Dismounting and cleaning device for gas guide cylinder and supporting rod sheath of single crystal furnace

Abstract

The utility model relates to the technical field of splitting tools, in particular to a dismounting and cleaning device for a gas guide cylinder and a support rod sheath of a single crystal furnace, which is used for taking out a workpiece mounted in a groove in the surface of a working platform and comprises a support frame, the support frame is mounted above the workpiece and is at least movably connected with a support arm, and the support arm is movably connected with the gas guide cylinder and the support rod sheath of the single crystal furnace. The supporting arm swings in the workpiece, a lifting rod is further connected to the middle of the supporting frame in a sliding mode, a rod body of the lifting rod is sleeved with a limiting plate, and when the lifting rod is lifted upwards, the limiting plate makes contact with the supporting arm till the supporting arm is driven to swing by a certain angle and then tightly abuts against the inner wall of the workpiece, and the workpiece is dragged to be separated from the working platform. The dismounting and cleaning device is simple in structure and convenient to operate, can be repeatedly used, can effectively avoid the safety problems of scalding and the like caused by contact with the high-temperature air guide cylinder and the supporting rod sheath in the manual dismounting and mounting process, greatly shortens the dismounting and mounting time, and can be suitable for various types of air guide cylinders and supporting rod sheaths.

Description

Technical Field

[0001] The utility model relates to the technical field of splitting tools, in particular to a single crystal furnace gas guide cylinder and support rod sheath dismantling and cleaning device. Background Art

[0002] The single crystal furnace is a device used to pull single crystal silicon. The gas guide cylinder and the support rod sleeve are its important components. The gas guide cylinder is mainly used to control the flow of argon gas in the furnace, maintain the pressure in the furnace stable, and prevent impurities from entering the crystal growth area, while the support rod sleeve plays a role in protecting the support rod from contact with other graphite parts and causing arcing and ignition. The gas guide cylinder and support rod sleeve of the single crystal furnace are both installed in the groove of the working platform for use.

[0003] The patent document with the patent publication number: CN220218327U discloses an impeller splitting tool, which acts on the impeller disc and the impeller ring, and a plurality of slots are opened on the outer peripheral surface of the impeller ring, including: a connecting disc; at least two hooks, at least two hooks are arranged on the connecting disc at equal intervals along the circumferential direction, the upper end of the hook is detachably connected to the connecting disc, and the lower end of the hook is adapted to the slot; a threaded sleeve, the threaded sleeve passes through the center of the connecting disc in the longitudinal direction and is fixedly connected to the connecting disc; and a screw, the screw passes through the threaded sleeve in the longitudinal direction and is threadedly matched with the threaded sleeve. The utility model provides an impeller splitting tool, in which the staff first inserts the lower end of the hook into the slot, and then connects and fixes the upper end of the hook to the connecting disc. When the staff rotates the screw, the screw moves downward to apply downward pressure to the impeller disc, and the pull hook will apply an upward reaction force to the impeller ring, thereby safely and completely splitting the impeller ring from the impeller disc.

[0004] The disassembly tool in the above scheme acts on the impeller disk and the impeller ring, and there are hooks and slots for connecting the tools, but the gas guide tube and the support rod sleeve of the single crystal furnace are installed in the groove of the working platform, and are tightly nested. At present, the disassembly and cleaning of the gas guide tube and the support rod sleeve of the single crystal furnace are mainly carried out by manually pulling them out of the groove and then cleaning them. However, due to the high operating temperature, burns are prone to occur, and a certain cooling time is required, and the disassembly and cleaning efficiency is low. Utility Model Content

[0005] In order to overcome the above technical problems, the purpose of the utility model is to provide a single crystal furnace gas guide cylinder and support rod sheath disassembly and cleaning device, which solves the current problem of low efficiency and lack of special tools when disassembling the gas guide cylinder and support rod sheath of the single crystal furnace.

