Secondary positioning mechanism for turret equipment

Abstract

The utility model discloses a secondary positioning mechanism used in turret equipment, which comprises an XY two-degree-of-freedom driving device, the XY two-degree-of-freedom driving device is provided with a secondary positioning structure, the secondary positioning structure comprises a lifting adjusting part and a rotating adjusting part, the rotating adjusting part is provided with a reference positioning square groove used for correcting the position of a material, and the reference positioning square groove is provided with a positioning groove. And an alignment tool for correcting the reference positioning square groove is arranged above the reference positioning square groove. According to the utility model, the reference positioning square groove corrects the position of a material by pushing a single side or two sides, so that the position compensation of the material in the horizontal direction and the angle direction is completed; the positioning mode does not need to contact four sides of the material, so that the risk of damaging the material can be reduced; in addition, the structure of the product is simple, whether the reference positioning groove meets the standard of material correction or not can be calibrated through the arrangement of the alignment block, the debugging process is more convenient, and the next position compensation is prevented from being affected.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor packaging, and in particular relates to a secondary positioning mechanism used in a turret device. Background Art

[0002] The turret equipment is a widely used equipment in the semiconductor packaging industry. It can suck up materials from the feeding mechanism through the suction nozzle to facilitate the subsequent work process. In addition, the turret equipment uses a direct drive motor as the main shaft, which has a fast rotation speed and high efficiency, so it has been favored by many semiconductor manufacturers. It is also because of the fast rotation speed of the equipment that the suction nozzle may cause the horizontal and angular position of the material to shift during the process of sucking the material, which will affect the subsequent work of the equipment, such as detection and discharge.

[0003] The secondary positioning mechanism is used to correct the position of the material. Currently, the horizontal position correction can be achieved through optics plus movement of the X-axis and Y-axis for position compensation, but the angular position compensation is still a big problem.

[0004] At present, most of the secondary positioning mechanisms on the market adopt a clamping claw structure, which clamps the four sides of the material to correct the position of the material, thereby completing the horizontal and angular position compensation of the material. However, there are still the following disadvantages:

[0005] 1. In the process of correcting the material position, the clamping structure will contact the four sides of the material, which will increase the risk of damaging the material.

[0006] 2. Due to its claw-type structure, it is difficult to install and debug. Utility Model Content

[0007] In view of the deficiencies in the prior art, the utility model provides a secondary positioning mechanism for use in a turret device, which can correct the position of a material by pushing an edge, thereby reducing damage to the material.

[0008] In order to solve the above technical problems and achieve the above technical effects, the present invention is implemented through the following technical solutions:

[0009] A secondary positioning mechanism for a turret device comprises an XY two-degree-of-freedom drive device, the XY two-degree-of-freedom drive device is provided with a secondary positioning structure for correcting the position of a material, the secondary positioning structure comprises a lifting adjustment part and a rotation adjustment part, the lifting adjustment part is adjustably arranged on the XY two-degree-of-freedom drive mechanism in an up and down position, the rotation adjustment part is adjustably arranged at the center of the lifting adjustment part in a plane angle, a reference positioning square groove for correcting the position of the material is opened on the rotation adjustment part, and a positioning tool for correcting the plane angle of the reference positioning square groove is provided above the reference positioning square groove.

[0010] Furthermore, the XY two-degree-of-freedom drive device includes an X-axis drive structure and a Y-axis drive structure, the X-axis drive structure includes an X-axis base plate, the upper surface of the X-axis base plate is provided with an X-axis motor through an X-axis motor support, the upper surface of the X-axis base plate is provided with an X-axis screw through an X-axis screw rotating support, the X-axis motor is connected to one end of the X-axis screw through an X-axis coupling, an X-axis screw nut is provided on the X-axis screw, an X-axis slide is provided on the X-axis screw nut, an X-axis slide is provided on one side of the X-axis slide, the X-axis slide is fixedly connected to the upper surface of the X-axis base plate, an X-axis slider is provided on the X-axis slide, one side of the X-axis slider is fixedly connected to the X-axis slide, and the Y-axis drive structure is simultaneously provided on the X-axis slider and the X-axis slide.

