Waste gas treatment equipment for manufacturing integrated circuit chip

Abstract

The utility model discloses waste gas treatment equipment for manufacturing integrated circuit chips, which comprises a waste gas treatment equipment body, an air inlet is arranged on the left side of the waste gas treatment equipment body, waste gas needing to be treated is firstly connected with the air inlet, and then the waste gas treatment equipment body is started to treat the waste gas. When the filter plate is replaced, the waste gas treatment equipment body is stopped, waste gas needing to be treated is disconnected from the air inlet, then a limiting block is rotated outwards through a round rod, and the filter plate is taken out and replaced through a handle; the waste gas treatment equipment body is closed at the first time, the effect of being convenient to replace is achieved, the waste gas treatment equipment for integrated circuit chip manufacturing has the advantage of being convenient to replace, and meanwhile, the problem that the next-time use is affected during disassembly due to the fact that screws are used for fixed connection is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuit chips, in particular to waste gas treatment equipment for integrated circuit chip manufacturing. Background Art

[0002] For the waste gas treatment equipment of integrated circuit chips, it is also necessary to pay attention to the replacement of its filter plate. Since various waste gases may be generated during the production process of integrated circuit chips, the filter plates in the waste gas treatment equipment will gradually accumulate pollutants over time, resulting in a decrease in its filtering effect. Therefore, regular inspection and replacement of filter plates are key steps to ensure the effective operation of waste gas treatment equipment. The specific replacement cycle should be considered comprehensively based on various factors such as the operating status of the equipment, the characteristics of the waste gas, the material and design of the filter plate, etc. The replacement of the filter plate not only affects the efficiency of waste gas treatment, but is also directly related to the cleanliness of the production environment and the health of employees. Therefore, it is recommended to keep in close contact with the equipment manufacturer or professional maintenance team, and replace the filter plate according to their suggestions and actual operating conditions. In addition, in addition to the replacement of the filter plate, the overall maintenance and maintenance of the waste gas treatment equipment is also very important. Regular cleaning of the equipment, checking the operating status of other components, and repairing and replacing as needed are all key to ensuring the long-term and stable operation of the waste gas treatment equipment.

[0003] When manufacturing integrated circuit chips, waste gas treatment equipment is needed. The patent publication number is CN206198910U. The utility model discloses a waste gas treatment equipment, including an air inlet, a spray device, a dehumidification device, an adsorption device, an air outlet and several pipes. The air inlet is connected to the spray device through the pipe, the dehumidification device is located between the spray device and the adsorption device, and the adsorption device is connected to the air outlet. The spray device of the waste gas treatment equipment of the utility model sprays the waste gas to remove dust and soluble harmful substances in the waste gas. The dehumidification device cools and refluxes the water vapor and organic waste gas with a low boiling point in the waste gas. The adsorption device uses activated carbon to purify the waste gas.

[0004] The above-mentioned prior art solutions have the following defects: after long-term use, the surface of the filter plate of the existing exhaust gas treatment equipment absorbs a large amount of particles or debris, and the filter plate needs to be replaced. Generally, screws are used to fix the connection, which will affect the next use when disassembled. Utility Model Content

[0005] In order to solve the problems raised in the above-mentioned background technology, the purpose of the utility model is to provide an exhaust gas treatment equipment for integrated circuit chip manufacturing, which has the advantage of easy replacement and solves the problem that after long-term use, the surface of the filter plate of the existing exhaust gas treatment equipment absorbs a large amount of particles or debris, and the filter plate needs to be replaced. It is generally fixed with screws, which will affect the next use when disassembled.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an exhaust gas treatment device for integrated circuit chip manufacturing, comprising an exhaust gas treatment device body, an air inlet is opened on the left side of the exhaust gas treatment device body, a limiting structure is arranged inside the air inlet, legs are fixedly connected on all sides of the bottom of the exhaust gas treatment device body, a controller is fixedly connected on the right side of the front of the exhaust gas treatment device body, an air outlet is opened on the right side of the exhaust gas treatment device body, the limiting structure comprises a filter plate, the filter plate is located inside the air inlet, round rods are fixedly connected on all sides of the left side of the air inlet, limiting blocks are sleeved on the surface of the round rods, a shell is fixedly connected on the left side of the filter plate, and a handle is fixedly connected to the inner side of the inner wall of the shell.

