Drawer type combined cutting tool of heat preservation system of semiconductor substrate production equipment

Abstract

The utility model provides a drawer type combined cutting tool of a heat preservation system of semiconductor base material production equipment, and belongs to the technical field of cutting tools of heat preservation systems. The problem that a split type heat preservation graphite soft felt cutting tool is low in cutting efficiency is solved. The combined cutting tool is used for cutting labyrinth seal soft felts at the bottom and the top of the heat preservation system and comprises a drawer frame and a combined cutting tool body, a combined tool body insertion opening is formed in the side edge of the drawer frame, and the combined cutting tool body is placed in the drawer frame through the combined tool body insertion opening. A combined type tool positioner is further arranged at the combined type tool inserting opening, and a frame gravity pressing area is arranged on the periphery of the drawer type frame; the combined cutting tool comprises a bottom combined cutting tool and a top combined cutting tool; the labyrinth seal soft felt cutting device is applied to labyrinth seal soft felt cutting of a heat preservation system.

Description

Technical Field

[0001] The utility model provides a drawer-type combined cutting tool for producing a heat preservation system of semiconductor substrate equipment, belonging to the technical field of heat preservation material cutting tool. Background Art

[0002] With the increase of R&D investment in the semiconductor industry, Chinese enterprises have made great progress in the development of third-generation semiconductor equipment. Among them, high-temperature purification equipment is an essential equipment for the preparation of third-generation semiconductor SiC substrates.

[0003] The insulation system of high-temperature purification equipment is a core component of the entire equipment. The internal temperature of the insulation system is as high as 2400℃. After being insulated by the insulation system, the external temperature of the insulation system is only 300℃, so the design and manufacturing process of the insulation system is extremely critical. In the design of the insulation system, graphite soft felt with good thermal insulation performance is selected as the insulation material, and in order to prevent heat loss, the bottom of the insulation system needs to be labyrinth sealed, so that the hot air flow can be blocked in sections, the airflow path can be extended, and finally the temperature can be reduced to ensure that the temperature outside the insulation system is 300℃.

[0004] When manufacturing the labyrinth seal at the bottom of the insulation system, due to the characteristics of the soft felt, it is impossible to perform direct mechanical processing, and the bottom insulation graphite soft felt needs to be cut on site. Therefore, a cutting tool needs to be designed. The existing cutting tool is a plurality of cutting tools designed according to the sizes of different layers of graphite soft felt. When using, it is necessary to select corresponding cutting tools according to the positions of the first layer or the second layer, the third layer, and the fourth layer of graphite soft felt, resulting in low cutting efficiency. Utility Model Content

[0005] In order to solve the problem of low cutting efficiency of split-type thermal insulation graphite soft felt cutting tools, the utility model proposes a drawer-type combined cutting tool for producing a thermal insulation system for semiconductor substrate equipment. The purpose is to place multiple combined cutting tools in a drawer frame through a drawer-type structure, and select different combined cutting tools according to different cutting types. Each combined cutting tool combines multiple split cutting tools into one tool, thereby realizing the cutting of thermal insulation soft felts of different specifications by using one tool.

[0006] In order to solve the above technical problems, the technical solution adopted by the utility model is: a drawer-type combined cutting tool for producing a semiconductor substrate equipment insulation system, which is used to cut the labyrinth sealing soft felt at the bottom and top of the insulation system, and includes a drawer frame and a combined cutting tool. A combined tool insertion port is opened on the side of the drawer frame, and the combined cutting tool is placed in the drawer frame through the combined tool insertion port. A combined tool positioner is also provided at the combined tool insertion port, and a frame gravity pressing area is provided on the periphery of the drawer frame;

[0007] The combined cutting tool comprises a bottom combined cutting tool and a top combined cutting tool, both of which are integrated cutting boards, and the integrated cutting board of the bottom combined cutting tool is provided with cutting positions of different layers of soft felt according to the position and size of the labyrinth sealing soft felt at the bottom of the thermal insulation system, and the integrated cutting board is also provided with positioning holes aligned with the bottom soft felt;

[0008] The integrated cutting board of the top combined cutting tool is provided with cutting positions for different layers of soft felt according to the position and size of the labyrinth sealing soft felt on the top of the thermal insulation system, and the integrated cutting board is also provided with positioning holes aligned with the top soft felt.