[0011] Furthermore, the Y-axis driving structure includes a Y-axis base plate, the lower surface of the Y-axis base plate is fixedly connected to the X-axis slider and the X-axis slider at the same time, the upper surface of the Y-axis base plate is provided with a Y-axis motor through a Y-axis motor support, the upper surface of the Y-axis base plate is provided with a Y-axis screw through a Y-axis screw rotating support, the Y-axis motor is connected to one end of the Y-axis screw through a Y-axis coupling, a Y-axis screw nut is provided on the Y-axis screw, and the Y-axis screw nut is fixedly connected to a Y-axis connecting plate, the lifting and lowering adjustment part is adjustably arranged on the Y-axis connecting plate, the upper surface of the Y-axis screw rotating support is provided with a Y-axis slide rail, the Y-axis slide rail is provided with a Y-axis slider, and the upper surface of the Y-axis slider is fixedly connected to the lower surface of the Y-axis connecting plate.

[0012] Furthermore, the lifting and lowering adjustment part is a reference positioning seat, which is adjustably connected to one side end surface of the Y-axis connecting plate in the Z-axis direction, and the upper surface of the reference positioning seat is provided with an embedding groove for installing the rotation adjustment part.

[0013] Furthermore, two symmetrical elliptical holes are provided on the end surface of the Y-axis connecting plate, and two symmetrical first threaded holes are provided on the side of the reference positioning seat opposite to the end surface of the Y-axis connecting plate. The two first threaded holes correspond to the positions of the two elliptical holes respectively. The reference positioning seat is connected to the Y-axis connecting plate in an adjustable up and down position by passing a lifting locking screw through the elliptical hole and being threadedly connected to the first threaded hole.

[0014] Furthermore, a convex edge is horizontally extended from both sides of the end surface of the Y-axis connecting plate, and the two elliptical holes are respectively located on the two convex edges.

[0015] Furthermore, a groove is provided on the end surface of the Y-axis connecting plate, and a protrusion is provided on the side of the reference positioning seat opposite to the end surface of the Y-axis connecting plate. The protrusion can be slidably embedded in the groove up and down, and the reference positioning seat realizes limited movement on the end surface of the Y-axis connecting plate through the sliding cooperation between the protrusion and the groove.

[0016] Furthermore, the rotation adjustment part is a rotating disk rotatably connected to the embedded groove, the reference positioning square groove is located at the center of the rotating disk, waist-shaped countersunk holes are opened on both sides of the reference positioning square groove, and two second threaded holes are arranged on the bottom surface of the embedded groove, and the two second threaded holes respectively correspond to the positions of the two waist-shaped countersunk holes. The rotating disk is connected to the reference positioning seat at an adjustable plane angle by rotating the locking screw through the waist-shaped countersunk hole and threadedly connected with the second threaded hole. The reference positioning square groove changes its azimuth angle under the rotation of the rotating disk.

[0017] Furthermore, the waist-shaped countersunk holes are symmetrically arranged on both sides of the reference positioning square groove, and the arc length of the waist-shaped countersunk holes meets the rotation angle requirement of the reference positioning square groove within a certain range.

[0018] Furthermore, the alignment tool is an alignment block, the bottom area of ​​the alignment block matches the bottom area of ​​the reference positioning square groove, and before the reference positioning square groove is used next time, the alignment block is inserted into the reference positioning square groove. Beneficial Effects

[0019] Compared with the prior art, the reference positioning square groove of the utility model can correct the position of the material by pushing one side or both sides, thereby completing the position compensation of the material in the horizontal and angular directions; and this positioning method does not require contact with the four sides of the material, which can reduce the risk of damaging the material; in addition, the structure of this product is also relatively simple. When the reference positioning square groove completes the secondary positioning of the material and before the next use, the setting of the positioning block can calibrate whether the reference positioning groove meets the standard of the correction material, making the debugging process more convenient to avoid affecting the next position compensation.

