Temperature regulation and control device for lens of photoetching machine

Abstract

The utility model relates to the technical field of temperature regulation and control devices, and provides a temperature regulation and control device for a lens of a photoetching machine, which comprises a nitrogen pipe, a nitrogen flow switch, an oil-water separation filter, a temperature control ribbon heater, a fixing ring, a positioning ring, a connecting plate, a supporting plate and a mounting plate, a nitrogen input port is formed in one side of the nitrogen pipe, the nitrogen flow switch is arranged on the nitrogen pipe and located on one side of the nitrogen input port, the oil-water separation filter is installed on one side of the nitrogen flow switch, and the temperature control electric heating belt is wound on the nitrogen pipe, so that the temperature of nitrogen entering a cavity of the photoetching machine can be conveniently controlled; after nitrogen heating treatment, the first temperature of air entering the air conditioning equipment lens isolation cavity can be controlled. According to the technical scheme, the problem that in the prior art, a hot air pump of a lens cavity is old in model, damaged and high in maintenance cost is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of aa, in particular to a temperature control device for a lens of a photolithography machine. Background Art

[0002] The photolithography machine is one of the key equipment in semiconductor manufacturing. It projects images onto silicon wafers through projection lenses. It is an important process for manufacturing integrated circuits. As a core component in the photolithography machine, projection plays a vital role. It can project the light beam from the light source onto the surface of the silicon wafer through a precise lens composition to form the original chip pattern on the microelectronic chip. Its principle is mainly to use the focusing and magnifying functions of the lens. After the light source passes through the lens combination, the tiny chip pattern is projected onto the silicon wafer, thereby realizing the manufacturing of the chip;

[0003] In traditional lithography machines, air conditioning equipment is usually equipped to control the constant temperature and humidity of the entire lithography machine environment. The principle is the same as our home air conditioning, which requires a compressor, condenser, evaporator and Freon. The main purpose of temperature and humidity control is to stabilize the temperature and humidity of the optical components inside the lithography machine cavity. In order to ensure the stability of the lens, the machine has a separate air-conditioning chamber isolated from the outside world around the lens to control the temperature of this chamber. The temperature of the NIKON lens is required to be maintained at 23°C, and that of the ASML is 22°C. At the same time, there will be a cooler around the lens. Old machines such as G6 and G7 use LATC (Lens Air Temp. Control), while newer machines use LLTC (Lens Liquid Temp. Control), using FC77 as the heat conduction medium, controlling the temperature of FC77 at 23°, and then circulating the liquid into the Lenscooler to achieve the effect of stabilizing the temperature.

[0004] The lens temperature control of the lithography machine currently used in the market adopts LATC (Lens Air Temp. Control), which uses a hot air pump to control the hot air temperature of the isolation chamber around the lens. The lithography machine model used is relatively old, and this pump is damaged, the maintenance cost is high, and there are no accessories. It needs to be modified to achieve the hot air temperature control of the isolation chamber around the lens. Utility Model Content

[0005] The utility model provides a temperature control device for a photolithography machine lens, which solves the problem in the related art that the lens chamber hot air pump is old and damaged and has high maintenance costs.

[0006] The technical solution of the utility model is as follows: a temperature control device for a photolithography machine lens, comprising a nitrogen pipe, a nitrogen flow switch, an oil-water separation filter, a temperature-controlling electric belt, a fixing ring, a positioning ring, a connecting plate, a supporting plate and a mounting plate;

[0007] The nitrogen pipe is detachably mounted at the air inlet of the lens isolation chamber of the air conditioning equipment, and a nitrogen input port is provided on one side of the nitrogen pipe;

[0008] The nitrogen flow switch is arranged on the nitrogen pipe, and the nitrogen flow switch is located on one side of the nitrogen inlet;

[0009] The oil-water separation filter is installed on one side of the nitrogen flow switch;

[0010] The temperature-controlled electric belt is wound around the nitrogen pipe;

[0011] The fixing rings are provided in two numbers, and both fixing rings are detachably provided on the nitrogen pipe;

[0012] The positioning ring is detachably mounted on the top end of each of the fixing rings through a positioning seat;

[0013] The connecting plate is fixedly connected to the top end of each positioning ring;

[0014] The support plate is rotatably and slidably mounted on each of the connecting plates through an adjusting assembly, and a groove for the support plate to slide is provided on the connecting plate;

[0015] The mounting plate is movably mounted on the upper side of each supporting plate through a supporting seat.

[0016] Preferably, the adjustment component comprises:

[0017] A rotating rod, the rotating rod is connected to the supporting plate through the supporting plate, and the supporting plate is provided with a rotating opening matching with the rotating rod;

[0018] A limit block, wherein two limit blocks are provided, the two limit blocks are symmetrically connected to the rotating rod, and the connecting plate is provided with a limit groove for the limit block to slide;

[0019] An adjustment plate, the adjustment plate being fixedly connected to one side of the support plate;

[0020] An adjusting screw is threadedly connected between the adjusting plate and the connecting plate.

