Hoisting tray and deposition furnace

Abstract

The utility model provides a hoisting tray and a deposition furnace, the hoisting tray comprises a hoisting assembly, the hoisting assembly comprises a mounting frame structure and a plurality of supporting structures, the plurality of supporting structures comprise first connecting parts and supporting parts, the plurality of first connecting parts are connected with the mounting frame structure, the plurality of supporting parts are connected with the first connecting parts, and the first connecting parts are connected with the mounting frame structure; the projection width of the supporting part in the vertical direction is greater than that of the first connecting part in the vertical direction; the tray assembly comprises opening structures, the opening structures and the supporting structures are arranged in a one-to-one correspondence mode, and the projection width of the opening structures in the vertical direction is larger than that of the supporting parts in the vertical direction. According to the technical scheme, the problem that in the prior art, when a clamp and a matched material disc are adopted for vapor deposition, the deposition efficiency is low is effectively solved.

Description

Technical Field

[0001] The present application relates to the technical field of hoisting a material tray, and in particular to a hoisting material tray and a deposition furnace. Background Art

[0002] When a deposition furnace performs vapor deposition, the workpiece to be processed is often placed on a tray, and the tray is then placed into the deposition furnace by a hoisting device for vapor deposition.

[0003] Generally, during the process of hoisting the tray, the clamp is rotated by a synchronous belt to clamp the tray at a certain angle, and then the tooling is lifted by a crane. After the tray is placed at the bottom of the furnace, personnel are required to operate the synchronous belt to rotate the clamp, and then the tooling is lifted by the crane.

[0004] In the prior art, the gap between the material tray and the furnace body for the clamp to extend into is large, the airtight phase enhancement effect is poor, the deposition efficiency is low, and the clamp contacts the upper surface of the material tray. The number of workpieces that can be held in the material tray is small, further reducing the processing efficiency, such as CN205222453U. Utility Model Content

[0005] A technical problem to be solved by the present application is that when a fixture and a matching material tray are used for vapor deposition, there is a problem of low deposition efficiency.

[0006] In order to solve the above technical problems, the present application provides a lifting material tray and a deposition furnace.

[0007] A lifting material tray provided according to the present application includes: a lifting component, the lifting component includes a mounting frame structure and multiple supporting structures, the multiple supporting structures include a first connecting part and a supporting part, the multiple first connecting parts are connected to the mounting frame structure, the multiple supporting parts are connected to the first connecting parts, and the projection width of the supporting parts in the vertical direction is greater than the projection width of the first connecting parts in the vertical direction; a material tray assembly, the material tray assembly includes an opening structure, the opening structure and the supporting structure are arranged in a one-to-one correspondence, and the projection width of the opening structure in the vertical direction is greater than the projection width of the supporting parts in the vertical direction.

[0008] In some embodiments, the support structure includes a counterweight portion, which is rotatably connected to the support portion, and the projection of the rotation axis between the counterweight portion and the support portion in the vertical direction is parallel to the projection of the rotation axis between the support portion and the first connecting portion in the vertical direction.

[0009] In some embodiments, the support portion includes a groove, and the first connecting portion is partially disposed in the groove and is rotatably connected to the groove.

[0010] In some embodiments, the support portion further includes an arcuate surface, and the arcuate surface is located at an end of the first connecting portion away from the counterweight portion.

[0011] In some embodiments, the support portion further includes a first inclined surface, and the first inclined surface is located at an end of the first connecting portion away from the counterweight portion.

[0012] In some embodiments, the opening structure includes a first limiting segment and a second limiting segment, the projection width of the first limiting segment in the vertical direction is smaller than the projection width of the second limiting segment in the vertical direction, and the projection width of the first limiting segment in the vertical direction is greater than the projection width of the support portion in the vertical direction.

[0013] In some embodiments, the mounting frame structure is movably connected to the supporting structure, and the plurality of supporting portions have supporting states of being close to each other or away from each other.