[0020] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiment of the utility model with the accompanying drawings. The specific implementation method of the utility model is given in detail by the following embodiments and their drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0022] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0023] Figure 2 It is the secondary positioning structure in the utility model;

[0024] Figure 3 It is a cross-sectional view of the alignment block of the utility model when calibrating the reference positioning square groove.

[0025] In the figure: 1. X-axis base plate; 11. X-axis motor; 12. X-axis coupling; 13. X-axis lead screw; 14. X-axis lead screw nut; 15. X-axis slide; 16. X-axis slide rail; 17. X-axis slider; 18. X-axis rotating lead screw support; 2. Y-axis base plate; 21. Y-axis motor; 22. Y-axis coupling; 23. Y-axis lead screw; 24. Y-axis lead screw nut; 25. Y-axis connecting plate; 26. elliptical hole; 27. Y-axis rotating lead screw support; 3. secondary positioning structure; 31. reference positioning seat; 32. lifting locking screw; 33. rotating disc; 34. reference positioning square groove; 35. waist-shaped countersunk hole; 36. rotating locking screw; 4. alignment block. DETAILED DESCRIPTION

[0026] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments. The descriptions herein are used to provide a further understanding of the present invention and constitute a part of this application. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention.

[0027] See also Figure 1-3 As shown, a secondary positioning mechanism used in a turret device mainly includes an XY two-degree-of-freedom driving device, and the XY two-degree-of-freedom driving device includes an X-axis driving structure and a Y-axis driving structure.

[0028] The X-axis driving structure includes an X-axis base plate 1 , an X-axis motor 11 is disposed on the upper surface of the X-axis base plate 1 through an X-axis motor support, and an X-axis screw 13 is disposed on the upper surface of the X-axis base plate 1 through an X-axis screw rotating support 18 .

[0029] Preferably, the X-axis motor 11 is connected to one end of the X-axis screw 13 through the X-axis coupling 12, the X-axis screw 13 is provided with an X-axis screw nut 14, the X-axis screw nut 14 is provided with an X-axis slide 15, one side of the X-axis slide 15 is provided with an X-axis slide rail 16, the X-axis slide rail 16 is fixedly connected to the upper surface of the X-axis base plate 1, the X-axis slide rail 16 is provided with an X-axis slider 17, one side of the X-axis slider 17 is fixedly connected to the X-axis slide 15, and the Y-axis driving structure is simultaneously provided on the X-axis slider 17 and the X-axis slide 15.

[0030] The Y-axis driving structure includes a Y-axis base plate 2, the lower surface of the Y-axis base plate 2 is fixedly connected to the X-axis slider 17 and the X-axis slider 17 at the same time, the upper surface of the Y-axis base plate 2 is provided with a Y-axis motor 21 through a Y-axis motor support, and the upper surface of the Y-axis base plate 2 is provided with a Y-axis screw 23 through a Y-axis screw rotating support 27.

[0031] Preferably, the Y-axis motor 21 is connected to one end of the Y-axis screw 23 through the Y-axis coupling 22, the Y-axis screw nut 24 is provided on the Y-axis screw 23, the Y-axis screw nut 24 is fixedly connected to the Y-axis connecting plate 25, the upper surface of the Y-axis screw rotating support 27 is provided with a Y-axis slide rail, the Y-axis slide rail is provided with a Y-axis slider, and the upper surface of the Y-axis slider is fixedly connected to the lower surface of the Y-axis connecting plate 25.

[0032] A secondary positioning structure 3 for correcting the material position is provided on the Y-axis connecting plate 25. The secondary positioning structure 3 includes a lifting adjustment part and a rotation adjustment part. The plane angle of the rotation adjustment part is adjustable at the center of the lifting adjustment part. A reference positioning square groove 34 for correcting the material position is opened on the rotation adjustment part.

