Guide assembly and process cavity

Abstract

The utility model provides a guide assembly and a process cavity. The guide assembly comprises a base, a support and a plurality of rolling bodies. The base is used for being fixed to the cavity. The bracket extends upwards from the base; the rolling bodies are arranged on the support in a surrounding mode, the rolling bodies are aligned in pairs in the radial direction and spaced, gaps which are through in the vertical direction are formed, and the rolling bodies are used for guiding a guide rod of the cover plate assembly to penetrate through the gaps and clamping the guide rod in a rolling mode to move downwards towards the cavity so that the guide rod can be fixed to the cavity. The process cavity comprises a cover plate assembly and a cavity body, the cover plate assembly comprises a cover plate and a guide rod, and the cover plate is used for downwards covering the opening end of the cavity body; the guide rod extends downwards from the cover plate; the process cavity further comprises the guide assembly. According to the guide assembly and the process cavity, the requirement for alignment precision is low, cost is low, operation is easy, and the requirement for the installation technology of workers is low.

Description

Technical Field

[0001] The present disclosure relates to the field of film coating, and more specifically to a guide component and a process chamber. Background Art

[0002] In the field of coating, especially in cathode cover plate assemblies involved in PVD, CVD and other process chambers, all cover plate connections on the market currently have either no positioning device or pin-type guide positioning, and the following problems are common:

[0003] If the cover assembly has no positioning device, the installation efficiency is low, the operation is difficult, and it is easy to bump, causing damage to the parts of the cover assembly that extend into the cavity, affecting the use effect;

[0004] If pin-type guide positioning is used, the installation positioning requires high precision, the processing and installation precision requirements are also high, the guide is not flexible enough, and the operation has certain difficulties.

[0005] Both methods are difficult to disassemble and require high installation skills from workers. Utility Model Content

[0006] In view of the problems existing in the background technology, the purpose of the present disclosure is to provide a guide assembly and a process chamber, which have low positioning accuracy requirements, low cost, simple operation, and low installation technology requirements for workers.

[0007] Thus, a guide assembly includes a base, a bracket and a plurality of rolling bodies: the base is used to be fixed to a cavity; the bracket extends upward from the base; a plurality of rolling bodies are arranged around the bracket, the plurality of rolling bodies are radially aligned and spaced apart in pairs to form gaps that penetrate in the up and down directions, and the plurality of rolling bodies are used to guide the guide rod of the cover plate assembly through the gap, and rollingly clamp the guide rod to move downward toward the cavity to fix the guide rod to the cavity.

[0008] A process chamber comprises a cover plate assembly and a chamber, wherein the cover plate assembly comprises a cover plate and a guide rod, wherein the cover plate is used to cover the opening end of the chamber downwardly; the guide rod extends downwardly from the cover plate; and the process chamber further comprises the aforementioned guide assembly.

[0009] The beneficial effects of the present disclosure are as follows.

[0010] In the guide assembly and process chamber according to the present disclosure, when the cover plate assembly is assembled, the guide rod of the cover plate assembly enters from top to bottom into the gap between the pairs of radially aligned and spaced rolling bodies. If the guide rod of the cover plate assembly is not in the center of the gap, the guide rod of the cover plate assembly will first contact one of the pairs of radially aligned and spaced rolling bodies, and be guided by the contacted rolling body to the other opposite rolling body, so that the guide rod of the cover plate assembly is adjusted to the center of the gap, and then clamped by the pair of rolling bodies, so that it can move downward stably and with high precision under the clamping of the pair of rolling bodies, and finally the guide rod is fixed to the chamber (that is, the cover plate assembly is fixed to the chamber); if the guide rod of the cover plate assembly is in the center of the gap, the guide rod of the cover plate assembly will simultaneously contact both of the pairs of radially aligned and spaced rolling bodies, and then move downward stably and with high precision under the clamping of the pair of rolling bodies, and finally the guide rod is fixed to the chamber (that is, the cover plate assembly is fixed to the chamber). That is to say, as long as the guide rod of the cover plate assembly enters the gap between the pairs of radially aligned and spaced rolling elements from top to bottom, the guide rod of the cover plate assembly can be stably and accurately positioned downward on the cavity, which is equivalent to positioning the guide rod of the cover plate assembly on the cavity in a blind insertion manner through the guide assembly. Therefore, in the guide assembly and process cavity according to the present disclosure, the alignment accuracy requirements between the guide rod of the cover plate assembly and the pairs of radially aligned and spaced rolling elements of the guide assembly are low, the cost is low, the operation is simple, and the installation technology requirements for workers are low. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 is a perspective view of a process chamber according to the present disclosure.

