Vacuum coating equipment

By designing rotary closed annular extrusion frame and slope parts in the vacuum coating equipment, the air leakage problem caused by positional offset between the cover plate and the equipment is solved, and the sealing effect of the equipment is significantly improved.

CN222613460UActive Publication Date: 2025-03-14JIANGXI ZHAO CHI SEMICON CO LTD
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Patent Information

Application Number
CN202420542209.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-20
Publication Date
2025-03-14
Estimated Expiration
2034-03-20

AI Technical Summary

Technical Problem

The gap between the cover plate of existing vacuum coating equipment and the coating equipment is prone to occur due to offset of the extrusion position, resulting in a decrease in the vacuum effect.

Method used

A vacuum coating device is designed. By setting the first extrusion frame and the second extrusion frame, the transmission plate is driven by a locking mechanism, so that the extrusion frame is rotated and closed, forming an annular extrusion frame, extrusion effect on the cover plate and the opening, increasing sealing ability, and abutting the cover plate and the opening through the sloped part to prevent position deviation.

Benefits of technology

It effectively improves the sealing between the cover plate and the body opening, prevents air leakage, and improves the sealing effect of the vacuum coating equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides vacuum coating equipment which comprises a machine body, an opening is formed in the machine body, a cover plate covers the opening, a connecting block is arranged on one side of the cover plate, a first extrusion frame and a second extrusion frame are rotationally connected to the connecting block, a first groove is formed in the first extrusion frame, and a second groove is formed in the second extrusion frame. First slope parts and second slope parts opposite to the first slope parts are arranged in the first groove and the second groove correspondingly, the first extrusion frame is connected with a first transmission plate, the second extrusion frame is connected with a second transmission plate, a connecting frame is arranged on the face, back to the machine body, of the cover plate, and a locking mechanism is arranged on the connecting frame. The locking mechanism is movably connected with the first transmission plate and the second transmission plate. By arranging the first extrusion frame and the second extrusion frame, the sealing performance between the cover plate and the opening of the machine body is improved, and by arranging the first slope part and the second slope part in a matched mode, position deviation of the cover plate relative to the opening can be prevented, the air leakage phenomenon can be avoided, and therefore the sealing effect is further improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating device. Background Art

[0002] Vacuum coating technology is to create a near-vacuum environment so that the coating material can be evenly deposited on the surface of the substrate. This technology is widely used in various fields such as optics, electronics, machinery, decoration, etc.

[0003] Vacuum coating equipment is a device based on vacuum coating technology. It can coat the surface of materials in a vacuum environment to achieve the purpose of surface treatment and surface enhancement. The power system in the vacuum coating equipment provides energy, the control system controls the entire coating process, and the cooling system ensures that the equipment will not overheat during operation.

[0004] However, the structure of the existing vacuum coating equipment is relatively simple, and it is mainly sealed and blocked by a cover plate. A gap is easily formed between the cover plate and the coating equipment due to the displacement of the extrusion position. During the negative pressure vacuuming process, the cover plate is prone to air leakage, which affects the vacuum effect. Utility Model Content

[0005] In view of the deficiencies of the prior art, the purpose of the present invention is to provide a vacuum coating device, aiming to solve the problem in the prior art that a gap is easily formed between the cover plate and the coating device due to extrusion position offset, resulting in a decrease in the vacuum effect.

[0006] In order to achieve the above purpose, the utility model is implemented through the following technical solutions:

[0007] A vacuum coating device comprises a body, the body is provided with an opening, the opening is covered with a cover plate, a connecting block is provided on one side of the cover plate, a first extrusion frame and a second extrusion frame are rotatably connected on the connecting block, a first groove is provided on the side of the first extrusion frame facing the second extrusion frame, a second groove is provided on the side of the second extrusion frame facing the first extrusion frame, a first slope portion and a second slope portion opposite to the first slope portion are provided in the first groove and the second groove, the first slope portion is detachably connected to the cover plate, and the second slope portion is detachably connected to the opening, an end of the first extrusion frame close to the connecting block is connected to a first transmission plate, an end of the second extrusion frame close to the connecting block is connected to a second transmission plate, a connecting frame is provided on a side of the cover plate facing away from the body, a locking mechanism is provided on the connecting frame, and the locking mechanism is movably connected to the first transmission plate and the second transmission plate, so that the first transmission plate and the second transmission plate respectively drive the first extrusion frame and the second extrusion frame to rotate.

