Protection device for gas return of single crystal furnace

Abstract

The utility model discloses a protection device for gas return of a single crystal furnace in the technical field of single crystal furnaces, which comprises a single crystal furnace body and a furnace tube, sliding chutes are fixedly arranged on the upper side and the lower side in a gas return prevention component, a sliding rod is slidably connected to the inner side of each sliding chute, one end of each sliding rod is fixedly connected with a sealing disc, and the other end of each sliding rod is fixedly connected with a gas return prevention component. When a vacuum pump breaks down or a pipeline is blocked, a circuit and other problems occur, negative pressure in the furnace tube is unbalanced, the spring can drive the connecting rod and the sealing disc to reset, the sealing disc can drive the sealing strip on one side to enter the sealing groove, and the sealing strip is fixedly installed on one side of the sealing disc. According to Figure 2, the effect of partitioning the interior of the connecting cavity can be achieved, gas circulation of the left-end furnace tube and the right-end furnace tube is blocked, and the problems of influence on the quality of a crystal bar, wire breakage, raw material pollution and raw material scrapping caused by the fact that impurity gas flows back into the furnace during gas return of the single crystal furnace body are avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal furnaces, and in particular relates to a protective device used for returning gas in a single crystal furnace. Background Art

[0002] During the crystal pulling process of the single crystal furnace, the protective gas (argon) enters from the top of the furnace, passes through the surface of the crystal rod to the surface of the melt, passes through the crucible wall and then enters the bottom of the furnace and is pumped out by the vacuum pump. The protective gas (argon) not only acts as a heat transfer medium, but also removes the volatile SiO and other impurities and contaminants in the melt, which is conducive to the smooth realization of dislocation-free growth of single products. During the crystal pulling process of the single crystal furnace, the furnace is in a negative pressure dynamic equilibrium state, but due to vacuum pump failure, pipeline blockage, circuit and other possible problems, it may cause gas return. Impurity gas is reversed into the furnace, which will affect the quality of the crystal rod, cause wire breakage, pollute the raw materials and cause the raw materials to be scrapped, thereby causing economic losses. For this reason, we propose a protective device for gas return in the single crystal furnace. Utility Model Content

[0003] The purpose of the utility model is to provide a protective device for the return gas of a single crystal furnace, so as to solve the problems proposed in the above background technology that when the single crystal furnace returns gas, impurity gas is reversed into the furnace, which will affect the quality of the crystal rod, cause wire breakage, pollute the raw materials and lead to the scrapping of the raw materials.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a protective device for the backgassing of a single crystal furnace, comprising a single crystal furnace body and a furnace tube, a furnace tube is provided on one side of the single crystal furnace body, a backgassing prevention component is provided on the surface of the furnace tube, a vacuum pump is provided at one end of the furnace tube, a connecting cavity is provided on the inner side of the backgassing prevention component, an air inlet is provided at one end of the air inlet, a connecting block is provided on one side of the air inlet, a sealing groove is provided on one side of the connecting block, a sliding groove is provided on the inner side of the backgassing prevention component, a sliding rod is provided on the inner side of the sliding groove, a sealing disk is provided on one end of the sliding rod, a sealing strip is provided on one side of the sealing disk, a fixing frame is provided on one side of the backgassing prevention component, a sliding hole is provided on the surface of the fixing frame, a connecting rod is provided on the inner side of the sliding hole, a limiting plate is provided on one end of the connecting rod, a limiting block is provided on the surface of the connecting rod, and a spring is provided on the surface of the connecting rod.

[0005] Preferably, a furnace tube is fixedly connected to one side of the single crystal furnace body, an anti-backgas component is fixedly installed on the surface of the furnace tube, a vacuum pump is fixedly connected to one end of the furnace tube, and a connecting cavity is fixedly opened on the inner side of the anti-backgas component.

[0006] Preferably, an air inlet is fixedly opened at one end of the anti-backgas assembly, the air inlet is communicated with the interior of the furnace tube, a connecting block is fixedly installed on one side of the air inlet, the connecting block is arranged inside the connecting cavity, and a sealing groove is fixedly opened on one side of the connecting block.

