Single crystal furnace magnetic field lifting mechanism

Abstract

The utility model provides a magnetic field lifting mechanism of a single crystal furnace. The magnetic field lifting mechanism comprises a mounting bracket; the screw rod driving mechanism is mounted on the mounting bracket; the n lead screws are arranged in the circumferential direction, all the lead screws are in transmission connection with the lead screw driving mechanism, and the lead screw driving mechanism is used for driving the n lead screws to rotate synchronously; the magnetic field bearing mechanism comprises a bearing part and n connecting parts arranged at the bottom of the bearing part in the circumferential direction, the n connecting parts correspond to the lead screws in a one-to-one mode, the bearing part is used for bearing a magnetic field, the connecting parts are connected to the corresponding lead screws in a threaded mode through nuts, and the lead screws drive the corresponding connecting parts to ascend and descend when rotating; and each magnetic field anti-falling mechanism is used for correspondingly locking one lead screw, and the magnetic field anti-falling mechanisms are arranged on the mounting bracket and the corresponding lead screws. The magnetic field lifting mechanism of the single crystal furnace can lock the screw rod and prevent the magnetic field bearing mechanism from falling to cause falling of the magnetic field.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal furnace manufacturing, and in particular to a magnetic field lifting mechanism for a single crystal furnace. Background Art

[0002] A single crystal furnace is a device that uses a crucible to melt polycrystalline materials such as polysilicon in an inert gas environment and uses the Czochralski method to grow single crystals without dislocation.

[0003] In order to ensure the quality of the crystal ingot, a magnetic field is usually set outside the furnace chamber of the single crystal furnace, and the magnetic field is controlled by a lifting mechanism. The existing magnetic field lifting mechanism of the single crystal furnace does not have the function of preventing the magnetic field from falling, and the magnetic field is prone to falling. The accidental falling of the magnetic field not only brings safety hazards, but also affects the processing quality of the crystal ingot. Utility Model Content

[0004] In view of the above technical problems existing in the traditional single crystal furnace magnetic field lifting mechanism, the present application provides a single crystal furnace magnetic field lifting mechanism, and its detailed technical solution is as follows:

[0005] A single crystal furnace magnetic field lifting mechanism, comprising:

[0006] Mounting bracket;

[0007] A screw drive mechanism, wherein the screw drive mechanism is mounted on a mounting bracket;

[0008] n screw rods, the n screw rods are arranged along the circumferential direction, each screw rod is transmission-connected to a screw rod driving mechanism, each screw rod is rotationally connected to a mounting bracket, and the screw rod driving mechanism is used to drive the n screw rods to rotate synchronously;

[0009] The magnetic field bearing mechanism includes a bearing portion and n connecting portions arranged circumferentially at the bottom of the bearing portion, wherein the n connecting portions correspond to the screw rods one by one, wherein the bearing portion is used to bear the magnetic field, the connecting portion is screwed to the corresponding screw rod through a nut, and when the screw rod rotates, the corresponding connecting portion is driven to rise and fall;

[0010] m magnetic field anti-falling mechanisms, each magnetic field anti-falling mechanism is used to lock a corresponding screw rod to prevent the screw rod from rotating, and the magnetic field anti-falling mechanism is arranged on the mounting bracket and the corresponding screw rod;

[0011] n≥3, m≤n.

[0012] The single crystal furnace magnetic field lifting mechanism provided in the present application is provided with a magnetic field anti-falling mechanism. When the screw driving mechanism adjusts the magnetic field on the magnetic field bearing mechanism to a predetermined height through the screw, the magnetic field anti-falling mechanism can lock the screw, thereby positioning the magnetic field bearing mechanism to prevent the magnetic field bearing mechanism from falling and causing the magnetic field to fall.

