Fixture for X-ray inspection in Z direction of integrated circuit
By designing a fixture that includes a base and crossbar assembly, the complexity of fixtures and pin damage in the Z-direction X-ray inspection of integrated circuits is solved, and efficient, fast and safe integrated circuit inspection is achieved, suitable for large-scale inspections.
Patent Information
- Application Number
- CN202421411016.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-20
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-06-20
AI Technical Summary
The prior art has the problem of complex fixture production and difficulty in putting it into production in the X-ray inspection of integrated circuits. The existing methods are prone to damage pins or residual colloids when removing integrated circuits, affecting the test results and equipment maintenance.
A fixture including a base and a cross bar assembly is designed. The base consists of a chassis, a frame, a rear frame and a front eaves cover. The cross bar assembly is translated and fixed by the cooperation between the ball and the chassis, the roller and the guide rail. Anti-static foam cotton is used as a buffer layer to ensure the stability and safety of the integrated circuit.
It realizes the efficiency, speed and safety of the integrated circuit Z-direction X-ray inspection, avoids pin damage and colloid residue, and is suitable for inspection of large-scale integrated circuits, improving test efficiency and reducing electrostatic risk.
Smart Images
Figure CN222661474U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to integrated circuit inspection, in particular to a clamp used for integrated circuit Z-direction X-ray inspection. Background Art
[0002] In the DPA test and the first screening process of the integrated circuit, X-ray inspection, as a non-destructive test, can detect various process defects such as bond wire breakage, chip bonding voids, plastic packaging material voids, bond wire collapse, debonding, etc. without destroying the integrated circuit. Due to the particularity of the defect location and its morphology, the inspection of the integrated circuit cannot be limited to a single inspection in the Y direction. The inspection in the Z direction is more targeted at bond wire collapse, internal excess, excessive chip undercut, and adhesive material accumulation.
[0003] The integrated circuit Z-direction inspection schemes found in the literature often have complex manufacturing processes and are difficult to actually put into production. The prior art generally uses a relatively primitive fixing or clamping method to keep the integrated circuit upright for X-ray inspection in the Z direction. For example, using double-sided tape to stick the integrated circuit to a fixed object, although this method is convenient and fast, it is easy to damage the integrated circuit pins or cause irreparable deformation of the pins when removing the integrated circuit. At the same time, colloid will remain on the adhesive surface of the removed integrated circuit, affecting the appearance of the integrated circuit and subsequent use. Cleaning the residual glue of the integrated circuit will also increase the time and cost of the test. Another example is to cut openings on the anti-static foam with a knife, and then place the integrated circuit in the opening of the anti-static foam with the Z direction facing upward. The advantage of this method is that it is highly efficient, will not damage the pins of the integrated circuit, and will not leave any colloid residue. The disadvantage is that it cannot fix and limit the integrated circuit. Therefore, during the transportation of the anti-static foam and the inertia of the movement of the tray inside the X-ray equipment during the test, the integrated circuit placed in the opening of the anti-static foam will become crooked and cannot be guaranteed to be completely vertical, which will undoubtedly increase the frequency of adjusting the lens angle during the test, which not only reduces the test efficiency, but also affects the accuracy of the test results. Both of the above methods cannot meet the requirements of batch inspection of hundreds or thousands of devices.
[0004] In view of the above-mentioned deficiencies in the prior art, the utility model proposes a fixture for X-ray inspection of integrated circuits in the Z direction, which has a simple structure, is convenient to maintain, is easy to operate, and is efficient and quick. Utility Model Content
[0005] The utility model aims to provide a fixture for X-ray inspection of integrated circuits in the Z direction, which has the advantages of simple structure, convenient maintenance, easy operation and high efficiency and speed.
