Cavity and reaction furnace

Abstract

The utility model relates to the technical field of photovoltaics and semiconductors, in particular to a cavity and a reaction furnace, and solves the problem that the productivity of the reaction furnace is relatively low. The cavity comprises an outer cavity body and a cooling pipeline, the shape of the cross section of the outer cavity body comprises a rectangular ring, the outer cavity body is used for containing a product, and the cooling pipeline is arranged on the outer side of the outer cavity body and used for containing a cooling medium. Compared with a circular cavity, the rectangular cavity can contain more products, so that the bearing capacity of the inner cavity is improved, and the productivity of the reaction furnace is improved. In addition, the cooling medium in the cooling pipeline can accelerate cooling of the cavity, so that the cooling efficiency of the reaction furnace is improved, the cooling time of the reaction furnace is shortened, the production efficiency of the reaction furnace is improved, and the productivity of the reaction furnace is further improved.

Description

Technical Field

[0001] The present disclosure relates to the field of photovoltaic and semiconductor technology, and in particular to a cavity and a reaction furnace. Background Art

[0002] Currently, in the manufacturing equipment of the photovoltaic and semiconductor industries, the most common reactor cavity is a circular cavity. Since the circular cavity occupies a large space and has a small carrying space, the cavity has a small carrying capacity for products, which in turn leads to a small production capacity of the reactor. In addition, the current cooling method of the reactor mostly uses a static natural cooling method to slowly cool the reactor to room temperature. The cooling time of the reactor is long and the cooling efficiency is low, which leads to low production efficiency and small production capacity of the reactor. Utility Model Content

[0003] In view of this, the embodiments of the present disclosure provide a chamber and a reactor, which solve the problem of low production capacity of the reactor.

[0004] In a first aspect, an embodiment of the present disclosure provides a cavity for use in a reaction furnace; wherein the cavity comprises: an outer cavity extending along the first direction, the cross-sectional shape of the outer cavity comprising a rectangular ring, the outer cavity being configured to accommodate a product; a cooling pipe disposed on the outside of the outer cavity and configured to accommodate a cooling medium; the reaction furnace comprises: at least one heating element disposed on the inside of the outer cavity and configured to heat the space within the cavity.

[0005] In some embodiments, the cooling pipeline has a medium input port and a medium output port, and the cooling medium flows into the cooling pipeline from the medium input port and flows out of the cooling pipeline from the medium output port.

[0006] In some embodiments, the cooling pipe includes: a plurality of first pipes, the plurality of first pipes are arranged in parallel and are all connected to the outside of the outer cavity; a plurality of second pipes, the second pipes are connected to adjacent first pipes and are all connected to the outside of the outer cavity; wherein the first pipes extend along the first direction, and the extension direction of the second pipes intersects with the first direction.

[0007] In some embodiments, the cavity further includes: a plurality of reinforcing ribs, wherein the plurality of reinforcing ribs are all connected to the outer side of the outer cavity, wherein the reinforcing ribs are arranged crosswise with the first pipe.

[0008] In some embodiments, the cavity further includes: an inner cavity extending along the first direction, the cross-section of the inner cavity comprising a rectangular ring, the outer cavity further configured to accommodate the inner cavity, and the inner cavity configured to accommodate the product.

[0009] In some embodiments, the cavity further includes: at least one support member, which is disposed at the bottom of the outer cavity on one side close to the inner cavity and is configured to support the inner cavity, and the support member extends along the first direction.

[0010] In some embodiments, the cavity also includes: at least one first guide member, which is arranged at the bottom and / or top of the side of the outer cavity close to the inner cavity and extends along the first direction, and is configured to guide the movement of the inner cavity so that the inner cavity can enter and exit the outer cavity along the first direction.

[0011] In some embodiments, the first guide member has a first guide surface, the first guide surface is a vertical plane, the first guide surface extends along the first direction, and during the process of the inner cavity entering and exiting the outer cavity, the first guide surface is slidably connected to the side of the inner cavity.