[0021] Furthermore, the support seat comprises:

[0022] A support tube, the support tube penetrates and slides onto the adjacent support plate, and the support tube is fixedly connected to the mounting plate;

[0023] A sliding block, wherein two sliding blocks are provided, and the two sliding blocks are symmetrically connected to the support plate;

[0024] A fastening screw, wherein the fastening screw thread is disposed between the support plate, the support tube and the two sliding blocks;

[0025] A fastening screw ring is threadedly connected to the fastening screw.

[0026] As a further solution of the present application, the positioning seat includes:

[0027] A positioning block, wherein two positioning blocks are provided, and the two positioning blocks are symmetrically connected to the positioning ring;

[0028] A fixing block, wherein two fixing blocks are provided, and the two fixing blocks are symmetrically mounted on adjacent fixing rings;

[0029] A positioning screw is threadedly connected between the positioning block and the adjacent fixing block, and a positioning screw ring is threadedly connected to the positioning screw.

[0030] On the basis of the above-mentioned solution, the two fixing rings and the two positioning rings are provided with through openings matching the nitrogen pipes.

[0031] It should also be noted that a plurality of mounting holes are provided on the mounting plate.

[0032] The working principle and beneficial effects of the utility model are:

[0033] 1. In the utility model, the nitrogen is conveniently allowed to enter the nitrogen pipe through the nitrogen inlet, the nitrogen flow switch is convenient for controlling the flow of nitrogen, the nitrogen can be filtered through the oil-water separation filter, and the temperature of the nitrogen in the nitrogen pipe is conveniently controlled through the temperature-controlled electric heating belt, so as to adjust and control the temperature of the nitrogen entering the air inlet of the lens isolation chamber;

[0034] 2. In the utility model, the fixing ring and the positioning ring are conveniently installed on the nitrogen pipe through the positioning seat, and the supporting plate is conveniently slid and rotated through the connecting plate, so as to adjust the horizontal position of the mounting plate, thereby facilitating the installation of the mounting plate at a suitable position of the air inlet of the isolation chamber of the air conditioning equipment;

[0035] 3. In the utility model, the support seat facilitates the movement of the mounting plate on the support plate, so as to adjust the mounting height of the mounting plate, thereby facilitating the mounting plate to be installed at the air inlet of the air conditioning equipment isolation chamber, and further the nitrogen pipe can be installed and removed at the air inlet of the air conditioning equipment lens isolation chamber;

[0036] 4. Therefore, compared with the prior art, the temperature control device for the lithography machine lens is convenient for adjusting and controlling the temperature of the air inlet entering the lens isolation chamber through the cooperation of the nitrogen pipe, nitrogen flow switch, oil-water separation filter, temperature-control electric belt, fixing ring, positioning ring, connecting plate, support plate and mounting plate, and is convenient for installing and disassembling the nitrogen pipe at the air inlet of the lens isolation chamber, without changing the structure of the existing air-conditioning equipment, and has a simple structure, low cost, and is easy to operate and implement. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0038] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0039] Figure 2 For this utility model Figure 1 A schematic diagram of the enlarged structure at A in the middle;

[0040] Figure 3 It is a cross-sectional structural diagram of the connection plate, support plate and mounting plate of the utility model;

[0041] Figure 4 It is a cross-sectional structural diagram of the cooperation among the support plate, the support tube and the sliding block of the utility model.

[0042] In the figure: 1. nitrogen pipe; 2. nitrogen flow switch; 3. oil-water separation filter; 4. temperature-controlled electric belt; 5. fixing ring; 6. positioning ring; 7. connecting plate; 8. support plate; 9. mounting plate; 10. rotating rod; 11. limit block; 12. adjustment plate; 13. adjustment screw; 14. support cylinder; 15. sliding block; 16. fastening screw; 17. fastening screw ring; 18. positioning block; 19. fixing block; 20. positioning screw; 21. positioning screw ring. DETAILED DESCRIPTION

