Crystal growth furnace

Abstract

The embodiment of the utility model provides a crystal growth furnace, and relates to the technical field of silicon carbide crystal growth equipment. The crystal growth furnace comprises a furnace body and a heating device, the heating device comprises a heater and a water-cooled copper electrode which are connected, the heater is located in the crystal growth furnace and used for heating the crystal growth furnace, the water-cooled copper electrode is partially located in the furnace body, the end, away from the heater, of the water-cooled copper electrode extends out of the furnace body, and a cooling loop is arranged in the water-cooled copper electrode. The cooling loop is provided with a water inlet and a water outlet which are located outside the furnace body, the water inlet is used for being connected with a water cooling cable, and the water outlet is used for being connected with a water outlet pipe. The external cooling water can cool the water-cooling copper electrode through the water-cooling loop, so that the water-cooling copper electrode is prevented from being melted, the situation that the connection position of the water-cooling copper electrode and the heater is loosened due to high temperature can be reduced, and the sparking phenomenon occurring at the connection position of the heater and the water-cooling copper electrode in the crystal growth furnace is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide crystal growth equipment, in particular to a crystal growth furnace. Background Art

[0002] Silicon carbide (SiC), as an emerging third-generation semiconductor core material, has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability, which makes it an important substrate wafer material with wide applications. It has shown good application prospects in the fields of aviation devices, new energy vehicles, rail transportation and household appliances. The crystal growth furnace is an important structure for the growth of silicon carbide crystals.

[0003] The inventors have found through research that sparks are prone to occur between the electrodes and heaters in some existing crystal growth furnaces. Utility Model Content

[0004] The utility model aims to provide a crystal growth furnace, which can reduce the occurrence of sparking between a heater and an electrode in the crystal growth furnace.

[0005] The embodiment of the utility model is achieved as follows:

[0006] In a first aspect, the utility model provides a crystal growth furnace, comprising:

[0007] Furnace body;

[0008] A heating device comprises a heater and a water-cooled copper electrode connected to each other. The heater is located in a crystal growth furnace, and part of the water-cooled copper electrode is located in the furnace body. One end of the water-cooled copper electrode away from the heater extends out of the furnace body. A cooling circuit is provided in the water-cooled copper electrode. The cooling circuit has a water inlet and a water outlet, and both the water inlet and the water outlet are located outside the furnace body. The water inlet is used to connect to a water-cooled cable, and the water outlet is used to connect to a water outlet pipe.

[0009] In an optional embodiment, the cooling circuit includes a cooling water channel and independently arranged water inlet pipe and water outlet pipe, the water inlet pipe and the water outlet pipe are both connected to the cooling water channel, the end of the water inlet pipe away from the cooling water channel is a water inlet for connecting to a water cooling cable, the end of the water outlet pipe away from the cooling water channel is a water outlet for connecting to a water outlet pipe, and the cooling water channel is located inside the furnace body.

[0010] In an optional embodiment, an end of the water outlet pipe away from the water outlet is closer to the heater than an end of the water inlet pipe away from the water inlet.

[0011] In an optional embodiment, the water-cooled copper electrode is detachably connected to the heater.

[0012] In an optional embodiment, the water-cooled copper electrode has a connection end, the connection end is provided with an external thread, and the heater is provided with a threaded hole connected to the external thread.

[0013] In an optional embodiment, the water-cooled copper electrode has a connection end, the connection end is provided with a threaded hole, and the heater is provided with a stud connected to the threaded hole.

[0014] In an optional embodiment, the crystal growth furnace also includes a connecting piece, which is sleeved on the water-cooled copper electrode and located on the outside of the furnace body. The connecting piece is insulated and matched with the water-cooled copper electrode. The connecting piece is connected to the outer wall of the furnace body, and the water-cooled copper electrode is connected to the outer wall of the furnace body through the connecting piece.

[0015] In an optional embodiment, the connecting piece is detachably connected to the outer wall of the furnace body.

[0016] In an optional embodiment, the connecting member includes an insulating ring and a connecting ring. The insulating ring is fixedly mounted on the water-cooled copper electrode. A contact platform is protruding from the outer side of the insulating ring. The connecting member is mounted on the insulating ring. A matching platform is protruding from the inner hole of the connecting member. The matching platform abuts against the abutment platform and is away from the heater relative to the abutment platform. The connecting ring is detachably connected to the outer wall of the furnace body.

