High-precision plane alignment platform module

Abstract

The utility model relates to a high-precision plane alignment platform module in the technical field of alignment platforms, which comprises an alignment platform, a Y-axis movable block and an X-axis movable block, a reversing device comprises reversers and a reversing steel ball, the reversers are respectively mounted at two ends of the reversing steel ball, and reading heads are mounted on the surfaces of the alignment platform, the Y-axis movable block and the X-axis movable block. One end of the reading head is provided with a magnetism isolating plate used for preventing a magnetic field from leaking, a rotor is arranged in the alignment table, a Y-axis steel rail and an X-axis steel rail which are matched with the reverse steel balls for use are arranged in the Y-axis movable block and the X-axis movable block respectively, and the Y-axis steel rail and the X-axis steel rail are both of an embedded structure; the alignment table is used for providing a basic platform and is matched with an external CCD semiconductor device to convert an optical image of a workpiece on the surface of the alignment table into a digital signal, and a coordinate system number consistent with that of the workpiece is formed on a computer, so that the alignment process is completed, the effect of synchronous real-time positioning is achieved, and the effect of deviation correction is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of alignment platforms, in particular to a high-precision plane alignment platform module. Background Art

[0002] As an emerging intelligent drive technology, the high-precision plane alignment platform module has received more and more attention and application at home and abroad. It has been applied in many fields, especially in industrial manufacturing and other fields. It has the characteristics of high efficiency, precision and reliability, and can achieve high-speed and high-accuracy drive control. As a new type of motor equipment, the high-precision plane alignment platform module is widely used in various fields. Unlike traditional motor equipment, many new technical means are used in design and manufacturing, which makes it have better performance than traditional motors in terms of power, efficiency, precision, etc. It can not only improve the quality and production volume of goods, but also has very important practical significance for ensuring improved labor efficiency, saving raw materials and reducing product costs. The relatively high production cost of the high-precision plane alignment platform module limits its application and promotion in some fields.

[0003] However, the plane alignment platform adopted in the current prior art still retains the traditional slide rail slider mode. The structure of the slide rail slider occupies a large internal space, which is not conducive to simplifying the overall footprint of the plane alignment platform. In addition, in the linear motion mode of the slide rail slider, the matching accuracy is relatively high. When an error occurs in a part between the two, it may cause overall motion deviation, thereby causing the alignment accuracy of the alignment platform to decrease. When it is used, it needs to be further processed and improved, which increases the process and reduces work efficiency. Therefore, optimizing the internal structure and achieving standardization are conducive to solving the current problems and deficiencies, and have an important role in promoting market development. To this end, the inventors have proposed a high-precision plane alignment platform module to solve the above-mentioned technical problems. Utility Model Content

[0004] The utility model aims to overcome the above-mentioned shortcomings and provide a technical solution to the above-mentioned problems.

[0005] A high-precision plane alignment platform module, comprising an alignment platform, a Y-axis movable block and an X-axis movable block, wherein the Y-axis movable block and the X-axis movable block are respectively provided with a Y-axis movable groove and an X-axis movable groove, wherein the Y-axis movable groove and the X-axis movable groove are both provided with a linear motor assembly for assisting the Y-axis movable block and the X-axis movable block to move, and the linear motor assembly assists the Y-axis movable block and the X-axis movable block to move through a reverse device;

[0006] The reversing device includes a reversing device and a reversing steel ball. The reversing devices are respectively installed at both ends of the reversing steel ball. The surfaces of the alignment table, the Y-axis movable block and the X-axis movable block are all installed with reading heads. A magnetic isolation plate for preventing magnetic field leakage is installed at one end of the reading head. The magnetic isolation plate uses magnetic isolation to ensure the accuracy of the reading head measurement. A rotor is arranged inside the alignment table. The Y-axis movable block and the X-axis movable block are respectively provided with a Y-axis steel rail and an X-axis steel rail used in pair with the reversing steel ball. Both the Y-axis steel rail and the X-axis steel rail are embedded structures.