[0012] In some embodiments, the number of the support members is at least two, and the number of the first guide members is multiple; wherein, at least two of the support members are arranged opposite to each other, and at least two of the support members respectively support the two sides of the bottom of the inner cavity; multiple first guide members are respectively arranged at the bottom and top of one side of the outer cavity close to the inner cavity, and multiple first guide members are symmetrically arranged relative to the inner cavity.

[0013] In some embodiments, the cavity is applied to a reaction furnace, and the reaction furnace includes: a heating element; wherein the first guide element also has a first mounting surface and a second guide surface, the first mounting surface is a horizontal plane, the second guide surface is a vertical plane, the first mounting surface connects the first guide surface and the second guide surface, and the first mounting surface and the second guide surface both extend along the first direction; wherein the heating element is arranged between two first mounting surfaces arranged opposite to each other in the vertical direction.

[0014] In some embodiments, the cavity further includes: a plurality of second guide members, the second guide members extending along the first direction, wherein at least two of the second guide members are arranged at the bottom or top of the side of the outer cavity close to the inner cavity, and at least one of the heating elements is arranged between the two second guide members at the bottom of the outer cavity or between the two second guide members at the top of the outer cavity.

[0015] In a second aspect, an embodiment of the present disclosure provides a reaction furnace, comprising: a cavity as described in the first aspect, configured to accommodate a product; at least one heating element, which is arranged on the inner side of an outer cavity of the cavity and configured to heat the space within the cavity; and a furnace door, configured to open or close the cavity.

[0016] The cavity provided in the embodiment of the present disclosure is a rectangular cavity. Since the rectangular cavity has a larger carrying space than the circular cavity, the cavity can carry more products, thereby increasing the carrying capacity of the cavity, thereby increasing the carrying capacity of the reactor, and further increasing the production capacity of the reactor.

[0017] In addition, the cooling medium in the cooling pipe can accelerate the cooling of the cavity to improve the cooling efficiency of the reactor and shorten the cooling time of the reactor, so as to facilitate faster removal of products from the reactor and delivery of products into the reactor, thereby improving the production efficiency of the reactor and further increasing the production capacity of the reactor. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 The figure shows a schematic diagram of the structure of a reaction furnace provided by an embodiment of the present disclosure excluding a furnace door.

[0019] Figure 2 The figure is a schematic structural diagram of a cavity provided by an embodiment of the present disclosure excluding an inner cavity.

[0020] Figure 3 Shown is a schematic structural diagram of a cavity provided in one embodiment of the present disclosure.

[0021] Figure 4 Shown is a partial enlarged view of the cavity in area A provided in one embodiment of the present disclosure.

[0022] Figure 5 Shown is a schematic structural diagram of an outer cavity and a heating element provided in an embodiment of the present disclosure.

[0023] Figure 6 The figure shows a side view of a cavity provided by an embodiment of the present disclosure excluding an inner cavity.

[0024] Figure 7 Shown is a side view of a reaction furnace provided in one embodiment of the present disclosure.

[0025] Figure 8 Shown is a cross-sectional view of a reaction furnace provided in one embodiment of the present disclosure.

[0026] Reference numerals:

[0027] 1. Reactor; 10. Cavity; 100. Inner cavity; 101. First opening; 200. Outer cavity; 201. Second opening; 202. Third opening; 203. Gas input port; 300. Cooling pipe; 301. Medium input port; 302. Medium output port; 310. First pipe; 320. Second pipe; 400. Reinforcement rib; 500. Support member; 501. Support surface; 600. First guide member; 601. First guide surface; 602. First mounting surface; 603. Second guide surface; 700. Second guide member; 800. Fixing member; 20. Heating member; 30. Furnace door; 3001. First furnace door; 3002. Second furnace door; 40. Exhaust flange; 50. Gas pipeline; 60. Sealing flange; 70. Aviation plug. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0029] Currently, in the manufacturing equipment of the photovoltaic and semiconductor industries, the most common reactor cavity is a circular cavity. Since the circular cavity occupies a large space and has a small carrying space, the cavity has a small carrying capacity for products, which in turn leads to a small production capacity of the reactor. In addition, the current cooling method of the reactor mostly uses a static natural cooling method to slowly cool the reactor to room temperature. The cooling time of the reactor is long and the cooling efficiency is low, which leads to low production efficiency and small production capacity of the reactor.