[0008] Compared with the prior art, the beneficial effect of the utility model lies in: by setting the first extrusion frame and the second extrusion frame, the locking mechanism is controlled to drive the first transmission plate and the second transmission plate, so that the first extrusion frame and the second extrusion frame are rotated and closed to form an annular extrusion frame, which exerts an extrusion effect on the cover plate and the opening, thereby increasing the sealing between the cover plate and the opening of the body, and cooperating with the first slope portion and the second slope portion, the cover plate and the opening are abutted when the first extrusion frame and the second extrusion frame rotate and close, and the inclined surface has not only vertical pressure on the cover plate and the opening, but also horizontal pressure, which can prevent the cover plate from shifting relative to the opening and avoid air leakage, thereby further improving the sealing effect of the vacuum coating equipment.

[0009] Furthermore, a first rotating shaft and a second rotating shaft are provided on the connecting block, and the first rotating shaft and the second rotating shaft are both perpendicular to the cover plate.

[0010] Furthermore, one end of the first rotating shaft facing away from the connecting block passes through the first extrusion frame and is connected to the first fixing plate, and one end of the second rotating shaft facing away from the connecting block passes through the second extrusion frame and is connected to the second fixing plate.

[0011] Furthermore, one side of the first fixed plate is vertically connected to the first clamping plate, one side of the second fixed plate is vertically connected to the second clamping plate, and the first clamping plate and the second clamping plate are both located between the first extrusion frame and the second extrusion frame, and are partially placed between the first transmission plate and the second transmission plate.

[0012] Furthermore, the locking mechanism includes a first slider, a second slider and a bidirectional screw, one end of the bidirectional screw is connected to an inner wall of the connecting frame, the other end of the bidirectional screw passes through the side wall of the connecting frame and is connected to a rotating wheel, the first slider is provided with a first through hole adapted to the bidirectional screw, the second slider is provided with a second through hole adapted to the bidirectional screw, the bidirectional screw passes through the first through hole and the second through hole, so that the first slider and the second slider are both close to or away from each other along the bidirectional screw.

[0013] Furthermore, a first slide groove is arranged on the first transmission plate, a second slide groove is arranged on the second transmission plate, a first transmission shaft is arranged on the first slider, the first transmission shaft is placed in the first slide groove, a second transmission shaft is arranged on the second slider, and the second transmission shaft is placed in the second slide groove.

[0014] Furthermore, the locking mechanism also includes a guide bar, and the two opposite inner walls of the connecting frame are respectively connected to the two ends of the guide bar, the guide bar is parallel to the bidirectional screw, the position of the guide bar is higher than the position of the bidirectional screw, and the end of the first slider facing away from the cover plate and the end of the second slider facing away from the cover plate are both slidably connected to the guide bar.

[0015] Furthermore, a plurality of exhaust pipes are arranged on the side wall of the machine body, and the outer wall of the first extrusion frame and the outer wall of the second extrusion frame are connected to a plurality of spring plates, and one end of the spring plate away from the first extrusion frame or the second extrusion frame is connected to the exhaust pipe.