[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0007] A fixture for X-ray inspection of integrated circuits in the Z direction, comprising a base and a crossbar assembly, characterized in that the base comprises a chassis, a frame, a rear frame and a front eaves cover, a pair of frames are arranged on the two side edges of the chassis, the rear frame is arranged on the rear edge of the chassis, the two ends of the rear frame are respectively connected to the rear ends of the two frames, the front eaves cover is detachably connected to the front end of the frame, a strip through hole is arranged on the frame, a guide rail is arranged on the inner side surface of the frame, anti-static foam cotton is applied on the inner side surface of the rear frame, there are more than two crossbar assemblies, the crossbar assembly comprises a base, a roller, a through hole and a ball are arranged on the base, anti-static foam cotton is applied on the front and rear end surfaces of the base, the crossbar assembly is translated back and forth on the base through the cooperation of the ball and the chassis and the cooperation of the roller and the guide rail, a device under test station is formed between adjacent bases and between the rear frame and adjacent bases, and the crossbar assembly is fixed to the base through the cooperation of screws, through holes, strip through holes and nuts.
[0008] Furthermore, the number of the crossbar assemblies is 4 to 6.
[0009] Furthermore, reinforcing ribs are arranged on the chassis.
[0010] Furthermore, the front eave cover is connected to the front end of the frame through an optical axis fixing ring.
[0011] When the utility model is working, a certain gap can be maintained between the sliding crossbar and the side of the chassis with anti-static foam cotton. The specific gap size is determined by the size and thickness of the integrated circuit itself, and then the integrated circuit is placed in the gap with one side of the Z direction facing downward, so that the integrated circuit remains in an inclined state. Then, according to the above placement method, other integrated circuits can be placed in the gap in rows at a certain interval according to needs. After the placement of this row is completed, the crossbar can continue to slide to reduce the gap until the integrated circuits in this row stand upright and are perpendicular to the bottom surface of the chassis. Then the crossbar assembly is fixed on the base through the cooperation of screws, through holes, strip through holes and nuts.
[0012] The utility model can be used to place a large number of integrated circuits, which greatly improves the test efficiency. The chassis and the crossbar are made of anti-static plastic material as a whole to prevent static breakdown and damage to static sensitive devices during the test. At the same time, anti-static foam cotton with a soft texture and low hardness is used as a buffer layer to release the clamping stress, effectively ensuring that the pins of the integrated circuit will not be squeezed by excessive stress and deformed and damaged.
[0013] The utility model has the advantages of simple structure, convenient maintenance, easy operation, high efficiency and fast operation. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 It is a schematic diagram of the structure of the utility model;
[0015] Figure 2 for Figure 1 Left view of;
[0016] Figure 3 for Figure 1 A top view of
[0017] Figure 4 This is a schematic diagram of the chassis structure of the utility model;
[0018] Figure 5 for Figure 4 Rear view of
[0019] Figure 6 This is a schematic diagram of the structure of the crossbar assembly of the utility model;
[0020] Figure 7 for Figure 6 Top view of the .
[0021] In the figure, 1-base; 1.1-chassis; 1.1.1-reinforcement ribs; 1.2-frame; 1.2.1-strip through holes; 1.2.2-guide rails; 1.3-rear frame; 1.4-front eaves cover; 2-crossbar assembly; 2.1-base; 2.2-roller; 2.3-through holes; 2.4-ball bearing; 3-antistatic foam cotton; 4-device under test station; 5-screw; 6-nut; 7-optical axis fixing ring. DETAILED DESCRIPTION
[0022] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the embodiments should not be construed as limiting the present invention.