[0012] Figure 2 yes Figure 1 Top view of the .

[0013] Figure 3 yes Figure 1 Front view of.

[0014] Figure 4 yes Figure 1 sectional view of .

[0015] Figure 5 yes Figure 1 Side view of.

[0016] Figure 6 yes Figure 1 Schematic diagram of the guide rods of the cover plate assembly of the process chamber.

[0017] Figure 7 is a perspective view of a guide assembly according to the present disclosure, wherein the screws are not shown.

[0018] Figure 8 yes Figure 7Top view of the .

[0019] Fig. 9 yes Figure 7 Side view of.

[0020] The reference numerals are described as follows:

[0021] 1000 process chamber 11 through hole

[0022] D 2 brackets in up and down direction

[0023] 100 cover plate assembly 21 vertical plate pair

[0024] 100a Cover plate 211 First vertical plate

[0025] 100b guide rod 212 second vertical plate

[0026] S threaded hole 22 shaft pin

[0027] 100c protrusion 23 ring body

[0028] P through hole 231 perforation

[0029] 100d bolt 232 first inner peripheral surface

[0030] 100e component part 233 second inner peripheral surface

[0031] 200 cavity 3 rolling element

[0032] 300 Guide Assembly G Clearance

[0033] 1 base 4 screws DETAILED DESCRIPTION

[0034] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.

[0035] [Guide components]

[0036] Reference Figures 1 to 9According to the present disclosure, the guide assembly 300 includes a base 1, a bracket 2, and a plurality of rolling bodies 3. The base 1 is used to be fixed to the cavity 200. The bracket 2 extends upward from the base 1. The plurality of rolling bodies 3 are arranged around the bracket 2, and the plurality of rolling bodies 3 are radially aligned and spaced apart in pairs to form a gap G that passes through the vertical direction D. The plurality of rolling bodies 3 are used to guide the guide rod 100b of the cover plate assembly 100 to pass through the gap G, and roll to clamp the guide rod 100b to move downward toward the cavity 200 so that the guide rod 100b is fixed to the cavity 200.

[0037] In the guide assembly 300 according to the present disclosure, when the cover assembly 100 is assembled, the guide rod 100b of the cover assembly 100 enters the gap G between the pairs of radially aligned and spaced rolling bodies 3 from top to bottom. If the guide rod 100b of the cover assembly 100 is not at the center of the gap G, the guide rod 100b of the cover assembly 100 will first contact one of the pairs of radially aligned and spaced rolling bodies 3, and be guided by the contacted rolling body 3 to the other opposite rolling body 3, so that the guide rod 100b of the cover assembly 100 is adjusted to the center of the gap G, and then is guided by the paired rolling bodies 3. The guide rod 100b of the cover plate assembly 100 is clamped by the pair of rolling elements 3, thereby stably and accurately moving downward under the clamping of the pair of rolling elements 3, and finally the guide rod 100b is fixed to the cavity 200 (that is, the cover plate assembly 100 is fixed to the cavity 200); if the guide rod 100b of the cover plate assembly 100 is at the center of the gap G, the guide rod 100b of the cover plate assembly 100 will simultaneously contact both of the pair of radially aligned and spaced rolling elements 3, and then stably and accurately move downward under the clamping of the pair of rolling elements 3, and finally the guide rod 100b is fixed to the cavity 200 (that is, the cover plate assembly 100 is fixed to the cavity 200). That is to say, as long as the guide rod 100b of the cover assembly 100 enters the gap G between the pairs of radially aligned and spaced rolling bodies 3 from top to bottom, the guide rod 100b of the cover assembly 100 can be stably and accurately positioned downward on the cavity 200, which is equivalent to positioning the guide rod 100b of the cover assembly 100 on the cavity 200 in a blind insertion manner through the guide assembly 300. Therefore, in the guide assembly 300 according to the present disclosure, the alignment accuracy requirements between the guide rod 100b of the cover assembly 100 and the pairs of radially aligned and spaced rolling bodies 3 of the guide assembly 300 are low, the cost is low, the operation is simple, and the installation technology requirements for workers are low. Like the pin-type guide positioning of the background technology, compared with not using any guide device, the use of the guide assembly 300 makes the assembly efficiency high, the operation is simple, and the damage of parts caused by the collision between the component part 100e of the cover assembly 100 that penetrates into the cavity 200 and the cavity 200 is avoided. To disassemble the cover assembly 100, you only need to lift the cover assembly 100 upwards, and the guide rod 100b of the cover assembly 100 moves from bottom to top under the clamping of the pairs of radially aligned and spaced rolling bodies 3 until it is disengaged from the guide assembly 300. After that, it can be moved away from the cavity 200. The disassembly efficiency is high and the operation is simple.