[0007] The alignment table provides a basic platform for supporting the module and placing the workpiece, and assisting in positioning the workpiece. The rotor is located inside the alignment table and is used in conjunction with the Y-axis movable block and the X-axis movable block. The rotor provides rotational power through the DD motor. When the workpiece is placed on the surface of the alignment table, the alignment table drives the workpiece to move through the rotor to adjust the position of the workpiece. At the same time, the Y-axis movable block and the X-axis movable block are moved to change the placement of the workpiece. By moving the adjusted XY-axis coordinates and cooperating with the external CCD semiconductor device, the optical image of the workpiece on the surface of the alignment table is converted into a digital signal, and a coordinate coefficient consistent with the workpiece is formed on the computer, thereby completing the alignment process, achieving the effect of synchronous real-time positioning, and achieving the effect of deviation correction;

[0008] The use of embedded Y-axis rails and X-axis rails, combined with a designed reverser to form a linear motion module, replaces the traditional guide rail slider, compresses the space inside the equipment, reduces the footprint, and improves positioning accuracy. The embedded structure is more stable, thereby reducing the vibration frequency generated when the Y-axis movable block and the X-axis movable block move, further improving positioning accuracy and maintaining motion accuracy.

[0009] Furthermore, the alignment table, the Y-axis movable block and the X-axis movable block are independent structures, and the alignment table, the Y-axis movable block and the X-axis movable block can be moved along the XY axis separately. This structure can enhance flexibility. The independent structure allows the alignment table, the Y-axis movable block and the X-axis movable block to move independently, thereby enhancing the flexibility of use. In the case of a single adjustment, only the position of a certain movable block needs to be adjusted to meet the needs, which simplifies the operation process.

[0010] Furthermore, the linear motor assembly includes a Y-axis linear motor and a connecting wire, one end of the Y-axis linear motor is electrically connected to the connecting wire, the Y-axis linear motor is located inside the Y-axis movable groove, one end of the connecting wire extends beyond the surface of the Y-axis movable groove and the Y-axis movable block, and one end of the connecting wire is used to connect an external power supply.

[0011] Furthermore, a Y-axis magnet rail is provided at one end of the Y-axis linear motor, the Y-axis magnet rail is a mover, the Y-axis magnet rail is linearly arranged at one end of the Y-axis linear motor, the spacing between two adjacent Y-axis magnet rails is equidistantly arranged, one end of the Y-axis magnet rail is connected to a magnet rail mounting plate, and two ends of the magnet rail mounting plate are respectively abutted against one end of the Y-axis magnet rail and one end of the rotor;

[0012] When the connecting line is energized, the Y-axis linear motor generates a traveling wave magnetic field, and generates a driving force under the action of the traveling wave magnetic field and the secondary permanent magnet, thereby realizing the linear motion of the moving parts. At the same time, an alternating magnetic field is generated between the magnetic field and the Y-axis magnet rail, so that the Y-axis magnet rail replaces the traditional linear motor mover to perform a reciprocating motion, thereby driving the Y-axis movable block to move along the Y-axis. The Y-axis movable block moves while driving the rotor and the alignment table, so that the alignment table can adjust the workpiece placed on its plane, so that the alignment table can perform the alignment process on the workpiece.

[0013] When the Y-axis movable block moves, the reverse steel ball slides along the inner surface of the Y-axis rail, which assists the movement of the Y-axis movable block and improves the activity stability and accuracy of the Y-axis movable block. The reverse device is used to facilitate the reversal of the reverse steel ball, thereby achieving a cyclic operation effect, so that the reciprocating motion process of the Y-axis movable block is coordinated with the circulation of the reverse steel ball, and the Y-axis movable block is moved along the Y-axis.

[0014] Furthermore, the linear motor assembly includes an X-axis linear motor and a power cord, one end of the X-axis linear motor is electrically connected to the power cord, the X-axis linear motor is located inside the X-axis movable groove, one end of the power cord extends beyond the surface of the X-axis movable groove and the X-axis movable block, and one end of the power cord is used to connect an external power supply.

