Testing tool for MEMS gyroscope

By designing a MEMS gyroscope test tool with multiple synergistic components, the existing test tooling has solved the problem of low test accuracy in large-scale testing, achieving rapid and efficient testing and improved testing quality.

CN222635505UActive Publication Date: 2025-03-18SUZHOU HENGXIN MICROELECTRONICS CO LTD

Patent Information

Application Number
CN202420898478.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-28
Publication Date
2025-03-18
Estimated Expiration
2034-04-28

AI Technical Summary

Technical Problem

The test tooling of existing MEMS gyroscopes has low test accuracy in large-scale tests, resulting in a decline in test quality.

Method used

A MEMS gyroscope test tooling including a test box, a test circuit board, a vertical board, a fixed top board, a drive device, a press, a fixed bottom board, a clamping assembly and a lifting assembly was designed. Through the synergy of these components, stable clamping and precise testing of the MEMS gyroscope is achieved.

Benefits of technology

This test tooling can quickly and efficiently conduct MEMS gyroscope testing, improve detection work efficiency and ensure the improvement of test quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a testing tool for an MEMS gyroscope, which comprises a testing box body, a testing circuit board is connected in the testing box body, a vertical plate is connected to one side of the testing box body, a fixed top plate is connected to the top end of the vertical plate, and a driving device is connected to the top surface of the fixed top plate. A driving shaft of the driving device penetrates through the fixed top plate and is in driving connection with the connecting rod, the connecting rod is connected with a pressing block, the other side of the test box body is connected with a fixed bottom plate used for installing a product, the fixed bottom plate is provided with a placing groove, the placing groove is internally connected with a clamping assembly used for clamping the product, and the other side of the test box body is provided with a through hole. A lifting assembly is connected in the inner cavity of the test box body, a lifting rod of the lifting assembly is in driving connection with the fixed plate, the fixed plate is connected with a probe which penetrates through the through hole and is in contact with a product pin, and the probe is connected with the test circuit board through a wire. According to the utility model, the detection efficiency can be improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of MEMS gyroscope chip testing, in particular to a testing tool for a MEMS gyroscope. Background Art

[0002] MEMS (Micro-Electro-Mechanical System) is an emerging technology developed from traditional integrated circuit technology. It realizes sensing or driving functions by making micron-scale mechanical structures. Due to the great difference between its size and the conventional millimeter or centimeter functional modules, it is necessary to use packaging to realize the mutual transmission of electrical signals between modules of different scales. In the process of signal transmission, the packaging itself should minimize the impact on the MEMS gyroscope chip as much as possible, and at the same time protect the MEMS gyroscope chip from external environmental interference factors.

[0003] After searching, the patent: Batch clamping tooling and test system and test method for MEMS accelerometers (CN201910333150.7), the batch clamping tooling includes guide rods, pressure plates, carrier plates, panels, vertical plates and bottom plates; the panel is installed on a fixed base composed of vertical plates and bottom plates, the panel includes a support plate and a bakelite pin plate embedded in the upper surface of the support plate, and multiple groups of probes are arranged on the bakelite pin plate; the carrier plate is installed above the panel through an elastic element, and the carrier plate is provided with multiple accelerometer mounting slots, each mounting slot corresponds to a group of probes; the pressure plate moves up and down along the guide rods arranged on the edge of the panel, and multiple groups of pressure rods are arranged on the lower surface of the pressure plate, and the pressure plate is fixed to the panel by clamping buckles. Although the above can realize large-scale testing, the relative test accuracy will be reduced, resulting in reduced test quality.

[0004] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a new structure of MEMS gyroscope test fixture to make it more valuable for industrial use. Utility Model Content

[0005] In order to solve the above technical problems, the purpose of the utility model is to provide a test fixture for a MEMS gyroscope.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A testing fixture for a MEMS gyroscope comprises a testing box, wherein a testing circuit board is connected to the testing box, a vertical plate is connected to one side of the testing box, a fixed top plate is connected to the top of the vertical plate, a driving device is connected to the top surface of the fixed top plate, a driving shaft of the driving device passes through the fixed top plate and is drivingly connected to a connecting rod, a pressing block is connected to the connecting rod, a fixed bottom plate for installing a product is connected to the other side of the testing box, a placement groove is provided on the fixed bottom plate, a clamping assembly for clamping the product is connected in the placement groove, a through hole is provided on the other side of the testing box, a lifting assembly is connected in the inner cavity of the testing box, a lifting rod of the lifting assembly is drivingly connected to the fixed plate, a probe passing through the through hole and contacting the product pin is connected to the fixed plate, and the probe is connected to the testing circuit board through a wire.

[0008] Preferably, in the test fixture for the MEMS gyroscope, a cushion block is connected to the lower end surface of the pressing block.

[0009] Preferably, in the test fixture for a MEMS gyroscope, the cushion block is a cushion block made of rubber material.

[0010] Preferably, in the test fixture for a MEMS gyroscope, the driving device is a cylinder.

[0011] Preferably, in the test fixture of a MEMS gyroscope, the clamping assembly includes a clamping block and a clamping spring, the fixed base plate is provided with a spring placement groove for the clamping spring, the spring placement groove is connected with a clamping spring, and the clamping block is connected to the clamping spring through a connecting column.

[0012] Preferably, in the test fixture for the MEMS gyroscope, a guide groove for guiding the clamping block is provided on a side of the placement groove.

[0013] Preferably, in the test fixture of the MEMS gyroscope, the lifting assembly includes a lifting cylinder, a lifting platform is connected to the driving shaft of the lifting cylinder, a guide rod is connected to the inside of the test box, the guide rod passes through the guide hole of the lifting platform, and the fixing plate is connected to the lifting platform.

