Electric field electrode structure applied to tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) reaction cavity

Abstract

The utility model discloses an electric field electrode structure applied to a tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) reaction cavity. The electrode stem is matched with a graphite boat, the electrode stem piston is arranged on the electrode stem and is close to the tail end of the electrode stem, the spring is arranged at the tail end of the electrode stem in a sleeving mode and is tightly attached to the tail end of the electrode stem piston, the vertical blocking piece is arranged at the tail end of the electrode stem, and the microswitch is matched with the vertical blocking piece. The movement of the electrode rod can drive the vertical separation blade to move along the straight line where the electrode rod is located; and the microswitch is communicated with a transmission mechanism of the graphite boat. Detection is carried out when the power port of the graphite boat is in butt joint with the electrode stem through the vertical blocking piece and the microswitch, the electrode stem is prevented from being collided when the power port of the graphite boat is not in butt joint with the electrode stem, and the purposes of improving the rod collision phenomenon of the graphite boat, preventing the electrode structure from being damaged and guaranteeing the installation and production quality of the graphite boat are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell equipment, in particular to an electric field electrode structure applied to a tubular PECVD reaction chamber. Background Art

[0002] In the prior art, PECVD (Plasma Enhanced Chemical Vapor Deposition) plasma enhanced chemical vapor deposition uses low-temperature plasma as an energy source under vacuum conditions. A silicon wafer is placed on a cathode of glow discharge under low pressure, and the silicon wafer is heated to a predetermined temperature by glow discharge (or with a heating element). Then, an appropriate amount of reaction gas is introduced, and the gas undergoes a series of chemical reactions and plasma reactions to form a solid film on the silicon wafer. The generation of plasma depends on a high-frequency electric field or a radio frequency electric field, and gas molecules are ionized under the action of the electric field to form electrons and ions.

[0003] The electric field of tubular PECVD is generated in the graphite boat. There is a positive and negative power supply interface near the end of the furnace on the graphite boat. The positive and negative electrodes are vacuum-sealed with the flange at the end of the furnace. The electrode rod extends into the furnace body. The graphite boat enters the furnace body through the horizontal boat pushing mechanism and is pushed to the position of the electrode rod until the electrode enters the power supply interface in the boat to complete the connection.

[0004] In actual applications, due to the accumulation of various mechanical problems and the aging of the silicon carbide tube of the boat pushing mechanism, errors will occur between the power port of the graphite boat and the electrode rod, resulting in the failure of the power port of the graphite boat to connect with the electrode rod, the electrode rod being bent or pushed out, and other abnormal situations.

[0005] How to effectively solve the above problems is an urgent issue that needs to be addressed at this stage.

[0006] The information disclosed in this background technology section is only intended to deepen the understanding of the overall background technology of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to those skilled in the art. Utility Model Content

[0007] In order to solve the above technical problems, the utility model proposes an electric field electrode structure applied to a tubular PECVD reaction chamber to improve the graphite boat collision phenomenon, avoid damage to the electrode structure and ensure the installation of the graphite boat.

[0008] In order to achieve the above object, the technical solution of the utility model is as follows:

[0009] An electric field electrode structure applied to a tubular PECVD reaction chamber, comprising an electrode rod matched with a graphite boat, an electrode rod piston arranged on the electrode rod and close to the tail end of the electrode rod, a spring sleeved on the tail end of the electrode rod and close to the tail end of the electrode rod piston, a vertical baffle arranged at the tail end of the electrode rod, and a micro switch matched with the vertical baffle;

[0010] The movement of the electrode rod can drive the vertical blocking piece to move along the straight line where the electrode rod is located;

[0011] The micro switch is connected with the transmission mechanism of the graphite boat.

[0012] The utility model realizes detection when the power port of the graphite boat is connected to the electrode rod through a vertical baffle and a micro switch, thereby preventing the power port of the graphite boat from hitting the electrode rod when the power port of the graphite boat is not connected to the electrode rod, thereby achieving the purpose of improving the graphite boat hitting the rod, avoiding the electrode structure from being damaged, and ensuring the installation and production quality of the graphite boat.