[0006] The purpose of the utility model can be achieved through the following technical solutions:

[0007] A single crystal furnace gas guide cylinder and support rod sleeve dismantling and cleaning device is used to remove a workpiece installed in a groove on the surface of a working platform. The dismantling and cleaning device includes a support frame, which is installed above the workpiece. The support frame is movably connected to at least one support arm, and the support arm swings inside the workpiece. The middle part of the support frame is also slidably connected to a lifting rod, and the rod body of the lifting rod is sleeved with a limit plate. When the lifting rod is lifted upward, the limit plate will contact the support arm until the support arm is driven to swing a certain angle and tightly abut against the inner wall of the workpiece, thereby dragging the workpiece to separate from the working platform.

[0008] Furthermore, the support frame and the lifting rod are coaxially arranged.

[0009] Furthermore, when the lifting rod is raised or lowered relative to the supporting frame, the two do not contact each other.

[0010] Furthermore, a limiter is provided at a position where the shaft of the lifting rod is higher than the supporting frame.

[0011] Furthermore, the limiting plate has a polygonal structure.

[0012] Furthermore, the support frame includes a support plate, which is a triangular structure with three corners arranged at 120° intervals. A through hole slidably connected to the lifting rod is provided in the middle of the support plate, and movable grooves are provided at the three corners of the support plate. A latch rod rotatably connected to the support arm is provided in the movable groove.

[0013] Furthermore, the support arm includes an inclined rod, the top end of the inclined rod is rotatably connected to the support frame through a rotation groove, and the bottom end of the inclined rod is provided with a locking portion, and after the support arm swings a certain angle, the locking portion tightly abuts against the inner wall of the workpiece.

[0014] Furthermore, a hook groove is formed on the locking portion toward the workpiece.

[0015] Furthermore, a transition surface is formed at a position of the locking portion facing away from the workpiece.

[0016] Furthermore, a position where the locking portion contacts the inner wall of the workpiece is coated with an anti-slip layer.

[0017] Beneficial effects of the utility model:

[0018] In view of the fact that the grooves of the gas guide cylinder and the support rod sleeve are tightly nested with the working platform and the temperature is high, this technical solution designs a dismantling device to dismantle the gas guide cylinder and the support rod sleeve of the single crystal furnace. This dismantling device has a simple structure, is easy to operate, and can be reused. It can effectively avoid safety problems such as burns caused by contact with the gas guide cylinder and the support rod sleeve in a high temperature state during manual dismantling and assembly, and greatly shortens the dismantling and assembly time, improves production efficiency, and can be used for dismantling various types of gas guide cylinders and support rod sleeves, with strong adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The utility model is further described below in conjunction with the accompanying drawings.

[0020] Figure 1 It is a schematic diagram of the utility model during use;

[0021] Figure 2 It is a three-dimensional view of the utility model;

[0022] Figure 3 It is a cross-sectional view of the middle part of the utility model;

[0023] Figure 4 It is a three-dimensional view of the support frame and the limiting plate in the utility model;

[0024] Figure 5 It is a three-dimensional view of the support frame in the utility model;

[0025] Figure 6 It is a three-dimensional view of the support arm in the utility model.

[0026] In the figure: 1, workpiece; 2, working platform; 3, support frame; 31, support plate; 32, through hole; 33, movable groove; 34, latch rod; 4, lifting rod; 41, limiter; 5, limit plate; 6, support arm; 61, oblique rod; 62, rotating groove; 63, locking part; 64, transition surface; 65, hook groove. DETAILED DESCRIPTION

[0027] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] Embodiment 1:

[0029] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5, Figure 6 As shown, a single crystal furnace gas guide cylinder and support rod sleeve dismantling and cleaning device is used to remove the workpiece 1 installed in the groove on the surface of the working platform 2. The workpiece 1 represents the single crystal furnace gas guide cylinder or the support rod sleeve. The workpiece 1 is a hollow cylindrical structure. The dismantling and cleaning device includes a support frame 3, which is installed above the workpiece 1. The support frame 3 is movably connected to at least one support arm 6, and the support arm 6 swings inside the workpiece 1. The middle part of the support frame 3 is also slidably connected to a lifting rod 4, and the rod body of the lifting rod 4 is provided with a limit plate 5. When the lifting rod 4 is lifted upward, the limit plate 5 will contact the support arm 6 until the support arm 6 is driven to swing a certain angle and tightly abut against the inner wall of the workpiece 1, thereby dragging the workpiece 1 to separate from the working platform 2.