[0033] The lifting adjustment part is a reference positioning seat 31 , and the reference positioning seat 31 is connected to an end surface of one side of the Y-axis connecting plate 25 in an adjustable position in the Z-axis direction.

[0034] Preferably, two symmetrical elliptical holes 26 are provided on the end face of the Y-axis connecting plate 25, and two symmetrical first threaded holes are provided on the side of the reference positioning seat 31 opposite to the end face of the Y-axis connecting plate 25. The two first threaded holes correspond to the positions of the two elliptical holes 26 respectively. The reference positioning seat 31 is connected to the Y-axis connecting plate 25 in an adjustable up and down position by passing the elliptical hole 26 through the lifting locking screw 32 and being threadedly connected with the first threaded hole.

[0035] Preferably, a convex edge is horizontally extended from both sides of the end face of the Y-axis connecting plate 25, and the two elliptical holes 26 are respectively located on the two convex edges; a groove is provided on the end face of the Y-axis connecting plate 25, and a protrusion is provided on the side of the reference positioning seat 31 opposite to the end face of the Y-axis connecting plate 25, and the protrusion can be slidably embedded in the groove up and down, and the reference positioning seat 31 realizes limited movement on the end face of the Y-axis connecting plate 25 through the sliding cooperation between the protrusion and the groove.

[0036] The rotation adjustment part is a rotating disk 33 . An embedding groove is provided on the upper surface of the reference positioning seat 31 . The rotating disk 33 is rotatably connected in the embedding groove. The reference positioning square groove 34 is located at the center of the rotating disk 33 .

[0037] Preferably, the waist-shaped countersunk holes 35 are symmetrically arranged on both sides of the reference positioning square groove 34, and the arc length of the waist-shaped countersunk holes 35 meets the rotation angle requirement of the reference positioning square groove 34 within a certain range. Waist-shaped countersunk holes 35 are opened on both sides of the reference positioning square groove 34, and two second threaded holes are arranged on the bottom surface of the embedded groove. The two second threaded holes correspond to the positions of the two waist-shaped countersunk holes 35 respectively. The rotating disk 33 is connected to the reference positioning seat 31 with an adjustable plane angle by rotating the locking screw 36 through the waist-shaped countersunk hole 35 and threadedly connected with the second threaded hole. The reference positioning square groove 34 changes its azimuth angle under the rotation of the rotating disk 33.

[0038] Preferably, the size of the reference positioning square groove 34 is slightly larger than the size of the material.

[0039] An alignment tool for correcting the plane angle of the reference positioning square groove 34 is provided above the reference positioning square groove 34 .

[0040] Preferably, the alignment tool is an alignment block 4, the bottom area of ​​the alignment block 4 matches the bottom area of ​​the reference positioning square groove 34, and the alignment block 4 is inserted into the reference positioning square groove 34 before the reference positioning square groove 34 is used next time.

[0041] The working principle of the utility model is as follows:

[0042] See also Figure 1-3As shown: when it is necessary to use this mechanism, firstly, one of the suction nozzles in the turret device needs to be replaced with the alignment block 4. The alignment block 4 can be used to calibrate whether the height and angle of the reference positioning square groove 34 meet the standard for correcting the material position. The steps are as follows: first, loosen the lifting locking screw 32 and the rotating locking screw 36. When the alignment block 4 rotates with the turret device to the top of the secondary positioning structure 3, the X-axis driving structure and the Y-axis driving structure cooperate with each other to move so that the reference positioning square groove 34 is located below the alignment block 4. At this time, the turret device drives the alignment block 4 to rotate. The positioning block 4 is inserted downward into the reference positioning square groove 34. When the positioning block 4 can just be inserted into the reference positioning square groove 34, it means that the reference positioning square groove 34 meets the standard of the calibration material. When the positioning block 4 is misaligned with the reference positioning square groove 34, the position of the reference positioning seat 31 is adjusted up and down, or the angle of the rotating disk 33 is rotated left and right, so that the positioning block 4 can be inserted into the reference positioning square groove 34, and then the lifting locking screw 32 and the rotating locking screw 36 are tightened, so that the reference positioning square groove 34 can achieve height and angle correction in the Z-axis direction.