[0013] Preferably, a protective base is provided outside the electrode piston rod, and the protective base is vacuum-sealed with the furnace tail of the reaction chamber close to the graphite boat.

[0014] Preferably, the vertical baffle is installed by means of a mounting assembly, wherein the mounting assembly comprises a mounting cover and a pair of mounting columns disposed in the mounting cover, and the mounting cover is fixedly connected to the protective base.

[0015] Preferably, a through hole for the vertical blocking piece to pass through is arranged on the bottom side wall of the mounting cover, and rubber pads are arranged at both ends of the through hole, so that the vertical blocking piece can move back and forth in the through hole.

[0016] Preferably, the micro switch is provided with a touch roller, and the touch roller is arranged on the outside of the vertical baffle and is arranged close to the vertical baffle.

[0017] Preferably, the vertical baffle and the electrode rod piston are respectively located on both sides of the spring.

[0018] Preferably, a pair of mounting posts fix the vertical baffle on the electrode rod.

[0019] The utility model has the following advantages:

[0020] 1. The utility model uses a vertical baffle and a micro switch to detect when the power port of the graphite boat is connected to the electrode rod, thereby preventing the electrode rod from being hit when the power port of the graphite boat is not connected to the electrode rod, and the electrode rod piston and spring are further provided to buffer the electrode rod when it is hit, thereby achieving the purpose of improving the graphite boat hitting the rod, avoiding damage to the electrode structure and ensuring the installation of the graphite boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below.

[0022] Figure 1 It is a structural schematic diagram of an electric field electrode structure applied to a tubular PECVD reaction chamber disclosed in an embodiment of the utility model;

[0023] Figure 2 It is a top view schematic diagram of an electric field electrode structure applied to a tubular PECVD reaction chamber disclosed in an embodiment of the utility model;

[0024] Figure 3 This is a schematic diagram of the structure of a graphite boat applied to a tubular PECVD reaction chamber disclosed in an embodiment of the utility model;

[0025] The numbers and letters in the figure represent the corresponding component names:

[0026] 1. Electrode rod 2. Electrode rod piston 3. Spring 4. Vertical baffle 5. Micro switch 6. Protective base

[0027] 71. Mounting cover 72. Mounting column 8. Graphite boat 81. Graphite boat power port. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0029] The utility model provides an electric field electrode structure applied to a tubular PECVD reaction chamber. Its working principle is to detect when the power port of a graphite boat is connected to an electrode rod through a vertical baffle and a micro switch, so as to prevent the electrode rod from being hit when the power port of the graphite boat is not connected to the electrode rod, and the electrode rod piston and spring are arranged to further buffer the electrode rod when it is hit, so as to achieve the purpose of improving the graphite boat hitting the rod, avoiding the electrode structure from being damaged and ensuring the installation of the graphite boat.

[0030] The present invention is further described in detail below in conjunction with embodiments and specific implementation methods.

[0031] like Figure 1-Figure 3As shown, an electric field electrode structure applied to a tubular PECVD reaction chamber includes an electrode rod 1 matched with a graphite boat, an electrode rod piston 2 arranged on the electrode rod and close to the tail end of the electrode rod, a spring 3 sleeved on the tail end of the electrode rod and close to the tail end of the electrode rod piston, a vertical baffle 4 arranged at the tail end of the electrode rod and a micro switch 5 matched with the vertical baffle, and the movement of the electrode rod can drive the vertical baffle to move along the straight line where the electrode rod is located.

[0032] The micro switch is connected to the transmission mechanism of the graphite boat;

[0033] A protective base 6 is arranged outside the electrode piston rod, and the protective base is vacuum-sealed with the furnace tail of the reaction chamber close to the graphite boat.