[0007] Preferably, a slide groove is fixedly opened on the upper and lower sides of the interior of the anti-backflow component, a slide rod is slidably connected to the inner side of the slide groove, one end of the slide rod is fixedly connected to a sealing disk, the sealing disk is arranged on one side of the connecting block, and a sealing strip is fixedly installed on one side of the sealing disk.

[0008] Preferably, a fixing frame is fixedly installed on one end of the inner side of the connecting cavity, a sliding hole is fixedly opened on the surface of the fixing frame, and a connecting rod is slidably penetrated and connected to the inner side of the sliding hole.

[0009] Preferably, a limiting plate is fixedly installed at one end of the connecting rod, the surface of the connecting rod is slidably sleeved and connected to a limiting block, one side of the limiting block is fixedly connected to one side of the fixing frame, the surface of the connecting rod is sleeved and connected to a spring, one end of the spring is fixedly connected to one side of the limiting block, one end of the connecting rod is fixedly connected to one side of the sealing disk, and one end of the spring is fixedly connected to one side of the sealing disk.

[0010] Compared with the prior art, the beneficial effects of the utility model are:

[0011] Through the furnace tube, connecting block, sealing groove, sealing plate, sealing strip, sliding hole, connecting rod, fixing frame, sliding hole, limiting plate and spring, the vacuum pump will generate negative pressure on one side of the furnace tube after starting. Figure 3 :When the negative pressure on the right side of the furnace tube reaches a certain value, the sealing disk will be sucked to the right by the negative pressure, and the spring on the connecting rod surface will be compressed at the same time. At this time, the left and right furnace tubes will be connected inside the connecting cavity, which is convenient for extracting the protective gas inside the single crystal furnace body from the bottom of the furnace. When there is a vacuum pump failure or pipeline blockage, circuit and other problems, the negative pressure inside the furnace tube will be unbalanced, and the spring will drive the connecting rod and the sealing disk to reset. The sealing disk will drive the sealing strip on one side into the inside of the sealing groove. Figure 2 :It can achieve the effect of isolating the inside of the connecting cavity, blocking the flow of gas between the left and right furnace tubes, and preventing impurity gas from entering the furnace when the single crystal furnace body returns gas, which will affect the quality of the crystal rod, cause wire breakage, pollute the raw materials and lead to the scrapping of the raw materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0013] Figure 2 For the utility model Figure 1 Schematic diagram of the structure of A;

[0014] Figure 3 This is a schematic diagram of the separation structure of the sealing disk and the connecting block of the utility model;

[0015] Figure 4 It is a schematic diagram of the internal slide groove structure of the connecting cavity of the utility model.

[0016] In the figure: 1. single crystal furnace body; 2. furnace tube; 3. anti-backgas assembly; 4. vacuum pump; 5. connecting chamber; 6. air inlet; 7. connecting block; 8. sealing groove; 9. slide groove; 10. slide rod; 11. sealing disk; 12. sealing strip; 13. fixing frame; 14. slide hole; 15. connecting rod; 16. limit plate; 17. limit block; 18. spring. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] See also Figure 1-4 The utility model provides a technical solution: a protective device for the return gas of a single crystal furnace, comprising a single crystal furnace body 1 and a furnace tube 2, a furnace tube 2 is arranged on one side of the single crystal furnace body 1, a return gas prevention component 3 is arranged on the surface of the furnace tube 2, a vacuum pump 4 is arranged at one end of the furnace tube 2, a connecting cavity 5 is arranged on the inner side of the return gas prevention component 3, an air inlet 6 is arranged at one end of the air inlet 6, a connecting block 7 is arranged on one side of the air inlet 6, a sealing groove 8 is arranged on one side of the connecting block 7, a slide groove 9 is arranged on the inner side of the return gas prevention component 3, a slide rod 10 is arranged on the inner side of the slide groove 9, a sealing disk 11 is arranged at one end of the slide rod 10, a sealing strip 12 is arranged on one side of the sealing disk 11, a fixing frame 13 is arranged on one side of the return gas prevention component 3, a sliding hole 14 is arranged on the surface of the fixing frame 13, a connecting rod 15 is arranged on the inner side of the sliding hole 14, a limiting plate 16 is arranged on one end of the connecting rod 15, a limiting block 17 is arranged on the surface of the connecting rod 15, and a spring 18 is arranged on the surface of the connecting rod 15.