[0030] In addition, when the production capacity of the reactor remains unchanged, the circular cavity occupies a large space, resulting in low production capacity per unit area of ​​the reactor.

[0031] In view of the above problems, an embodiment of the present disclosure provides a cavity, which is applied to a reaction furnace, and the cavity includes an outer cavity and a cooling pipe, the outer cavity extends along a first direction, the cross-section of the outer cavity includes a rectangular ring, and the outer cavity is configured to accommodate a product. The cooling pipe is arranged on the outside of the outer cavity and is configured to accommodate a cooling medium. The reaction furnace includes at least one heating element, which is arranged on the inside of the outer cavity and is configured to heat the space in the cavity.

[0032] The cavity provided in the embodiment of the present disclosure is a rectangular cavity. Since the rectangular cavity has a larger carrying space than the circular cavity, the cavity can carry more products, thereby increasing the carrying capacity of the cavity, thereby increasing the carrying capacity of the reactor, and further increasing the production capacity of the reactor.

[0033] In addition, the cooling medium in the cooling pipe can accelerate the cooling of the cavity to improve the cooling efficiency of the reactor and shorten the cooling time of the reactor, so as to facilitate faster removal of products from the reactor and delivery of products into the reactor, thereby improving the production efficiency of the reactor and further increasing the production capacity of the reactor.

[0034] In addition, since the rectangular cavity occupies less space than the circular cavity, the floor area of ​​the reactor can be reduced, thereby further improving the production capacity per unit area of ​​the reactor when the production capacity of the reactor is increased.

[0035] The specific structures of the chamber and the reaction furnace are described below in conjunction with the embodiments.

[0036] Figure 1 The figure shows a schematic diagram of the structure of a reaction furnace provided by an embodiment of the present disclosure excluding a furnace door. Figure 5 FIG. 1 is a schematic diagram of the structure of the outer cavity and the heating element provided in one embodiment of the present disclosure. Figure 1 and Figure 5 As shown, the cavity 10 is applied to the reaction furnace 1. The cavity 10 includes an outer cavity 200 and a cooling pipe 300. The outer cavity 200 extends along a first direction X1, and the shape of the cross section of the outer cavity 200 includes a rectangular ring, and the outer cavity 200 is configured to accommodate a product. The cooling pipe 300 is arranged outside the outer cavity 200 and is configured to accommodate a cooling medium. The reaction furnace 1 includes at least one heating element 20, which is arranged inside the outer cavity 200 and is configured to heat the space inside the cavity 10.

[0037] For example, the cooling pipe 300 may be connected to the outside of the outer cavity 200. The cooling pipe 300 may also be close to the outside of the outer cavity 200 and not connected to the outer cavity 200.

[0038] Exemplarily, the cooling pipe 300 is arranged at the top of the outer cavity 200, the bottom of the outer cavity 200, and the two sides of the outer cavity 200 extending along the first direction X1. The cooling medium in the cooling pipe 300 can simultaneously cool the top of the outer cavity 200, the bottom of the outer cavity 200, and the two sides of the outer cavity 200 extending along the first direction X1, so as to improve the cooling efficiency of the outer cavity 200, thereby improving the cooling efficiency of the cavity 10.

[0039] The cooling medium can be water, salt water, trinitrile aqueous solution or other liquids with cooling effect.

