Furnace tail isolation device and heat treatment equipment
By designing a furnace tail isolation device in a heat treatment equipment and using inert gas to form an isolation gas curtain, the pollution and sealing difficulty of furnace pipes with larger pipe diameters is solved during the furnace tail sealing, achieving a more efficient sealing effect and a longer life of sealing components.
Patent Information
- Application Number
- CN202421435385.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-21
- Publication Date
- 2025-03-21
- Estimated Expiration
- 2034-06-21
AI Technical Summary
In heat treatment equipment, when the furnace pipe with a larger diameter is sealed at the end of the furnace, the metal material reacts with the heat treatment gas, resulting in increased pollution and sealing difficulty, and the prior art is difficult to effectively solve this problem.
A furnace tail isolation device is designed, including a furnace tail flange and an air curtain device, and an inert gas is passed to the air curtain device through an inert gas source to form an isolation gas curtain curtain to isolate the contact between the heat treatment gas in the furnace tube and the furnace tail seal assembly.
It effectively reduces the pollution of the furnace tube, extends the service life of metal sealing components, optimizes the heat treatment process effect, and enhances gas flow.
Smart Images
Figure CN222648034U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of heat treatment equipment, and more specifically, to a furnace tail isolation device and a heat treatment equipment. Background Art
[0002] At present, for the furnace tubes of heat treatment equipment, when the tube diameter is small (480mm and below), Figure 1 As shown, the furnace tail 01 is sealed by welding the arc-shaped end cover 02 made of the same material as the furnace tube to the furnace tube. In order to further improve the production capacity and meet the production process requirements of large-size substrates, a furnace tube with a larger diameter (575mm and above) is used. At this time, if the furnace tail 01 is still welded with the arc-shaped end cover 02 made of the same material as the furnace tube, it is difficult to make, so a through-tube furnace tube is designed. If the furnace tail of the through-tube furnace tube is sealed with metal material, the metal will react with the heat treatment process reaction gas or the reaction generated gas, thereby contaminating the furnace tube.
[0003] Therefore, how to design a furnace tail isolation device to increase the isolation effect between the gas and the furnace tail sealing assembly and reduce the pollution to the furnace tube has become a technical problem that needs to be solved urgently by technical personnel in this field. Utility Model Content
[0004] In view of this, the purpose of the utility model is to provide a furnace tail isolation device to increase the isolation effect between the gas and the furnace tail sealing component and reduce the pollution to the furnace tube.
[0005] Another object of the utility model is to provide a heat treatment equipment including the above furnace tail isolation device.
[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0007] A furnace tail isolation device is used to be arranged at the tail of a furnace tube, comprising a furnace tail flange and an air curtain device:
[0008] The furnace tail flange is arranged at the tail of the furnace tube, and a first gas pipe is arranged on the furnace tail flange, and the first gas pipe is connected with an inert gas source;
[0009] The air curtain device is fixed to the furnace tail flange through a pressing plate. The air curtain device includes an air inlet and multiple air outlets. The air inlet is connected to the first air pipe, and the air outlet is arranged on the inner wall of the air curtain device. One end of the pressing plate is connected to the air curtain device, and the other end is connected to the furnace tail flange through a fastener.
[0010] Optionally, in the above-mentioned furnace tail isolation device, an air inlet mounting groove is provided on the furnace tail flange, the first air pipe extends into the air inlet mounting groove, and the air inlet is installed and matched with the air inlet mounting groove.
[0011] Optionally, in the above furnace tail isolation device, a first sealing member is provided between the air inlet and the air inlet mounting groove.
[0012] Optionally, the above-mentioned furnace tail isolation device also includes a quartz bag, an end cover is provided at the tail of the furnace tube, the end cover is connected to the furnace tail flange and is used to seal the tail of the furnace tube, a second air pipe connected to the furnace tube is provided on the end cover, the quartz bag is arranged on the side of the air curtain device away from the end cover and abuts against the inner wall of the furnace tube, and a through hole is provided on the quartz bag for the second air pipe to pass through.
[0013] Optionally, in the above-mentioned furnace tail isolation device, the quartz package includes at least one annular quartz cover plate.
[0014] Optionally, in the above furnace tail isolation device, the first gas pipe is welded to the furnace tail flange.
[0015] Optionally, in the above furnace tail isolation device, a third sealing member is provided between the furnace tail flange and the furnace tube.
