Prewarming treatment equipment and sorting machine

Abstract

The utility model provides a preheating processing device and a sorting machine, and relates to the technical field of semiconductor testing, and the preheating processing device comprises a cavity used for accommodating a plurality of test trays; the waiting area is positioned in the cavity; the to-be-detected area is arranged in the cavity; the first temperature control device and the second temperature control device are arranged in the cavity; the first temperature control device is used for providing first temperature control fluid conveyed in the first direction for the cavity. The second temperature control device is at least partially arranged on one side of the to-be-tested area, the second temperature control device is used for providing second temperature fluid conveyed in the second direction for the cavity, the second temperature fluid is perpendicular to one side, bearing the chip, of each test tray in the to-be-tested area, and an included angle is formed between the first direction and the second direction. The preheating treatment equipment provided by the utility model can quickly enable hot fluid or cold fluid to fill all parts of the cavity, effectively ensures the consistency of the temperature of all parts in the cavity, and is suitable for the condition of simultaneous measurement of large cavities and multiple stations.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor testing, in particular to a pre-temperature treatment device and a sorting machine. Background Art

[0002] The sorting machine is a device that places the semiconductor components under test in the required high temperature, normal temperature, or low temperature environment, and combines with the test machine to apply input signals to the semiconductor components and collect output signals to determine whether the design functions and performance of the semiconductor components under test meet the standards. The sorting machine will mark, sort, collect and stack the semiconductor components under test based on the test results.

[0003] The test temperature of chips on the market is generally -55℃~150℃, so the sorting machine is equipped with a pre-temperature chamber, a test chamber, and a re-temperature chamber. At the beginning of the test, the pre-temperature chamber pre-heats the semiconductor components to a temperature range that meets the test conditions, and then the material lateral movement mechanism transports the tray where the material is located to the test position of the test chamber, and combines with the test head of the test machine for testing. Finally, the tested chips are transported to the re-temperature chamber for re-temperature sorting.

[0004] When the sorting machine works at low temperature, the temperature of the material being tested needs to be maintained within the target low temperature value range. To achieve this goal, a similar technical implementation method is to open a refrigerant flow channel on the material tray, or place the material tray on a pre-heating tray for preheating, but this method cannot be applied to the situation of simultaneous measurement at multiple stations. Utility Model Content

[0005] The utility model aims to provide a pre-temperature treatment device and a sorting machine, which can effectively ensure the consistency of temperature at various locations in a cavity and is suitable for large cavities and multi-station simultaneous measurement situations.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] The utility model provides a pre-temperature treatment device, comprising:

[0008] A cavity, used to accommodate a plurality of test trays;

[0009] A waiting area, located in the cavity, having waiting stations for caching a plurality of the test trays;

[0010] A test area is arranged in the cavity, and the test area has test stations for receiving a plurality of the test trays;

[0011] and a first temperature control device and a second temperature control device both disposed in the cavity;

[0012] The first temperature control device is used to provide a first temperature control fluid transported along a first direction to the cavity;

[0013] The second temperature control device is at least partially disposed on one side of the test area, and is used to provide a second temperature fluid transported along a second direction to the cavity, the second temperature fluid is perpendicular to one side of each test tray carrying chips in the test area, and the first direction and the second direction form an angle.

[0014] Furthermore, the second temperature control device includes a fan chamber, an air duct plate and an air balancing plate, the air duct plate is connected between the fan chamber and the air balancing plate, the air duct plate is parallel to the side of each test tray carrying the chip in the test area, the air duct plate is used to guide the wind in the fan chamber to the side of the air balancing plate away from the test area, and a plurality of air outlet holes are provided on the air balancing plate.

[0015] Further, the waiting area is located on a side of the tested area away from the second temperature control device, and the first temperature control device is arranged below the tested area and the waiting area to transport the first temperature control fluid to the tested area and the waiting area.

[0016] Further, the air duct plate has a width dimension extending along the second direction, and the air duct plate has a length dimension extending perpendicular to the first direction and perpendicular to the second direction, and the first direction is perpendicular to the second direction;

[0017] The length dimension of the air duct plate gradually decreases along the first direction, and the width dimension of the air duct plate gradually increases along the first direction.

[0018] Furthermore, the opening of the air duct plate gradually increases along the second direction.

[0019] Furthermore, the air balancing plate is sealedly connected to the inner wall of the cavity and forms an air guiding cavity connected to each of the air outlet holes between the air balancing plate and the inner wall of the cavity.