[0019] Specifically, a furnace tube 2 is fixedly connected to one side of the single crystal furnace body 1, an anti-return gas component 3 is fixedly installed on the surface of the furnace tube 2, a vacuum pump 4 is fixedly connected to one end of the furnace tube 2, a connecting cavity 5 is fixedly opened on the inner side of the anti-return gas component 3, an air inlet 6 is fixedly opened at one end of the anti-return gas component 3, the air inlet 6 is communicated with the interior of the furnace tube 2, a connecting block 7 is fixedly installed on one side of the air inlet 6, the connecting block 7 is arranged inside the connecting cavity 5, a sealing groove 8 is fixedly opened on one side of the connecting block 7, a slide groove 9 is fixedly opened on the upper and lower sides of the interior of the anti-return gas component 3, a slide rod 10 is slidably connected to the inner side of the slide groove 9, and a sealing disk 11 is fixedly connected to one end of the slide rod 10, and the sealing disk 11 is arranged on the connecting block 7, a sealing strip 12 is fixedly installed on one side of the sealing disk 11, a fixing frame 13 is fixedly installed on one end of the inner side of the connecting cavity 5, a sliding hole 14 is fixedly opened on the surface of the fixing frame 13, a connecting rod 15 is slidably penetrated and connected to the inner side of the sliding hole 14, one end of the connecting rod 15 is fixedly installed with a limiting plate 16, a limiting block 17 is slidably sleeved on the surface of the connecting rod 15, one side of the limiting block 17 is fixedly connected to one side of the fixing frame 13, a spring 18 is sleeved on the surface of the connecting rod 15, one end of the spring 18 is fixedly connected to one side of the limiting block 17, one end of the connecting rod 15 is fixedly connected to one side of the sealing disk 11, and one end of the spring 18 is fixedly connected to one side of the sealing disk 11.

[0020] In this embodiment, when the single crystal furnace body 1 is in the process of pulling crystals, the vacuum pump 4 and the furnace tube 2 are provided. After the vacuum pump 4 is started, it will suck the inside of the furnace tube 2, so that a negative pressure is generated on one side of the inside of the furnace tube 2. Figure 3 :When the negative pressure inside the right side of the furnace tube 2 reaches a certain value, the sealing disk 11 and the connecting block 7 will be separated, so that the sealing strip 12 on one side of the sealing disk 11 will leave the sealing groove 8 on the side of the connecting block 7. When the sealing disk 11 is sucked to the right by the negative pressure, the sealing disk 11 drives the connecting rod 15 to slide to the right inside the sliding hole 14, and at the same time, the spring 18 on the surface of the connecting rod 15 is compressed. Through the separation between the sealing disk 11 and the connecting block 7, according to Figure 3 : The left furnace tube 2 and the right furnace tube 2 will achieve the effect of communication inside the connecting chamber 5, and the negative pressure force inside the furnace tube 2 can extract the protective gas inside the single crystal furnace body 1 from the bottom of the furnace, so that the internal impurities and pollutants and other objects can be taken out. The provided slide groove 9 and slide rod 10 improve the stability of the sealing disk 11 during movement, and avoid position deviation during long-term use. When the vacuum pump 4 fails or the pipeline is blocked, the circuit and other problems occur, the negative pressure inside the furnace tube 2 will be unbalanced. When the suction force generated by the negative pressure is lower than the rebound force of the spring 18, the spring 18 will drive the connecting rod 15 and the sealing disk 11 to reset, and the sealing disk 11 will drive the sealing strip 12 on one side to enter the inside of the sealing groove 8. Figure 2: The interior of the connecting cavity 5 can be isolated, blocking the flow of gas between the left furnace tube 2 and the right furnace tube 2, and preventing impurity gas from entering the furnace when the single crystal furnace body 1 returns gas, which will affect the quality of the crystal rod, cause wire breakage, pollute the raw materials and cause the raw materials to be scrapped.