[0030] Under normal working conditions, a plurality of grooves are provided on the surface of the working platform 2, in which the gas guide cylinder or the support rod sheath of the single crystal furnace is placed, and the size of the grooves matches the size of the gas guide cylinder or the support rod sheath.

[0031] like Figure 1 , Figure 2 , Figure 3 As shown, in this embodiment, the end of the workpiece 1 is open, which facilitates the placement of the support arm 6 into the interior of the workpiece 1.

[0032] like Figure 2 , Figure 3 , Figure 5 As shown, the support frame 3 includes a support plate 31, which is a triangular structure with three corners arranged at 120°. A through hole 32 slidably connected to the lifting rod 4 is provided in the middle of the support plate 31, and movable grooves 33 are provided at the three corners of the support plate 31. The movable grooves 33 extend toward the through hole 32 but are not conductive, and a latch rod 34 rotatably connected to the support arm 6 is provided in the movable groove 33.

[0033] like Figure 3 As shown, in this embodiment, the support frame 3, the lifting rod 4 and the workpiece 1 are coaxially arranged, and the diameter of the lifting rod 4 is smaller than the through hole 32. When the lifting rod 4 is raised or lowered relative to the support frame 3, the two do not contact each other.

[0034] like Figure 4 As shown, a limiter 41 is provided on the rod body of the lifting rod 4 at a position higher than the support frame 3. The limiter 41 can serve as a layer of insurance to prevent the lifting rod 4 from falling into the bottom end of the workpiece 1 as a whole after the lifting rod 4 is loosened, causing operational inconvenience, and can also provide a force point when lifting the lifting rod 4.

[0035] like Figure 3 , Figure 6 As shown, in this embodiment, there are three support arms 6, and the support arm 6 includes an inclined rod 61. The top end of the inclined rod 61 is rotatably connected to the latch rod 34 inside the movable groove 33 through a rotating groove 62, and the bottom end of the inclined rod 61 is provided with a locking portion 63, as shown in FIG. Figure 3 As shown, in this embodiment, the limit plate 5 is a polygonal structure. When the support arm 6 is not acted upon by an external force, the lower end of the support arm 6, that is, the locking portion 63, naturally rotates and droops;

[0036] When it is necessary to separate the workpiece 1 and the working platform 2, the support frame 3 is placed on the upper end of the workpiece 1, and the support arm 6 swings freely inside the workpiece 1. At this time, the lifting rod 4 is lifted upward and the support frame 3 is kept stationary. As the lifting rod 4 rises, the limit plate 5 contacts the lower end of the support arm 6, and the limit plate 5 squeezes the support arm 6 to drive the support arm 6 to rotate toward the inner wall of the workpiece 1. When the locking portion 63 of the support arm 6 is tightly in contact with the inner wall of the workpiece 1 after swinging a certain angle, the support frame 3 can no longer be controlled to be stationary. As the lifting rod 4 continues to be lifted, the support arm 6 drives the workpiece 1 to move upward synchronously under the action of friction. Because the working platform 2 is always stationary, the separation of the workpiece 1 and the working platform 2 is finally achieved.

[0037] The device combines mechanical structure and transmission system, has the characteristics of rapid response and efficient action, greatly shortens the disassembly and assembly time, and adopts modular design with simple structure. Each component is easy to disassemble and replace, which is convenient for maintenance.

[0038] like Figure 5 As shown, a transition surface 64 is formed at the position of the locking portion 63 facing away from the workpiece 1, and the transition surface 64 is an arc-shaped surface. When the limit plate 5 contacts the locking portion 63 under the action of the lifting rod 4, the limit plate 5 can smoothly slide over the transition surface 64 and drive the support arm 6 to rotate about the latch rod 34.

[0039] In this embodiment, the position where the locking portion 63 contacts the inner wall of the workpiece 1 is covered with an anti-slip layer, thereby increasing the friction between the locking portion 63 and the inner wall of the workpiece 1, making the separation of the workpiece 1 and the working platform 2 more stable and reliable.