[0015] Furthermore, an X-axis magnet rail is provided at one end of the X-axis linear motor, the X-axis magnet rail is a mover, the X-axis magnet rail is linearly arranged at one end of the X-axis linear motor, the spacing between two adjacent X-axis magnet rails is equidistantly arranged, a magnetic rail connecting plate is installed at one end of the X-axis magnet rail, the two ends of the magnetic rail connecting plate are respectively abutted against one end of the X-axis magnet rail and one end of the X-axis movable block, when the power cord is energized, the X-axis linear motor generates a traveling wave magnetic field, and a driving force is generated under the action of the traveling wave magnetic field and the secondary permanent magnet, thereby realizing the linear motion of the moving part, and at the same time, an alternating magnetic field is generated between the magnetic field and the X-axis magnet rail, so that the X-axis magnet rail replaces the traditional linear motor mover to perform a reciprocating motion, thereby driving the X-axis movable block to move along the X-axis;

[0016] When the X-axis movable block moves, the reverse steel ball slides along the inner surface of the X-axis rail, which assists the movement of the X-axis movable block and improves the activity stability and accuracy of the X-axis movable block. The reverse device is used to facilitate the reversal of the reverse steel ball, thereby achieving a cyclic operation effect, so that the reciprocating motion process of the X-axis movable block is coordinated with the circulation of the reverse steel ball, and the X-axis movable block is moved along the X-axis.

[0017] Furthermore, an angular contact bearing is installed inside the rotor, the rotor moves in a circular motion, the angular contact bearing has a circumferential sealed wave-shaped structure, the angular contact bearing is used to support the rotor, one end of the alignment platform abuts against the surface of the rotor, and the alignment platform is circular;

[0018] The angular contact bearing adopts a circumferential sealed wave-shaped structure, which can effectively carry the rotor and enable it to perform circular motion. The alignment table is circular and abuts against the surface of the rotor, which can better align and position the rotor and ensure the stability and accuracy of the rotor during movement. In addition, the circular structure of the alignment table can also increase the contact area with the rotor surface, thereby reducing the possibility of the alignment table detaching from one end of the rotor, while making it easier for the surface of the alignment table to carry and place the workpiece.

[0019] Furthermore, the outside of the reverse steel ball is connected with a steel ball protection plate for limiting the position of the reverse steel ball, the two ends of the steel ball protection plate are respectively abutted against the surface of the reverse device, and the surface of the steel ball protection plate is connected with a steel ball truss, which is used to protect the steel ball protection plate and the reverse steel ball;

[0020] The structure in which both ends of the steel ball protection plate abut against the surface of the reverser can accurately define the position of the reverse steel ball, ensuring that the reverse steel ball maintains linear motion during use, thereby improving the stability and accuracy of the reverse steel ball movement.

[0021] Furthermore, a dustproof structure is provided between the alignment table and the Y-axis movable block. The dustproof structure is in a flat-head sawtooth shape. The dustproof structure can also be in a maze shape. The protruding structure formed between the two adjacent structures of the alignment table and the Y-axis movable block can reduce dust from entering the interior of the angular contact bearing, thereby affecting the movement of the rotor and causing the alignment table to reduce its movement accuracy.

[0022] This design can improve the stability and service life of the alignment table. Since dust and debris are often one of the main causes of equipment failure and maintenance, by reducing the entry of dust into the key moving parts of the alignment table, wear and unnecessary friction can be reduced, thereby extending the service life of the alignment table.

[0023] Furthermore, the surfaces of the Y-axis movable block and the X-axis movable block are both provided with a moving rod and an anti-collision rubber block, the anti-collision rubber blocks are located at both ends of the moving rod, and the moving rod moves synchronously with the Y-axis movable block or the X-axis movable block;

[0024] The moving rod can move in the guide hole or guide groove of the Y-axis movable block or the X-axis movable block, and can assist the Y-axis movable block or the X-axis movable block to move accurately while preventing overtravel. The anti-collision rubber block can play a role of buffering and shock absorption, absorbing the vibration and impact generated during the mechanical movement, reducing the wear of the Y-axis movable block and the X-axis movable block, and improving the stability and service life during movement. In addition, the moving stroke of the moving rod is limited by the anti-collision rubber block, reducing the precision error within the moving stroke.

[0025] On the other hand, the anti-collision rubber block can reduce the noise generated during the operation of the Y-axis movable block or the X-axis movable block, providing a good working environment. At the same time, the anti-collision rubber block can prevent the moving rod from colliding hard with surrounding objects, prevent flying injuries and damage to products caused by improper operation, and reduce damage to surrounding objects.