[0013] In some embodiments, the magnetic field anti-fall mechanism includes: a limit flange, which is fixedly connected to the upper end of the corresponding screw rod, and the limit flange is provided with a plurality of slots along the circumferential direction; a limit assembly, which includes a driving member and a limit pin, wherein the driving member is fixedly installed relative to the mounting bracket, the limit pin is connected to the driving end of the driving member and points to the limit flange, and the driving member is used to drive the limit pin to move toward or away from the limit flange; when the driving member drives the limit pin to move toward the limit flange, the limit pin is inserted into the slot to lock the screw rod; when the driving member drives the limit pin to move away from the limit flange, the limit pin disengages from the slot.

[0014] A magnetic field anti-falling mechanism with a simple structure is provided, which controls a limiting component fixedly installed relative to a mounting bracket to be inserted into or separated from a limiting flange installed at the upper end of a screw rod, so as to lock or release the screw rod.

[0015] In some embodiments, the magnetic field anti-fall mechanism also includes a screw bearing seat, which is arranged on a mounting bracket, and the upper end of the screw is rotatably connected to the screw bearing seat via a bearing; the limiting flange is located in the screw bearing seat, and a limiting hole is provided on the side of the screw bearing seat facing the limiting pin, and the limiting pin is inserted into the slot through the limiting hole.

[0016] By setting the screw bearing seat, the upper end of the screw and the limiting flange can be installed and limited in rotation, preventing the upper end of the screw and the limiting flange from moving during rotation. By setting the limiting hole on the screw bearing seat, it is ensured that the limiting pin can penetrate into the screw bearing seat and be inserted into the slot of the limiting flange to lock the screw.

[0017] In some embodiments, the magnetic field anti-fall mechanism also includes an induction plate and an induction component, wherein: the induction plate is arranged on a limit pin, the induction component is fixedly installed relative to the mounting bracket and arranged opposite to the induction plate, and the induction component is connected to the signal of the screw drive mechanism; when the limit pin is inserted into the slot, the induction plate is away from the induction component; when the limit pin is out of the slot, the induction plate approaches the induction component or abuts against the induction component, and the induction component is triggered by the induction plate to generate an induction signal, and transmits the induction signal to the screw drive mechanism.

[0018] Through the cooperation of the induction sheet and the induction element, when the limit assembly releases the lock on the screw rod, the induction element transmits the induction signal to the screw rod driving mechanism. After receiving the induction signal, the screw rod driving mechanism can drive the screw rod to rise and fall to implement the height adjustment of the magnetic field.

[0019] In some embodiments, the single crystal furnace magnetic field lifting mechanism also includes n guide rods corresponding to the screw rods one by one, the upper and lower ends of the guide rods are fixedly connected to the mounting bracket, and the connecting part is slidably connected to the corresponding guide rods and can slide up and down along the guide rods.

[0020] By setting the guide rod, the lifting and lowering guidance of the bearing part and the magnetic field is achieved, preventing the bearing part and the magnetic field from deviating during the lifting process and damaging components such as the lead screw and the nut.

[0021] In some embodiments, the connecting part includes a transfer arm, a mounting seat and a linear bearing, wherein: the upper end of the transfer arm is connected to the bottom of the load-bearing part, the mounting seat is connected to the lower end of the transfer arm, the nut is fixedly arranged on the mounting seat and screwed on the screw rod, and the linear bearing is fixedly arranged on the mounting seat and sleeved on the guide rod; or, the connecting part includes a transfer arm, a mounting seat and a bushing, wherein: the upper end of the transfer arm is connected to the bottom of the load-bearing part, the mounting seat is connected to the lower end of the transfer arm, the nut is fixedly arranged on the mounting seat and screwed on the screw rod, and the bushing is fixedly arranged on the mounting seat and sleeved on the guide rod.

[0022] By setting the connection part, on the one hand, the connection strength between the connection part and the bearing part is ensured, and on the other hand, it is ensured that the screw rod and the guide rod are connected to the connection part in a manner that they can be raised and lowered and adjusted.