[0040] The cavity 10 provided in the embodiment of the present disclosure is a rectangular cavity 10. Since the rectangular cavity 10 has a larger carrying space than the circular cavity, the cavity 10 can carry more products, thereby increasing the carrying capacity of the cavity 10, thereby increasing the carrying capacity of the reactor 1, and further increasing the production capacity of the reactor 1.

[0041] In addition, the cooling medium in the cooling pipe 300 can accelerate the cooling of the outer cavity 200 to improve the cooling efficiency of the reactor 1 and shorten the cooling time of the reactor 1, so as to facilitate faster removal of the products in the reactor 1 and delivery of the products into the reactor 1, thereby improving the production efficiency of the reactor 1 and further improving the production capacity of the reactor 1.

[0042] In addition, since the rectangular cavity 10 occupies less space than the circular cavity, the floor area of ​​the reactor 1 can be reduced, thereby further improving the production capacity per unit area of ​​the reactor 1 when the production capacity of the reactor 1 is increased.

[0043] In some embodiments, Figure 2 As shown, the cooling pipe 300 has a medium inlet 301 and a medium outlet 302 . The cooling medium flows into the cooling pipe 300 from the medium inlet 301 and flows out of the cooling pipe 300 from the medium outlet 302 .

[0044] Exemplarily, the medium input port 301 and the medium output port 302 are respectively connected to the peripheral cold water circulation system, and the peripheral cold water circulation system delivers cold water from the medium input port 301 into the cooling pipe 300, and the water flows through the cooling pipe 300 and flows out of the cooling pipe 300 from the medium output port 302. The outer cavity 200 is cooled by the circulating cold water to further improve the cooling efficiency of the outer cavity 200, thereby further shortening the cooling time of the reactor 1, so as to more quickly take out the products in the reactor 1 and deliver the products into the reactor 1, thereby further improving the production efficiency of the reactor 1, and further improving the production capacity of the reactor 1.

[0045] Exemplarily, cold water is circulated into the cooling pipe 300 to cool the outer cavity 200 , so that the temperature of the outer cavity 200 can be maintained below 60° C., thereby reducing the mechanical strength attenuation of the outer cavity 200 due to the temperature.

[0046] In addition, since the cooling pipe 300 is disposed outside the outer cavity 200 , it is possible to prevent the cooling medium from taking away the heat in the cavity 10 during a high-temperature process.

[0047] In some embodiments, Figure 2As shown, the cooling pipe 300 includes a plurality of first pipes 310 and a plurality of second pipes 320. The plurality of first pipes 310 are arranged in parallel, and each first pipe 310 is connected to the outside of the outer cavity 200. The second pipes 320 communicate with adjacent first pipes 310, and each second pipe 320 is connected to the outside of the outer cavity 200. The first pipes 310 extend along the first direction X1, and the extending direction of the second pipes 320 intersects with the first direction X1.

[0048] Exemplarily, the first pipe 310 extends along the first direction X1, and the first pipe 310 extends from one end of the outer side of the outer cavity 200 to the other end to ensure that the length of the first pipe 310 is long, so that the cooling medium can flow from one end of the outer cavity 200 to the other end of the outer cavity 200 along the first direction X1 to ensure the best cooling effect.

[0049] In addition, the first pipe 310 can also enhance the mechanical strength of the outer cavity 200 along the first direction X1. The second pipe 320 can also enhance the mechanical strength of the outer cavity 200 along a direction intersecting the first direction X1.

[0050] In some embodiments, Figure 1 to Figure 2 As shown, the cavity 10 further includes a plurality of reinforcing ribs 400 , and the plurality of reinforcing ribs 400 are all connected to the outer side of the outer cavity 200 , and the reinforcing ribs 400 are cross-arranged with the first pipe 310 .