[0026] Compared with the prior art, the beneficial effects of the utility model are:

[0027] 1. The alignment table is used to provide a basic platform to support the module and place the workpiece, and assist in positioning the workpiece. The rotor is located inside the alignment table and is used in conjunction with the Y-axis movable block and the X-axis movable block. The rotor provides rotational power through the DD motor. When the workpiece is placed on the surface of the alignment table, the alignment table drives the workpiece to move through the rotor to adjust the position of the workpiece. At the same time, the Y-axis movable block and the X-axis movable block are moved to change the placement of the workpiece. By moving the adjusted XY-axis coordinates and cooperating with the external CCD semiconductor device, the optical image of the workpiece on the surface of the alignment table is converted into a digital signal, and a coordinate coefficient consistent with the workpiece is formed on the computer, thereby completing the alignment process, achieving the effect of synchronous real-time positioning, and achieving the effect of correction;

[0028] 2. Adopt embedded Y-axis rail and X-axis rail, and combine linear motion module with designed reverser to replace traditional guide rail slider, which compresses the space inside the equipment, reduces the floor space, and improves positioning accuracy;

[0029] 3. The Y-axis rail and X-axis rail with embedded structure are used together with reverse steel balls to make their activities more stable, thereby reducing the vibration frequency generated when the Y-axis movable block and the X-axis movable block move, further improving the positioning accuracy and maintaining the motion accuracy. Since the reverse steel ball and the Y-axis rail or the X-axis rail are in local point contact, the overall error in the overall linear accuracy is reduced. When an error occurs in the local accuracy, a single reverse steel ball can be replaced or repaired, which reduces the maintenance cost and simplifies the maintenance time and structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is the main view of a high-precision plane alignment platform module;

[0031] Figure 2 It is an axial view of a high-precision plane alignment platform module;

[0032] Figure 3 It is a stereogram of a high-precision plane alignment platform module;

[0033] Figure 4 It is another stereogram of a high-precision plane alignment platform module;

[0034] Figure 5 This is an internal structure diagram of a high-precision plane alignment platform module;

[0035] Figure 6 This is another internal structure diagram of a high-precision plane alignment platform module;

[0036] Figure 7 It is a stereogram of an angular contact bearing in a high-precision plane alignment platform module;

[0037] Figure 8 It is a three-dimensional diagram of the Y-axis linear motor assembly in a high-precision plane alignment platform module;

[0038] Fig. 9 It is another stereoscopic view of the Y-axis linear motor assembly in a high-precision plane alignment platform module;

[0039] Fig.10 It is a stereoscopic diagram of the X-axis linear motor assembly in a high-precision plane alignment platform module;

[0040] Fig.11 It is another stereoscopic view of the X-axis linear motor assembly in a high-precision plane alignment platform module;

[0041] Fig.12 It is an exploded view of a high-precision plane alignment platform module;

[0042] Fig.13It is a three-dimensional cross-sectional view of a high-precision plane alignment platform module;

[0043] Fig.14 It is a main cross-sectional view of a high-precision plane alignment platform module;

[0044] Fig.15 yes Fig.14 A is a partial enlarged schematic diagram;

[0045] In the figure: alignment table-1, Y-axis movable block-2, X-axis movable block-3, Y-axis movable slot-4, X-axis movable slot-5, reverser-6, reverse steel ball-7, reading head-8, magnetic isolation plate-9, rotor-10, Y-axis steel rail-11, X-axis steel rail-12, Y-axis linear motor-13, connecting line-14, Y-axis magnet rail-15, magnet rail mounting plate-16, X-axis linear motor-17, power line-18, X-axis magnet rail-19, magnet rail connecting plate-20, angular contact bearing-21, steel ball protection plate-22, steel ball truss-23, dustproof structure-24, moving rod-25, anti-collision rubber block-26. DETAILED DESCRIPTION

[0046] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0047] For this example, please refer to Figure 1-Figure 15 A high-precision plane alignment platform module specifically implemented therein comprises an alignment platform 1, a Y-axis movable block 2 and an X-axis movable block 3, wherein the Y-axis movable block 2 and the X-axis movable block 3 are respectively provided with a Y-axis movable slot 4 and an X-axis movable slot 5, wherein the Y-axis movable slot 4 and the X-axis movable slot 5 are both provided with a linear motor assembly for assisting the Y-axis movable block 2 and the X-axis movable block 3 to move, and the linear motor assembly assists the Y-axis movable block 2 and the X-axis movable block 3 to move through a reverse device;