[0043] When the reference positioning square groove 34 meets the standard of the calibrated material, the alignment block 4 is replaced with a suction nozzle. As the feeding mechanism starts to transport the material, the turret equipment absorbs the material through the suction nozzle during the rotation, so that the material follows the suction nozzle to rotate to the top of the reference positioning square groove 34, and then the reference positioning square groove 34 starts to correct the position of the material. The steps are as follows: when the material passes above the reference positioning square groove 34, the suction nozzle moves downward and releases the material to allow the material to enter the reference positioning square groove 34. In the process of the material entering the reference positioning square groove 34, the four sides of the material can automatically fit with the edges of the reference positioning square groove 34, so that the material can achieve height and angle correction in the Z-axis direction.

[0044] When the position of the material is corrected by the reference positioning square groove 34, the suction nozzle again takes the material up from the reference positioning square groove 34 and then moves to the next working link.

[0045] The reference positioning square groove 34 of the utility model can correct the position of the material by pushing one side or both sides, thereby completing the position compensation of the material in the horizontal and angular directions; and this positioning method does not require contact with the four sides of the material, which can reduce the risk of damaging the material; in addition, the structure of the product is also relatively simple. When the reference positioning square groove 34 completes the secondary positioning of the material and before the next use, the setting of the alignment block 4 can calibrate whether the reference positioning groove 34 meets the standard for correcting the material, making the debugging process more convenient to avoid affecting the next position compensation.

[0046] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A secondary positioning mechanism for a turret device, characterized in that: The invention comprises an XY two-degree-of-freedom driving device, wherein the XY two-degree-of-freedom driving device is provided with a secondary positioning structure (3) for correcting the position of a material, wherein the secondary positioning structure (3) comprises a lifting adjustment part and a rotation adjustment part, wherein the lifting adjustment part is adjustably arranged on the XY two-degree-of-freedom driving mechanism in an up-and-down position, wherein the rotation adjustment part is adjustably arranged at the center of the lifting adjustment part in a plane angle, wherein a reference positioning square groove (34) for correcting the position of a material is provided on the rotation adjustment part, and an alignment tool for correcting the plane angle of the reference positioning square groove (34) is provided above the reference positioning square groove (34).

2. A secondary positioning mechanism for a turret device according to claim 1, characterized in that: The XY two-degree-of-freedom drive device comprises an X-axis drive structure and a Y-axis drive structure, wherein the X-axis drive structure comprises an X-axis base plate (1), an X-axis motor (11) is arranged on the upper surface of the X-axis base plate (1) via an X-axis motor support, an X-axis screw rod (13) is arranged on the upper surface of the X-axis base plate (1) via an X-axis screw rod rotating support (18), the X-axis motor (11) is connected to one end of the X-axis screw rod (13) via an X-axis coupling (12), and an X-axis screw rod (13) is arranged on the X-axis screw rod (13). A rod nut (14), an X-axis slide table (15) is arranged on the X-axis lead screw nut (14), an X-axis slide rail (16) is arranged on one side of the X-axis slide table (15), the X-axis slide rail (16) is fixedly connected to the upper surface of the X-axis base plate (1), an X-axis slider (17) is arranged on the X-axis slide rail (16), one side of the X-axis slider (17) is fixedly connected to the X-axis slide table (15), and the Y-axis driving structure is arranged on both the X-axis slider (17) and the X-axis slide table (15).