[0016] Optionally, in the above furnace tail isolation device, a cooling channel is provided on the furnace tail flange.
[0017] Optionally, in the above furnace tail isolation device, the air curtain device is an annular cavity, and the plurality of air outlets are arranged in an annular shape along the circumference of the air curtain device.
[0018] A heat treatment equipment comprises the furnace tail isolation device as described above.
[0019] The furnace tail isolation device and heat treatment equipment disclosed by the utility model can, when a gas reaction is carried out in a furnace tube, introduce inert gas into the gas curtain device through an inert gas source, and the inert gas is discharged from a plurality of gas outlets to form an isolation gas curtain at the tail of the furnace tube, so as to isolate the heat treatment gas in the furnace tube from directly contacting the furnace tail sealing component, thereby further ensuring the sealing effect of the furnace tube; if the furnace tail sealing component is made of metal, metal contamination can be prevented, thereby protecting the furnace tube and extending the service life of the metal sealing component; the gas flow in the furnace tube can also be enhanced, thereby optimizing the heat treatment process effect. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0021] Figure 1 It is a schematic diagram of the structure of the furnace tail seal of a small-diameter furnace tube in the prior art;
[0022] Figure 2 The structure diagram of the furnace tail isolation device disclosed in the embodiment of the utility model is as follows Figure 1 ;
[0023] Figure 3 The structure diagram of the furnace tail isolation device disclosed in the embodiment of the utility model is as follows Figure 2 ;
[0024] Figure 4 The structure diagram of the air curtain device and the furnace tail flange installation disclosed in the embodiment of the utility model Figure 1 ;
[0025] Figure 5 This is a schematic diagram of the structure of the furnace tail flange disclosed in the embodiment of the utility model;
[0026] Figure 6 It is a structural schematic diagram of the air curtain device disclosed in the embodiment of the utility model;
[0027] Figure 7 The structure diagram of the air curtain device and the furnace tail flange installation disclosed in the embodiment of the utility model Figure 2 ;
[0028] Figure 8 for Figure 7 A partial enlarged view of middle A;
[0029] Fig. 9 The structure diagram of the air curtain device and the furnace tail flange installation disclosed in the embodiment of the utility model Figure 3 ;
[0030] Fig.10 The structure diagram of the furnace tail isolation device disclosed in the embodiment of the utility model is as follows Figure 3 .
[0031] Among them, 01 is the furnace tail, and 02 is the arc-shaped end cover;
[0032] 10 is a furnace tube;
[0033] 20 is the furnace tail flange, 21 is the first air pipe, 22 is the air inlet mounting groove, and 23 is the cooling channel;
[0034] 30 is an air curtain device, 31 is an air inlet, and 32 is an air outlet;
[0035] 40 is a pressure plate, 50 is a first sealing member, 60 is a quartz package, and 70 is a third sealing member;
[0036] 80 is an end cover, and 81 is a second air pipe. DETAILED DESCRIPTION
[0037] The core of the utility model is to disclose a furnace tail isolation device to increase the isolation effect between gas and furnace tail sealing components and reduce pollution to furnace tubes.
[0038] Another purpose of the utility model is to disclose a heat treatment equipment including the furnace tail isolation device.
[0039] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0040] The utility model embodiment discloses a furnace tail isolation device, which is arranged at the tail of the furnace tube 10 and is used to isolate the gas in the furnace tube 10 from the sealing component arranged at the tail of the furnace tube 10. The furnace tail isolation device includes a furnace tail flange 20 and an air curtain device 30.
[0041] like Figure 2-Figure 3 As shown, a carrier is provided in the furnace tube 10, and a substrate is placed in the carrier. Gas is introduced into the furnace tube 10 to react with the substrate. A sealing assembly is provided at the tail of the furnace tube 10, and the sealing assembly includes an end cover 80 and a furnace tail flange 20. The end cover 80 is connected to the furnace tail flange 20 and is used to seal the tail of the furnace tube 10. A second gas pipe 81 connected to the furnace tube 10 is provided on the end cover 80, and the second gas pipe 81 is used to discharge the gas in the furnace tube 10. It should be noted that the furnace tube 10 can be a quartz tube or other materials; the sealing assembly at the tail of the furnace tube 10 can be made of metal or other materials.