[0048] The reversing device includes a reverser 6 and a reverse steel ball 7. The reverser 6 is respectively installed at both ends of the reverse steel ball 7. The surfaces of the alignment platform 1, the Y-axis movable block 2 and the X-axis movable block 3 are all installed with a reading head 8. A magnetic isolation plate 9 for preventing magnetic field leakage is installed at one end of the reading head 8. The magnetic isolation plate 9 uses a magnetic isolation method to ensure the accuracy of the reading head 8 measurement, and further prevents the strong magnetism of the motor and the ruler from affecting each other, thereby affecting the accuracy. A rotor 10 is arranged inside the alignment platform 1. The Y-axis movable block 2 and the X-axis movable block 3 are respectively provided with a Y-axis rail 11 and an X-axis rail 12 used in pair with the reverse steel ball 7. The Y-axis rail 11 and the X-axis rail 12 are both embedded structures;

[0049] The alignment table 1 provides a basic platform for supporting the module and placing the workpiece, and assisting the workpiece in positioning. The rotor 10 is located inside the alignment table 1 and is used in conjunction with the Y-axis movable block 2 and the X-axis movable block 3. The rotor 10 provides rotational power through the DD motor. When the workpiece is placed on the surface of the alignment table 1, the alignment table 1 drives the workpiece to move through the rotor 10, so that the position of the workpiece is adjusted. At the same time, the placement position of the workpiece is changed by coordinating the movement of the Y-axis movable block 2 and the X-axis movable block 3. By moving the adjusted XY-axis coordinates and coordinating with the external CCD semiconductor device, the optical image of the workpiece on the surface of the alignment table 1 is converted into a digital signal, and a coordinate coefficient consistent with the workpiece is formed on the computer, thereby completing the alignment process, achieving the effect of synchronous real-time positioning, and achieving the effect of deviation correction. Another alternative is to use finite element analysis to simulate the mechanical strength, and then the finished product is precision tested by a laser interferometer. The high-precision range value is: repeatability ≤0.5um, external magnetic leakage is less than 10GS;

[0050] The Y-axis steel rail 11 and the X-axis steel rail 12 with an embedded structure are combined with a designed reverser 6 to form a linear motion module, replacing the traditional guide rail slider, which compresses the space inside the equipment, reduces the footprint, and improves the positioning accuracy. The embedded structure is more stable, thereby reducing the vibration frequency generated when the Y-axis movable block 2 and the X-axis movable block 3 move, further improving the positioning accuracy and maintaining the motion accuracy.

[0051] The alignment table 1, the Y-axis movable block 2 and the X-axis movable block 3 are independent structures, and the alignment table 1, the Y-axis movable block 2 and the X-axis movable block 3 can be moved along the XY axis separately; this structure can enhance flexibility, and the independent structure enables the alignment table 1, the Y-axis movable block 2 and the X-axis movable block 3 to be moved independently, thereby enhancing the flexibility of use. In the case of a single adjustment, only the position of a certain movable block needs to be adjusted to meet the needs, which simplifies the operation process.

[0052] The linear motor assembly includes a Y-axis linear motor 13 and a connecting wire 14, one end of the Y-axis linear motor 13 is electrically connected to the connecting wire 14, the Y-axis linear motor 13 is located inside the Y-axis movable groove 4, one end of the connecting wire 14 extends beyond the surface of the Y-axis movable groove 4 and the Y-axis movable block 2, and one end of the connecting wire 14 is used to connect an external power supply.

[0053] One end of the Y-axis linear motor 13 is provided with a Y-axis magnet rail 15, the Y-axis magnet rail 15 is a mover, the Y-axis magnet rail 15 is linearly arranged at one end of the Y-axis linear motor 13, the spacing between two adjacent Y-axis magnet rails 15 is equidistant, one end of the Y-axis magnet rail 15 is connected to a magnet rail mounting plate 16, and two ends of the magnet rail mounting plate 16 are respectively abutted against one end of the Y-axis magnet rail 15 and one end of the rotor 10;