[0020] Furthermore, the fan chamber includes a first fan, a first heater and a first refrigerator, the first refrigerator is used to provide a cooling fluid, the air inlet of the first fan is connected to the space in the cavity, the air outlet of the first fan is connected to the air duct plate, and the first fan is used to drive the cooling fluid released by the first refrigerator or the hot fluid heated by the first heater to be discharged to the air duct plate.

[0021] Furthermore, the area to be measured includes a first position to be measured and a second position to be measured which are arranged opposite to the wind balancing plate, and projections of the first position to be measured and the second position to be measured along the second direction fall into the wind balancing plate.

[0022] Furthermore, the first temperature control device includes a second fan, a second heater and a second refrigerator, the second refrigerator is used to provide a cooling fluid, the air inlet of the second fan is connected to the space in the cavity, the air outlet of the second fan is located below the test area and the waiting area, and the second fan is used to drive the cooling fluid released by the second refrigerator or the hot fluid heated by the second heater to be discharged into the cavity.

[0023] Furthermore, the cavity comprises a material inlet, and the material inlet is located at an end of the waiting area away from the first temperature control device.

[0024] In a second aspect, the utility model also provides a sorting machine, comprising the pre-temperature treatment equipment described in the above scheme.

[0025] The pre-temperature treatment equipment and sorting machine provided by the utility model can produce the following beneficial effects:

[0026] When the pre-temperature treatment equipment provided by the utility model is in use, the electronic components are placed on the carrier tray and then enter the waiting area in the cavity, and then are transferred to the area to be tested. During this process, the first temperature control device conveys the first temperature control fluid into the cavity along the first direction, and the second temperature control device conveys the second temperature control fluid into the cavity along the second direction. The second temperature control fluid is conveyed to one side of the chip carrying each test tray in the area to be tested, and the conveying direction of the second temperature control fluid forms an angle with the conveying direction of the first temperature control fluid, so as to realize cooling or heating of the electronic components on the test tray.

[0027] Compared with the prior art, the pre-temperature treatment equipment provided by the utility model has a first temperature control device and a second temperature control device, which can respectively deliver temperature control fluid to the test tray in the cavity from two different directions, and can quickly fill the cavity with hot fluid or cold fluid, effectively ensuring the consistency of temperature in various places in the cavity, and is suitable for large cavities and multi-station simultaneous measurements. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 A side view of the internal structure of a pre-temperature treatment device provided by an embodiment of the utility model;

[0030] Figure 2 A front view of a partial structure of a second temperature control device provided by an embodiment of the utility model;

[0031] Figure 3 An exploded view of a fan chamber provided in an embodiment of the utility model;

[0032] Figure 4 A top view of a first temperature control device provided in an embodiment of the utility model.

[0033] Icons: 1-area to be tested; 11-first position to be tested; 12-second position to be tested; 2-waiting area; 3-first temperature control device; 31-second fan; 32-second heater; 33-second refrigerator; 4-second temperature control device; 41-fan room; 411-first fan; 4111-fan turbine outlet; 412-first heater; 413-first refrigerator; 42-air duct plate; 43-air balancing plate; 431-air outlet; 44-temperature sensor; 5-feeding port. DETAILED DESCRIPTION

[0034] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] The specific implementation of the present invention is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described here is only used to illustrate and explain the present invention, and is not used to limit the present invention.

[0038] The first aspect of the present invention provides a pre-temperature treatment device. Figure 1 and Figure 2 As shown, it includes: a cavity for accommodating a plurality of test trays; a waiting area 2, located in the cavity, having a waiting station for caching a plurality of test trays; a waiting area 1, arranged in the cavity, having a waiting station for receiving a plurality of test trays; and a first temperature control device 3 and a second temperature control device 4, both arranged in the cavity;

[0039] The first temperature control device 3 is used to provide a first temperature control fluid transported along a first direction to the cavity; the second temperature control device 4 is at least partially arranged on one side of the test area 1, and the second temperature control device 4 is used to provide a second temperature fluid transported along a second direction to the cavity, and the second temperature fluid is perpendicular to a side of each test tray carrying the chip in the test area 1, and the first direction and the second direction form an angle.

[0040] See also Figure 1 When in use, the second temperature control device 4 delivers the second temperature fluid to the cavity along the second direction, and the first temperature control device 3 delivers the second temperature fluid to the cavity along the first direction. Since the delivery direction of the second temperature control fluid is at an angle to the delivery direction of the first temperature control fluid, the hot fluid or the cold fluid can be quickly filled in all parts of the cavity, and the temperature of the electronic components on the test tray in the test area 1 and the waiting area 2 can be lowered or raised, ensuring the consistency of the temperature in all parts of the cavity, which is suitable for large cavities and multi-station simultaneous testing.