[0016] Furthermore, a baffle is provided on a side of the cover plate facing away from the machine body, and the baffle is used to shield the connection frame and the locking mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a partial structural schematic diagram of the vacuum coating equipment in the embodiment of the utility model;

[0018] Figure 2 It is a schematic top view of a part of the structure of the vacuum coating equipment in the embodiment of the utility model;

[0019] Figure 3 It is a structural schematic diagram of the first slope portion and the second slope portion in the vacuum coating equipment in the embodiment of the utility model;

[0020] Figure 4 It is a schematic diagram of a partially disassembled structure of a vacuum coating device in an embodiment of the utility model from a first perspective;

[0021] Figure 5 A schematic diagram of a partially disassembled structure of a vacuum coating device in an embodiment of the utility model from a second viewing angle;

[0022] Figure 6 This is a schematic diagram of the structure of a baffle in a vacuum coating device according to an embodiment of the utility model from a first viewing angle;

[0023] Figure 7 A second perspective structural diagram of a baffle in a vacuum coating device in an embodiment of the utility model

[0024] Description of main component symbols:

[0025]

[0026]

[0027] The following specific implementation manner will further illustrate the present utility model in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0028] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0029] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0030] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0031] See also Figures 1 to 5The vacuum coating device in the embodiment of the utility model includes a body 100, the body 100 is provided with an opening, the opening is covered with a cover plate 200, a connecting block 210 is provided on one side of the cover plate 200, the connecting block 210 is rotatably connected to the first extrusion frame 301 and the second extrusion frame 302, a first rotating shaft 341 and a second rotating shaft 342 are provided on the connecting block 210, the first rotating shaft 341 and the second rotating shaft 342 are both perpendicular to the cover plate 200, one end of the first rotating shaft 341 facing away from the connecting block 210 passes through the first extrusion frame 301 and is connected to the first fixed plate 331, one end of the second rotating shaft 342 facing away from the connecting block 210 passes through the second extrusion frame 302 and is connected to the second fixed plate 332, one side of the first fixed plate 331 is vertically connected to the first clamping plate, one side of the second fixed plate 332 is vertically connected to the second clamping plate, and the first clamping plate and the second clamping plate are both located between the first extrusion frame 301 and the second extrusion frame 302. Preferably, the first rotating shaft 341 and the second rotating shaft 342 both adopt latches, the first extrusion frame 301 and the second extrusion frame 302 are symmetrically arranged and have a semicircular ring shape, the first extrusion frame 301 and the second extrusion frame 302 are both located in the same plane, and when rotating, the end of the first extrusion frame 301 away from the first rotating shaft 341 and the end of the second extrusion frame 302 away from the second rotating shaft 342 can move away from or approach each other. It can be understood that when they are close to each other and abut against each other, the first extrusion frame 301 and the second extrusion frame 302 form an annular extrusion frame.

[0032] A first groove is provided on one side of the first extrusion frame 301 facing the second extrusion frame 302, and a second groove is provided on one side of the second extrusion frame 302 facing the first extrusion frame 301. A first slope 303 and a second slope 304 opposite to the first slope 303 are provided in both the first groove and the second groove. The first slope 303 is detachably connected to the cover plate 200, and the second slope 304 is detachably connected to the opening. Preferably, the first slope 303 is provided along the upper inner side wall of the first groove or the second groove, and the second slope 304 is provided along the lower inner side wall of the first groove or the second groove, and the first slope 303 and the second slope 304 are symmetrically provided along the central axis of the groove. It can be understood that when the first slope portion 303 abuts against the cover plate 200 and the second slope portion 304 abuts against the opening, the cover plate 200 and the opening are subjected to pressure not only from the vertical direction but also from the horizontal direction, thereby limiting the cover plate 200 and preventing the cover plate 200 from slipping, thereby causing a gap between the cover plate 200 and the opening and causing air leakage. The setting of the first slope portion 303 and the second slope portion 304 effectively improves the sealing effect of the vacuum coating machine.