[0009] The integrated cutting plate of the bottom combined cutting tool is provided with two hollow rings, the inner and outer rings of the inner hollow ring near the center are respectively the first and second cutting positions of the bottom layer, and the inner and outer rings of the outer hollow ring are respectively the third and fourth cutting positions of the bottom layer;

[0010] The integrated cutting plate of the top combined cutting tool is provided with two hollow rings, the inner and outer rings of the inner hollow ring close to the center are respectively the top first layer cutting position and the top second layer cutting position, and the inner and outer rings of the outer hollow ring are respectively the top third layer cutting position and the top fourth layer cutting position.

[0011] A connector is provided between the two hollow rings of the bottom combined cutting tool and the top combined cutting tool.

[0012] The integrated cutting plate is a circular metal plate.

[0013] The connector is arranged at positions of 0°, 90°, 180° and 270° in two hollow rings.

[0014] Four frame handles are also arranged on the outer side of the drawer frame.

[0015] The utility model has the following beneficial effects compared with the prior art: the drawer-type combined cutting tool provided by the utility model can use one tool to simultaneously cut the bottom labyrinth sealing layer and the top labyrinth sealing layer of the thermal insulation system, and the corresponding combined cutting tool can be replaced as needed. Each combined cutting tool has different cutting positions and only needs to be aligned with the cutting position of the corresponding layer. The utility model effectively reduces the tool manufacturing cost and tool management cost, and reduces the types of graphite soft felt cutting tools. Moreover, the frame gravity pressing area can ensure the dimensional accuracy of the cut soft felt, ensure the thermal insulation effect of the thermal insulation felt, and is convenient for on-site operators to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The utility model is further described below in conjunction with the accompanying drawings:

[0017] Figure 1 This is a schematic diagram of the structure of the thermal insulation system for high-purity third-generation semiconductor substrate equipment;

[0018] Figure 2 for Figure 1 The schematic diagram of the structure of the middle labyrinth seal part;

[0019] Figure 3 It is a front view of the drawer frame of the utility model;

[0020] Figure 4 for Figure 3 Side view of

[0021] Figure 5 It is a structural schematic diagram of the drawer-type combined cutting tool for the bottom of the thermal insulation felt of the utility model;

[0022] Figure 6 It is a structural schematic diagram of the drawer-type combined cutting tool used for the top of the thermal insulation felt of the utility model;

[0023] Figure 7 It is a structural schematic diagram of the drawer-type combined cutting tool used for cutting the bottom of the thermal insulation felt according to the utility model;

[0024] In the figure: 1 is a drawer frame, 2 is a bottom combined cutting tool, 3 is a top combined cutting tool, 4 is a combined tool insertion port, 5 is a combined tool positioner, 6 is a frame gravity pressing area, 7 is a frame handle, 8 is a soft felt, 9 is a positioning hole, 10 is a connector, and 11 is a wallpaper knife;

[0025] 21 is the cutting position of the first layer at the bottom, 22 is the cutting position of the second layer at the bottom, 23 is the cutting position of the third layer at the bottom, and 24 is the cutting position of the fourth layer at the bottom;

[0026] 31 is the cutting position of the first layer at the top, 32 is the cutting position of the second layer at the top, 33 is the cutting position of the third layer at the top, and 34 is the cutting position of the fourth layer at the top. DETAILED DESCRIPTION