[0023] In some embodiments, the mounting seat includes a first mounting block, a second mounting block and a third mounting block, wherein: the first end of the first mounting block is connected to the lower end of the transfer arm, a mounting notch is provided at the bottom of the second end of the first mounting block, a first mounting hole is also provided on the second end of the first mounting block, and the lower half of the first mounting hole is connected to the mounting notch to form a first half-section hole; the second mounting block is installed in the mounting notch, and the second mounting block is provided with a second half-section hole that is connected to the first half-section hole on the side facing the first half-section hole, and a third half-section hole is provided on the side of the second mounting block away from the first half-section hole; the third mounting block is connected to the top of the second end of the first mounting block and extends outward from the first mounting block, a second mounting hole that is connected up and down with the first mounting hole is provided on the third mounting block, and a third mounting hole that is connected up and down with the third half-section hole is also provided on the third mounting block; the nut is passed through the first mounting hole, the screw rod passes through the nut and the second mounting hole, and the linear bearing or bushing is passed through the third mounting hole.

[0024] The mounting seat is arranged as a disassembly and assembly split structure consisting of a first mounting block, a second mounting block and a third mounting block, which facilitates the maintenance and replacement of the nut and the linear bearing.

[0025] In some embodiments, the bearing portion includes an annular mounting flange that matches the shape of the bottom of the magnetic field, and the magnetic field is fixed on the mounting flange.

[0026] By providing the mounting flange, the disassembly and assembly of the magnetic field is facilitated, and the installation stability of the magnetic field is ensured to prevent the magnetic field from falling or tilting.

[0027] In some embodiments, the single crystal furnace magnetic field lifting mechanism also includes a limiting support mechanism arranged below the magnetic field bearing mechanism; the limiting support mechanism includes a plurality of support seats arranged along the circumferential direction, and the support seats are arranged one by one below the connecting part, and the upper surfaces of the plurality of support seats are on the same horizontal plane to constitute a supporting surface of the limiting support mechanism, and a buffer pad is installed on the upper surface of the support seat.

[0028] When installing the magnetic field, the magnetic field bearing mechanism is first supported horizontally on each support seat, thereby ensuring the horizontality of the magnetic field installed on the magnetic field bearing mechanism. In addition, since a buffer pad is provided on the support seat, the support seat can provide buffer support for the magnetic field when the magnetic field falls accidentally.

[0029] In some embodiments, the screw drive mechanism includes a motor and n reducers corresponding to the screws one by one, wherein: the n reducers are arranged along the circumferential direction and are all transmission-connected to the motor, and the lower end of the screw is connected to the output end of the corresponding reducer; the motor drives the n screws to rotate synchronously through the n reducers.

[0030] By setting the screw drive mechanism, the screw drive mechanism can synchronously drive n screws to rotate synchronously, thereby realizing the lifting and lowering drive of the magnetic field. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a structural schematic diagram of the magnetic field lifting mechanism of the single crystal furnace in the embodiment of the present application in a working state;

[0032] Figure 2 It is a structural schematic diagram of the magnetic field lifting mechanism of the single crystal furnace in the embodiment of the present application in another working state;

[0033] Figure 3 This is a structural schematic diagram of the magnetic field lifting mechanism of the single crystal furnace after the mounting bracket is omitted in the embodiment of the present application;

[0034] Figure 4 It is a schematic diagram of the assembly of the magnetic field bearing mechanism, the lead screw and the guide rod in the embodiment of the present application;

[0035] Figure 5 A schematic diagram of the disassembly of the mounting base in an embodiment of the present application at a viewing angle;

[0036] Figure 6 A schematic diagram of the disassembly of the mounting base in the embodiment of the present application from another viewing angle;

[0037] Figure 7 It is a structural schematic diagram of the magnetic field anti-fall mechanism in the embodiment of the present application;

[0038] Figure 8 It is a structural schematic diagram of the magnetic field anti-fall mechanism in the embodiment of the present application;

[0039] Fig. 9 It is a schematic diagram of the structure of the limiting flange and the screw bearing seat in the embodiment of the present application;

[0040] Figures 1 to 9 Included:

[0041] Mounting bracket 1;

[0042] Screw drive mechanism 2:

[0043] Motor 21, reducer 22;

[0044] Screw 3;

[0045] Magnetic field bearing mechanism 4:

[0046] A bearing portion 41;