[0017] In an optional embodiment, the connecting ring is provided with a plurality of mounting holes spaced apart along the circumferential direction, the crystal growth furnace is provided with a plurality of matching holes, and the connecting ring is detachably connected to the outer wall of the furnace body by fasteners passing through the mounting holes and the matching holes in sequence.

[0018] The beneficial effects of the embodiments of the utility model are as follows: a crystal growth furnace provided by the embodiments of the utility model includes a furnace body and a heating device, the heating device includes a connected heater and a water-cooled copper electrode, the heater is located in the crystal growth furnace and is used to heat the crystal growth furnace, the water-cooled copper electrode is partially located in the furnace body, one end of the water-cooled copper electrode away from the heater extends out of the furnace body, the water-cooled copper electrode has a cooling circuit, the cooling circuit has a water inlet and a water outlet, and the water inlet and the water outlet are both located outside the furnace body, the water inlet is used to connect to a water-cooled cable, and the water outlet is used to connect to a water outlet pipe. External cooling water can cool the water-cooled copper electrode through the water-cooling circuit to avoid melting of the water-cooled copper electrode, and can also reduce the loosening of the connection between the water-cooled copper electrode and the heater due to high temperature, thereby reducing the sparking phenomenon at the connection between the heater and the water-cooled copper electrode in the crystal growth furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 A schematic diagram of the structure of a crystal growth furnace provided in an embodiment of the utility model;

[0021] Figure 2 for Figure 1 A partial enlarged view of

[0022] Figure 3 This is a schematic structural diagram of a crystal growth furnace provided in other embodiments of the utility model.

[0023] Icons: 1-crystal growth furnace; 100-furnace body; 200-heating device; 210-heater; 220-water-cooled copper electrode; 221-water inlet pipe; 222-water outlet pipe; 223-cooling water channel; 224-water inlet; 225-water outlet; 300-connector; 310-connecting ring; 311-matching platform; 320-insulating ring; 321-abutment platform; 2-water-cooling cable; 3-water outlet pipe. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0027] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0028] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0029] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] The specific structure of a crystal growth furnace provided by an embodiment of the utility model and the corresponding technical effects it brings are described in detail below in conjunction with the patent drawings.

[0031] Please refer to Figure 1-Figure 2 A crystal growth furnace 1 provided in an embodiment of the utility model includes a furnace body 100 and a heating device 200 .

[0032] The heating device 200 includes a heater 210 and a water-cooled copper electrode 220 connected to each other. The heater 210 is located in the crystal growth furnace 1 and is used to heat the crystal growth furnace 1. The water-cooled copper electrode 220 is partially located in the furnace body 100. One end of the water-cooled copper electrode 220 away from the heater 210 extends out of the furnace body 100. The water-cooled copper electrode 220 has a cooling circuit. The cooling circuit has a water inlet 224 and a water outlet 225, and the water inlet 224 and the water outlet 225 are both located outside the furnace body 100. The water inlet 224 is used to connect to the water-cooled cable 2, and the water outlet 225 is used to connect to the water outlet pipe 3.

[0033] It can be understood that the water-cooled cable 2 is used to supply power to the water-cooled copper electrode 220 and to supply water to the water inlet 224 of the water-cooled copper electrode 220. In order to accelerate the flow rate of cooling water in the cooling circuit, in some embodiments, a water outlet pipe 3 connected to the water outlet can also be provided with a water pump.

[0034] It should be noted that the heater 210 in some existing crystal growth furnaces 1 is generally directly connected to the graphite electrode, which is then connected to the copper electrode. During the heating process, the graphite bolts at the connection between the graphite electrode and the graphite heater 210 are prone to thermal expansion, so that the graphite electrode and the graphite heater 210 become loose. When current passes through, the heat generated by the contact resistance will cause the local temperature to rise sharply, forming a hot spot. This high temperature is likely to cause arc discharge and sparking.

