High-reliability semiconductor device processing equipment
By designing a filter device including collar, main cylinder, secondary cylinder and filter in semiconductor device processing equipment, the problem of pollutant leakage during the flushing process of the equipment is solved, and higher reliability and cleanliness are achieved.
Patent Information
- Application Number
- CN202420490049.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-14
- Publication Date
- 2025-03-18
- Estimated Expiration
- 2034-03-14
AI Technical Summary
Existing semiconductor device processing equipment lacks filtering devices during the flushing process, resulting in leakage of particulate matter pollutants in the moisture, affecting the reliability of device processing.
A high-reliability semiconductor device processing equipment is designed, and a filter device including a collar, a main cylinder, a secondary cylinder and a filter screen is used to filter the discharged water by setting a collar, a main cylinder, a secondary cylinder and a filter screen to reduce particulate pollution.
It effectively reduces particulate pollution in water, improves the reliability of semiconductor device processing equipment, prevents pollutant leakage, and ensures the clean and stable processing process.
Smart Images
Figure CN222623887U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductors, in particular to high-reliability semiconductor device processing equipment. Background Art
[0002] Semiconductors refer to materials with electrical conductivity between conductors and insulators at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors. The application principle of semiconductor refrigeration technology is based on the Peltier principle.
[0003] With respect to the above-mentioned and existing related technologies, the inventors believe that the following defects often exist: when semiconductor parts need to be processed, a pipeline precision dicing machine is generally used, and water is flushed during processing. Since the drainage mechanism in most machines lacks a filtering device, particulate matter in the water will flow into the pipe or container with the water, which will cause the problem of pollutant leakage; therefore, high-reliability semiconductor device processing equipment is proposed to address the above-mentioned problems. Utility Model Content
[0004] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.
[0005] The technical solution adopted by the utility model to solve its technical problems is: the high-reliability semiconductor device processing equipment described in the utility model comprises a body and a filtering device, the side wall of the body is fixedly connected with a touch panel, and the side wall of the body is fixedly connected with a conduit; the surface of the conduit is provided with a filtering device, and the filtering device comprises two sleeves, a main tube and a secondary tube, the two sleeves are located directly below the conduit, the two sleeves are respectively sleeved on the surface of the main tube and the secondary tube, and the inner walls of the main tube and the secondary tube are inserted with a plurality of filter screens, and the discharged water can be filtered by arranging the sleeves, the main tube, the secondary tube and the filter screens.
[0006] Preferably, the inner walls of the collar and the conduit are threadedly connected with a plurality of bolts, the inner surfaces of the main tube and the auxiliary tube are provided with a plurality of slots, the filter is inserted into the inner walls of the slots of the main tube and the auxiliary tube, and the opening of the slots can limit the position of the filter.
[0007] Preferably, the surfaces of the main tube and the auxiliary tube are provided with limiting grooves, the two rings are respectively inserted into the inner walls of the limiting grooves of the main tube and the auxiliary tube, and the surface of the auxiliary tube is fixedly connected with two connecting blocks. The provision of the limiting grooves can limit the position of the main tube or the auxiliary tube on the surface of the rings.
[0008] Preferably, the surfaces of the two connecting blocks are fixedly connected with a rotating shaft, the surface of the main cylinder is fixedly connected with a rotating block, the inner wall of the rotating block is rotatably connected to the surface of the rotating shaft, the rotating shaft rotates on the inner wall of the rotating block, the secondary cylinder is sleeved on the surface of the filter, and the rotating block, the connecting block and the rotating shaft can connect the main cylinder and the secondary cylinder together.
[0009] Preferably, the side wall of the machine body is provided with a supporting device, and the supporting device includes a frame, the side wall of the frame is fixedly connected to the side wall of the machine body, the surface of the frame is rotatably connected with a threaded rod, the surface of the threaded rod is provided with two opposite sections of threaded lines, and the surface of the threaded rod is threadedly connected with two clamping rings, the two clamping rings are located at the bottom end of the collar, and the clamping rings will move to the bottom end of the collar, and the collar can be assisted in supporting by setting the frame, the threaded rod and the clamping ring.