[0047] Connecting portion 42: adapter arm 421, mounting seat 422, linear bearing 433, first mounting block 4221, second mounting block 4222, third mounting block 4223, mounting notch 4224, first mounting hole 4225, second half-cut hole 4226, third half-cut hole 4227, second mounting hole 4228, third mounting hole 4229;

[0048] Nut 43;

[0049] Magnetic field anti-fall mechanism 5;

[0050] Limiting flange 51: slot 511

[0051] Limiting assembly 52: driving member 521, limiting pin 522;

[0052] Screw bearing seat 53: limiting hole 531;

[0053] Bearing 54;

[0054] Induction sheet 55;

[0055] Induction member 56;

[0056] Guide rod 6;

[0057] Support seat 7;

[0058] Magnetic field 100. DETAILED DESCRIPTION

[0059] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0060] like Figures 1 to 3As shown, the single crystal furnace magnetic field lifting mechanism in the embodiment of the present application includes a mounting bracket 1, a screw drive mechanism 2, n screws 3, a magnetic field bearing mechanism 4 and m magnetic field anti-falling mechanisms 5, wherein:

[0061] The screw drive mechanism 2 is mounted on the mounting bracket 1 .

[0062] The n screw rods 3 are arranged along the circumferential direction, each screw rod 3 is transmission-connected to the screw rod driving mechanism 2 , each screw rod 3 is rotationally connected to the mounting bracket 1 , and the screw rod driving mechanism 2 is used to drive the n screw rods 3 to rotate synchronously.

[0063] The magnetic field bearing mechanism 4 includes a bearing portion 41 and n connecting portions 42 circumferentially arranged at the bottom of the bearing portion 41, and the n connecting portions 42 correspond one to one with the screw rod 3, wherein the bearing portion 41 is used to bear the magnetic field 100, and the connecting portion 42 is screwed to the corresponding screw rod 3 through a nut, and when the screw rod 3 rotates, the corresponding connecting portion 42 is driven to rise and fall.

[0064] Each magnetic field anti-falling mechanism 5 is used to lock a corresponding screw rod 3 to prevent the screw rod 3 from rotating. The magnetic field anti-falling mechanism 5 is arranged on the mounting bracket 1 and the corresponding screw rod 3 .

[0065] n≥3, m≤n, that is, the single crystal furnace magnetic field lifting mechanism in the embodiment of the present application is provided with at least three screw rods 3, and at least one screw rod 3 is provided with a magnetic field anti-falling mechanism 5. For example, Figures 1 to 3 In the embodiment, four screw rods 3 are provided in total, and two non-adjacent screw rods 3 are provided with magnetic field anti-falling mechanisms 5 .

[0066] The working process of the single crystal furnace magnetic field lifting mechanism in the embodiment of the present application is as follows:

[0067] First, the screw drive mechanism 2 drives n screws 3 to rotate synchronously along a first direction (eg, clockwise), so as to drive the magnetic field bearing mechanism 4 to the installation low position.

[0068] The magnetic field 100 is mounted on the magnetic field support mechanism 4 at the mounting lower position.

[0069] Next, the n screws 3 are driven by the screw driving mechanism 2 to rotate synchronously along the second direction (eg, counterclockwise) to adjust the magnetic field bearing mechanism 4 and the magnetic field 100 to a predetermined height.

[0070] Then, each magnetic field anti-falling mechanism 5 is controlled to lock the corresponding screw rod 3 .

[0071] The single crystal furnace magnetic field lifting mechanism in the embodiment of the present application is provided with a magnetic field anti-falling mechanism 5. When the screw drive mechanism 2 adjusts the magnetic field 100 on the magnetic field bearing mechanism 4 to a predetermined height through the screw 3, the magnetic field anti-falling mechanism 4 can lock the screw 3, thereby positioning the magnetic field bearing mechanism 4 to prevent the magnetic field bearing mechanism 4 from accidentally falling and causing the magnetic field 100 to fall.

[0072] It should be noted that the magnetic field 100 mentioned in the present application is a ring-shaped component with a certain thickness and used to generate a magnetic field in the furnace chamber of the single crystal furnace.

