Vacuum sintering furnace

Abstract

The utility model relates to the technical field of vacuum sintering, in particular to a vacuum sintering furnace which comprises a plurality of double-sealed gate valves, a second preheating area, a welding area, a plurality of electromagnetic valves and a cooling area. The inlet end of the second preheating area is provided with a double-sided sealing gate valve, the outlet end of the second preheating area is provided with a double-sided sealing gate valve, the inlet end of the welding area is provided with a double-sided sealing gate valve, the outlet end of the welding area is provided with a double-sided sealing gate valve, and the inlet end of the cooling area is provided with a double-sided sealing gate valve. The outlet end of the cooling area is provided with a double-sealed gate valve, the second preheating area and the welding area are communicated or closed through electromagnetic valves, the welding area and the cooling area are communicated or closed through electromagnetic valves, the outlet end of the cooling area is provided with an electromagnetic valve, and the inlet end of the second preheating area is provided with an electromagnetic valve. The problem that the gate valve is difficult to open due to the pressure difference between the two cavities is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum sintering, in particular to a vacuum sintering furnace. Background Art

[0002] The vacuum gate valve is a valve used to isolate the vacuum pipe and block the air flow. It is an important vacuum component. When semiconductor chips are packaged, it needs to be carried out in a vacuum environment, which can generally be achieved in the form of a vacuum reflow oven. The vacuum reflow oven in the prior art is equipped with multiple temperature zones, which are divided into a preheating zone, a welding zone and a cooling zone. Among them, the preheating zone is protected by nitrogen and is not a completely low-oxygen environment; the welding zone is a vacuum environment. After the chip is welded, the door connecting the welding zone and the cooling zone is opened, and the chip enters the cooling zone from the welding zone. At the same time, the door connecting the welding zone and the preheating zone is opened, and the preheated chip is sent to the welding zone for welding. In this way, after completing one welding process and carrying out the next welding process, the front and rear doors of the welding zone must be opened at the same time, and the cooling zone and the preheating zone will destroy the vacuum environment of the welding zone. The gate valve is difficult to open due to the pressure difference between the two cavities. Summary of the invention

[0003] The utility model provides a vacuum sintering furnace, which is used to solve the problem in the prior art that a plug valve is difficult to open due to the pressure difference between two cavities of the vacuum sintering furnace.

[0004] The utility model provides a vacuum sintering furnace, comprising a plurality of double-sided sealed gate valves, a second preheating zone, a welding zone, a plurality of solenoid valves and a cooling zone; the inlet end of the second preheating zone is provided with the double-sided sealed gate valve, the outlet end of the second preheating zone is provided with the double-sided sealed gate valve, the inlet end of the welding zone is provided with the double-sided sealed gate valve, the outlet end of the welding zone is provided with the double-sided sealed gate valve, the inlet end of the cooling zone is provided with the double-sided sealed gate valve, the outlet end of the cooling zone is provided with the double-sided sealed gate valve, the second preheating zone and the welding zone are provided with the solenoid valve to be connected or closed, the welding zone and the cooling zone are provided with the solenoid valve to be connected or closed, the outlet end of the cooling zone is provided with the solenoid valve, and the inlet end of the second preheating zone is provided with the solenoid valve.

[0005] According to the vacuum sintering furnace of the utility model, it also includes a first preheating zone, which is the upper workstation of the second preheating zone. The double-sided sealing gate valve is arranged at the inlet end of the first preheating zone, and the double-sided sealing gate valve is arranged at the outlet end of the first preheating zone.

[0006] According to the vacuum sintering furnace of the present invention, it further comprises a lifting mechanism, and the lifting mechanism is arranged below the first preheating zone, the second preheating zone, the welding zone and / or the cooling zone.

[0007] According to the vacuum sintering furnace of the utility model, it also includes a power wheel and a guide wheel, and the power wheel and the guide wheel are arranged on both sides inside the first preheating zone, the second preheating zone, the welding zone and the cooling zone.

[0008] According to the vacuum sintering furnace of the utility model, it also includes a transmission mechanism, and the transmission mechanism is arranged on both sides of the outside of the first preheating zone, the second preheating zone, the welding zone and the cooling zone, and the transmission mechanism drives the power wheel.