[0010] Preferably, a sliding groove is provided on the surface of the frame, the inner wall of the sliding groove of the frame is slidably connected to the surface of the clamp ring, and two support rods are fixedly connected to the bottom end of the frame. The support rods are located on the side walls of the body, and when the frame is subjected to force, the support rods will bear part of the force. By setting the support rods, the frame can be assisted in supporting.
[0011] The utility model is beneficial in that:
[0012] 1. When the utility model needs to use the entire device, the filter screen is first inserted into the inner wall of the slot of the main cylinder, and then the auxiliary cylinder is pushed to allow the auxiliary cylinder to drive the connecting block and the rotating shaft to rotate. The rotating shaft rotates on the inner wall of the rotating block, and the slot of the auxiliary cylinder is sleeved on the surface of the filter screen. Then the two sleeves are respectively sleeved on the surfaces of the main cylinder and the auxiliary cylinder. At the same time, part of the structure of the sleeve will be inserted into the inner wall of the limiting groove, and then the sleeve will fit the conduit, and then the bolt will be rotated to the inner wall of the sleeve and the conduit. By arranging the sleeve, the main cylinder, the auxiliary cylinder and the filter screen, the water body can be filtered, and at the same time, filter screens of different sizes can be installed to filter particles of different sizes layer by layer. The arrangement of the entire device can reduce the situation where particles pollute the water body.
[0013] 2. After the collar is fixed, the utility model rotates the threaded rod to rotate on the surface of the frame and the inner wall of the clamp ring, the threaded rod moves the clamp ring, the clamp ring slides on the inner wall of the slide groove of the frame, the clamp ring moves to the bottom end of the collar, and when the frame is subjected to force, the support rod supports the frame. By setting the frame, the threaded rod and the clamp ring, the entire filter device can be auxiliary supported to reduce the gravity on the catheter, and the support rod can assist the frame in supporting the filter device. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.
[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of the machine body in the high-reliability semiconductor device processing equipment;
[0016] Figure 2 It is a schematic diagram of the explosion structure of the filtering device in the high reliability semiconductor device processing equipment;
[0017] Figure 3 It is a schematic diagram of the side view structure of the machine body in the high reliability semiconductor device processing equipment;
[0018] Figure 4 For high reliability semiconductor device processing equipment Figure 3 Schematic diagram of the structure at point A.
[0019] In the figure: 1. body; 2. touch panel; 3. catheter; 4. filter device; 41. collar; 42. main cylinder; 43. auxiliary cylinder; 44. filter screen; 45. slot; 46. limit slot; 47. connecting block; 48. rotating shaft; 49. rotating block; 5. supporting device; 51. frame; 52. threaded rod; 53. clamp ring; 54. slide groove; 55. support rod. DETAILED DESCRIPTION
[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0021] See also Figure 1-4As shown, a high-reliability semiconductor device processing equipment comprises a body 1 and a filtering device 4, wherein a touch panel 2 is fixedly connected to the side wall of the body 1, and a conduit 3 is fixedly connected to the side wall of the body 1; a filtering device 4 is arranged on the surface of the conduit 3, and the filtering device 4 comprises two sleeves 41, a main cylinder 42 and a secondary cylinder 43, wherein the two sleeves 41 are located directly below the conduit 3, and the two sleeves 41 are respectively sleeved on the surface of the main cylinder 42 and the secondary cylinder 43, wherein the inner walls of the main cylinder 42 and the secondary cylinder 43 are provided with a plurality of filter screens 44; during operation, the main cylinder 42 and the secondary cylinder 43 are sleeved on the surface of the plurality of filter screens 44, and then the two sleeves 41 are sleeved on the surface of the main cylinder 42 and the secondary cylinder 43, and then the two sleeves 41 are fixed to the bottom end of the conduit 3, and the discharged water can be filtered by arranging the sleeves 41, the main cylinder 42, the secondary cylinder 43 and the filter screen 44.