[0007] As a preferred embodiment of the present invention, a ventilation hole is provided at the bottom of the front side of the exhaust gas treatment device body, and a dustproof net is fixedly connected to the interior of the ventilation hole.

[0008] As a preferred embodiment of the present invention, a connection block is fixedly connected to the top of the left side of the front side of the exhaust gas treatment equipment body, and an alarm light is fixedly connected to the front side of the connection block.

[0009] As a preferred embodiment of the present invention, a box body is fixedly connected to the left side of the front face of the exhaust gas treatment device body, and a cover plate is movably connected to the left side of the front face of the box body via a hinge.

[0010] As a preferred embodiment of the present invention, an emergency stop button is provided on the left side of the front side of the exhaust gas treatment equipment body, and the emergency stop button is located at the bottom of the alarm light.

[0011] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0012] 1. The utility model connects the exhaust gas to be treated with the air inlet first, and then starts the exhaust gas treatment device body to treat the exhaust gas. When replacing the filter plate, the exhaust gas treatment device body is stopped to disconnect the exhaust gas to be treated from the air inlet, and then the limit block is rotated outward by the round rod, and the filter plate can be taken out and replaced by the handle. Through the setting of the alarm light and the emergency stop button, the exhaust gas treatment device body can be closed at the first time when the exhaust gas treatment device body fails, thereby achieving the effect of easy replacement. The exhaust gas treatment device for integrated circuit chip manufacturing has the advantage of easy replacement, improves the stability of the exhaust gas treatment device body, and avoids the problem of fixed connection with screws, which will affect the next use during disassembly.

[0013] 2. The utility model provides a limiting structure, which can facilitate users to replace the filter plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a three-dimensional diagram of the main body of the waste gas treatment equipment of the utility model structure;

[0015] Figure 2 This is the air outlet diagram of the utility model structure;

[0016] Figure 3 It is an enlarged view of point A in the structure 1 of the utility model.

[0017] In the figure: 1. Exhaust gas treatment equipment body; 2. Air inlet; 3. Limiting structure; 301. Filter plate; 302. Round rod; 303. Limiting block; 304. Shell; 305. Handle; 4. Leg; 5. Controller; 6. Air outlet; 7. Ventilation hole; 8. Dust net; 9. Connecting block; 10. Warning light; 11. Box body; 12. Cover plate; 13. Emergency stop button. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] like Figures 1 to 3As shown, the utility model provides an exhaust gas treatment device for integrated circuit chip manufacturing, including an exhaust gas treatment device body 1, an air inlet 2 is opened on the left side of the exhaust gas treatment device body 1, a limiting structure 3 is arranged inside the air inlet 2, legs 4 are fixedly connected to the four sides of the bottom of the exhaust gas treatment device body 1, a controller 5 is fixedly connected to the right side of the front of the exhaust gas treatment device body 1, an air outlet 6 is opened on the right side of the exhaust gas treatment device body 1, the limiting structure 3 includes a filter plate 301, the filter plate 301 is located inside the air inlet 2, a round rod 302 is fixedly connected to the four sides of the left side of the air inlet 2, a limiting block 303 is sleeved on the surface of the round rod 302, a shell 304 is fixedly connected to the left side of the filter plate 301, and a handle 305 is fixedly connected to the inner side of the inner wall of the shell 304.

[0020] refer to Figure 1 A ventilation hole 7 is provided at the bottom of the front side of the exhaust gas treatment device body 1, and a dustproof net 8 is fixedly connected to the inside of the ventilation hole 7.

[0021] As a technical optimization solution of the present invention, the provision of the ventilation holes 7 and the dustproof net 8 can facilitate air to enter the interior of the exhaust gas treatment device body 1, thereby ensuring smooth operation of the exhaust gas treatment device body 1.

[0022] refer to Figure 1 A connection block 9 is fixedly connected to the top of the left side of the front of the exhaust gas treatment equipment body 1, and an alarm light 10 is fixedly connected to the front of the connection block 9.