[0041] The second temperature control device 4 is described in detail below:

[0042] In some embodiments, Figure 1 As shown, the second temperature control device 4 includes a fan chamber 41, an air duct plate 42 and an air balancing plate 43. The air duct plate 42 is connected between the fan chamber 41 and the air balancing plate 43. The air duct plate 42 is parallel to one side of each test tray carrying chips in the test area 1. The air duct plate 42 is used to guide the wind in the fan chamber 41 to the side of the air balancing plate 43 away from the test area 1. A plurality of air outlet holes 431 are provided on the air balancing plate 43. The wind on one side of the air balancing plate 43 can be blown directly to the test area 1 from the plurality of air outlet holes 431.

[0043] In some embodiments, Figure 1 As shown, the waiting area 2 is located on the side of the test area 1 away from the second temperature control device 4 , so that the wind on one side of the wind balancing plate 43 can also blow toward the waiting area 2 from the multiple air outlets 431 .

[0044] In order to make the wind on one side of the wind plate 43 blow evenly to the test area 1 and the waiting area 2, Figure 2 As shown, the air outlet holes 431 on the air balancing plate 43 are evenly distributed on the air balancing plate 43. Specifically, the top of the air balancing plate 43 may not be lower than the top of the test area 1 and the waiting area 2, and the bottom of the air balancing plate 43 may not be higher than the bottom of the test area 1 and the waiting area 2, so that the wind blown by the air balancing plate 43 can cover the entire side of the test area 1 and the waiting area 2.

[0045] In some embodiments, since the purpose of the air duct plate 42 is to guide the wind in the fan chamber 41 to the side of the air duct plate 43 away from the test area 1, it is crucial to guide the hot air or cold air from the air duct plate 42 to the air duct plate 43 to reduce power loss. To facilitate the description of the shape of the air duct plate 42, it is assumed that the air duct plate 42 has a width dimension extending along the second direction, and the air duct plate 42 has a length dimension extending along the first direction and perpendicular to the second direction, the first direction is perpendicular to the second direction, and the first direction extends vertically upward.

[0046] like Figure 1 As shown, the width dimension of the air duct plate 42 is Figure 1 The left and right directions in Figure 2 As shown, the length dimension of the air duct plate 42 is Figure 2 The left and right direction in .

[0047] Specifically, Figure 2 As shown, the length dimension of the air duct plate 42 gradually decreases along the first direction to adapt to the length dimension of the air inlet of the air balancing plate 43; Figure 1 As shown, the width dimension of the air duct plate 42 gradually increases along the first direction to adapt to the width dimension of the air inlet of the air equalizing plate 43.

[0048] In general, the ratio of the length to the width of the air duct plate 42 at the air inlet is smaller than the ratio of the length to the width at the air outlet.

[0049] The air duct plate can be a cylindrical structure, formed by connecting multiple plates end to end in sequence, forming an air guide cavity by itself; or it can be formed by connecting multiple plates in sequence into a semi-enclosed structure, with the side ends of the air duct plate fixed to the inner wall of the cavity, forming an air guide cavity between the air duct plate and the inner wall of the cavity. Similarly, the air duct plate 43 can also form an air guide cavity by itself, or form an air guide cavity between itself and the inner wall of the cavity.

[0050] In at least one embodiment, the air balancing plate 43 is in a semi-enclosed structure, and the side end of the air balancing plate 43 is sealed and connected to the inner wall of the cavity to form an air guide cavity connected to each air outlet 431 between the side end of the air balancing plate 43 and the inner wall of the cavity.

[0051] The above arrangement uses the inner wall of the cavity to form the side wall of the air guide cavity, which can reduce the amount of raw materials used for the air distribution plate 43, facilitate the processing of the air distribution plate 43, and reduce the preheating treatment equipment. Figure 1 Dimensions in width direction shown.

[0052] In order to facilitate the connection between the air balancing plate 43 and the inner wall of the cavity, a connecting plate is provided at the edge of the air balancing plate 43, and a connecting hole is opened on the connecting plate, and a connecting piece such as a screw can be screwed into the connecting hole.

[0053] In some embodiments, Figure 3 As shown, the fan chamber 41 includes a first fan 411, a first heater 412 and a first cooler 413; the first cooler 413 is used to provide a refrigeration fluid to form a cold fluid; the first heater 412 is used to heat the wind body to form a hot fluid; the air inlet of the first fan 411 is connected to the space in the cavity to receive the hot fluid or cold fluid discharged from the cavity, and the air outlet of the first fan 411 is connected to the air duct plate 42.