[0051] The first pipe 310 can be used to strengthen the mechanical strength of the outer cavity 200 along the first direction X1, and the reinforcing ribs 400 and the second pipe 320 can be used to strengthen the mechanical strength of the outer cavity 200 along the direction intersecting with the first direction X1, thereby achieving the reinforcement of the mechanical strength of the outer cavity 200 along multiple directions, and further increasing the atmospheric pressure that the outer cavity 200 withstands in a vacuum environment, so as to reduce the deformation of the outer cavity 200.

[0052] Exemplarily, the second pipe 320 and the reinforcing rib 400 both extend in a direction perpendicular to the first direction X1.

[0053] Exemplarily, each reinforcing rib 400 is annularly arranged on the top of the outer cavity 200, the bottom of the outer cavity 200, and the two side portions of the outer cavity 200 extending along the first direction X1, and the plurality of reinforcing ribs 400 are arranged at intervals along the first direction X1. The reinforcing ribs 400 and the second pipes 320 on the same side of the outer cavity 200 are perpendicular to each other, and each first pipe 310 passes through the plurality of reinforcing ribs 400 arranged at intervals in sequence.

[0054] Exemplarily, the outer cavity 200 further has a third opening 202 , and the third opening 202 is arranged opposite to the second opening 201 .

[0055] In some embodiments, Figure 1 As shown, the cavity 10 further includes an inner cavity 100, which extends along a first direction X1, and a cross-sectional shape of the inner cavity 100 includes a rectangular ring. The outer cavity 200 is further configured to accommodate the inner cavity 100, and the inner cavity 100 is configured to accommodate a product.

[0056] Exemplarily, the inner cavity 100 has a first opening 101, and the product enters and exits the inner cavity 100 through the first opening 101. The outer cavity 200 has a second opening 201, and the inner cavity 100 enters and exits the outer cavity 200 through the second opening 201. When the outer cavity 200 accommodates the inner cavity 100, the first opening 101 is close to the second opening 201.

[0057] In some embodiments, the cavity 10 further includes at least one support member 500 , which is disposed at the bottom of the outer cavity 200 on a side close to the inner cavity 100 and configured to support the inner cavity 100 . The support member 500 extends along the first direction X1 .

[0058] Exemplarily, the cross-sectional shape of the support member 500 is n-shaped, and the support member 500 has a support surface 501, which is a horizontal plane and extends along the first direction X1. The support surface 501 is used to support the inner cavity 100 to ensure that the inner cavity 100 is placed horizontally in the outer cavity 200.

[0059] In some embodiments, the cavity 10 also includes a first guide member 600, which is disposed at the bottom or top of a side of the outer cavity 200 close to the inner cavity 100, and the first guide member 600 extends along a first direction X1. The first guide member 600 is configured to guide the movement of the inner cavity 100 so that the inner cavity 100 can enter and exit the outer cavity 200 along the first direction X1.

[0060] In some embodiments, the cavity 10 also includes two first guide members 600, which are respectively arranged at the bottom and top of the side of the outer cavity 200 close to the inner cavity 100, and the two first guide members 600 are arranged opposite to each other, and the first guide members 600 extend along the first direction X1. The first guide members 600 are configured to guide the movement of the inner cavity 100, so that the inner cavity 100 can enter and exit the outer cavity 200 along the first direction X1.

[0061] In some embodiments, the cavity 10 further includes two first guide members 600, which are respectively disposed at the bottom of the outer cavity 200 on one side close to the inner cavity 100, and the two first guide members 600 are disposed opposite to each other, and the first guide members 600 extend along the first direction X1, and the first guide members 600 are configured to guide the movement of the inner cavity 100, so that the inner cavity 100 can enter and exit the outer cavity 200 along the first direction X1. Exemplarily, the first guide member 600 can be connected to the support member 500.