[0014] In some embodiments, the support structure also includes an adjustment part, and the mounting frame structure includes a reinforcement part and a second connecting part, the reinforcement part is connected to the second connecting part, the second connecting part is arranged on the circumferential outer side of the reinforcement part, and the second connecting part has a through hole arranged one-to-one corresponding to the adjustment part, and the adjustment part can be movably inserted into the through hole.

[0015] In some embodiments, length scale lines are provided on the adjustment portion.

[0016] According to another aspect of the present application, a deposition furnace is provided. The deposition furnace adopts the above-mentioned lifting material tray. The deposition furnace includes a furnace body. The projection area of ​​the lifting material tray in the vertical direction is smaller than the projection area of ​​the furnace body in the vertical direction.

[0017] Through the above technical scheme, the hoisting tray provided by the present application lowers the hoisting assembly, the support part extends from the opening structure to the bottom of the opening structure, rotates the hoisting assembly to a certain angle in the horizontal direction, and the first connecting part abuts against the side wall of the opening structure, so that the support part is partially located below the tray assembly; raises the hoisting assembly, the support part supports the bottom of the tray assembly, and the tray assembly rises together with the hoisting assembly. After placing the tray assembly in a suitable position, the hoisting assembly is rotated so that the support part and the opening structure are directly opposite in the vertical direction, and the hoisting assembly is raised, and the support part withdraws from the opening structure. The above steps realize the taking and placing of the tray assembly. Since the hoisting assembly only contacts the bottom of the tray assembly during the whole process, it will not affect the amount of material placed above the tray assembly, and the hoisting of the hoisting assembly can be realized by only setting an opening on the tray assembly, which reduces the gap between the tray assembly and the inner wall of the deposition furnace, and the airtightness enhancement effect is good. The technical scheme of the present application effectively solves the problem of low deposition efficiency in the prior art when using a fixture to match the tray for vapor deposition. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 A schematic diagram of the structure of the hoisting material tray disclosed in the first embodiment of the present application is shown;

[0020] Figure 2 Shows Figure 1 A schematic diagram of a partially enlarged structure of the support structure of the hoisting material tray in a state of waiting to be supported;

[0021] Figure 3 Shows Figure 1 A schematic diagram of a partially enlarged structure of the support structure of the hoisting material tray in a supporting state;

[0022] Figure 4 Shows Figure 1 A schematic diagram of the structure of the support portion of the hoisting tray;

[0023] Figure 5 Shows Figure 1 A schematic cross-sectional structure diagram of a support portion of a hoisting material tray;

[0024] Figure 6 Shows Figure 1 A schematic diagram of a top view of the structure of the support portion of the hoisting tray;

[0025] Figure 7 Shows Figure 1 A left-side structural schematic diagram of a support portion of a hoisting material tray;

[0026] Figure 8 Shows Figure 1 Schematic diagram of the top view of the tray assembly of the lifting tray.

[0027] Description of reference numerals:

[0028] 10. Hoisting assembly; 11. Mounting frame structure; 12. Support structure; 121. First connecting portion; 122. Support portion; 1221. Groove; 1222. Arc surface; 1223. First inclined surface; 123. Counterweight portion; 20. Tray assembly; 21. Opening structure; 211. First limiting section; 212. Second limiting section. DETAILED DESCRIPTION

[0029] The following is a further detailed description of the implementation methods of the present application in conjunction with the accompanying drawings and examples. The detailed descriptions and drawings of the following examples are used to exemplarily illustrate the principles of the present application, but cannot be used to limit the scope of the present application. The present application can be implemented in many different forms and is not limited to the specific embodiments of the present application, but includes all technical solutions that fall within the scope of the claims.

[0030] The present application provides these embodiments to make the present application thorough and complete, and to fully express the scope of the present application to those skilled in the art. It should be noted that unless otherwise specifically stated, the relative arrangement of the parts and steps, the composition of the materials, the numerical expressions and the numerical values ​​set forth in these embodiments should be interpreted as being merely exemplary, and not as limiting.