[0014] By means of the above solution, the utility model has at least the following advantages:

[0015] The utility model can quickly test the product, effectively improve the working efficiency of the detection, and at the same time ensure the quality of the product test.

[0016] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a structural schematic diagram of the utility model. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Generally, the tooling of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0021] Example

[0022] like Figure 1As shown, a test fixture for a MEMS gyroscope comprises a test box 1, wherein a test circuit board 2 is connected to the test box 1, a vertical plate 3 is connected to one side of the test box 1, a fixed top plate 4 is connected to the top of the vertical plate 3, a driving device 5 is connected to the top surface of the fixed top plate 4, a driving shaft of the driving device 5 passes through the fixed top plate 4 and is drivingly connected to a connecting rod 6, a pressing block 7 is connected to the connecting rod 6, a fixed bottom plate 9 for installing a product is connected to the other side of the test box 1, a placement groove 10 is provided on the fixed bottom plate 9, a clamping assembly 11 for clamping the product is connected to the placement groove 10, a through hole is provided on the other side of the test box 1, a lifting assembly 12 is connected to the inner cavity of the test box 1, a lifting rod of the lifting assembly 12 is drivingly connected to a fixed plate 13, a probe 14 passing through the through hole and contacting the product pin is connected to the fixed plate 13, and the probe 14 is connected to the test circuit board 2 through a wire.

[0023] The lower end surface of the pressing block 7 in the utility model is connected with a cushion block 8, and the cushion block 8 is a cushion block made of rubber material.

[0024] The driving device described in the utility model is a cylinder.

[0025] The clamping assembly 11 in the utility model includes a clamping block 111 and a clamping spring 112. A spring placement groove for the clamping spring is provided on the fixed base plate 9. The clamping spring 112 is connected in the spring placement groove. The clamping block 111 is connected to the clamping spring through a connecting column, wherein a guide groove for guiding the clamping block is provided on the side of the placement groove 10.

[0026] The lifting assembly 12 in the utility model includes a lifting cylinder 121, a lifting platform 122 is connected to the driving shaft of the lifting cylinder 121, a guide rod 123 is connected to the inside of the test box 1, the guide rod 123 passes through the guide hole of the lifting platform 122, and the fixing plate 13 is connected to the lifting platform 122.

[0027] The working principle of the utility model is as follows:

[0028] During specific operation, the product (chip) is placed in the placement slot, clamped by the clamping block, and then fixed again by the pressure block. Finally, the lifting assembly in the test box drives the probe to contact the pin of the product, and the test is carried out by the test circuit board, and the final test result is displayed.

[0029] In the above structure, the probes on the fixed plate can be replaced according to different products, and the replaced probes match the products. The probes correspond to the through holes, which ensures that the probes can be on the same axis, and the stability of the product is ensured by the clamping assembly and the pressure block, which further ensures the stability of product testing and detection, thereby ensuring the quality of the test.

[0030] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0031] In the description of this application, it should be noted that the terms "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0032] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or vertical, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0033] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0034] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as within the protection scope of the present invention.

Claims

1. A test fixture for a MEMS gyroscope, comprising a test box (1), wherein a test circuit board (2) is connected to the test box (1), and characterized in that: A vertical plate (3) is connected to one side of the test box (1); a fixed top plate (4) is connected to the top of the vertical plate (3); a driving device (5) is connected to the top surface of the fixed top plate (4); a driving shaft of the driving device (5) passes through the fixed top plate (4) and is drivingly connected to a connecting rod (6); a pressing block (7) is connected to the connecting rod (6); a fixed bottom plate (9) for mounting a product is connected to the other side of the test box (1); a fixing plate (9) for mounting a product is provided on the fixed bottom plate (9); A placement groove (10) is provided, wherein a clamping assembly (11) for clamping a product is connected in the placement groove (10), a through hole is provided on the other side of the test box (1), a lifting assembly (12) is connected in the inner cavity of the test box (1), a lifting rod of the lifting assembly (12) is drivingly connected to a fixing plate (13), a probe (14) passing through the through hole and contacting a pin of the product is connected to the fixing plate (13), and the probe (14) is connected to a test circuit board (2) via a wire.

2. A test fixture for a MEMS gyroscope according to claim 1, characterized in that: A cushion block (8) is connected to the lower end surface of the pressing block (7).

3. A test fixture for a MEMS gyroscope according to claim 2, characterized in that: The cushion block (8) is a cushion block made of rubber material.

4. The test fixture for a MEMS gyroscope according to claim 1, characterized in that: The driving device is a cylinder.

5. The test fixture for a MEMS gyroscope according to claim 1, characterized in that: The clamping assembly (11) comprises a clamping block (111) and a clamping spring (112); a spring placement groove for the clamping spring is provided on the fixed base plate (9); the clamping spring (112) is connected to the spring placement groove; and the clamping block (111) is connected to the clamping spring via a connecting column.

6. The test fixture for a MEMS gyroscope according to claim 1, characterized in that: A guide groove for guiding the clamping block is provided on the side of the placement groove (10).

7. The test fixture for a MEMS gyroscope according to claim 1, characterized in that: The lifting assembly (12) comprises a lifting cylinder (121), a driving shaft of the lifting cylinder (121) is connected to a lifting platform (122), a guide rod (123) is connected inside the test box (1), the guide rod (123) passes through a guide hole of the lifting platform (122), and the fixing plate (13) is connected to the lifting platform (122).

Citation Information

Patent Citations

  • Batch clamping tool for MEMS accelerometers, test system and test method

    CN111856076A

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