[0043] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0044] like Figure 1~Figure 4As shown, this embodiment proposes a temperature control device for a lithography machine lens, including a nitrogen pipe 1, a nitrogen flow switch 2, an oil-water separation filter 3, a temperature-controlling electric heating tape 4, a fixing ring 5, a positioning ring 6, a connecting plate 7, a supporting plate 8 and a mounting plate 9. The nitrogen pipe 1 can be detachably installed at the air inlet of the lens isolation chamber of the air-conditioning equipment, and a nitrogen input port is provided on one side of the nitrogen pipe 1 to facilitate the entry of nitrogen into the nitrogen pipe 1. The temperature of nitrogen is lower than that of compressed air and the temperature is stable. The nitrogen flow switch 2 is arranged on the nitrogen pipe 1, and the nitrogen flow switch 2 is located on one side of the nitrogen input port. The oil-water separation filter 3 is installed on one side of the nitrogen flow switch 2. The temperature-controlling electric heating tape 4 is wound around the nitrogen pipe 1. The temperature-controlling electric heating tape 4 is connected to a 220V power supply and a temperature controller, so that the nitrogen in the nitrogen pipe 1 can be heated and the nitrogen entering the lens isolation chamber of the air-conditioning equipment can be heated. The temperature is controlled by a nitrogen flow switch 2 and a temperature-controlled electric belt 4, and it is also convenient to control the temperature of the nitrogen entering the cavity of the lithography machine. After the nitrogen heating treatment, the first temperature of the air entering the lens isolation cavity of the air-conditioning equipment can be controlled. Two fixing rings 5 ​​are provided, and both fixing rings 5 ​​are detachably provided on the nitrogen pipe 1. The positioning ring 6 is detachably installed on the top of each fixing ring 5 through a positioning seat. The two fixing rings 5 ​​and the two positioning rings 6 are both provided with through-holes matching the nitrogen pipe 1, which is convenient for stably installing the fixing ring 5 and the positioning ring 6 on the nitrogen pipe 1. The connecting plate 7 is fixedly connected to the top of each positioning ring 6. The support plate 8 is rotated and slidably installed on each connecting plate 7 through an adjusting assembly, and a groove for the support plate 8 to slide is provided on the connecting plate 7. The mounting plate 9 is movably installed on the upper side of each support plate 8 through the support seat.

[0045] like Figure 1~Figure 4 As shown, the adjustment assembly includes a rotating rod 10, a limit block 11, an adjustment plate 12 and an adjustment screw 13. The rotating rod 10 is connected to the support plate 8 through, and the support plate 8 is provided with a rotation opening matching the rotating rod 10. Two limit blocks 11 are provided, and the two limit blocks 11 are symmetrically connected to the rotating rod 10. A limit groove for the limit block 11 to slide is provided on the connecting plate 7. The adjustment plate 12 is fixedly connected to one side of the support plate 8, and the adjustment screw 13 is threadedly connected between the adjustment plate 12 and the connecting plate 7.

[0046] The rotating mouth makes it easy to rotate the support plate 8 on the rotating rod 10 so as to adjust the support angle of the support plate 8. At the same time, the support plate 8 can be moved on the connecting plate 7 through the groove so as to adjust the support position of the support plate 8. When the support plate 8 is adjusted to a suitable position, the adjusting plate 12 and the connecting plate 7 can be connected by adjusting the screw 13 to fix the position of the support plate 8.

[0047] like Figure 1~Figure 4As shown, the support seat includes a support cylinder 14, a sliding block 15, a fastening screw 16 and a fastening screw ring 17. The support cylinder 14 passes through the sliding sleeve on the adjacent support plate 8, and the support cylinder 14 is fixedly connected to the mounting plate 9. Two sliding blocks 15 are provided, and the two sliding blocks 15 are symmetrically connected to the support plate 8. The support cylinder 14 is provided with a sliding groove for the sliding block 15 to slide. The fastening screw 16 is threadedly arranged between the support plate 8, the support cylinder 14 and the two sliding blocks 15, and the fastening screw ring 17 is threadedly connected to the fastening screw 16;

[0048] Through the cooperation of the sliding block 15 and the sliding groove, the support tube 14 can slide stably on the support plate 8, so as to adjust the installation position of the mounting plate 9. When the mounting plate 9 is moved to a suitable installation height, the support plate 8, the support tube 14 and the sliding block 15 can be connected through the cooperation of the fastening screws 16 and the fastening screw ring 17, so as to fix the position of the support tube 14 on the support plate 8, thereby facilitating the fixation of the position of the mounting plate 9.

[0049] like Figure 1~Figure 4 As shown, the positioning seat includes a positioning block 18, a fixing block 19 and a positioning screw 20. The positioning block 18 is provided in two pieces, and the two positioning blocks 18 are symmetrically connected to the positioning ring 6. The fixing block 19 is provided in two pieces, and the two fixing blocks 19 are symmetrically installed on the adjacent fixing rings 5. The positioning screw 20 is threadedly connected between the positioning block 18 and the adjacent fixing block 19, and a positioning screw ring 21 is threadedly connected to the positioning screw 20.

[0050] The adjacent fixing blocks 19 and positioning blocks 18 can be connected by the positioning screws 20 and the positioning screw rings 21 , so as to stably connect the fixing ring 5 and the positioning ring 6 , thereby facilitating the installation of the fixing ring 5 and the positioning ring 6 on the nitrogen pipe 1 .