[0062] In some embodiments, the cavity 10 also includes two first guide members 600, which are respectively arranged at the top of one side of the outer cavity 200 close to the inner cavity 100, and the two first guide members 600 are arranged opposite to each other, and the first guide members 600 extend along the first direction X1. The first guide members 600 are configured to guide the movement of the inner cavity 100 so that the inner cavity 100 can enter and exit the outer cavity 200 along the first direction X1.

[0063] The first guide member 600 is used to guide the movement of the inner cavity 100 to improve the movement accuracy of the inner cavity 100 and prevent the inner cavity 100 from colliding with the outer cavity 200 when entering and exiting the outer cavity 200, thereby preventing the inner cavity 100 and the outer cavity 200 from being damaged.

[0064] In some embodiments, Figures 2 to 4 As shown, the first guide member 600 has a first guide surface 601, which is a vertical plane and extends along the first direction X1. When the inner cavity 100 enters and exits the outer cavity 200, the first guide surface 601 is slidably connected to the side of the inner cavity 100.

[0065] In some embodiments, the number of the support members 500 is at least two, and the number of the first guide members 600 is multiple. At least two support members 500 are arranged opposite to each other, and at least two support members 500 respectively support both sides of the bottom of the inner cavity 100. Multiple first guide members 600 are respectively arranged at the bottom and top of one side of the outer cavity 200 close to the inner cavity 100, and the multiple first guide members 600 are symmetrically arranged relative to the inner cavity 100.

[0066] For example, Figures 3 to 6As shown, the number of the support members 500 is two, and the number of the first guide members 600 is four. The two support members 500 are arranged oppositely, and the two support members 500 bear the two sides of the bottom of the inner cavity 100 respectively. The two first guide members 600 are arranged oppositely at the bottom of the outer cavity 200 on the side close to the inner cavity 100, and the other two first guide members 600 are arranged oppositely at the top of the outer cavity 200 on the side close to the inner cavity 100. The two first guide members 600 at the top and bottom of the same side of the outer cavity 200 are arranged oppositely. In the process of the inner cavity 100 entering and exiting the outer cavity 200, the first guide surfaces 601 of the four first guide members 600 are respectively slidably connected with the two side surfaces of the top of the inner cavity 100 and the two side surfaces of the bottom of the inner cavity 100, so as to realize the movement guidance of the four first guide members 600 to the inner cavity 100, so as to further improve the movement accuracy of the inner cavity 100, thereby improving the installation accuracy of the inner cavity 100. When the inner cavity 100 moves to the right position, the fixing member 800 is used to fix the inner cavity 100 and the outer cavity 200 to prevent the inner cavity 100 from shifting.

[0067] In some embodiments, Figures 3 to 5 As shown, the reaction furnace 1 includes a heating element 20, and the first guide element 600 further has a first mounting surface 602 and a second guide surface 603. The first mounting surface 602 is a horizontal plane, and the second guide surface 603 is a vertical plane. The first mounting surface 602 connects the first guide surface 601 and the second guide surface 603. The first mounting surface 602 and the second guide surface 603 both extend along the first direction X1. The heating element 20 is arranged between the two first mounting surfaces 602 arranged opposite to each other in the vertical direction.

[0068] Exemplarily, the reaction furnace 1 includes two heating elements 20, and the two heating elements 20 are arranged vertically. The heating element 20 enters and exits the outer cavity 200 through the third opening 202. In the process of the heating element 20 entering and exiting the outer cavity 200, the heating element 20 is slidably connected with the second guide surface 603, and the second guide surface 603 is used to guide the movement of the heating element 20 to improve the movement accuracy of the heating element 20, thereby improving the installation accuracy of the heating element 20. When the heating element 20 moves to the right position, the heating element 20 is connected to the first guide member 600.

[0069] In some embodiments, the cavity 10 further includes two second guide members 700 extending along the first direction X1, the two second guide members 700 are arranged at the bottom of the outer cavity 200 on one side close to the inner cavity 100, and a heating member 20 is horizontally arranged between the two second guide members 700.