[0023] As shown in the figure, a fixture for X-ray inspection of integrated circuits in the Z direction includes a base 1 and a crossbar assembly 2. The base 1 includes a chassis 1.1, a frame 1.2, a rear frame 1.3 and a front eaves cover 1.4. A pair of frames 1.2 are arranged on the two side edges of the chassis 1.1, and the rear frame 1.3 is arranged on the rear edge of the chassis 1.1. The two ends of the rear frame 1.3 are respectively connected to the rear ends of the two frames 1.2, and the front eaves cover 1.4 is detachably connected to the front end of the frame 1.2. A strip through hole 1.2.1 is arranged on the frame 1.2, a guide rail 1.2.2 is arranged on the inner side of the frame 1.2, and an anti-static foam is laid on the inner side of the rear frame 1.3. Foam cotton 3, there are more than two crossbar components 2, the crossbar components 2 include a base 2.1, the base 2.1 is provided with rollers 2.2, through holes 2.3 and balls 2.4, the front and rear end surfaces of the base 2.1 are coated with anti-static foam cotton 3, the crossbar component 2 is translated back and forth on the base 1 through the cooperation of the balls 2.4 and the chassis 1.1 and the cooperation of the rollers 2.2 and the guide rails 1.2.2, and a device under test station 4 is formed between adjacent bases 2.1 and between the rear frame 1.3 and the adjacent bases 2.1, and the crossbar component 2 is fixed to the base 1 by the cooperation of the screws 5, the through holes 2.3, the strip through holes 1.2.1 and the nuts 6.
[0024] A preferred embodiment is: in the above scheme, the number of the crossbar assemblies 2 is 4 to 6.
[0025] A preferred embodiment is: in the above solution, reinforcing ribs 1.1.1 are provided on the chassis 1.1.
[0026] A preferred embodiment is: in the above solution, the front eave cover 1.4 is connected to the front end of the frame 1.2 through an optical axis fixing ring 7.
[0027] The contents not described in detail in this specification belong to the prior art known to those skilled in the art.
Claims
1. A fixture for integrated circuit Z-direction X-ray inspection, comprising a base (1) and a crossbar assembly (2), characterized in that: The base (1) comprises a chassis (1.1), a frame (1.2), a rear frame (1.3) and a front eave cover (1.4); a pair of frames (1.2) are arranged on the two side edges of the chassis (1.1); the rear frame (1.3) is arranged on the rear edge of the chassis (1.1); the two ends of the rear frame (1.3) are respectively connected to the rear ends of the two frames (1.2); the front eave cover (1.4) is detachably connected to the front end of the frame (1.2); a strip through hole (1.2.1) is arranged on the frame (1.2); a guide rail (1.2.2) is arranged on the inner side of the frame (1.2); an antistatic foam cotton (3) is laid on the inner side of the rear frame (1.3); there are more than two crossbar assemblies (2); the crossbar assemblies (2) include The invention comprises a base (2.1), the base (2.1) is provided with a roller (2.2), a through hole (2.3) and a ball (2.4), the front and rear end surfaces of the base (2.1) are provided with antistatic foam cotton (3), the crossbar assembly (2) is translated forward and backward on the base (1) through the cooperation of the ball (2.4) and the chassis (1.1) and the roller (2.2) and the guide rail (1.2.2), a device under test station (4) is formed between adjacent bases (2.1) and between the rear frame (1.3) and the adjacent bases (2.1), and the crossbar assembly (2) is fixed on the base (1) through the cooperation of a screw rod (5), a through hole (2.3), a strip through hole (1.2.1) and a nut (6).
2. The fixture for integrated circuit Z-direction X-ray inspection according to claim 1, characterized in that: The number of the crossbar assemblies (2) is 4 to 6.
3. The fixture for integrated circuit Z-direction X-ray inspection according to claim 1 or 2, characterized in that: The chassis (1.1) is provided with reinforcing ribs (1.1.1).
4. The fixture for integrated circuit Z-direction X-ray inspection according to claim 1 or 2, characterized in that: The front eave cover (1.4) is connected to the front end of the frame (1.2) via an optical axis fixing ring (7).
5. The fixture for integrated circuit Z-direction X-ray inspection according to claim 3, characterized in that: The front eave cover (1.4) is connected to the front end of the frame (1.2) via an optical axis fixing ring (7).