3. A secondary positioning mechanism for a turret device according to claim 2, characterized in that: The Y-axis driving structure comprises a Y-axis base plate (2), the lower surface of the Y-axis base plate (2) being fixedly connected to the X-axis slider (17) and the X-axis slider (17), the upper surface of the Y-axis base plate (2) being provided with a Y-axis motor (21) via a Y-axis motor support, the upper surface of the Y-axis base plate (2) being provided with a Y-axis screw rod (23) via a Y-axis screw rod rotating support (27), the Y-axis motor (21) being connected to the Y-axis screw rod (23) via a Y-axis coupling (22). The Y-axis screw rod (23) is connected to one end thereof, a Y-axis screw rod nut (24) is arranged on the Y-axis screw rod (23), the Y-axis screw rod nut (24) is fixedly connected to a Y-axis connecting plate (25), the lifting and lowering adjustment portion is arranged on the Y-axis connecting plate (25) in an adjustable manner in terms of up and down positions, a Y-axis slide rail is arranged on the upper surface of the Y-axis screw rod rotating support (27), a Y-axis slider is arranged on the Y-axis slide rail, and the upper surface of the Y-axis slider is fixedly connected to the lower surface of the Y-axis connecting plate (25).

4. A secondary positioning mechanism for a turret device according to claim 3, characterized in that: The lifting and lowering adjustment part is a reference positioning seat (31), and the reference positioning seat (31) is adjustably connected to one end surface of the Y-axis connecting plate (25) in the Z-axis direction. The upper surface of the reference positioning seat (31) is provided with an embedding groove for installing the rotation adjustment part.

5. The secondary positioning mechanism for turret equipment according to claim 4, characterized in that: Two symmetrical elliptical holes (26) are provided on the end surface of the Y-axis connecting plate (25), and two symmetrical first threaded holes are provided on the side of the reference positioning seat (31) opposite to the end surface of the Y-axis connecting plate (25), the two first threaded holes respectively corresponding to the positions of the two elliptical holes, and the reference positioning seat (31) is connected to the Y-axis connecting plate (24) in an adjustable vertical position by passing through the elliptical holes (26) and being threadedly connected to the first threaded holes through the lifting locking screws (32).

6. A secondary positioning mechanism for a turret device according to claim 5, characterized in that: A convex edge is horizontally extended from both sides of the end surface of the Y-axis connecting plate (25), and the two elliptical holes (26) are respectively located on the two convex edges.

7. The secondary positioning mechanism for turret equipment according to claim 4, characterized in that: A groove is provided on the end surface of the Y-axis connecting plate (25), and a protrusion is provided on the side of the reference positioning seat (31) opposite to the end surface of the Y-axis connecting plate (25). The protrusion is slidably embedded in the groove, and the reference positioning seat (31) realizes limited movement on the end surface of the Y-axis connecting plate (25) through the sliding cooperation between the protrusion and the groove.

8. The secondary positioning mechanism for turret equipment according to claim 4, characterized in that: The rotation adjustment part is a rotating disk (33) rotatably connected in the embedded groove, the reference positioning square groove (34) is located at the center of the rotating disk (33), waist-shaped countersunk holes (35) are opened on both sides of the reference positioning square groove (34), and two second threaded holes are arranged on the bottom surface of the embedded groove, and the two second threaded holes correspond to the positions of the two waist-shaped countersunk holes (35) respectively. The rotating disk (33) is connected to the reference positioning seat (31) in a plane angle adjustable manner by rotating a locking screw (36) through the waist-shaped countersunk hole (35) and being threadedly connected with the second threaded hole. The reference positioning square groove (34) changes its azimuth angle under the rotation of the rotating disk (33).

9. A secondary positioning mechanism for a turret device according to claim 8, characterized in that: The waist-shaped countersunk holes (35) are symmetrically arranged on both sides of the reference positioning square groove (34), and the arc length of the waist-shaped countersunk holes (35) meets the rotation angle requirement of the reference positioning square groove (34) within a certain range.

10. The secondary positioning mechanism for turret equipment according to claim 1, characterized in that: The alignment tool is an alignment block (4), the bottom area of ​​the alignment block (4) matches the bottom area of ​​the reference positioning square groove (34), and before the reference positioning square groove (34) is used next time, the alignment block (4) is inserted into the reference positioning square groove (34).

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