[0038] In one example, refer to Figure 7 and Figure 8 Combined with Figures 1 to 5 The base 1 includes a plurality of through holes 11, which are distributed around the base 1, and each through hole 11 passes through the base 1 along the up-down direction D. The guide assembly 300 also includes a plurality of screws 4, and each screw 4 is used to pass through the corresponding through hole 11 and be screwed to the cavity 200.

[0039] In one example, refer to Figures 7 to 9 , the bracket 2 includes a plurality of vertical plate pairs 21 and a plurality of shaft pins 22. The plurality of vertical plate pairs 21 are arranged in a circumferential manner; each vertical plate pair 21 includes a first vertical plate 211 and a second vertical plate 212, and the first vertical plate 211 and the second vertical plate 212 of each vertical plate pair 21 extend upward from the base 1 and are spaced apart in the circumferential direction. The two ends of the shaft pin 22 are respectively fixed to the corresponding first vertical plate 211 and the second vertical plate 212, and each rolling body 3 is a bearing, and the corresponding rolling body 3 is located between the first vertical plate 211 and the second vertical plate 212 of the corresponding vertical plate pair 21 and is sleeved on the corresponding shaft pin 22 so that the rolling body 3 can rotate passively. In an alternative example not shown, the rolling body 3 can be a roller, and two shaft pins are respectively arranged at the two ends of the roller, and bearings are respectively arranged on the corresponding first vertical plate 211 and the second vertical plate 212, and each shaft pin is inserted into the corresponding bearing, thereby realizing the passive rotation of the rolling body 3.

[0040] like Figure 8 As shown, in one example, a plurality of vertical plate pairs 21 are arranged around each other at equal intervals.

[0041] like Figure 7 and Fig. 9 As shown, in one example, corresponding two or more rolling bodies 3 are spaced up and down and arranged between the first vertical plate 211 and the second vertical plate 212 of the corresponding vertical plate pair 21, thereby being able to accommodate a longer guide rod 100b and its larger stroke.

[0042] In one example, if Figure 7 and Figure 8 As shown, the bracket 2 further includes a ring body 23, which is arranged on the top of the plurality of pairs of first vertical plates 211 and second vertical plates 212; the ring body 23 has a through hole 231 that penetrates along the up-down direction D; the inner diameter of the through hole 231 is larger than the gap G formed by the plurality of rolling bodies 3. The ring body 23 not only enhances the structural strength and stability of the guide assembly 300, but also can guide the guide rod 100b by means of the through hole 231.

[0043] Furthermore, if Figure 7 and Figure 8 As shown, the ring body 23 has a first inner circumferential surface 232, which is an inclined annular surface that tapers from top to bottom, and the first inner circumferential surface 232 forms the upper part of the through hole 231. If the guide rod 100b of the cover plate assembly 100 contacts the first inner circumferential surface 232, the inclined annular surface that tapers from top to bottom causes the guide rod 100b to move toward the center of the gap G, thereby achieving a preliminary centering effect. Furthermore, as Figure 7 and Figure 8 As shown, the ring body 23 has a second inner circumferential surface 233 , the first inner circumferential surface 232 is a cylindrical surface with the same diameter from top to bottom, and the second inner circumferential surface 233 forms the lower part of the through hole 231 .

[0044] [Process chamber]

[0045] Reference Figures 1 to 5 According to the present disclosure, the process chamber 1000 includes a cover plate assembly 100 and a chamber 200. The cover plate assembly 100 includes a cover plate 100a and a guide rod 100b. The cover plate 100a is used to cover the open end of the chamber 200 downwardly; the guide rod 100b extends downward from the cover plate 100a; and the process chamber 1000 also includes the aforementioned guide assembly 300.

[0046] The specific structure and effect of the guide assembly 300 are as mentioned above and will not be repeated here.

[0047] In one example, if Figures 1 to 6 As shown, the cover plate assembly 100 further includes a protrusion 100c and a bolt 100d. The protrusion 100c extends horizontally outward from the side wall of the cover plate 100a, and the protrusion 100c is provided with a through hole P with an upper limit passing therethrough; the upper end of the guide rod 100b is provided with a threaded hole S; the bolt 100d passes through the through hole P and is screwed to the threaded hole S. Thus, the guide rod 100b can be disassembled and assembled, which is convenient for replacing guide rods 100b of different lengths, and further convenient for using cover plates 100a of different heights assembled with the cavity 200.