[0035] In the present embodiment, the heater 210 is a resistive heater 210 , which is a graphite heater 210 . Of course, in some other embodiments, the heater 210 may also be other resistive heaters 210 .

[0036] Furthermore, the heater 210 in the present embodiment is directly connected to the water-cooled copper electrode 220, and a water-cooling circuit is also provided in the water-cooled copper electrode 220. It can be understood that the external cooling water can cool down the water-cooled copper electrode 220 through the water-cooling circuit to avoid melting of the water-cooled copper electrode 220, and can also reduce the loosening of the connection between the water-cooled copper electrode 220 and the heater 210 due to high temperature, thereby reducing the sparking phenomenon at the connection between the heater 210 and the water-cooled copper electrode 220 in the crystal growth furnace 1.

[0037] It is understandable that, since the water-cooled copper electrode 220 has a water-cooling circuit, in order to avoid short circuit, the water introduced into the water-cooled copper electrode 220 may be pure water. Of course, in order to further avoid short circuit of the copper electrode, the contact side of the water-cooling circuit and the copper electrode may be coated with a corresponding insulating coating to reduce the possibility of electrochemical reaction.

[0038] Optionally, the cooling circuit includes a cooling water channel 223 and an independently arranged water inlet pipe 221 and a water outlet pipe 222. The water inlet pipe 221 and the water outlet pipe 222 are both connected to the cooling water channel 223. The end of the water inlet pipe 221 away from the cooling water channel 223 is a water inlet 224 for connecting to the water-cooled electrode, and the end of the water outlet pipe 222 away from the cooling water channel 223 is a water outlet 225 for connecting to the water outlet pipe 3. The cooling water channel 223 is located in the furnace body 100. That is, the cooling water channel 223 can cool the water-cooled copper electrode 220 located in the furnace body 100.

[0039] It can be understood that in order to improve the cooling efficiency of the water-cooled copper electrode 220, the cooling water channel 223 can be set as a spiral or serpentine water channel to increase the heat exchange area between the cooling water and the copper electrode surface, thereby improving the heat exchange efficiency.

[0040] Of course, the cooling water channel 223 can also be a water channel of other shapes, for example, the cooling water channel 223 is a cylindrical water channel extending along the axis direction of the water-cooled copper electrode 220. Among them, one end of the water outlet 225 of the water outlet pipe 222 is close to the heater 210 relative to the end of the water inlet pipe 221 away from the water inlet 224, so that the water in the cooling water channel 223 can achieve heat exchange with most of the area of ​​the water-cooled copper electrode 220 located in the furnace body 100.

[0041] Optionally, in order to increase the heat exchange efficiency of the water-cooled copper electrode 220, a heat dissipation fin may be provided on the outside of the copper electrode, or an insulating water-cooling pipeline may be provided around the outside of the copper electrode.

[0042] It can be understood that in some embodiments, in order to facilitate operators to monitor and control the flow of the hydraulic press in real time to adapt to different workloads and temperature changes, the crystal growth furnace 1 can also be equipped with a flow meter and a pressure gauge, and the flow meter and the pressure gauge can both be set on the water-cooled cable 2.

[0043] Similarly, in order to facilitate observation of the temperature of the water-cooled copper electrode 220 , a temperature sensor may be disposed on the surface of the water-cooled copper electrode 220 or the water outlet 225 .

[0044] Optionally, the water-cooled copper electrode 220 is detachably connected to the heater 210. In some embodiments, the water-cooled copper electrode 220 has a connecting end (not shown in the figure), the connecting end is provided with an external thread (not shown in the figure), and the heater 210 is provided with a threaded hole (not shown in the figure) connected to the external thread.

[0045] In some other embodiments, the connection end is provided with a threaded hole (not shown in the figure), and the heating end is provided with a stud (not shown in the figure) connected to the threaded hole.

[0046] Alternatively, in some other embodiments, the water-cooled copper electrode 220 is threadedly connected to the heater 210 via a copper screw.

[0047] The crystal growth furnace 1 further includes a connector 300, which is sleeved on the water-cooled copper electrode 220 and located outside the furnace body 100. The connector 300 is insulated and matched with the water-cooled copper electrode 220, and the connector 300 is connected to the outer wall of the furnace body 100. It can be understood that through the setting of the connector 300, the water-cooled copper electrode 220 is connected to the outer wall of the furnace body 100 through the connector 300. It can be understood that through the connector 300, the water-cooled copper electrode 220 can be supported by the connector 300.