[0034] The vertical baffle is installed through a mounting assembly, which includes a mounting cover 71 and a pair of mounting posts 72 arranged in the mounting cover. The mounting cover is fixedly connected to the protective base, and the tail end of the electrode rod is against the mounting posts. A through hole (not shown) is provided below the mounting cover for the vertical baffle to pass through.

[0035] The specific use steps of the utility model are as follows: Figure 1-Figure 3 As shown, during the operation, when the graphite boat 8 enters the reaction chamber under the action of the transmission mechanism, it gradually moves until the electrode rod 1 is inserted into the graphite boat power port 81 to complete the connection, and then the subsequent process can be carried out.

[0036] When the graphite boat power port 81 is misaligned with the electrode rod 1, a certain displacement and torque will be generated on the electrode rod first, and then the electrode rod 1 will transmit the displacement and torque to the vertical baffle 4. Since the touch roller is close to the vertical baffle 4, the displacement and torque will be detected by the micro switch 5 through the vertical baffle 4 and the touch roller. At this time, the micro switch 5 will immediately feedback to the transmission mechanism and stop the transmission mechanism to avoid hitting the rod. At the same time, the spring 3 and the electrode rod piston 2 will buffer the electrode rod, improving the quality of the electrode rod.

[0037] Through the above method, the utility model provides an electric field electrode structure applied to a tubular PECVD reaction chamber, which detects when the power port of the graphite boat is connected to the electrode rod through a vertical baffle and a micro switch, thereby preventing the electrode rod from being hit when the power port of the graphite boat is not connected to the electrode rod, and the electrode rod piston and spring are further provided to buffer the electrode rod when it is hit, thereby achieving the purpose of improving the graphite boat hitting the rod, avoiding damage to the electrode structure and ensuring the installation of the graphite boat.

[0038] The above is only a preferred embodiment of the electric field electrode structure applied to the tubular PECVD reaction chamber disclosed by the utility model. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the creative concept of the utility model, which all belong to the protection scope of the utility model.

Claims

1. An electric field electrode structure applied to a tubular PECVD reaction chamber, characterized in that: The invention comprises an electrode rod matched with the graphite boat, an electrode rod piston arranged on the electrode rod and close to the tail end of the electrode rod, a spring sleeved on the tail end of the electrode rod and close to the tail end of the electrode rod piston, a vertical baffle arranged at the tail end of the electrode rod, and a micro switch matched with the vertical baffle; The movement of the electrode rod can drive the vertical blocking piece to move along the straight line where the electrode rod is located; The micro switch is connected to the transmission mechanism of the graphite boat.

2. The electric field electrode structure applied to a tubular PECVD reaction chamber according to claim 1, characterized in that: A protective base is arranged outside the electrode piston rod, and the protective base is vacuum-sealed with the furnace tail of the reaction chamber close to the graphite boat.

3. The electric field electrode structure applied to a tubular PECVD reaction chamber according to claim 2, characterized in that: The vertical baffle is installed through a mounting assembly, and the mounting assembly includes a mounting cover and a pair of mounting columns arranged in the mounting cover, and the mounting cover is fixedly connected to the protective base.

4. The electric field electrode structure applied to a tubular PECVD reaction chamber according to claim 3, characterized in that: A through hole for the vertical blocking piece to pass through is arranged on the bottom side wall of the mounting cover, rubber pads are arranged at both ends of the through hole, and the vertical blocking piece can move back and forth in the through hole.

5. The electric field electrode structure applied to a tubular PECVD reaction chamber according to claim 1, characterized in that: The micro switch is provided with a touch roller, and the touch roller is arranged on the outside of the vertical baffle and is arranged close to the vertical baffle.

6. The electric field electrode structure applied to a tubular PECVD reaction chamber according to claim 1, characterized in that: The vertical baffle and the electrode rod piston are respectively located on both sides of the spring.

7. The electric field electrode structure applied to a tubular PECVD reaction chamber according to claim 3, characterized in that: A pair of mounting posts fix the vertical baffles on the electrode rods.

Images