[0042] like Figure 2 As shown, the furnace tail flange 20 is arranged at the tail of the furnace tube 10. Figure 4-Figure 6 As shown, a first air pipe 21 is provided on the furnace tail flange 20, and the first air pipe 21 is connected to an inert gas source. The inert gas source can be nitrogen or other gases, but it is necessary to ensure that it does not react with the gas in the furnace tube 10, the substrate and the sealing component. The air curtain device 30 is fixed to the furnace tail flange 20 through a pressing plate 40. The air curtain device 30 includes an air inlet 31 and a plurality of air outlets 32. The air inlet 31 is provided on the outer wall of the air curtain device 30, and the air inlet 31 is connected to the first air pipe 21. The plurality of air outlets 32 are provided on the inner wall of the air curtain device 30.
[0043] The inert gas can enter the air curtain device 30 through the first air pipe 21 and be discharged through the air outlet 32 to form an air curtain at the tail end of the furnace tube 10. The air curtain can isolate the reaction gas or the reaction generated gas (hereinafter referred to as the heat treatment gas) in the furnace tube 10 from contacting the sealing component, thereby further ensuring the sealing effect of the furnace tube 10. If the sealing component is made of metal, on the one hand, it can reduce the occurrence of corrosion of the metal sealing component by the heat treatment gas, thereby extending the service life of the metal sealing component, and on the other hand, it can reduce the reaction between the heat treatment gas and the metal sealing component to pollute the furnace tube 10, thereby protecting the furnace tube 10.
[0044] The furnace tail isolation device disclosed in the embodiment of the utility model has a simple structure and is easy to process. It can be used not only on diffusion equipment, but also on heat treatment equipment such as LPCVD, which is not limited here. The furnace tail isolation device disclosed in the embodiment of the utility model can effectively ensure the sealing effect of the furnace tube 10; isolate the heat treatment gas from reacting with the metal sealing component to prevent metal contamination, thereby protecting the furnace tube 10; at the same time, it can enhance the gas flow in the furnace tube 10 and optimize the heat treatment process effect, such as the uniformity of the diffusion square resistance and the uniformity of the LPCVD film layer; at the same time, it provides a solution to the difficulty in manufacturing heat treatment tubes for large-diameter heat treatment equipment.
[0045] like Figure 4 and Figure 8 As shown, in a specific embodiment of the utility model, the air curtain device 30 is fixed to the furnace tail flange 20 through a pressing plate 40. Specifically, one end of the pressing plate 40 is connected to the air curtain device 30, and the other end is connected to the furnace tail flange 20 through a fastener, and the fastener can be a high-temperature bolt. The pressing plate 40 includes a plurality of pressing plates, which are arranged in an annular manner along the circumference of the furnace tail flange 20. This connection method is simple, and the plurality of pressing plates 40 arranged in an annular manner can ensure the firmness of the connection.
[0046] like Figure 5 and Fig. 9 As shown, in order to facilitate the positioning and installation of the air curtain device 30, an air inlet mounting groove 22 is provided on the furnace tail flange 20. During installation, the air inlet 31 on the air curtain device 30 is installed and matched with the air inlet mounting groove 22, so that the air inlet 31 is connected to the first air pipe 21, and then the air curtain device 30 is fixed to the furnace tail flange 20 by the pressing plate 40.
[0047] like Figure 7-Figure 8 As shown, in order to ensure the firmness of the connection between the air inlet 31 and the air inlet mounting groove 22, a first sealing member 50 is provided between the air inlet 31 and the air inlet mounting groove 22. Specifically, the first sealing member 50 may be a sealing ring.
[0048] like Figure 2As shown, in a specific embodiment of the utility model, the furnace tail isolation device also includes a quartz bag 60, which is arranged on the side of the gas curtain device 30 away from the end cover 80 and abuts against the inner wall of the furnace tube 10, thereby preventing the heat treatment gas in the furnace tube 10 from contacting the end cover 80. The quartz bag 60 and the gas curtain device 30 cooperate to form a double-layer isolation structure, which can effectively prevent the heat treatment gas from contacting the end cover 80, and the isolation effect is better.
[0049] The furnace tail isolation device disclosed in the embodiment of the utility model, the quartz package 60 includes at least one annular quartz cover plate, Figure 2 There are two quartz cover plates shown in the figure. The quartz package 60 is provided with a through hole for the second air pipe 81 to pass through. In order to ensure sealing, a fourth sealing member can be provided between the second air pipe 81 and the quartz package 60.