[0054] The shell of the fan chamber 41 is provided with a through hole connected to the cavity. After the first fan 411 is started, the fan chamber 41 is under negative pressure, and the circulating air enters the fan chamber 41 from the cavity, enters the first fan 411 after being temperature-controlled by the first heater 412 or the first refrigerator 413, and enters the air duct plate 42 from the fan turbine outlet 4111 after being accelerated and pressurized by the first fan 411, and then merges into the air duct plate 42, and is blown out from the air outlet 431 on the surface of the air duct plate 43, and is blown from the side to the test tray on the test area 1 and the test tray on the waiting area 2.

[0055] The above arrangement enables the fan chamber 41 to further heat or cool the fluid discharged from the cavity, regardless of whether the fluid is hot or cold, thereby ensuring the temperature of the circulating fluid entering the cavity.

[0056] The first heater 412 and the first refrigerator 413 can be installed at the air inlet of the first fan 411, so that the hot fluid or the cold fluid can quickly enter the first fan 411. The first heater 412 can include a heating wire, etc., and the first refrigerator 413 can use an existing mixer of mixed dry gas and liquid nitrogen.

[0057] In addition, the first fan 411 may be a centrifugal fan, and a speed detector may be installed on the output shaft of the centrifugal fan to monitor the motor speed in real time and to promptly alarm when abnormal conditions such as bearing damage or stalling occur.

[0058] The inner surface of the fan chamber 41 may be installed with a heat insulation board or other heat-insulating structures to reduce the impact of the external environment on the temperature inside the chamber and to avoid abnormal phenomena such as frost and condensation due to the outer surface temperature being too low during low-temperature operation.

[0059] In some embodiments, the second temperature control device 4 may further include a temperature sensor 44 , which is mounted on the air duct plate 42 via a sensor mounting seat to detect and control the temperature of the circulating air at the outlet of the first fan 411 .

[0060] Based on the above description of the structure of the second temperature control device 4, the test area 1 and the waiting area 2 are specifically described below:

[0061] In some embodiments, Figure 1 As shown, the test area 1 includes a first test position 11 and a second test position 12 which are arranged opposite to the wind equalizing plate 43. The projections of the first test position 11 and the second test position 12 along the second direction fall into the wind equalizing plate 43, so that the wind blown by the wind equalizing plate 43 can cover the entire side of the first test position 11 and the second test position 12.

[0062] Specifically, Figure 1 As shown, the first position to be measured 11 may be higher than the second position to be measured 12 .

[0063] The above arrangement enables the first position to be measured 11 and the second position to be measured 12 to receive the wind blown by the wind balancing plate 43 at the same time, ensuring that the ambient temperature of the two is consistent as much as possible, while avoiding the occurrence of Figure 1 The feed inlet 5 shown is more reasonable in layout.

[0064] In some embodiments, Figure 1 As shown, the waiting area 2 is arranged on a side of the second position to be measured 12 away from the wind balancing plate 43 .

[0065] The above-mentioned arrangement is relative to that the waiting area 2 is arranged on the side of the first position to be measured 11 away from the air equalizing plate 43. On the one hand, the waiting area 2 can be located at a low position, so that it can quickly receive the hot air or cold air blown out by the first temperature control device 3, thereby ensuring that the ambient temperature thereof is within a preset range; on the other hand, the feed port 5 does not need to be designed too high, thereby avoiding interference between the feed port 5 and the fan chamber 41; and finally, the center of gravity of the pre-temperature treatment equipment can be moved downward as a whole, making it more stable during use.

[0066] The structure of the first temperature control device 3 is described in detail below:

[0067] In some embodiments, the waiting area 2 is located on the side of the test area 1 away from the second temperature control device 4, and the first temperature control device 3 is arranged below the test area 1 and the waiting area 2 to transport the first temperature control fluid to the test area 1 and the waiting area 2 to quickly heat up or cool down the test area 1 and the waiting area 2.

[0068] In some embodiments, Figure 4As shown, the first temperature control device 3 includes a second fan 31, a second heater 32 and a second refrigerator 33; similar to the above-mentioned first refrigerator 413, the second refrigerator 33 is used to mix liquid nitrogen and dry gas and spray them out to form cold wind, and the first heater 412 is used to provide a refrigerant fluid; the air inlet of the second fan 31 is connected to the space in the cavity, and the air outlet of the second fan 31 is located below the test area 1 and the waiting area 2. The second fan 31 is used to drive the refrigerant fluid released by the second refrigerator 33 or the hot fluid heated by the second heater 32 to be discharged into the cavity.