[0021] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A protective device for a single crystal furnace during gas return, comprising a single crystal furnace body (1) and a furnace tube (2), characterized in that: A furnace tube (2) is provided on one side of the single crystal furnace body (1), a backflow prevention assembly (3) is provided on the surface of the furnace tube (2), a vacuum pump (4) is provided at one end of the furnace tube (2), a connecting cavity (5) is provided on the inner side of the backflow prevention assembly (3), an air inlet (6) is provided at one end of the backflow prevention assembly (3), a connecting block (7) is provided on one side of the air inlet (6), a sealing groove (8) is provided on one side of the connecting block (7), a sliding groove (9) is provided on the inner side of the backflow prevention assembly (3), and a sealing groove (9) is provided on the inner side of the sliding groove (9). A sliding rod (10) is provided, a sealing disk (11) is provided at one end of the sliding rod (10), a sealing strip (12) is provided on one side of the sealing disk (11), a fixing frame (13) is provided on one side of the anti-return air component (3), a sliding hole (14) is provided on the surface of the fixing frame (13), a connecting rod (15) is provided on the inner side of the sliding hole (14), a limiting plate (16) is provided at one end of the connecting rod (15), a limiting block (17) is provided on the surface of the connecting rod (15), and a spring (18) is provided on the surface of the connecting rod (15).

2. The protective device for returning gas in a single crystal furnace according to claim 1, characterized in that: A furnace tube (2) is fixedly connected to one side of the single crystal furnace body (1), an anti-return gas assembly (3) is fixedly installed on the surface of the furnace tube (2), a vacuum pump (4) is fixedly connected to one end of the furnace tube (2), and a connecting cavity (5) is fixedly opened on the inner side of the anti-return gas assembly (3).

3. The protective device for single crystal furnace gas return according to claim 1, characterized in that: An air inlet (6) is fixedly provided at one end of the anti-return air component (3), the air inlet (6) is communicated with the interior of the furnace tube (2), a connecting block (7) is fixedly installed on one side of the air inlet (6), the connecting block (7) is arranged inside the connecting cavity (5), and a sealing groove (8) is fixedly provided on one side of the connecting block (7).

4. The protective device for single crystal furnace gas return according to claim 1, characterized in that: The anti-return air component (3) has a sliding groove (9) fixedly provided on the upper and lower sides thereof, the inner side of the sliding groove (9) is slidably connected to a sliding rod (10), one end of the sliding rod (10) is fixedly connected to a sealing disk (11), the sealing disk (11) is arranged on one side of the connecting block (7), and a sealing strip (12) is fixedly installed on one side of the sealing disk (11).

5. The protective device for single crystal furnace return gas according to claim 1, characterized in that: A fixing frame (13) is fixedly mounted on one end of the inner side of the connecting cavity (5), a sliding hole (14) is fixedly opened on the surface of the fixing frame (13), and a connecting rod (15) is slidably penetrated and connected to the inner side of the sliding hole (14).

6. The protective device for returning gas in a single crystal furnace according to claim 1, characterized in that: A limiting plate (16) is fixedly mounted on one end of the connecting rod (15); a limiting block (17) is slidably sleeved on the surface of the connecting rod (15); one side of the limiting block (17) is fixedly connected to one side of the fixing frame (13); a spring (18) is sleeved on the surface of the connecting rod (15); one end of the spring (18) is fixedly connected to one side of the limiting block (17); one end of the connecting rod (15) is fixedly connected to one side of the sealing disk (11); and one end of the spring (18) is fixedly connected to one side of the sealing disk (11).

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