[0073] like Figures 7 to 9 As shown, optionally, the magnetic field anti-fall mechanism 5 includes a limiting flange 51 and a limiting assembly 52. ​​The limiting flange 51 is fixedly connected to the upper end of the corresponding screw rod 3, and the limiting flange 51 is circumferentially provided with a plurality of (four in the figure) slots 511. The limiting assembly 52 includes a driving member 521 and a limiting pin 522, wherein the driving member 521 is fixedly installed relative to the mounting bracket 1, and the limiting pin 522 is connected to the driving end of the driving member 521 and points to the limiting flange 51. When the magnetic field 100 is lifted and lowered to a predetermined height driven by the screw rod 3, the driving member 521 drives the limiting pin 522 to move toward the limiting flange 51, so that the limiting pin 522 is inserted into a slot 511 of the limiting flange 51, thereby locking the corresponding screw rod 3. When it is necessary to end the locking of the screw rod 3 , the driving member 521 drives the limiting pin 522 to move away from the limiting flange 51 , so that the limiting pin 522 is disengaged from the clamping groove 511 of the limiting flange 51 .

[0074] The driving member 521 may be, for example, a cylinder, which may be directly mounted on the mounting bracket 1 or may be mounted on a connecting frame independent of the mounting bracket 1 .

[0075] Optionally, the magnetic field anti-fall mechanism 5 also includes a screw bearing seat 53, the screw bearing seat 53 is arranged on the mounting bracket 1, and the upper end of the screw 3 is rotatably connected in the screw bearing seat 53 through the bearing. The limiting flange 51 is located in the screw bearing seat 53 and above the bearing. A limiting hole 531 is provided on the side of the screw bearing seat 53 facing the limiting pin 522. When the driving member 521 drives the limiting pin 522 toward the limiting flange 51, the limiting pin 522 is inserted into the card slot 511 of the limiting flange 51 through the limiting hole 531.

[0076] By providing the screw bearing seat 53, the upper end of the screw 3 and the limiting flange 51 are rotatably installed and limited, thereby preventing the upper end of the screw 3 and the limiting flange 51 from moving during the rotation process.

[0077] like Figure 8As shown, optionally, the magnetic field anti-fall mechanism 5 also includes an induction sheet 55 and an induction member 56, wherein: the induction sheet 55 is arranged on the limit pin 522, the induction member 56 is fixedly installed relative to the mounting bracket 1 and arranged opposite to the induction sheet 55, and the induction member 56 is connected to the screw drive mechanism 2 by signal. When the limit pin 522 is inserted into the slot 511 of the limit flange 51, the induction sheet 55 is away from the induction member 56, and the induction member 56 does not generate an induction signal. When the limit pin 522 is out of the slot 511 of the flange 51, the induction sheet 55 is close to the induction member 56 or abuts against the induction member 56, and the induction member 56 is triggered to generate an induction signal, and transmits the induction signal to the screw drive mechanism 2.

[0078] The screw drive mechanism 2 can drive the screw 3 to rise and fall only after receiving the induction signal to adjust the height of the magnetic field 100. In this way, on the one hand, it can prevent the screw drive mechanism 2 from driving the screw 3 to rotate when the screw 3 is locked, causing damage to the screw, nut and other components.

[0079] The sensing element 56 can be, for example, a micro switch with a trigger head. When the limit pin 522 is separated from the slot 511 of the flange 51, the sensing sheet 55 can be driven to abut against the trigger head of the micro switch, so that the micro switch is triggered to generate a sensing signal.

[0080] like Figure 3 and Figure 4 As shown, optionally, the single crystal furnace magnetic field lifting mechanism in the embodiment of the present application also includes n guide rods 6 corresponding one by one to the screw rods 3, the upper and lower ends of the guide rods 6 are fixedly connected to the mounting bracket 1, and the connecting part 42 is slidably connected to the corresponding guide rods 6 and can slide up and down along the guide rods 6.