[0070] In some embodiments, the cavity 10 also includes two second guide members 700, which extend along the first direction X1. The two second guide members 700 are arranged at the top of one side of the outer cavity 200 close to the inner cavity 100, and a heating element 20 is horizontally arranged between the two second guide members 700.

[0071] In some embodiments, Figure 2 , Figure 5 and Figure 6 As shown, the cavity 10 further includes a plurality of second guide members 700, and the second guide members 700 extend along the first direction X1. Two second guide members 700 are arranged at the bottom of the outer cavity 200 on the side close to the inner cavity 100, two second guide members 700 are arranged at the top of the outer cavity 200 on the side close to the inner cavity 100, one heating member 20 is horizontally arranged between the two second guide members 700 at the bottom of the outer cavity 200, and one heating member 20 is horizontally arranged between the two second guide members 700 at the top of the outer cavity 200.

[0072] When the heating element 20 enters and exits the outer cavity 200, the two sides of the heating element 20 are slidably connected to the two second guide members 700 respectively, so that the second guide members 700 can guide the movement of the heating element 20, thereby improving the movement accuracy of the heating element 20 and thus improving the installation accuracy of the heating element 20.

[0073] Exemplarily, the reactor 1 includes two vertically arranged heating elements 20 and two horizontally arranged heating elements 20. The four heating elements 20 are used to heat the two side surfaces of the inner cavity 100 extending along the first direction X1, the top of the inner cavity 100, and the bottom of the inner cavity 100 at the same time, so as to improve the heating efficiency and shorten the heating time, so that the inner cavity 100 can be heated to the preset temperature in a shorter time, thereby improving the production efficiency of the reactor 1 and further improving the production capacity of the reactor 1.

[0074] Figure 7 FIG. 1 is a schematic diagram of the structure of a reactor provided by an embodiment of the present disclosure. Figure 7 As shown, the reaction furnace 1 includes: the cavity 10 mentioned in the above embodiment, at least one heating element 20 and a furnace door 30, the cavity 10 is configured to accommodate the product, the heating element 20 is arranged on the inner side of the outer cavity 200 of the cavity 10, the heating element 20 is configured to heat the space in the cavity 10, and the furnace door 30 is configured to open or close the cavity 10.

[0075] For example, Figure 1 As shown, the reaction furnace 1 further includes an exhaust flange 40 , which connects the cavity 10 with a vacuum pump. The vacuum pump is used to exhaust the pressure in the cavity 10 to a preset value to meet the process requirements.

[0076] For example, Figure 7 As shown, the furnace door 30 includes a first furnace door 3001 and a second furnace door 3002 . The first furnace door 3001 is used to open or close the second opening 201 , and the second furnace door 3002 is used to open or close the third opening 202 .

[0077] For example, Figure 1 As shown, the reactor 1 further includes a gas pipeline 50, which is disposed between the inner cavity 100 and the outer cavity 200 and is close to the first opening 101. The outer cavity 200 is provided with a gas input port 203, one end of the gas pipeline 50 is connected to the gas input port 203, and the other end of the gas pipeline 50 penetrates the inner cavity 100. The process gas enters the gas pipeline 50 from the gas input port 203, and flows through the gas pipeline 50 and then enters the inner cavity 100, so that the reactor 1 can process the product.

[0078] For example, Figure 7 and Figure 8 As shown, when the heating element 20 and the inner cavity 100 are installed, the first furnace door 3001 and the second furnace door 3002 are closed, and the sealing flange 60 is installed on the second furnace door 3002, and the aviation plug 70 is connected to the sealing flange 60 to seal the cavity 10.

[0079] In the embodiments of the present disclosure, if not clearly defined, the connection may be in the form of detachable connection using bolts and nuts, screws, buckles, magnets, etc. In some connections, if there is no special requirement for non-detachable matching, non-detachable connection may be achieved by welding, bonding, etc.