[0051] In the present embodiment, when it is necessary to install the nitrogen pipe 1 at the air inlet of the lens isolation chamber of the air-conditioning equipment, firstly, the fixing ring 5 and the positioning ring 6 are both installed on the nitrogen pipe 1, and the adjacent fixing blocks 19 and positioning blocks 18 are connected by the positioning screws 20. After the fixing ring 5 and the positioning ring 6 are installed, the support plate 8 is slid in the groove, and the support plate 8 is rotated on the rotating rod 10 according to the actual installation requirements, so as to facilitate the movement and rotation of the mounting plate 9. When the support plate 8 is adjusted to a suitable position, the adjusting plate 12 and the connecting plate 7 are connected by the adjusting screws 13, and the support tube 14 is moved on the support plate 8 at the same time, so as to facilitate the adjustment of the installation height of the mounting plate 9. When the support tube 14 and the mounting plate 9 are both moved to suitable positions, the support plate 8, the support tube 14 and the sliding block 15 are connected by the fastening screws 16 and the fastening screw ring 17, and the mounting plate 9 is installed at a suitable installation position of the air inlet of the lens isolation chamber of the air-conditioning equipment through multiple mounting holes and multiple external mounting screws.

[0052] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A temperature control device for a lithography machine lens, characterized in that: include: A nitrogen pipe (1), the nitrogen pipe (1) being detachably mounted at the air inlet of the lens isolation chamber of the air conditioning device, and a nitrogen input port being provided on one side of the nitrogen pipe (1); A nitrogen flow switch (2), the nitrogen flow switch (2) being arranged on the nitrogen pipe (1), and the nitrogen flow switch (2) being located on one side of the nitrogen inlet; An oil-water separation filter (3), the oil-water separation filter (3) being installed on one side of the nitrogen flow switch (2); A temperature-controlled electric belt (4), wherein the temperature-controlled electric belt (4) is wound around the nitrogen pipe (1); A fixing ring (5), wherein two fixing rings (5) are provided, and both fixing rings (5) are detachably provided on the nitrogen pipe (1); A positioning ring (6), the positioning ring (6) being detachably mounted on the top end of each of the fixing rings (5) via a positioning seat; A connecting plate (7), the connecting plate (7) being fixedly connected to the top end of each positioning ring (6); A support plate (8), the support plate (8) being rotatably and slidably mounted on each of the connecting plates (7) via an adjustment assembly, and the connecting plates (7) being provided with grooves for the support plate (8) to slide; A mounting plate (9), wherein the mounting plate (9) is movably mounted on the upper side of each of the support plates (8) via a support seat.

2. The temperature control device for a lithography machine lens according to claim 1, characterized in that: The adjustment component comprises: A rotating rod (10), the rotating rod (10) being connected through the supporting plate (8), and the supporting plate (8) being provided with a rotating opening matching the rotating rod (10); a limit block (11), wherein two limit blocks (11) are provided, the two limit blocks (11) are symmetrically connected to the rotating rod (10), and the connecting plate (7) is provided with a limit groove for the limit block (11) to slide; an adjustment plate (12), the adjustment plate (12) being fixedly connected to one side of the support plate (8); An adjusting screw (13), wherein the adjusting screw (13) is threadedly connected between the adjusting plate (12) and the connecting plate (7).

3. The temperature control device for a lithography machine lens according to claim 2, characterized in that: The support base comprises: A support tube (14), the support tube (14) penetrates and is slidably mounted on the adjacent support plate (8), and the support tube (14) is fixedly connected to the mounting plate (9); A sliding block (15), wherein two sliding blocks (15) are provided, and the two sliding blocks (15) are symmetrically connected to the support plate (8); a fastening screw (16), wherein the fastening screw (16) is threadably disposed between the support plate (8), the support tube (14) and the two sliding blocks (15); A fastening screw ring (17), wherein the fastening screw ring (17) is threadedly connected to the fastening screw (16).

4. The temperature control device for a lithography machine lens according to claim 3, characterized in that: The positioning seat comprises: A positioning block (18), wherein two positioning blocks (18) are provided, and the two positioning blocks (18) are symmetrically connected to the positioning ring (6); A fixing block (19), wherein two fixing blocks (19) are provided, and the two fixing blocks (19) are symmetrically mounted on adjacent fixing rings (5); A positioning screw (20), wherein the positioning screw (20) is threadedly connected between the positioning block (18) and the adjacent fixing block (19), and a positioning screw ring (21) is threadedly connected to the positioning screw (20).

5. The temperature control device for a lithography machine lens according to claim 4, characterized in that: The two fixing rings (5) and the two positioning rings (6) are each provided with a through opening matching the nitrogen pipe (1).

6. The temperature control device for a lithography machine lens according to claim 5, characterized in that: The mounting plate (9) is provided with a plurality of mounting holes.

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