[0081] By providing the guide rod 6, the lifting and lowering guidance of the bearing part 41 and the magnetic field 100 is achieved, preventing the bearing part 41 and the magnetic field 100 from deviating during the lifting process and damaging the screw rod 3, the nut and other components.

[0082] like Figures 4 to 6 As shown, optionally, the connecting part 42 includes a transfer arm 421, a mounting seat 422 and a linear bearing 433, wherein: the upper end of the transfer arm 421 is connected to the bottom of the bearing part 41, the mounting seat 422 is connected to the lower end of the transfer arm 421, the nut 43 is fixedly arranged on the mounting seat 422 and is screwed on the screw rod 3, and the linear bearing 433 is fixedly arranged on the mounting seat 422 and is sleeved on the guide rod 6.

[0083] By configuring the connecting portion 42 in this way, the connection strength between the connecting portion 42 and the supporting portion 41 is ensured on the one hand, and the screw rod 3 and the guide rod 6 are connected to the connecting portion 42 in a manner that they can be raised and lowered and adjusted on the other hand.

[0084] Of course, the linear bearing 433 may also be replaced by a bushing to support the guide rod 6 .

[0085] like Figures 5 and 6 As shown, optionally, the mounting seat 422 includes a first mounting block 4221, a second mounting block 4222 and a third mounting block 4223, wherein:

[0086] The first end of the first mounting block 4221 is connected to the lower end of the adapter arm 421, a mounting notch 4224 is provided at the bottom of the second end of the first mounting block 4221, a first mounting hole 4225 is also provided on the second end of the first mounting block 4221, and the lower half of the first mounting hole 4225 is connected to the mounting notch 4224 to form a first half-hole.

[0087] The second mounting block 4222 is installed in the mounting notch 4224. A second half hole 4226 docking with the first half hole is provided on the side of the second mounting block 4222 facing the first half hole. A third half hole 4227 is provided on the side of the second mounting block 4222 away from the first half hole.

[0088] The third mounting block 4223 is connected to the top of the second end of the first mounting block 4221 and extends outward from the first mounting block 4221. The third mounting block 4223 is provided with a second mounting hole 4228 vertically interpenetrating the first mounting hole 4225. The third mounting block 4223 is also provided with a third mounting hole 4229 vertically interpenetrating the third half-cut hole.

[0089] The nut 43 is inserted into the first mounting hole 4225, and the screw rod passes through the nut 43 and the second mounting hole 4228. The linear bearing 433 is inserted into the third mounting hole 4229, and the third half-cut hole 4227 is used to avoid the linear bearing 433.

[0090] By configuring the mounting seat 422 to be a detachable split structure consisting of the first mounting block 4221 , the second mounting block 4222 and the third mounting block 4223 , it is convenient to repair and replace the nut 43 and the linear bearing 433 .

[0091] In order to facilitate the disassembly and assembly of the magnetic field 100 and ensure the installation stability of the magnetic field 100, and prevent the magnetic field 100 from falling or tilting, the bearing portion 41 is optionally an annular mounting flange matching the bottom shape of the magnetic field 100, and the magnetic field 100 is fixedly mounted on the mounting flange through the mounting holes on the mounting flange.

[0092] like Figures 1 to 3As shown, optionally, the single crystal furnace magnetic field lifting mechanism in the embodiment of the present application further includes a position-limiting support mechanism arranged below the magnetic field bearing mechanism 4. The position-limiting support mechanism includes a plurality of support seats 7 arranged along the circumferential direction, and the support seats 7 are arranged one by one below the connecting portion 42, and the upper surfaces of the plurality of support seats 7 are on the same horizontal plane to constitute a support surface of the position-limiting support mechanism.

[0093] When installing the magnetic field 100 , firstly, the connecting parts 42 of the magnetic field bearing mechanism 4 are supported one by one on the support seat 7 to ensure the horizontality of the bearing part 41 , and finally ensure the horizontality of the magnetic field 100 installed on the bearing part 41 .

[0094] Optionally, a buffer pad is also installed on the upper surface of the support seat 7. When the magnetic field 100 falls accidentally, the support seat 7 can provide buffer support for the magnetic field 100 through the buffer pad thereon.