[0040] The device is a small dismantling and cleaning device with low manufacturing cost and is easy to carry during work.

[0041] In view of the fact that the grooves of the gas cylinder and the support rod sleeve are tightly nested with the working platform 2 and the temperature is high, this scheme designs a dismantling device to dismantle the gas cylinder and the support rod sleeve of the single crystal furnace. This dismantling device has a simple structure, is easy to operate, can be reused, and can effectively avoid safety problems such as burns caused by contact with the gas cylinder and the support rod sleeve in a high temperature state during manual dismantling and assembly. It also greatly shortens the dismantling and assembly time and improves production efficiency. It can be used to dismantle various types of gas cylinders and support rod sleeves and has strong adaptability.

[0042] Embodiment 2:

[0043] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 As shown, a single crystal furnace gas guide cylinder and support rod sheath dismantling device is used to remove a workpiece 1 installed in a groove on the surface of a working platform 2. The workpiece 1 is a hollow cylindrical structure. Compared with the first embodiment, the difference of this embodiment is that:

[0044] like Figure 5 As shown, a hook groove 65 is formed at the locking portion 63 facing the workpiece 1. The existence of the hook groove 65 makes it easier for the locking portion 63 to hook the relevant fixing parts inside the workpiece 1 when it abuts against the inner wall of the workpiece 1, thereby making it more stable when separating the workpiece 1 and the work platform 2, and is suitable for separating different models of workpieces 1 and work platforms 2.

[0045] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0046] The above contents are merely examples and explanations of the present utility model. The technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of the present utility model.

Claims

1. A device for removing and cleaning the gas guide tube and the support rod sheath of a single crystal furnace, used to remove the workpiece installed in the groove on the surface of the working platform, characterized in that: The dismantling device includes a support frame, which is installed above the workpiece. The support frame is movably connected to at least one support arm, which swings inside the workpiece. The middle part of the support frame is also slidably connected to a lifting rod, and the rod body of the lifting rod is provided with a limit plate. When the lifting rod is lifted upward, the limit plate will contact the support arm until the support arm is driven to swing a certain angle and tightly abut against the inner wall of the workpiece, thereby dragging the workpiece to separate from the working platform.

2. A single crystal furnace gas guide cylinder and support rod sheath dismantling device according to claim 1, characterized in that: The support frame and the lifting rod are coaxially arranged.

3. The single crystal furnace gas guide cylinder and support rod sheath dismantling device according to claim 1 is characterized in that: When the lifting rod is raised or lowered relative to the supporting frame, the two do not contact each other.

4. A single crystal furnace gas guide tube and support rod sheath dismantling device according to claim 1, characterized in that: A limiter is sleeved on the position where the rod body of the lifting rod is higher than the supporting frame.

5. The single crystal furnace gas guide cylinder and support rod sheath dismantling device according to claim 1, characterized in that: The limiting plate has a polygonal structure.

6. A single crystal furnace gas guide cylinder and support rod jacket removal device according to claim 1, characterized in that: The support frame includes a support plate, which is a triangular structure with three corners arranged at 120°. A through hole slidably connected to the lifting rod is provided in the middle of the support plate, and movable grooves are provided at the three corners of the support plate. A latch rod rotatably connected to the support arm is provided in the movable groove.

7. The device for removing and cleaning the gas guide tube and the support rod jacket of a single crystal furnace according to claim 1, characterized in that: The support arm comprises an inclined rod, the top end of which is rotatably connected to the support frame via a rotation groove, and the bottom end of the inclined rod is provided with a locking portion, which is in close contact with the inner wall of the workpiece after the support arm swings a certain angle.

8. A single crystal furnace gas guide tube and support rod jacket removal device according to claim 7, characterized in that: The locking portion is formed with a hook groove at a position facing the workpiece.

9. A single crystal furnace gas guide cylinder and support rod jacket removal device according to claim 7, characterized in that: A transition surface is formed at a position of the locking portion facing away from the workpiece.

10. A single crystal furnace gas guide cylinder and support rod jacket removal device according to claim 7, characterized in that: The position where the locking portion contacts the inner wall of the workpiece is coated with an anti-slip layer.

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