[0033] One end of the first extrusion frame 301 close to the connecting block 210 is connected to the first transmission plate 311, and one end of the second extrusion frame 302 close to the connecting block 210 is connected to the second transmission plate 312. The first clamping plate and the second clamping plate are partially placed between the first transmission plate 311 and the second transmission plate 312. A connecting frame 400 is set on the side of the cover plate 200 facing away from the body 100. A locking mechanism is set on the connecting frame 400, and the locking mechanism movably connects the first transmission plate 311 and the second transmission plate 312, so that the first transmission plate 311 and the second transmission plate 312 respectively drive the first extrusion frame 301 and the second extrusion frame 302 to rotate. Preferably, the first transmission plate 311 and the second transmission plate 312 are both long straight plates, and one side of the first transmission plate 311 and one side of the second transmission plate 312 are both slid against the side of the cover plate 200 facing away from the body 100. Furthermore, the first transmission plate 311 is fixedly connected to one end of the first extrusion frame 301 and can rotate along the first rotating shaft 341, and the second transmission plate 312 is fixedly connected to one end of the second extrusion frame 302 and can rotate along the second rotating shaft 342. It can be understood that the first fixed plate 331, the first clamping plate, the second fixed plate 331 and the second clamping plate can improve the connection stability between the extrusion frame and the cover plate 200.

[0034] The locking mechanism includes a first slider 421, a second slider 422 and a bidirectional screw 510, one end of the bidirectional screw 510 is connected to an inner side wall of the connecting frame 400, the other end of the bidirectional screw 510 passes through the side wall of the connecting frame 400 and is connected to the rotating wheel 520, the first slider 421 is provided with a first through hole adapted to the bidirectional screw 510, the second slider 422 is provided with a second through hole adapted to the bidirectional screw 510, the bidirectional screw 510 passes through the first through hole and the second through hole, so that the first slider 421 and the second slider 422 are both close to or away from each other along the bidirectional screw 510, the first transmission plate 311 is provided with a first sliding groove 321, and the second transmission plate 311 is provided with a first sliding groove 321. A second slide groove 322 is set on the plate 312, a first transmission shaft 431 is set on the first slider 421, the first transmission shaft 431 is placed in the first slide groove 321, a second transmission shaft is set on the second slider 422, the second transmission shaft is placed in the second slide groove 322, the locking mechanism also includes a guide bar 410, the two opposite inner side walls of the connecting frame 400 are respectively connected to the two ends of the guide bar 410, the guide bar 410 is parallel to the bidirectional screw 510, the position of the guide bar 410 is higher than the position of the bidirectional screw 510, the end of the first slider 421 facing away from the cover plate 200 and the end of the second slider 422 facing away from the cover plate 200 are both slidably connected to the guide bar 410. Preferably, the first slide groove 321 and the second slide groove 322 both pass through the bottom of the connecting frame 400 to achieve a larger sliding range, and the end of the first slider 421 facing away from the cover plate 200 and the end of the second slider 422 facing away from the cover plate 200 are both provided with a snap-on that matches the guide strip 410, and the rotating wheel 520 can drive the bidirectional screw 510. It can be understood that when the operator rotates the rotating wheel 520, the first slider 421 and the second slider 422 are driven to approach each other by the rotation of the bidirectional screw 510. Under the limiting action of the guide bar 410, the sliding of the first slider 421 and the second slider 422 is more stable to prevent tilting. The first transmission shaft 431 and the second transmission shaft respectively drive the first transmission plate 311 and the second transmission plate 312 to approach and close together, thereby driving the first extrusion frame 301 and the second extrusion frame 302 to gradually close together from a mutually open and closed state, and close to form a circular ring, which is sleeved outside the cover plate 200 and the opening to complete the sealing of the vacuum coating equipment. The sealing process is smooth and stable, with good sealing effect, and the two extrusion frames are controlled at the same time, and the extrusion strength can be adjusted by the rotating wheel 520 and the bidirectional screw 510.

[0035] See also Figure 6 and Figure 7, a plurality of air extraction pipes 110 are arranged on the side wall of the machine body 100, and a plurality of spring plates 600 are connected to the outer side wall of the first extrusion frame 301 and the outer side wall of the second extrusion frame 302, and one end of the spring plate 600 away from the first extrusion frame 301 or the second extrusion frame 302 is connected to the air extraction pipe 110, and a baffle 700 is arranged on the side of the cover plate 200 facing away from the machine body 100, and the baffle 700 is used to shield the connection frame 400 and the locking mechanism. Preferably, the spring plate 600 is made of a flexible material to increase the stability of the connection between the air extraction pipe 110 and the machine body 100, and the baffle 700 covers the locking mechanism to reduce the exposure area of ​​the transmission components in the locking mechanism to the outside world, thereby improving the safety of the locking mechanism and the safety of the vacuum coating equipment.