[0031] It should be noted that, in the description of this application, unless otherwise specified, the meaning of "multiple" is greater than or equal to two; the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicating the orientation or positional relationship, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0032] In addition, the words "first", "second" and similar words used in this application do not indicate any order, quantity or importance, but are only used to distinguish different parts. "Vertical" does not mean vertical in the strict sense, but is within the tolerance range. "Parallel" does not mean parallel in the strict sense, but is within the tolerance range. "Include" or "comprising" and similar words mean that the elements before the word include the elements listed after the word, and do not exclude the possibility of including other elements.

[0033] It should also be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances. When a specific device is described as being located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.

[0034] All terms used in this application have the same meaning as those understood by those of ordinary skill in the art to which this application belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, such as general dictionaries, should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined herein.

[0035] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0036] like Figures 1 to 8 As shown, the lifting material tray disclosed in the first embodiment of the present application includes: a lifting component 10 and a material tray component 20, the lifting component 10 includes a mounting frame structure 11 and a plurality of supporting structures 12, the plurality of supporting structures 12 include a first connecting portion 121 and a supporting portion 122, the plurality of first connecting portions 121 are connected to the mounting frame structure 11, the plurality of supporting portions 122 are connected to the first connecting portions 121, the projection width of the supporting portions 122 in the vertical direction is greater than the projection width of the first connecting portions 121 in the vertical direction, the material tray component 20 includes an opening structure 21, the opening structure 21 is arranged one-to-one with the supporting structure 12, the projection width of the opening structure 21 in the vertical direction is greater than the projection width of the supporting portion 122 in the vertical direction.

[0037] The technical solution of the first embodiment is applied, the lifting assembly 10 is lowered, the support part 122 extends from the opening structure 21 to the bottom of the opening structure 21, and the lifting assembly 10 is rotated to a certain angle in the horizontal direction, and the first connecting part 121 abuts against the side wall of the opening structure 21, so that the support part 122 is partially located below the tray assembly 20; the lifting assembly 10 is raised, and the support part 122 supports the bottom of the tray assembly 20, and the tray assembly 20 rises together with the lifting assembly 10. After the tray assembly 20 is placed in a suitable position, the lifting assembly 10 is rotated so that the support part 122 is vertically opposite to the opening structure 21, and the lifting assembly 10 is raised, and the support part 122 withdraws from the opening structure 21. The above steps realize the taking and placing of the tray assembly 20. Since the hoisting assembly 10 is only in contact with the bottom of the tray assembly 20 during the whole process, it will not affect the amount of material placed on the tray assembly 20, and the hoisting of the hoisting assembly 10 can be achieved by only setting an opening on the tray assembly 20, thereby reducing the gap between the tray assembly 20 and the inner wall of the deposition furnace, and achieving a good airtight effect. The technical solution of the first embodiment effectively solves the problem of low deposition efficiency in the prior art when using a fixture to match the tray for vapor deposition.

[0038] like Figures 1 to 7As shown, in the technical solution of the first embodiment, the support structure 12 includes a counterweight portion 123, the counterweight portion 123 is rotatably connected to the support portion 122, and the projection of the rotation axis between the counterweight portion 123 and the support portion 122 in the vertical direction is parallel to the projection of the rotation axis between the support portion 122 and the first connecting portion 121 in the vertical direction. Under the influence of the gravity of the counterweight portion 123, and without being subjected to other external forces, the support portion 122 has a predetermined angle with the first connecting portion 121, and the angle is an acute angle. At this time, the projection area of ​​the support portion 122 in the vertical direction is small, which facilitates the support portion 122 to pass through the opening structure 21. The counterweight portion 123 adopts a chain structure, and a connecting rod is provided on the support portion 122, and the counterweight portion 123 is rotatably connected to the connecting rod. When the support part 122 rotates, the counterweight part 123 rotates accordingly, and the chain structure is always arranged in the vertical direction, which ensures that the center of gravity of the entire support structure 12 is stable and not prone to shaking.