[0027] like Figures 1 to 7 As shown, the utility model provides a drawer-type combined cutting tool for producing an insulation system for semiconductor substrate equipment, which is used for cutting the labyrinth sealing soft felt at the bottom and top of the insulation system. The tool consists of a drawer frame 1 and a combined cutting tool. The combined cutting tool is designed with a bottom combined cutting tool 2 and a top combined cutting tool 3 according to different cutting parts, which are respectively used for cutting the labyrinth sealing soft felt at the top and bottom of the insulation system. The drawer frame 1 is provided with a combined tool insertion port 4, a combined tool positioner 5, a frame gravity pressing area 6 and a frame handle 7, wherein four frame handles 7 are specifically provided, which are respectively fixed on the four corners of the drawer frame 1, and are used to save effort during transportation; a combined tool insertion port 4 is opened on the side of the drawer frame 1, through which the bottom combined cutting tool 2 or the top combined cutting tool 3 can be inserted into the drawer frame 1 when in use as needed, and can be pulled out after use; a frame gravity pressing area 6 is provided on the periphery of the drawer frame 1, through which the soft felt can be pressed and flattened when in use to ensure the cutting accuracy; two combined tool positioners 5 are provided at the end of the combined tool insertion port 4, which are used to ensure the accurate insertion position of the combined cutting tool when inserting it.

[0028] The bottom combined cutting tool 2 includes an integrated cutting plate, on which two hollow rings are arranged, the inner hollow rings near the center are respectively the bottom first layer cutting position 21 and the bottom second layer cutting position 22, and the outer hollow rings are respectively the bottom third layer cutting position 23 and the bottom fourth layer cutting position 24. The integrated cutting plate is also provided with a positioning hole 9 for aligning with the soft felt to be cut. The positioning hole 9 is used to align the soft felt with the pre-marked position on the soft felt when cutting it, so as to ensure that the size of the soft felt after cutting corresponds to the insulation layer of the insulation system.

[0029] A connector 10 is provided between the two hollow rings to make the cutting board an integrated cutting board.

[0030] The integrated cutting plate is a round metal plate.

[0031] The connector 10 can be specifically arranged at the positions of 0°, 90°, 180°, and 270° of two hollow rings.

[0032] The bottom combined cutting tool 2 is designed according to the outer dimensions of the bottom labyrinth sealing soft felt of the thermal insulation system bottom to have the sizes of the bottom first layer cutting position 21, the bottom second layer cutting position 22, the bottom third layer cutting position 23 and the bottom fourth layer cutting position 24.

[0033] The top combined cutting tool 3 includes an integrated cutting plate, on which two hollow rings are arranged, the inner hollow rings near the center are respectively the top first layer cutting position 31 and the top second layer cutting position 32, and the outer hollow rings are respectively the top third layer cutting position 33 and the top fourth layer cutting position 34. The integrated cutting plate is also provided with a positioning hole 9 for aligning with the soft felt to be cut. The positioning hole 9 is used to align the soft felt with the pre-marked position on the soft felt when cutting it, so as to ensure that the size of the soft felt after cutting corresponds to the insulation layer of the insulation system.

[0034] The bottom combined cutting tool 2 and the top combined cutting tool 3 are designed to correspond to the outer dimensions of the bottom and top labyrinth seal soft felt of the thermal insulation system, respectively. The two tools have different positions and numbers of positioning holes 9, and the sizes of the four-layer cutting positions are also different. The similarity is that both are integrated cutting plates. The operator selects different cutting tools according to the labyrinth seal of the thermal insulation system at different positions.

[0035] The use principle of the utility model is as follows: when in use, the operator inserts different combined cutting tools into the drawer frame 1 according to the soft felt to be cut at different parts (top soft felt or bottom soft felt), first aligns the position through the positioning hole 9, and then uses the wallpaper knife 11 to cut the soft felt 8 according to the cutting position (first layer, second layer...fourth layer) marked on the combined cutting tool. Take cutting the bottom soft felt as an example: insert the bottom combined cutting tool 2 into the drawer frame 1, position the combined cutting tool through the combined tool positioner 5, and the operator puts the assembled drawer-type combined cutting tool on the soft felt 8 to be cut through the frame handle 6, first aligns the bottom combined cutting tool 2 with the soft felt 8 to be cut through the positioning hole 9, presses the soft felt 8 around the frame gravity pressing area 6 for easy cutting, and uses the wallpaper knife 11 to cut according to the marked position on the combined cutting tool (i.e., the first to fourth layer cutting position). When cutting the top soft felt, the bottom combined cutting tool 2 is pulled out from the drawer frame 1, and the top combined cutting tool 3 is replaced, and the above operation is repeated to complete the cutting of the top soft felt.