[0054] When the connecting wire 14 is energized, the Y-axis linear motor 13 generates a traveling wave magnetic field, and generates a driving force under the action of the traveling wave magnetic field and the secondary permanent magnet, thereby realizing the linear motion of the moving part. At the same time, an alternating magnetic field is generated between the magnetic field and the Y-axis magnet rail 15, so that the Y-axis magnet rail 15 replaces the traditional linear motor mover to perform a reciprocating motion, thereby driving the Y-axis movable block 2 to move along the Y-axis. When the Y-axis movable block 2 moves, it drives the rotor 10 and the alignment table 1, so that the alignment table 1 can adjust the workpiece placed on its plane, so that the alignment table 1 can perform the alignment process of the workpiece;

[0055] When the Y-axis movable block 2 moves, the reverse steel ball 7 slides along the inner surface of the Y-axis rail 11, which assists the movement of the Y-axis movable block 2 and improves the activity stability and accuracy of the Y-axis movable block 2. The reverse device 6 is used to facilitate the reversal of the reverse steel ball 7, thereby achieving a cyclic operation effect, so that the reciprocating motion process of the Y-axis movable block 2 is coordinated with the circulation of the reverse steel ball 7, and the Y-axis movable block 2 is moved along the Y-axis.

[0056] The linear motor assembly includes an X-axis linear motor 17 and a power cord 18, one end of the X-axis linear motor 17 is electrically connected to the power cord 18, the X-axis linear motor 17 is located inside the X-axis movable groove 5, one end of the power cord 18 extends beyond the surface of the X-axis movable groove 5 and the X-axis movable block 3, and one end of the power cord 18 is used to connect an external power supply.

[0057] An X-axis magnet rail 19 is provided at one end of the X-axis linear motor 17. The X-axis magnet rail 19 is a mover. The X-axis magnet rail 19 is linearly arranged at one end of the X-axis linear motor 17. The spacing between two adjacent X-axis magnet rails 19 is equidistant. A magnetic rail connecting plate 20 is installed at one end of the X-axis magnet rail 19. The two ends of the magnetic rail connecting plate 20 are respectively abutted against one end of the X-axis magnet rail 19 and one end of the X-axis movable block 3. When the power cord 18 is energized, the X-axis linear motor 17 generates a traveling wave magnetic field, and generates a driving force under the action of the traveling wave magnetic field and the secondary permanent magnet, thereby realizing the linear motion of the moving part. At the same time, an alternating magnetic field is generated between the magnetic field and the X-axis magnet rail 19, so that the X-axis magnet rail 19 replaces the traditional linear motor mover to perform a reciprocating motion, thereby driving the X-axis movable block 3 to move along the X-axis.

[0058] When the X-axis movable block 3 moves, the reverse steel ball 7 slides along the inner surface of the X-axis rail 12, which assists the movement of the X-axis movable block 3 and improves the activity stability and accuracy of the X-axis movable block 3. The reverse device 6 is used to facilitate the reversal of the reverse steel ball 7, thereby achieving a cyclic operation effect, so that the reciprocating motion process of the X-axis movable block 3 is coordinated with the circulation of the reverse steel ball 7, and the X-axis movable block 3 is moved along the X-axis.

[0059] An angular contact bearing 21 is installed inside the rotor 10. The rotor 10 moves in a circular motion. The angular contact bearing 21 has a circumferential sealed wave-shaped structure. The angular contact bearing 21 is used to carry the rotor 10. One end of the alignment platform 1 abuts against the surface of the rotor 10. The alignment platform 1 is circular.

[0060] The angular contact bearing adopts a circumferential sealed wavy structure, which can effectively carry the rotor 10 and enable it to perform circular motion. The alignment table 1 is circular and abuts against the surface of the rotor 10, which can better align and position the rotor 10 and ensure the stability and accuracy of the rotor 10 during the movement. In addition, the alignment table 1 with a circular structure can also increase the contact area with the surface of the rotor 10, thereby reducing the possibility of the alignment table 1 detaching from one end of the rotor 10, and at the same time making it easier for the surface of the alignment table 1 to carry and place the workpiece.

[0061] The outer part of the reverse steel ball 7 is connected with a steel ball protection plate 22 for limiting the position of the reverse steel ball 7. The two ends of the steel ball protection plate 22 are respectively in contact with the surface of the reverser 6. The surface of the steel ball protection plate 22 is connected with a steel ball truss 23. The steel ball truss 23 is used to protect the steel ball protection plate 22 and the reverse steel ball 7.