[0039] like Figures 1 to 7 As shown, in the technical solution of the first embodiment, the support portion 122 includes a groove 1221, and the first connection portion 121 is partially inserted into the groove 1221 and is rotatably connected to the groove 1221. The connection between the first connection portion 121 and the groove 1221 is located at the middle of the groove 1221, close to the side of the counterweight portion, so that the support portion 122 has a predetermined rotation range. When the support structure 12 is in a waiting state, under the action of the counterweight portion 123, the upper edge of the groove 1221 away from the counterweight portion 123 contacts the first connection portion 121, so as to avoid excessive rotation of the support portion 122 under the action of the counterweight portion 123; when the support structure 12 is in a supporting state, the inner wall of the groove 1221 close to the counterweight portion 123 abuts against the first connection portion 121, and at this time, the angle between the support portion 122 and the first connection portion 121 is a right angle. The setting of the groove 1221 ensures that the angle between the support part 122 and the first connection part 121 is less than or equal to ninety degrees, thereby preventing the tray assembly 20 from falling off. In addition, the upper edge of the groove 1221 away from the counterweight part 123 is provided with a chamfer, and the chamfer has a second inclined surface, so that when the support part 122 rotates to the point where the angle with the first connection part 121 is the smallest, the first connection part 121 and the second inclined surface abut against each other, thereby preventing the first connection part 121 from being broken due to a large local force. When the support part 122 supports the tray assembly 20, the angle between the support part 122 and the first connection part 121 changes from an acute angle to a right angle. In this process, the contact area between the support part 122 and the tray assembly 20 increases, further ensuring the stability of the support.

[0040] like Figures 1 to 7As shown, in the technical solution of the first embodiment, the support portion 122 further includes an arcuate surface 1222, and the arcuate surface 1222 is located at one end of the first connection portion 121 away from the counterweight portion 123. In the process of the support portion 122 supporting the tray assembly 20, the arcuate surface 1222 contacts the bottom of the tray assembly 20, the support portion 122 rotates, and the angle between the support portion 122 and the first connection portion 121 increases. The setting of the arcuate surface 1222 ensures that the relative movement between the support portion 122 and the tray assembly 20 is smooth during the rotation of the support portion 122, thereby avoiding the vibration of the tray assembly 20 and the problem that the support portion 122 is blocked from rotating.

[0041] like Figures 1 to 7 As shown, in the technical solution of the first embodiment, the support portion 122 further includes a first inclined surface 1223, and the first inclined surface 1223 is located at one end of the first connecting portion 121 away from the counterweight portion 123. When the support portion 122 is in the supporting state, the horizontal distance between the first inclined surface 1223 and the arc surface 1222 increases continuously along the direction from approaching to away from the mounting frame structure 11. The setting of the first inclined surface 1223 ensures that during the entire process of the support portion 122 rotating from the waiting state to the supporting state, the projection of the first inclined surface 1223 in the vertical direction is always located on the side of the projection of the arc surface 1222 in the vertical direction away from the tray assembly 20. The setting of the first inclined surface 1223 further reduces the projection area of ​​the support portion 122 in the vertical direction when the support portion 122 is in the waiting state, so as to facilitate the support portion 122 to pass through the opening structure 21.

[0042] like Figure 1 , Figure 2 , Figure 3 and Figure 8 As shown, in the technical solution of embodiment 1, the opening structure 21 includes a first limiting segment 211 and a second limiting segment 212, the projection width of the first limiting segment 211 in the vertical direction is smaller than the projection width of the second limiting segment 212 in the vertical direction, and the projection width of the first limiting segment 211 in the vertical direction is greater than the projection width of the support portion 122 in the vertical direction. The projection widths of the first limiting section 211 and the second limiting section 212 in the vertical direction are both greater than the projection width of the support portion 122 in the vertical direction, so that the support portion 122 can pass through the opening structure 21 in the vertical direction. The position of the second limiting section 212 is set according to the first connecting portion 121. After the support portion 122 passes through the opening structure 21, the hoisting assembly 10 is rotated so that the first connecting portion 121 abuts against the side wall of the second limiting section 212. Since the projection width of the second limiting section 212 in the vertical direction is greater than the projection width of the first limiting section 211 in the vertical direction, the setting of the second limiting section 212 increases the range in which the entire hoisting assembly 10 can rotate, thereby increasing the contact area between the support portion 122 and the bottom of the tray assembly 20.