[0023] As a technical optimization solution of the utility model, by setting the connecting block 9 and the alarm light 10, an alarm can be issued immediately when a failure occurs in the exhaust gas treatment device body 1, and the exhaust gas treatment device body 1 can be stopped in conjunction with the emergency stop button 13.

[0024] refer to Figure 1 A box body 11 is fixedly connected to the left side of the front of the exhaust gas treatment equipment body 1, and a cover plate 12 is movably connected to the left side of the front of the box body 11 through a hinge.

[0025] As a technical optimization solution of the present invention, the emergency stop button 13 can be protected by the arrangement of the box body 11 and the cover plate 12 to prevent accidental contact by non-staff members.

[0026] refer to Figure 3 An emergency stop button 13 is provided on the left side of the front of the exhaust gas treatment equipment body 1 , and the emergency stop button 13 is located at the bottom of the warning light 10 .

[0027] As a technical optimization solution of the present invention, by setting the emergency stop button 13, it is possible to cooperate with the alarm light 10 to issue an alarm immediately when a failure occurs in the exhaust gas treatment device body 1.

[0028] The working principle and use process of the utility model are as follows: when in use, first connect the exhaust gas to be treated with the air inlet 2, then start the exhaust gas treatment device body 1 to treat the exhaust gas, and when replacing the filter plate 301, stop the exhaust gas treatment device body 1 to disconnect the exhaust gas to be treated from the air inlet 2, and then rotate the limit block 303 outward through the round rod 302, and take out the filter plate 301 through the handle 305 for replacement. By setting the alarm light 10 and the emergency stop button 13, the exhaust gas treatment device body 1 can be closed at the first time when a failure occurs in the exhaust gas treatment device body 1, thereby achieving the effect of easy replacement.

[0029] To sum up: the exhaust gas treatment equipment for integrated circuit chip manufacturing, through the exhaust gas treatment equipment body 1, air inlet 2, limiting structure 3, filter plate 301, round rod 302, limiting block 303, shell 304, handle 305, support leg 4, controller 5 and air outlet 6, solves the problem that after long-term use of existing exhaust gas treatment equipment, the surface of the filter plate absorbs a large amount of particles or debris, and the filter plate needs to be replaced. Generally, screws are used for fixing and connection, which will affect the next use when disassembled.

[0030] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0031] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An exhaust gas treatment device for integrated circuit chip manufacturing, comprising an exhaust gas treatment device body (1), characterized in that: An air inlet (2) is provided on the left side of the exhaust gas treatment device body (1), a limiting structure (3) is arranged inside the air inlet (2), legs (4) are fixedly connected to the four sides of the bottom of the exhaust gas treatment device body (1), a controller (5) is fixedly connected to the right side of the front of the exhaust gas treatment device body (1), an air outlet (6) is provided on the right side of the exhaust gas treatment device body (1), the limiting structure (3) comprises a filter plate (301), the filter plate (301) is located inside the air inlet (2), round rods (302) are fixedly connected to the four sides of the left side of the air inlet (2), a limiting block (303) is sleeved on the surface of the round rod (302), a shell (304) is fixedly connected to the left side of the filter plate (301), and a handle (305) is fixedly connected to the inner side of the inner wall of the shell (304).

2. The waste gas treatment equipment for integrated circuit chip manufacturing according to claim 1 is characterized in that: A ventilation hole (7) is provided at the bottom of the front side of the exhaust gas treatment device body (1), and a dustproof net (8) is fixedly connected to the inside of the ventilation hole (7).

3. The waste gas treatment equipment for integrated circuit chip manufacturing according to claim 1, characterized in that: A connection block (9) is fixedly connected to the top of the left side of the front of the exhaust gas treatment equipment body (1), and an alarm light (10) is fixedly connected to the front of the connection block (9).

4. The waste gas treatment equipment for integrated circuit chip manufacturing according to claim 1, characterized in that: A box body (11) is fixedly connected to the left side of the front face of the exhaust gas treatment equipment body (1), and a cover plate (12) is movably connected to the left side of the front face of the box body (11) via a hinge.

5. The waste gas treatment equipment for integrated circuit chip manufacturing according to claim 1, characterized in that: An emergency stop button (13) is provided on the left side of the front of the exhaust gas treatment equipment body (1), and the emergency stop button (13) is located at the bottom of the warning light (10).

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