[0036] Specifically, when cutting the first layer of soft felt at the bottom, the operator only needs to cut the graphite soft felt according to the bottom first layer cutting position 21 marked on the bottom combined cutting tool 2; when cutting the second layer of soft felt, the operator only needs to cut the graphite soft felt according to the marked bottom second layer cutting position 22; when cutting the third layer of graphite soft felt, the operator only needs to cut the graphite soft felt according to the marked bottom third layer cutting position 23; when cutting the fourth layer of graphite soft felt, the operator only needs to cut the graphite soft felt according to the marked bottom fourth layer cutting position 24. This combined graphite soft felt cutting tool can effectively reduce manufacturing costs and tooling management costs, and reduce the types of graphite soft felt cutting tools, making it easier for on-site operators to use.

[0037] Regarding the specific structure of the utility model, it should be explained that the connection relationship between the various component modules adopted in the utility model is definite and feasible. Except for special instructions in the embodiments, the specific connection relationship can bring corresponding technical effects and solve the technical problems raised by the utility model without relying on the execution of corresponding software programs. The components, modules, models of specific components and the connection methods between each other appearing in the utility model, as well as the conventional use methods and expected technical effects brought about by the above-mentioned technical features, except for specific instructions, all belong to the disclosed contents in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by technical personnel in this field before the application date, or belong to the existing technologies such as conventional technologies and common knowledge in this field, and there is no need to elaborate, so that the technical solution provided in this case is clear, complete and feasible, and the corresponding physical products can be reproduced or obtained according to the technical means.

[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A drawer-type combined cutting tool for producing a semiconductor substrate equipment insulation system, characterized in that: The labyrinth sealing soft felt used for cutting the bottom and top of the thermal insulation system comprises a drawer frame and a combined cutting tool. The side of the drawer frame is provided with a combined tool insertion port. The combined cutting tool is placed in the drawer frame through the combined tool insertion port. A combined tool positioner is also provided at the combined tool insertion port. A frame gravity pressing area is provided on the periphery of the drawer frame. The combined cutting tool comprises a bottom combined cutting tool and a top combined cutting tool, both of which are integrated cutting boards, and the integrated cutting board of the bottom combined cutting tool is provided with cutting positions of different layers of soft felt according to the position and size of the labyrinth sealing soft felt at the bottom of the thermal insulation system, and the integrated cutting board is also provided with positioning holes aligned with the bottom soft felt; The integrated cutting board of the top combined cutting tool is provided with cutting positions for different layers of soft felt according to the position and size of the labyrinth sealing soft felt on the top of the thermal insulation system, and the integrated cutting board is also provided with positioning holes aligned with the top soft felt.

2. The drawer-type combined cutting tool for producing a semiconductor substrate equipment insulation system according to claim 1, characterized in that: The integrated cutting plate of the bottom combined cutting tool is provided with two hollow rings, the inner and outer rings of the inner hollow ring near the center are respectively the first and second cutting positions of the bottom layer, and the inner and outer rings of the outer hollow ring are respectively the third and fourth cutting positions of the bottom layer; The integrated cutting plate of the top combined cutting tool is provided with two hollow rings, the inner and outer rings of the inner hollow ring close to the center are respectively the top first layer cutting position and the top second layer cutting position, and the inner and outer rings of the outer hollow ring are respectively the top third layer cutting position and the top fourth layer cutting position.

3. The drawer-type combined cutting tool for producing a semiconductor substrate equipment insulation system according to claim 2, characterized in that: A connector is provided between the two hollow rings of the bottom combined cutting tool and the top combined cutting tool.

4. The drawer-type combined cutting tool for producing a semiconductor substrate equipment insulation system according to claim 3, characterized in that: The integrated cutting plate is a circular metal plate.

5. The drawer-type combined cutting tool for producing a semiconductor substrate equipment insulation system according to claim 3, characterized in that: The connector is arranged at positions of 0°, 90°, 180° and 270° in two hollow rings.

6. A drawer-type combined cutting tool for producing a semiconductor substrate equipment insulation system according to any one of claims 1 to 5, characterized in that: Four frame handles are also arranged on the outer side of the drawer frame.

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