[0009] According to the vacuum sintering furnace of the utility model, the transmission mechanism is a roller, a gear, a belt and / or a chain.

[0010] According to the vacuum sintering furnace of the utility model, the first preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0011] The second preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0012] The welding zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage;

[0013] The cooling zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece cooling stage.

[0014] According to the vacuum sintering furnace of the utility model, the first preheating zone and the second preheating zone are connected or closed by the solenoid valve, and the inlet end of the first preheating zone is provided with the solenoid valve.

[0015] According to the vacuum sintering furnace of the utility model, the solenoid valve is a corrosion-resistant solenoid valve.

[0016] A solenoid valve is arranged between adjacent cavities. When the gate valve needs to be opened, the solenoid valve is opened first to make the air pressure of adjacent cavities equal, which facilitates opening of the gate valve and reduces the difficulty of opening the gate valve due to the pressure difference between the two cavities. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the main structure of a vacuum sintering furnace;

[0019] Figure 2 It is a schematic diagram of the top view structure of a vacuum sintering furnace;

[0020] Figure 3 It is a schematic diagram of the three-dimensional structure of the first preheating zone;

[0021] Figure 4 It is a schematic diagram of the three-dimensional structure of the lower cavity of the first preheating zone;

[0022] Figure numerals: 1. first preheating zone; 2. second preheating zone; 3. welding zone; 4. cooling zone; 5. double-sided sealing gate valve; 6. solenoid valve; 7. lifting mechanism; 11. transmission mechanism; 12. upper cover; 13. lower cavity; 131. lower cavity frame; 132. power wheel; 133. guide wheel; 134. heating pipe; 135. heat dissipation water tank. DETAILED DESCRIPTION

[0023] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0024] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0025] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0026] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0027] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0028] Combine the following Figure 1-4 A vacuum sintering furnace according to an embodiment of the utility model is described, comprising a plurality of double-sided sealed gate valves 5, a second preheating zone 2, a welding zone 3, a plurality of solenoid valves 6 and a cooling zone 4; a double-sided sealed gate valve 5 is provided at the inlet end of the second preheating zone 2, a double-sided sealed gate valve 5 is provided at the outlet end of the second preheating zone 2, a double-sided sealed gate valve 5 is provided at the inlet end of the welding zone 3, a double-sided sealed gate valve 5 is provided at the outlet end of the welding zone 3, a double-sided sealed gate valve 5 is provided at the inlet end of the cooling zone 4, a double-sided sealed gate valve 5 is provided at the outlet end of the cooling zone 4, the second preheating zone 2 and the welding zone 3 are provided with a solenoid valve 6 to be connected or closed, that is, the second preheating zone 2 and the welding zone 3 balance the pressure of the two cavities through the solenoid valve 6. The welding zone 3 and the cooling zone 4 are provided with a solenoid valve 6 to be connected or closed, a solenoid valve 6 is provided at the outlet end of the cooling zone 4, and a solenoid valve 6 is provided at the inlet end of the second preheating zone 2. During use, three cavities can be used, namely the second preheating zone 2, the welding zone 3 and the cooling zone 4. A solenoid valve 6 is provided at the inlet end of the second preheating zone 2 to balance the pressure with the atmospheric pressure, so as to facilitate opening the gate valve at the inlet end of the second preheating zone 2.

[0029] In some embodiments, it also includes a first preheating zone 1, which is the previous station of the second preheating zone 2. A double-sided sealing gate valve 6 is provided at the inlet end of the first preheating zone 1, and a double-sided sealing gate valve 6 is provided at the outlet end of the first preheating zone 1. During use, four cavities are used, namely the first preheating zone 1, the second preheating zone 2, the welding zone 3 and the cooling zone 4.

[0030] In some embodiments, a lifting mechanism 7 is further included, and a lifting mechanism 7 is disposed below the first preheating zone 1 , the second preheating zone 2 , the welding zone 3 and / or the cooling zone 4 .