[0048] The connecting piece 300 is detachably connected to the outer wall of the furnace body 100. It can be understood that since the connecting piece 300 is detachably connected to the outer wall of the furnace body 100, it is convenient for the user to replace the copper electrode.

[0049] In detail, the connecting member 300 includes an insulating ring 320 and a connecting ring 310. The insulating ring 320 is fixedly sleeved on the water-cooled copper electrode 220. A contact platform 321 is convexly provided on the outer side of the insulating ring 320. The connecting member 300 is sleeved on the insulating ring 320. A matching platform 311 is convexly provided on the inner hole of the connecting member 300. The matching platform 311 is in contact with the contact platform 321 and is relatively away from the heater 210. The connecting ring 310 is detachably connected to the outer wall of the furnace body 100. That is to say, the weight of the water-cooled copper electrode 220 is abutted on the matching platform 311 through the abutment platform 321, and the matching platform 311 is connected to the outer wall of the furnace body 100, so that the weight of the water-cooled copper electrode 220 can be borne by the furnace body 100 to ensure that the water-cooled copper electrode 220 can be stably installed on the furnace body 100.

[0050] In detail, the connecting ring 310 is provided with a plurality of mounting holes (not shown in the figure) at intervals along the circumferential direction, and the crystal growth furnace 1 is provided with a plurality of matching holes (not shown in the figure). The connecting ring 310 is detachably connected to the outer wall of the furnace body 100 by fasteners passing through the mounting holes and the matching holes in sequence.

[0051] In detail, the matching holes on the crystal growth furnace 1 are threaded holes, and the fasteners are threaded fasteners. The threaded fasteners pass through the mounting holes in sequence and are threadedly matched with the matching holes.

[0052] Optionally, in some embodiments, the water-cooled cable 2 is directly connected to the water-cooled copper electrode 220 through a fitting, so that the water outlet of the water-cooled cable 2 is connected to the water inlet 224 of the water-cooled copper electrode 220, and the copper electrode of the water-cooled cable 2 is connected to the water-cooled copper electrode. For example, the fitting is a fitting made of high-temperature resistant metal or ceramic material, such as a copper sleeve or a graphite sleeve, and the copper electrode of the water-cooled cable 2 is inserted therein and fixed by fasteners to ensure the electrical and mechanical connection between the water-cooled copper electrode 2 and the water-cooled cable.

[0053] Optionally, refer to Figure 3In some embodiments, a threaded hole can be set at the end of the water-cooled copper electrode 220 away from the heater 210, and the crystal growth furnace 1 also includes a mounting bolt threadedly connected to the water-cooled copper electrode 220, and a water channel is opened in the screw of the mounting bolt, and the water channel is connected to the water inlet 224. The outer wall of the screw is opened with a water inlet hole connected to the water channel, and the water-cooling cable 2 is sleeved on the screw and the water outlet hole of the water-cooling cable 2 is connected to the water inlet hole. That is to say, water in the water-cooling cable 2 can enter from the water inlet hole of the screw in turn, and flow into the water inlet 224 of the water-cooled copper electrode 220 from the water channel. When the mounting bolt is tightened, the water-cooling cable 2 is clamped between the nut of the mounting bolt and the end of the water-cooled copper electrode 220 away from the heater 210.

[0054] To sum up, a crystal growth furnace 1 provided by an embodiment of the utility model includes a furnace body 100 and a heating device 200, the heating device 200 includes a connected heater 210 and a water-cooled copper electrode 220, the heater 210 is located in the crystal growth furnace 1, and is used to heat the crystal growth furnace 1, the water-cooled copper electrode 220 is partially located in the furnace body 100, and one end of the water-cooled copper electrode 220 away from the heater 210 extends out of the furnace body 100, and the water-cooled copper electrode 220 has a cooling circuit, the cooling circuit has a water inlet 224 and a water outlet 225, and the water inlet 224 and the water outlet 225 are both located outside the furnace body 100, the water inlet 224 is used to connect to the water-cooled cable 2, and the water outlet 225 is used to connect to the water outlet pipe 3. The external cooling water can cool the water-cooled copper electrode 220 through the water cooling circuit to prevent the water-cooled copper electrode 220 from melting, and can also reduce the loosening of the connection between the water-cooled copper electrode 220 and the heater 210 due to high temperature, thereby reducing the sparking phenomenon at the connection between the heater 210 and the water-cooled copper electrode 220 in the crystal growth furnace 1.