[0062] The structure in which both ends of the steel ball protection plate 22 abut against the surface of the reverser 6 can accurately define the position of the reverse steel ball 7, ensuring that the reverse steel ball 7 maintains linear motion during use, thereby improving the stability and accuracy of the movement of the reverse steel ball 7.

[0063] A dustproof structure 24 is provided between the alignment platform 1 and the Y-axis movable block 2. The dustproof structure 24 is in a flat sawtooth shape. The dustproof structure 24 can also be in a maze shape, such as Fig.15 As shown, the convex structure formed between the two adjacent structures of the alignment table 1 and the Y-axis movable block 2 reduces dust from entering the interior of the angular contact bearing 21, thereby affecting the movement of the rotor 10 and causing the alignment table 1 to reduce its movement accuracy;

[0064] This design can improve the stability and service life of the alignment table 1, because dust and debris are often one of the main causes of equipment failure and maintenance. By reducing the entry of dust into the key moving parts of the alignment table 1, wear and unnecessary friction can be reduced, thereby extending the service life of the alignment table 1.

[0065] The surfaces of the Y-axis movable block 2 and the X-axis movable block 3 are both provided with a moving rod 25 and an anti-collision rubber block 26. The anti-collision rubber block 26 is located at both ends of the moving rod 25. The moving rod 25 moves synchronously with the Y-axis movable block 2 or the X-axis movable block 3.

[0066] The moving rod 25 can move in the guide hole or guide groove of the Y-axis moving block 2 or the X-axis moving block 3, and can assist the Y-axis moving block 2 or the X-axis moving block 3 to move accurately while preventing overtravel. The anti-collision rubber block 26 can play a role of buffering and shock absorption, absorbing the vibration and impact generated during the mechanical movement, reducing the wear of the Y-axis moving block 2 and the X-axis moving block 3, and improving the stability and service life during movement. In addition, the moving stroke of the moving rod 25 is limited by the anti-collision rubber block 26, reducing the precision error within the moving stroke.

[0067] On the other hand, the anti-collision rubber block 26 can reduce the noise generated during the operation of the Y-axis movable block 2 or the X-axis movable block 3, providing a good working environment. At the same time, the anti-collision rubber block 26 can prevent the moving rod 25 from colliding hard with surrounding objects, prevent the occurrence of flying car injuries and damage to products caused by improper operation, and reduce damage to surrounding objects.

[0068] The key points of the design of the utility model are: the alignment table 1 is used to provide a basic platform for supporting the module and placing the workpiece, and assisting the workpiece in positioning. The rotor 10 is located inside the alignment table 1 and is used in conjunction with the Y-axis movable block 2 and the X-axis movable block 3. The rotor 10 provides rotational power through the DD motor. When the workpiece is placed on the surface of the alignment table 1, the alignment table 1 drives the workpiece to move through the rotor 10, so that the position of the workpiece is adjusted. At the same time, the movement of the Y-axis movable block 2 and the X-axis movable block 3 is coordinated to change the placement position of the workpiece. By moving the adjusted XY-axis coordinates and cooperating with an external CCD semiconductor device, the optical image of the workpiece on the surface of the alignment table 1 is converted into a digital signal, and a coordinate coefficient consistent with the workpiece is formed on the computer, thereby completing the alignment process, achieving the effect of synchronous real-time positioning, and achieving the effect of deviation correction.

[0069] In addition, an embedded Y-axis rail 11 and an X-axis rail 12 are used, and a linear motion module is combined with a designed reverser 6 to replace the traditional guide rail slider, which compresses the space inside the equipment, reduces the footprint, and improves the positioning accuracy; at the same time, the embedded Y-axis rail 11 and the X-axis rail 12 make their activities more stable, thereby reducing the vibration frequency generated when the Y-axis movable block 2 and the X-axis movable block 3 move, further improving the positioning accuracy and maintaining the motion accuracy.

[0070] The above contents are further detailed descriptions of the present invention in combination with specific preferred embodiments, and the specific implementation of the present invention cannot be considered to be limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions or substitutions can be made without departing from the concept of the present invention, which should be regarded as the protection scope of the present invention.