[0043] The difference between the technical solution of the second embodiment and the technical solution of the first embodiment is that the mounting frame structure 11 is movably connected to the supporting structure 12, and the plurality of supporting parts 122 have a supporting state of being close to each other or far away from each other. By moving the supporting structure 12 to change the distance between the plurality of supporting parts 122, the material tray assemblies 20 of different sizes can be hoisted, and the versatility is stronger.

[0044] In the technical solution of the second embodiment, the support structure 12 also includes an adjustment part, and the mounting frame structure 11 includes a reinforcement part and a second connection part, the reinforcement part is connected to the second connection part, the second connection part is arranged on the circumferential outer side of the reinforcement part, the second connection part has a through hole arranged one-to-one with the adjustment part, and the adjustment part can be movably penetrated in the through hole. The adjustment part uses a transverse long rod, the transverse long rod is penetrated on the second connection part, the second connection part is an annular structure, the adjustment part can be movably penetrated in the through hole on the second connection part, the axis of the through hole is arranged parallel to the horizontal direction, and the second connection part is also provided with a fixing hole, the axis of the fixing hole is arranged parallel to the vertical direction, the fixing hole is arranged one-to-one with the through hole, the fixing hole is connected with the through hole, the fixing hole is a threaded hole, a bolt fastener is penetrated in the fixing hole, the position of the adjustment part is fixed by rotating the bolt, when the position of the adjustment part needs to be adjusted, the bolt is loosened, the position of the adjustment part can be changed, and then the position of the multiple support parts 122 can be changed. The structure is relatively simple, easy to process, and convenient to operate.

[0045] In the technical solution of the second embodiment, the adjustment part is provided with length scale lines. By reading the scale line readings, the distance between the multiple support parts 122 can be obtained, so that the adjusted hanging assembly 10 meets the requirements of the tray assembly 20. The setting of the length scale lines enables the adjustment of the support part 122 to be numerical, rather than being adjusted only by experience, further ensuring the adjustment accuracy.

[0046] According to another aspect of the present application, a deposition furnace is provided, the deposition furnace adopts the above-mentioned hoisting tray, the deposition furnace includes a furnace body, and the projection area of ​​the hoisting tray in the vertical direction is smaller than the projection area of ​​the furnace body in the vertical direction. The above-mentioned hoisting tray is used to perform vapor deposition in the deposition furnace. Since the gap between the tray assembly 20 and the inner wall of the deposition furnace is smaller, it is not easy for the gas to move to the bottom of the tray, the deposition efficiency is higher, the deposition effect is better, and the hoisting assembly 10 will not contact the upper surface of the tray assembly 20, and will not occupy the material discharge space on the upper surface of the tray assembly 20, thereby increasing the amount of discharge and further improving the work efficiency of vapor deposition of large-scale products.

[0047] Based on the above, it can be seen that the design idea of ​​the new fixture for hoisting the deposition furnace is that the lower side of the footrest (support part 122) has a counterweight chain (counterweight part 123), which is heavier than the upper side, and maintains the same Figure 2state, and then the tray opening (opening structure 21) is designed as Figure 8 When in use, the crane lifts the tray (tray assembly 20), lowers the hoist (hoisting assembly 10) from the tray opening, and rotates the hoisting assembly 10 to place the support portion 122 at the notch (opening structure 21) to support the tray. Figure 3 As shown; when placing the tray and taking out the sling (lifting assembly 10), rotate the lifting assembly 10, and then use a crane to lift out the tray. The adjustable footrest can be used to reduce the size of the tray opening, and during vapor deposition, the gas loss can be reduced, resulting in a better vapor densification effect. Compared with existing tooling with synchronous belt drive, the present application does not need to consider the wear of the belt. It only needs to use a counterweight to adjust the retraction and extension of the footrest, and the sling can be rotated to operate according to the opening shape of the tray. Workers do not need to enter the furnace, which is very convenient. The tray can be designed to be larger, hold more products, and have a smaller opening area to enhance the vapor densification effect.