[0036] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0037] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A vacuum coating device, characterized in that: The invention comprises a body, wherein the body is provided with an opening, the opening is covered with a cover plate, a connecting block is provided on one side of the cover plate, the connecting block is rotatably connected to the first extrusion frame and the second extrusion frame, a first groove is provided on the side of the first extrusion frame facing the second extrusion frame, and a second groove is provided on the side of the second extrusion frame facing the first extrusion frame, a first slope portion and a second slope portion opposite to the first slope portion are provided in the first groove and the second groove, the first slope portion is disassembled and connected to the cover plate, and the second slope portion is disassembled and connected to the opening, an end of the first extrusion frame close to the connecting block is connected to the first transmission plate, and an end of the second extrusion frame close to the connecting block is connected to the second transmission plate, a connecting frame is provided on the side of the cover plate facing away from the body, a locking mechanism is provided on the connecting frame, and the locking mechanism is movably connected to the first transmission plate and the second transmission plate, so that the first transmission plate and the second transmission plate respectively drive the first extrusion frame and the second extrusion frame to rotate.

2. The vacuum coating equipment according to claim 1, characterized in that: The connecting block is provided with a first rotating shaft and a second rotating shaft, and the first rotating shaft and the second rotating shaft are both perpendicular to the cover plate.

3. The vacuum coating equipment according to claim 2, characterized in that: One end of the first rotating shaft facing away from the connecting block passes through the first extrusion frame and is connected to the first fixing plate, and one end of the second rotating shaft facing away from the connecting block passes through the second extrusion frame and is connected to the second fixing plate.

4. The vacuum coating equipment according to claim 3, characterized in that: One side of the first fixing plate is vertically connected to the first clamping plate, one side of the second fixing plate is vertically connected to the second clamping plate, the first clamping plate and the second clamping plate are both located between the first extrusion frame and the second extrusion frame, and are partially placed between the first transmission plate and the second transmission plate.

5. The vacuum coating equipment according to claim 1, characterized in that: The locking mechanism includes a first slider, a second slider and a bidirectional screw, one end of the bidirectional screw is connected to an inner wall of the connecting frame, the other end of the bidirectional screw passes through the side wall of the connecting frame and is connected to a rotating wheel, a first through hole adapted to the bidirectional screw is provided on the first slider, a second through hole adapted to the bidirectional screw is provided on the second slider, the bidirectional screw passes through the first through hole and the second through hole, so that the first slider and the second slider are moved closer to or away from each other along the bidirectional screw.

6. The vacuum coating equipment according to claim 5, characterized in that: A first slide groove is arranged on the first transmission plate, a second slide groove is arranged on the second transmission plate, a first transmission shaft is arranged on the first slider, the first transmission shaft is placed in the first slide groove, a second transmission shaft is arranged on the second slider, and the second transmission shaft is placed in the second slide groove.

7. The vacuum coating equipment according to claim 5, characterized in that: The locking mechanism also includes a guide bar, and the two opposite inner walls of the connecting frame are respectively connected to the two ends of the guide bar, the guide bar is parallel to the bidirectional screw, the position of the guide bar is higher than the position of the bidirectional screw, and the end of the first slider facing away from the cover plate and the end of the second slider facing away from the cover plate are both slidably connected to the guide bar.

8. The vacuum coating equipment according to claim 1, characterized in that: A plurality of air extraction pipes are arranged on the side wall of the machine body, and a plurality of spring plates are connected to the outer side wall of the first extrusion frame and the outer side wall of the second extrusion frame. One end of the spring plate away from the first extrusion frame or the second extrusion frame is connected to the air extraction pipe.

9. The vacuum coating equipment according to claim 1, characterized in that: A baffle is also arranged on a side of the cover plate facing away from the machine body, and the baffle is used to shield the connection frame and the locking mechanism.