[0095] It should be noted that the buffer pad will be installed on the support seat 7 only after the magnetic field 100 is installed. It is necessary to ensure that the connecting part 42 and the support seat 7 are in hard contact during the installation of the magnetic field 100, so as to avoid the buffer pad affecting the horizontality of the installation of the magnetic field 100.

[0096] like Figure 3 As shown, optionally, the screw drive mechanism 2 includes a motor 21 and n reducers 22 corresponding to the screws 3, wherein: the n reducers 22 are arranged along the circumferential direction and are all transmission-connected to the motor 21, and the lower end of the screw 3 is connected to the output end of the corresponding reducer 33. The motor 21 drives the n screws 3 to rotate synchronously through the n reducers 22, thereby realizing the lifting and lowering drive of the bearing part 41 and the magnetic field 100.

[0097] Of course, other existing driving mechanisms can also be used to drive n screw rods 3 to rotate synchronously. For example, the screw driving mechanism 2 includes n independent rotation driving motors, each of which is connected to a screw rod 3 by transmission. The n rotation driving motors are controlled by the same controller, and the controller drives the n rotation driving motors to synchronously drive the n screw rods 3 to rotate, so as to realize the lifting and lowering drive of the bearing part 41 and the magnetic field 100.

[0098] The present application is described in sufficient detail above with certain particularity. It should be understood by those skilled in the art that the description in the embodiments is merely exemplary, and all changes made without departing from the true spirit and scope of the present application should fall within the scope of protection of the present application. The scope of protection claimed in the present application is defined by the claims, rather than by the above description in the embodiments.

Claims

1. A single crystal furnace magnetic field lifting mechanism, characterized in that: The single crystal furnace magnetic field lifting mechanism comprises: Mounting bracket; A screw drive mechanism, wherein the screw drive mechanism is mounted on the mounting bracket; n screw rods, the n screw rods are arranged along the circumferential direction, each of the screw rods is transmission-connected to the screw rod driving mechanism, each of the screw rods is rotationally connected to the mounting bracket, and the screw rod driving mechanism is used to drive the n screw rods to rotate synchronously; A magnetic field bearing mechanism, the magnetic field bearing mechanism comprises a bearing portion and n connecting portions arranged circumferentially at the bottom of the bearing portion, the n connecting portions corresponding to the screw rods one by one, wherein the bearing portion is used to bear the magnetic field, the connecting portion is screwed to the corresponding screw rod through a nut, and the corresponding connecting portion is driven to rise and fall when the screw rod rotates; m magnetic field anti-falling mechanisms, each of which is used to lock a corresponding screw rod to prevent the screw rod from rotating, and the magnetic field anti-falling mechanism is arranged on the mounting bracket and the corresponding screw rod; n≥3, m≤n.

2. The single crystal furnace magnetic field lifting mechanism according to claim 1, characterized in that: The magnetic field anti-fall mechanism comprises: A limiting flange, the limiting flange is fixedly connected to the upper end of the corresponding screw rod, and the limiting flange is provided with a plurality of slots along the circumferential direction; A limit assembly, the limit assembly comprising a driving member and a limit pin, wherein the driving member is fixedly mounted relative to the mounting bracket, the limit pin is connected to the driving end of the driving member and points to the limit flange, and the driving member is used to drive the limit pin to move toward or away from the limit flange; When the driving member drives the limit pin to move toward the limit flange, the limit pin is inserted into the slot to lock the screw rod; when the driving member drives the limit pin to move away from the limit flange, the limit pin is disengaged from the slot.

3. The single crystal furnace magnetic field lifting mechanism according to claim 2, characterized in that: The magnetic field anti-fall mechanism also includes a screw bearing seat, the screw bearing seat is arranged on the mounting bracket, and the upper end of the screw is rotatably connected to the screw bearing seat via a bearing; The limiting flange is located in the screw bearing seat, and a limiting hole is provided on a side of the screw bearing seat facing the limiting pin, and the limiting pin is inserted into the slot through the limiting hole.