[0048] So far, the embodiments of the present application have been described in detail. In order to avoid obscuring the concept of the present application, some details known in the art are not described. Based on the above description, those skilled in the art can fully understand how to implement the technical solution of the present application.

[0049] Although some specific embodiments of the present application have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present application. It should be understood by those skilled in the art that the above embodiments may be modified or some technical features may be replaced by equivalents without departing from the scope and spirit of the present application. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict.

Claims

1. A hoisting tray, characterized in that: include: A hoisting assembly (10), the hoisting assembly (10) comprising a mounting frame structure (11) and a plurality of supporting structures (12), the plurality of supporting structures (12) comprising a first connecting portion (121) and a supporting portion (122), the plurality of first connecting portions (121) being connected to the mounting frame structure (11), the plurality of supporting portions (122) being connected to the first connecting portion (121), and the projection width of the supporting portion (122) in the vertical direction being greater than the projection width of the first connecting portion (121) in the vertical direction; A material tray assembly (20), the material tray assembly (20) comprising an opening structure (21), the opening structure (21) being arranged in a one-to-one correspondence with the support structure (12), and the projection width of the opening structure (21) in the vertical direction is greater than the projection width of the support portion (122) in the vertical direction.

2. The hoisting tray according to claim 1, characterized in that: The support structure (12) comprises a counterweight portion (123), the counterweight portion (123) being rotatably connected to the support portion (122), and a projection of a rotation axis between the counterweight portion (123) and the support portion (122) in the vertical direction and a projection of a rotation axis between the support portion (122) and the first connecting portion (121) in the vertical direction are parallel to each other.

3. The hoisting tray according to claim 2, characterized in that: The supporting portion (122) comprises a groove (1221), and the first connecting portion (121) is partially inserted into the groove (1221) and is rotatably connected to the groove (1221).

4. The hoisting tray according to claim 2, characterized in that: The supporting portion (122) further comprises an arcuate surface (1222), and the arcuate surface (1222) is located at an end of the first connecting portion (121) away from the counterweight portion (123).

5. The hoisting tray according to claim 4, characterized in that: The supporting portion (122) further comprises a first inclined surface (1223), wherein the first inclined surface (1223) is located at an end of the first connecting portion (121) away from the counterweight portion (123).

6. The hoisting tray according to claim 1, characterized in that: The opening structure (21) comprises a first limiting section (211) and a second limiting section (212); the projection width of the first limiting section (211) in the vertical direction is smaller than the projection width of the second limiting section (212) in the vertical direction; and the projection width of the first limiting section (211) in the vertical direction is larger than the projection width of the support portion (122) in the vertical direction.

7. The hoisting tray according to claim 1, characterized in that: The mounting frame structure (11) is movably connected to the supporting structure (12), and the plurality of supporting portions (122) are in a supporting state of being close to each other or far away from each other.

8. The hoisting tray according to claim 7, characterized in that: The support structure (12) also includes an adjusting portion, and the mounting frame structure (11) includes a reinforcing portion and a second connecting portion, wherein the reinforcing portion is connected to the second connecting portion, the second connecting portion is arranged on the circumferential outer side of the reinforcing portion, and the second connecting portion has a through hole arranged in a one-to-one correspondence with the adjusting portion, and the adjusting portion is movably inserted into the through hole.

9. The hoisting tray according to claim 8, characterized in that: The adjusting portion is provided with length scale lines.

10. A deposition furnace, characterized in that: The deposition furnace adopts the hoisting material tray according to any one of claims 1 to 9, and the deposition furnace comprises a furnace body, and a projection area of ​​the hoisting material tray in the vertical direction is smaller than a projection area of ​​the furnace body in the vertical direction.

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