[0050] In a specific embodiment of the present invention, the first gas pipe 21 is connected to the furnace tail flange 20 by welding, and the welding connection method can ensure the firmness of the connection between the first gas pipe 21 and the furnace tail flange 20.
[0051] like Fig.10 As shown, in order to ensure the sealing of the connection between the furnace tail flange 20 and the furnace tube 10, a third sealing member 70 is provided between the furnace tail flange 20 and the furnace tube 10. The third sealing member 70 may be a sealing ring.
[0052] In order to cool the furnace tail flange 20 and extend the service life of the third sealing member 70 , a cooling channel 23 is provided on the furnace tail flange 20 , and a cooling medium flows in the cooling channel 23 .
[0053] The furnace tail isolation device disclosed in the embodiment of the utility model, the air curtain device 30 is an annular cavity, and multiple air outlets 32 are arranged in an annular manner along the circumference of the air curtain device 30. The multiple air outlets 32 can be evenly arranged or unevenly arranged, and those skilled in the art can make specific settings according to actual conditions.
[0054] The utility model also discloses a heat treatment device, including the furnace tail isolation device as described in the above embodiment, and thus has all the technical effects of the furnace tail isolation device, which will not be described in detail herein.
[0055] It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.
[0056] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "a kind" and / or "the" do not refer to the singular, but also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements. The elements defined by the sentence "includes a..." do not exclude the existence of other identical elements in the process, method, commodity or device that includes the elements.
[0057] In the following, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features.
[0058] This article uses specific examples to illustrate the principles and implementation methods of the utility model. The above examples are only used to help understand the core idea of the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.
Claims
1. A furnace tail isolation device, used to be arranged at the tail of a furnace tube (10), characterized in that: It includes a furnace tail flange (20) and an air curtain device (30); The furnace tail flange (20) is arranged at the rear of the furnace tube (10), and a first gas pipe (21) is arranged on the furnace tail flange (20), and the first gas pipe (21) is connected to an inert gas source; The air curtain device (30) is fixed to the furnace tail flange (20) via a pressing plate (40), the air curtain device (30) comprises an air inlet (31) and a plurality of air outlets (32), the air inlet (31) is communicated with the first air pipe (21), and the air outlets (32) are arranged on the inner wall of the air curtain device (30); one end of the pressing plate (40) is connected to the air curtain device (30), and the other end is connected to the furnace tail flange (20) via a fastener.
2. The furnace tail isolation device according to claim 1, characterized in that: An air inlet installation groove (22) is provided on the furnace tail flange (20), the first air pipe (21) extends into the air inlet installation groove (22), and the air inlet (31) is installed and matched with the air inlet installation groove (22).
3. The furnace tail isolation device according to claim 2, characterized in that: A first sealing member (50) is provided between the air inlet (31) and the air inlet mounting groove (22).
4. The furnace tail isolation device according to claim 1, characterized in that: The invention also comprises a quartz bag (60), the tail of the furnace tube (10) is provided with an end cover (80), the end cover (80) is connected to the furnace tail flange (20) and is used to seal the tail of the furnace tube (10), the end cover (80) is provided with a second air pipe (81) connected to the furnace tube (10), the quartz bag (60) is arranged on a side of the air curtain device (30) away from the end cover (80) and abuts against the inner wall of the furnace tube (10), and the quartz bag (60) is provided with a through hole for the second air pipe (81) to pass through.
5. The furnace tail isolation device according to claim 4, characterized in that: The quartz package (60) comprises at least one annular quartz cover plate.
6. The furnace tail isolation device according to claim 1, characterized in that: The first gas pipe (21) is connected to the furnace tail flange (20) by welding.
7. The furnace tail isolation device according to claim 1, characterized in that: A third sealing member (70) is provided between the furnace tail flange (20) and the furnace tube (10).
8. The furnace tail isolation device according to claim 1, characterized in that: The furnace tail flange (20) is provided with a cooling channel (23).
9. The furnace tail isolation device according to any one of claims 1 to 8, characterized in that: The air curtain device (30) is an annular cavity, and the plurality of air outlets (32) are arranged in an annular manner along the circumference of the air curtain device (30).
10. A heat treatment device, characterized in that: It comprises the furnace tail isolation device as described in any one of claims 1-9.