[0022] The inner wall of the collar 41 and the conduit 3 are threadedly connected with a plurality of bolts, the inner surfaces of the main cylinder 42 and the auxiliary cylinder 43 are provided with a plurality of slots 45, and the filter 44 is inserted into the inner walls of the slots 45 of the main cylinder 42 and the auxiliary cylinder 43; during operation, the slots 45 of the main cylinder 42 and the auxiliary cylinder 43 will be sleeved on the surface of the filter 44, and the opening of the slots 45 can limit the position of the filter 44.
[0023] The surfaces of the main tube 42 and the auxiliary tube 43 are provided with limiting grooves 46, and the two collars 41 are respectively inserted into the inner walls of the limiting grooves 46 of the main tube 42 and the auxiliary tube 43, and the surface of the auxiliary tube 43 is fixedly connected with two connecting blocks 47; when working, the two collars 41 will be respectively inserted into the inner walls of the limiting grooves 46 of the main tube 42 and the auxiliary tube 43, and the opening of the limiting grooves 46 can limit the position of the main tube 42 or the auxiliary tube 43 on the surface of the collar 41.
[0024] The surfaces of the two connecting blocks 47 are fixedly connected with a rotating shaft 48, and the surface of the main cylinder 42 is fixedly connected with a rotating block 49. The inner wall of the rotating block 49 is rotatably connected to the surface of the rotating shaft 48. When working, the filter screen 44 is placed on the inner wall of the main cylinder 42, and then the auxiliary cylinder 43 is pushed to allow the auxiliary cylinder 43 to drive the connecting blocks 47 and the rotating shaft 48 to rotate. The rotating shaft 48 rotates on the inner wall of the rotating block 49, and the auxiliary cylinder 43 is sleeved on the surface of the filter screen 44. The rotating block 49, the connecting block 47 and the rotating shaft 48 can connect the main cylinder 42 and the auxiliary cylinder 43 together.
[0025] The side wall of the body 1 is provided with a supporting device 5, and the supporting device 5 includes a frame 51. The side wall of the frame 51 is fixedly connected to the side wall of the body 1. The surface of the frame 51 is rotatably connected with a threaded rod 52. The surface of the threaded rod 52 is provided with two opposite sections of thread lines. The surface of the threaded rod 52 is threadedly connected with two clamping rings 53, and the two clamping rings 53 are located at the bottom end of the collar 41; when working, the threaded rod 52 is rotated to allow the threaded rod 52 to rotate on the surface of the frame 51 and the inner wall of the clamping ring 53, and the clamping ring 53 will move to the bottom end of the collar 41. By setting the frame 51, the threaded rod 52 and the clamping ring 53, the support collar 41 can be assisted.
[0026] A sliding groove 54 is provided on the surface of the frame 51, and the inner wall of the sliding groove 54 of the frame 51 is slidably connected to the surface of the clamping ring 53. The bottom end of the frame 51 is fixedly connected to two support rods 55, and the support rods 55 are located on the side walls of the body 1; when working, the clamping ring 53 slides on the inner wall of the sliding groove 54 of the frame 51, and at the same time, when the frame 51 is subjected to force, the support rods 55 will bear part of the force. By setting the support rods 55, the frame 51 can be assisted in supporting.