[0055] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A crystal growth furnace, characterized in that: include: Furnace body (100); A heating device (200), the heating device (200) comprising a heater (210) and a water-cooled copper electrode (220) connected to each other, the heater (210) being located in the crystal growth furnace, the water-cooled copper electrode (220) being partially located in the furnace body (100), the end of the water-cooled copper electrode (220) away from the heater (210) extending out of the furnace body (100), the water-cooled copper electrode (220) having a cooling circuit therein, the cooling circuit having a water inlet (224) and a water outlet (225), and the water inlet (224) and the water outlet (225) being both located outside the furnace body (100), the water inlet (224) being used to be connected to a water-cooled cable (2), and the water outlet (225) being used to be connected to a water outlet pipe (3).

2. The crystal growth furnace according to claim 1, characterized in that: The cooling circuit comprises a cooling water channel (223) and an independently arranged water inlet pipeline (221) and a water outlet pipeline (222); the water inlet pipeline (221) and the water outlet pipeline (222) are both in communication with the cooling water channel (223); one end of the water inlet pipeline (221) away from the cooling water channel (223) is a water inlet (224) for connecting to a water-cooling cable (2); one end of the water outlet pipeline (222) away from the cooling water channel (223) is a water outlet (225) for connecting to a water outlet pipe (3); and the cooling water channel (223) is located in the furnace body (100).

3. The crystal growth furnace according to claim 2, characterized in that: An end of the water outlet pipeline (222) away from the water outlet (225) is closer to the heater (210) than an end of the water inlet pipeline (221) away from the water inlet (224).

4. The crystal growth furnace according to claim 1, characterized in that: The water-cooled copper electrode (220) is detachably connected to the heater (210).

5. The crystal growth furnace according to claim 1, characterized in that: The water-cooled copper electrode (220) has a connection end, the connection end is provided with an external thread, and the heater (210) is provided with a threaded hole connected to the external thread.

6. The crystal growth furnace according to claim 1, characterized in that: The water-cooled copper electrode (220) has a connection end, the connection end is provided with a threaded hole, and the heater (210) is provided with a stud connected to the threaded hole.

7. The crystal growth furnace according to claim 1, characterized in that: The crystal growth furnace also includes a connecting piece (300), the connecting piece (300) is sleeved on the water-cooled copper electrode (220) and is located on the outside of the furnace body (100), the connecting piece (300) and the water-cooled copper electrode (220) are insulated and matched, the connecting piece (300) is connected to the outer wall of the furnace body (100), and the water-cooled copper electrode (220) is connected to the outer wall of the furnace body (100) through the connecting piece (300).

8. The crystal growth furnace according to claim 7, characterized in that: The connecting piece (300) is detachably connected to the outer wall of the furnace body (100).

9. The crystal growth furnace according to claim 7, characterized in that: The connecting member (300) comprises an insulating ring (320) and a connecting ring (310); the insulating ring (320) is fixedly sleeved on the water-cooled copper electrode (220); an abutment platform (321) is convexly provided on the outer side of the insulating ring (320); the connecting member (300) is sleeved on the insulating ring (320); an inner hole of the connecting member (300) is convexly provided with a matching platform (311); the matching platform (311) is in abutment with the abutment platform (321) and is away from the heater (210) relative to the abutment platform (321); and the connecting ring (310) is detachably connected to the outer wall of the furnace body (100).

10. The crystal growth furnace according to claim 9, characterized in that: The connection ring (310) is provided with a plurality of mounting holes at intervals along the circumferential direction, the crystal growth furnace is provided with a plurality of matching holes, and the connection ring (310) is detachably connected to the outer wall of the furnace body (100) by fasteners passing through the mounting holes and the matching holes in sequence.

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