Claims

1. A high-precision plane alignment platform module, comprising an alignment platform, a Y-axis movable block and an X-axis movable block, characterized in that: The Y-axis movable block and the X-axis movable block are respectively provided with a Y-axis movable groove and an X-axis movable groove, and the Y-axis movable groove and the X-axis movable groove are both installed with linear motor assemblies for assisting the Y-axis movable block and the X-axis movable block to move, and the linear motor assemblies assist the Y-axis movable block and the X-axis movable block to move through a reverse device; The reversing device includes a reverser and a reverse steel ball. The reversers are respectively installed at both ends of the reverse steel ball. Reading heads are installed on the surfaces of the alignment table, the Y-axis movable block and the X-axis movable block. A magnetic isolation plate for preventing magnetic field leakage is installed at one end of the reading head. A rotor is arranged inside the alignment table. The Y-axis movable block and the X-axis movable block are respectively provided with Y-axis rails and X-axis rails used in pair with the reverse steel balls. Both the Y-axis rail and the X-axis rail are embedded structures.

2. A high-precision plane alignment platform module according to claim 1, characterized in that: The alignment platform, the Y-axis movable block and the X-axis movable block are independent structures, and the alignment platform, the Y-axis movable block and the X-axis movable block can move along the XY axes separately.

3. The high-precision plane alignment platform module according to claim 1, characterized in that: The linear motor assembly includes a Y-axis linear motor and a connecting wire, one end of the Y-axis linear motor is electrically connected to the connecting wire, the Y-axis linear motor is located inside the Y-axis movable groove, and one end of the connecting wire extends beyond the surface of the Y-axis movable groove and the Y-axis movable block.

4. The high-precision plane alignment platform module according to claim 3, characterized in that: A Y-axis magnet rail is provided at one end of the Y-axis linear motor, and the Y-axis magnet rail is a mover. The Y-axis magnet rail is linearly arranged at one end of the Y-axis linear motor, and the spacing between two adjacent Y-axis magnet rails is equidistant. A magnetic rail mounting plate is connected to one end of the Y-axis magnet rail, and both ends of the magnetic rail mounting plate are respectively abutted against one end of the Y-axis magnet rail and one end of the rotor.

5. The high-precision plane alignment platform module according to claim 1, characterized in that: The linear motor assembly includes an X-axis linear motor and a power cord, one end of the X-axis linear motor is electrically connected to the power cord, the X-axis linear motor is located inside the X-axis movable groove, and one end of the power cord extends beyond the surface of the X-axis movable groove and the X-axis movable block.

6. The high-precision plane alignment platform module according to claim 5, characterized in that: An X-axis magnet rail is provided at one end of the X-axis linear motor, and the X-axis magnet rail is a mover. The X-axis magnet rail is linearly arranged at one end of the X-axis linear motor, and the spacing between two adjacent X-axis magnet rails is equidistant. A magnetic rail connecting plate is installed at one end of the X-axis magnet rail, and the two ends of the magnetic rail connecting plate are respectively abutted against one end of the X-axis magnet rail and one end of the X-axis movable block.

7. A high-precision plane alignment platform module according to any one of claims 1 to 6, characterized in that: An angular contact bearing is installed inside the rotor. The rotor moves in a circular motion. The angular contact bearing has a circumferential sealed wave-shaped structure. The angular contact bearing is used to support the rotor. One end of the alignment platform abuts against the surface of the rotor, and the alignment platform is circular.

8. A high-precision plane alignment platform module according to any one of claims 1 to 6, characterized in that: The outside of the reverse steel ball is connected with a steel ball protection plate for limiting the position of the reverse steel ball. Both ends of the steel ball protection plate are respectively abutted against the surface of the reverser, and the surface of the steel ball protection plate is connected with a steel ball truss.

9. A high-precision plane alignment platform module according to any one of claims 1 to 6, characterized in that: A dustproof structure is provided between the alignment platform and the Y-axis movable block, and the dustproof structure is in a flat-head sawtooth shape.

10. A high-precision plane alignment platform module according to any one of claims 1 to 6, characterized in that: The surfaces of the Y-axis movable block and the X-axis movable block are both provided with moving rods and anti-collision rubber blocks, the anti-collision rubber blocks are located at both ends of the moving rods, and the moving rods move synchronously with the Y-axis movable block or the X-axis movable block.

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