[0031] In some embodiments, a power wheel 132 and a guide wheel 133 are also included, and the power wheel 132 and the guide wheel 133 are arranged on both sides of the first preheating zone 1, the second preheating zone 2, the welding zone 3 and the cooling zone 4. The first preheating zone 1, the second preheating zone 2, the welding zone 3 and the cooling zone 4 include an upper cover 12 and a lower cavity 13. The lower cavity 13 includes a lower cavity frame 131, a power wheel 132, a guide wheel 133, a heating pipe 134 and a heat dissipation water tank 135. That is to say, the power wheel 132 and the guide wheel 133 are arranged on both sides of the interior of the lower cavity frame 131, the heating pipe 134 is arranged inside the lower cavity frame 131, and the heat dissipation water tank 135 is arranged around the outside of the lower cavity frame 134.

[0032] In some embodiments, a transmission mechanism 11 is further included. The transmission mechanism 11 is arranged on both sides of the outside of the first preheating zone 1 , the second preheating zone 2 , the welding zone 3 and the cooling zone 4 . The transmission mechanism 11 drives the power wheel 132 .

[0033] In some embodiments, the transmission mechanism 11 is a roller, a gear, a belt and / or a chain.

[0034] In some embodiments, the first preheating zone 1 is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0035] The second preheating zone 2 is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage;

[0036] The welding zone 3 is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage;

[0037] The cooling zone 4 is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece cooling stage.

[0038] In some embodiments, the first preheating zone 1 and the second preheating zone 2 are connected or closed by a solenoid valve 6 , and the inlet end of the first preheating zone 1 is provided with a solenoid valve 6 .

[0039] In some embodiments, the solenoid valve 6 is a corrosion-resistant solenoid valve.

[0040] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A vacuum sintering furnace, characterized in that: It includes multiple double-sided sealed gate valves, a second preheating zone, a welding zone, multiple solenoid valves and a cooling zone; the inlet end of the second preheating zone is provided with the double-sided sealed gate valve, the outlet end of the second preheating zone is provided with the double-sided sealed gate valve, the inlet end of the welding zone is provided with the double-sided sealed gate valve, the outlet end of the welding zone is provided with the double-sided sealed gate valve, the inlet end of the cooling zone is provided with the double-sided sealed gate valve, the outlet end of the cooling zone is provided with the double-sided sealed gate valve, the second preheating zone and the welding zone are provided with the solenoid valve to be connected or closed, the welding zone and the cooling zone are provided with the solenoid valve to be connected or closed, the outlet end of the cooling zone is provided with the solenoid valve, and the inlet end of the second preheating zone is provided with the solenoid valve.

2. The vacuum sintering furnace according to claim 1, characterized in that: It also includes a first preheating zone, which is the previous workstation of the second preheating zone. The double-sided sealing gate valve is arranged at the inlet end of the first preheating zone and the double-sided sealing gate valve is arranged at the outlet end of the first preheating zone.

3. The vacuum sintering furnace according to claim 2, characterized in that: It also includes a lifting mechanism, which is arranged below the first preheating zone, the second preheating zone, the welding zone and / or the cooling zone.

4. The vacuum sintering furnace according to claim 2, characterized in that: It also includes a power wheel and a guide wheel, and the power wheel and the guide wheel are arranged on both sides of the first preheating zone, the second preheating zone, the welding zone and the cooling zone.

5. The vacuum sintering furnace according to claim 4, characterized in that: It also includes a transmission mechanism, and the transmission mechanism is arranged on both sides of the outside of the first preheating zone, the second preheating zone, the welding zone and the cooling zone, and the transmission mechanism drives the power wheel.

6. The vacuum sintering furnace according to claim 5, characterized in that: The transmission mechanism is a roller, a gear, a belt and / or a chain.

7. The vacuum sintering furnace according to claim 2, characterized in that: The first preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage; The second preheating zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece preheating stage; The welding zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece welding stage; The cooling zone is used to provide a vacuum environment, an inert gas environment or a reducing gas environment during the workpiece cooling stage.

8. The vacuum sintering furnace according to claim 2, characterized in that: The first preheating zone and the second preheating zone are connected or closed by the solenoid valve, and the inlet end of the first preheating zone is provided with the solenoid valve.

9. The vacuum sintering furnace according to claim 1, characterized in that: The solenoid valve is a corrosion-resistant solenoid valve.

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