[0080] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0081] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0082] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0083] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0084] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A cavity, characterized in that: Applied to reactors; Wherein, the cavity comprises: an outer cavity extending along a first direction, the cross-section of the outer cavity having a shape comprising a rectangular ring, and the outer cavity being configured to contain a product; A cooling pipe, disposed outside the outer cavity and configured to contain a cooling medium; The reactor comprises: At least one heating element is disposed inside the outer cavity and is configured to heat the space inside the cavity.

2. The cavity according to claim 1, characterized in that: The cooling pipeline has a medium input port and a medium output port. The cooling medium flows into the cooling pipeline from the medium input port and flows out of the cooling pipeline from the medium output port.

3. The cavity according to claim 1, characterized in that: The cooling pipeline comprises: A plurality of first pipelines, wherein the plurality of first pipelines are arranged in parallel and are all connected to the outer side of the outer cavity; a plurality of second pipes, wherein the second pipes are connected to adjacent first pipes and are all connected to the outside of the outer cavity; The first pipeline extends along the first direction, and the extension direction of the second pipeline intersects with the first direction.

4. The cavity according to claim 3, characterized in that: Also includes: A plurality of reinforcing ribs are provided, and the plurality of reinforcing ribs are all connected to the outer side of the outer cavity, wherein the reinforcing ribs are arranged crosswise with the first pipe.

5. The cavity according to any one of claims 1 to 4, characterized in that: Also includes: The inner cavity extends along the first direction, the cross-section of the inner cavity comprises a rectangular ring, the outer cavity is further configured to accommodate the inner cavity, and the inner cavity is configured to accommodate the product.

6. The cavity according to claim 5, characterized in that: Also includes: At least one support member is disposed at the bottom of the outer cavity on one side close to the inner cavity, and is configured to support the inner cavity. The support member extends along the first direction.

7. The cavity according to claim 6, characterized in that: Also includes: At least one first guide member is arranged at the bottom and / or top of one side of the outer cavity close to the inner cavity and extends along the first direction, and is configured to guide the movement of the inner cavity so that the inner cavity can enter and exit the outer cavity along the first direction.

8. The cavity according to claim 7, characterized in that: The first guide member has a first guide surface, which is a vertical plane and extends along the first direction. When the inner cavity moves into and out of the outer cavity, the first guide surface is slidably connected to the side surface of the inner cavity.

9. The cavity according to claim 8, characterized in that: The number of the supporting members is at least two, and the number of the first guiding members is multiple; Wherein, at least two of the support members are arranged opposite to each other, and at least two of the support members respectively support two sides of the bottom of the inner cavity; The plurality of first guide members are respectively arranged at the bottom and the top of the outer cavity on one side close to the inner cavity, and the plurality of first guide members are symmetrically arranged relative to the inner cavity.

10. The cavity according to claim 9, characterized in that: The first guide member further comprises a first mounting surface and a second guiding surface, the first mounting surface is a horizontal plane, the second guiding surface is a vertical plane, the first mounting surface connects the first guiding surface and the second guiding surface, and the first mounting surface and the second guiding surface both extend along the first direction; Wherein, the heating element is arranged between two first mounting surfaces which are arranged opposite to each other in the vertical direction.

11. The chamber according to claim 10, characterized in that: Also includes: A plurality of second guide members, wherein the second guide members extend along the first direction, wherein at least two of the second guide members are arranged at the bottom or top of the side of the outer cavity close to the inner cavity, and at least one of the heating members is arranged between the two second guide members at the bottom of the outer cavity or between the two second guide members at the top of the outer cavity.

12. A reaction furnace, characterized in that: include: The cavity according to any one of claims 1 to 11, configured to contain a product; at least one heating element, the heating element being disposed inside the outer cavity of the cavity and configured to heat the space inside the cavity; The furnace door is configured to open or close the cavity.

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