4. The single crystal furnace magnetic field lifting mechanism according to claim 2, characterized in that: The magnetic field anti-fall mechanism also includes an induction sheet and an induction member, wherein: The induction sheet is arranged on the limit pin, the induction element is fixedly installed relative to the mounting bracket and arranged opposite to the induction sheet, and the induction element is connected to the lead screw drive mechanism by signal; When the limiting pin is inserted into the card slot, the sensing sheet is away from the sensing element; When the limit pin is disengaged from the slot, the sensing sheet approaches the sensing element or abuts against the sensing element, and the sensing element is triggered by the sensing sheet to generate a sensing signal, and transmits the sensing signal to the screw drive mechanism.

5. The single crystal furnace magnetic field lifting mechanism according to claim 1, characterized in that: The single crystal furnace magnetic field lifting mechanism also includes n guide rods corresponding to the screw rods one by one, the upper and lower ends of the guide rods are fixedly connected to the mounting bracket, and the connecting part is slidably connected to the corresponding guide rod and can slide up and down along the guide rod.

6. The single crystal furnace magnetic field lifting mechanism according to claim 5, characterized in that: The connecting part includes a transfer arm, a mounting seat and a linear bearing, wherein: The upper end of the transfer arm is connected to the bottom of the bearing portion, the mounting seat is connected to the lower end of the transfer arm, the nut is fixedly arranged on the mounting seat and screwed on the screw rod, and the linear bearing is fixedly arranged on the mounting seat and sleeved on the guide rod; or, The connecting part includes a transfer arm, a mounting seat and a bushing, wherein: The upper end of the transfer arm is connected to the bottom of the bearing part, the mounting seat is connected to the lower end of the transfer arm, the nut is fixedly arranged on the mounting seat and screwed on the screw rod, and the bushing is fixedly arranged on the mounting seat and sleeved on the guide rod.

7. The single crystal furnace magnetic field lifting mechanism according to claim 6, characterized in that: The mounting seat includes a first mounting block, a second mounting block and a third mounting block, wherein: The first end of the first mounting block is connected to the lower end of the transfer arm, a mounting notch is provided at the bottom of the second end of the first mounting block, a first mounting hole is also provided on the second end of the first mounting block, and the lower half of the first mounting hole is connected to the mounting notch to form a first half-section hole; The second mounting block is mounted in the mounting notch, a second half-section hole is provided on a side of the second mounting block facing the first half-section hole and docking with the first half-section hole, and a third half-section hole is provided on a side of the second mounting block away from the first half-section hole; The third mounting block is connected to the top of the second end of the first mounting block and extends outward from the first mounting block, the third mounting block is provided with a second mounting hole vertically penetrating the first mounting hole, and the third mounting block is also provided with a third mounting hole vertically penetrating the third half-section hole; The nut is inserted into the first mounting hole, the screw rod passes through the nut and the second mounting hole, and the linear bearing or bushing is inserted into the third mounting hole.

8. The single crystal furnace magnetic field lifting mechanism according to claim 1, characterized in that: The bearing portion comprises an annular mounting flange matching the shape of the bottom of the magnetic field, and the magnetic field is fixed on the mounting flange.

9. The single crystal furnace magnetic field lifting mechanism according to claim 1, characterized in that: The single crystal furnace magnetic field lifting mechanism also includes a limit support mechanism arranged below the magnetic field bearing mechanism; The position limiting support mechanism includes a plurality of support seats arranged along the circumferential direction, and the support seats are arranged one by one below the connecting portion. The upper surfaces of the plurality of support seats are on the same horizontal plane to constitute the support surface of the position limiting support mechanism, and a buffer pad is installed on the upper surface of the support seat.

10. The single crystal furnace magnetic field lifting mechanism according to claim 1, characterized in that: The screw drive mechanism includes a motor and n reducers corresponding to the screws one by one, wherein: The n reducers are arranged along the circumferential direction and are all connected to the motor in a transmission manner, and the lower end of the screw rod is connected to the output end of the corresponding reducer; The motor drives the n screw rods to rotate synchronously via the n reducers.

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