[0048] like Figure 4 As shown schematically, the cover plate 100 a is installed with a component part 100 e that extends downward into the cavity 200 when assembled with the cavity 200 .

[0049] As described in the background art, the process chamber 1000 according to the present disclosure is applicable to the film coating field, especially to process chambers such as PVD and CVD.

[0050] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.

Claims

1. A guide assembly, characterized in that: It comprises a base (1), a bracket (2) and a plurality of rolling bodies (3): The base (1) is used to be fixed to the cavity (200); The bracket (2) extends upward from the base (1); A plurality of rolling bodies (3) are disposed on the bracket (2) in a circumferential manner. The plurality of rolling bodies (3) are radially aligned in pairs and spaced apart to form a gap (G) that passes through in the up-down direction (D). The plurality of rolling bodies (3) are used to guide a guide rod (100b) of the cover plate assembly (100) to pass through the gap (G), and to rollably clamp the guide rod (100b) to move downward toward the cavity (200) so as to fix the guide rod (100b) to the cavity (200).

2. The guide assembly according to claim 1, characterized in that: The base (1) comprises a plurality of through holes (11), the plurality of through holes (11) are distributed around the base, and each through hole (11) passes through the base (1) in an up-down direction (D). The guide assembly (300) further comprises a plurality of screws (4), Each screw (4) is used to pass through a corresponding through hole (11) and be screwed onto the cavity (200).

3. The guide assembly according to claim 1, characterized in that: The bracket (2) comprises a plurality of vertical plate pairs (21) and a plurality of axle pins (22). A plurality of vertical plate pairs (21) are arranged in a surrounding manner; Each pair of vertical plates (21) comprises a first vertical plate (211) and a second vertical plate (212). The first vertical plate (211) and the second vertical plate (212) of each vertical plate pair (21) extend upward from the base (1) and are spaced apart in the circumferential direction; The two ends of the shaft pin (22) are respectively fixed to the corresponding first vertical plate (211) and the second vertical plate (212). Each rolling body (3) is a bearing. The corresponding rolling body (3) is located between the first vertical plate (211) and the second vertical plate (212) of the corresponding vertical plate pair (21) and is sleeved on the corresponding shaft pin (22) so that the rolling body (3) can rotate in a driven manner.

4. The guide assembly according to claim 3, characterized in that: A plurality of pairs of vertical plates (21) are arranged around each other at equal intervals.

5. The guide assembly according to claim 3, characterized in that: The corresponding two or more rolling bodies (3) are spaced apart from each other and arranged between the first vertical plate (211) and the second vertical plate (212) of the corresponding vertical plate pair (21).

6. The guide assembly according to claim 3, characterized in that: The stent (2) further comprises a ring body (23), The ring body (23) is arranged on the top of a plurality of pairs of first vertical plates (211) and second vertical plates (212); The ring body (23) has a through hole (231) penetrating in the up-down direction (D); The inner diameter of the through hole (231) is larger than the gap (G) formed by the plurality of rolling elements (3).

7. The guide assembly according to claim 6, characterized in that: The ring body (23) has a first inner circumferential surface (232), which is an inclined annular surface that gradually contracts from top to bottom, and the first inner circumferential surface (232) forms the upper part of the through hole (231).

8. A process chamber, comprising a cover plate assembly (100) and a chamber (200), The cover plate assembly (100) comprises a cover plate (100a) and a guide rod (100b). The cover plate (100a) is used to cover the open end of the cavity (200) downwards; The guide rod (100b) extends downward from the cover plate (100a); It is characterized in that The process chamber (1000) further comprises a guide assembly (300) according to any one of claims 1 to 7.

9. The process chamber according to claim 8, characterized in that: The cover plate assembly (100) further comprises a protrusion (100c) and a bolt (100d). The protrusion (100c) extends horizontally outward from the side wall of the cover plate (100a), and the protrusion (100c) is provided with a through hole (P) with an upper limit penetrating therethrough; The upper end of the guide rod (100b) is provided with a threaded hole (S); The bolt (100d) passes through the through hole (P) and is screwed into the threaded hole (S).

10. The process chamber according to claim 8, characterized in that: The cover plate (100a) is provided with a component part (100e) which is inserted into the interior of the cavity (200) when the cover plate (100a) is assembled with the cavity (200).

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