[0027] Working principle: when the whole device needs to be used, the filter screen 44 is first inserted into the inner wall of the slot 45 of the main cylinder 42, and then the auxiliary cylinder 43 is pushed to make the auxiliary cylinder 43 drive the connecting block 47 and the rotating shaft 48 to rotate. The rotating shaft 48 rotates on the inner wall of the rotating block 49, and the slot 45 of the auxiliary cylinder 43 is sleeved on the surface of the filter screen 44. Then the two rings 41 are respectively sleeved on the surfaces of the main cylinder 42 and the auxiliary cylinder 43. At the same time, part of the structure of the ring 41 will be inserted into the inner wall of the limiting groove 46, and then the ring 41 is fitted to the conduit 3, and then the bolt is rotated to the inner wall of the ring 41 and the conduit 3. By setting the ring 41, the main cylinder 42, the auxiliary cylinder 43 and the filter screen 44, the water body can be filtered, and it can also be installed without The same-sized filter screens 44 filter particles of different sizes layer by layer, and the setting of the entire device can reduce the situation of particle pollution of water bodies; after the ring 41 is fixed, the threaded rod 52 is rotated to allow the threaded rod 52 to rotate on the surface of the frame 51 and the inner wall of the clamping ring 53, and the threaded rod 52 will move the clamping ring 53, and the clamping ring 53 slides on the inner wall of the slide groove 54 of the frame 51, and the clamping ring 53 moves to the bottom end of the ring 41. When the frame 51 is subjected to force, the support rod 55 will support the frame 51. By setting the frame 51, the threaded rod 52 and the clamping ring 53, the entire filtering device 4 can be assisted in supporting, thereby reducing the gravity on the conduit 3. At the same time, the support rod 55 can assist the frame 51 in supporting the filtering device 4.
[0028] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0029] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.
Claims
1. A high-reliability semiconductor device processing device, comprising a body (1) and a filtering device (4), wherein a touch panel (2) is fixedly connected to a side wall of the body (1), and a conduit (3) is fixedly connected to a side wall of the body (1); characterized in that: A filtering device (4) is provided on the surface of the conduit (3), and the filtering device (4) comprises two sleeves (41), a main tube (42) and a secondary tube (43). The two sleeves (41) are located directly below the conduit (3), and the two sleeves (41) are respectively sleeved on the surface of the main tube (42) and the secondary tube (43). A plurality of filter screens (44) are inserted into the inner walls of the main tube (42) and the secondary tube (43).
2. The high reliability semiconductor device processing equipment according to claim 1, characterized in that: The inner wall of the collar (41) and the conduit (3) are threadedly connected with a plurality of bolts, the inner surfaces of the main tube (42) and the auxiliary tube (43) are provided with a plurality of slots (45), and the filter screen (44) is inserted into the inner walls of the slots (45) of the main tube (42) and the auxiliary tube (43).
3. The high reliability semiconductor device processing equipment according to claim 1, characterized in that: The surfaces of the main tube (42) and the auxiliary tube (43) are both provided with limiting grooves (46), the two sleeve rings (41) are respectively inserted into the inner walls of the limiting grooves (46) of the main tube (42) and the auxiliary tube (43), and the surface of the auxiliary tube (43) is fixedly connected with two connection blocks (47).
4. The high reliability semiconductor device processing equipment according to claim 3, characterized in that: The surfaces of the two connection blocks (47) are fixedly connected with a rotating shaft (48), the surface of the main cylinder (42) is fixedly connected with a rotating block (49), and the inner wall of the rotating block (49) is rotatably connected to the surface of the rotating shaft (48).
5. The high reliability semiconductor device processing equipment according to claim 1, characterized in that: The side wall of the machine body (1) is provided with a supporting device (5), and the supporting device (5) comprises a frame (51). The side wall of the frame (51) is fixedly connected to the side wall of the machine body (1). A threaded rod (52) is rotatably connected to the surface of the frame (51). The surface of the threaded rod (52) is provided with two sections of opposite thread lines. The surface of the threaded rod (52) is threadedly connected with two clamping rings (53). The two clamping rings (53) are located at the bottom end of the collar (41).
6. The high reliability semiconductor device processing equipment according to claim 5, characterized in that: A sliding groove (54) is provided on the surface of the frame (51); the inner wall of the sliding groove (54) of the frame (51) is slidably connected to the surface of the clamping ring (53); and two support rods (55) are fixedly connected to the bottom end of the frame (51); and the support rods (55) are located on the side wall of the machine body (1).