[0069] When working, the second fan 31 sucks air from the top of the cavity, and blows it upward from the bottom after being pressurized and accelerated by the second fan 31, so as to preheat and control the temperature of the electronic components on the test area 1 and the carrier trays on the waiting area 2.

[0070] The first temperature control device 3 can heat or cool the fluid discharged from the cavity synchronously with the second temperature control device 4 to ensure the consistency of temperature at various locations in the cavity.

[0071] In some embodiments, Figure 4 As shown, the second fan 31 and the second heater 32 are both configured in plurality to blow air evenly from the bottom of the cavity.

[0072] Specifically, the second refrigerator 33 and the plurality of second heaters 32 are disposed between the plurality of second fans 31 to form a concentrated heating area and a cooling area.

[0073] In some embodiments, Figure 4 As shown, the second fan 31 and the second heater 32 are both configured in two numbers, the two second heaters 32 are arranged between the two second fans 31 , and the second refrigerator 33 is arranged between the two second heaters 32 .

[0074] Each second heater 32 can heat the air blown out by the adjacent second fan 31 , and the cold air blown out by the second refrigerator 33 can be mixed with the air blown out by the two second fans 31 to ensure the consistency of the temperature of the air blowing to the test area 1 and the waiting area 2 .

[0075] In some embodiments, the second fan 31 may be a cross-flow fan, and a protective net is provided on the top of the cross-flow fan to prevent fingers or other objects from falling into the second fan 31 during maintenance, thereby preventing danger or damaging the second fan 31.

[0076] In some embodiments, the cavity includes a feed inlet 5 , which is located at one end of the waiting area 2 away from the first temperature control device 3 , so that the material at the feed inlet 5 can directly enter the waiting area 2 .

[0077] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A pre-temperature treatment device, characterized in that: include: A cavity, used to accommodate a plurality of test trays; A waiting area (2), located in the cavity, having a waiting station for caching a plurality of the test trays; A test area (1) is arranged in the cavity, and the test area (1) has a test station for receiving a plurality of the test trays; and a first temperature control device (3) and a second temperature control device (4) both disposed in the cavity; The first temperature control device (3) is used to provide a first temperature control fluid transported along a first direction to the cavity; The second temperature control device (4) is at least partially arranged on one side of the test area (1), and the second temperature control device (4) is used to provide a second temperature fluid transported along a second direction to the cavity, the second temperature fluid is perpendicular to a side of each test tray carrying a chip in the test area (1), and the first direction and the second direction form an angle.

2. The pre-temperature treatment equipment according to claim 1, characterized in that: The second temperature control device (4) comprises a fan chamber (41), an air duct plate (42) and an air balancing plate (43); the air duct plate (42) is connected between the fan chamber (41) and the air balancing plate (43); the air duct plate (42) is parallel to a side of each test tray carrying chips in the test area (1); the air duct plate (42) is used to guide the wind in the fan chamber (41) to a side of the air balancing plate (43) away from the test area (1); and a plurality of air outlet holes (431) are provided on the air balancing plate (43).

3. The pre-temperature treatment equipment according to claim 2, characterized in that: The waiting area (2) is located on a side of the test area (1) away from the second temperature control device (4), and the first temperature control device (3) is arranged below the test area (1) and the waiting area (2) to transport the first temperature control fluid to the test area (1) and the waiting area (2).

4. The pre-temperature treatment equipment according to claim 3, characterized in that: The air duct plate (42) has a width dimension extending along the second direction, and the air duct plate (42) has a length dimension extending perpendicular to the first direction and perpendicular to the second direction, and the first direction is perpendicular to the second direction; The length dimension of the air duct plate (42) gradually decreases along the first direction, and the width dimension of the air duct plate (42) gradually increases along the first direction.

5. The pre-temperature treatment equipment according to claim 2, characterized in that: The air distribution plate (43) is sealedly connected to the inner wall of the cavity and forms an air guide cavity in communication with each of the air outlet holes (431) with the inner wall of the cavity.

6. The pre-temperature treatment equipment according to claim 2, characterized in that: The fan chamber (41) includes a first fan (411), a first heater (412) and a first refrigerator (413), wherein the first refrigerator (413) is used to provide a cooling fluid, an air inlet of the first fan (411) is connected to the space in the cavity, and an air outlet of the first fan (411) is connected to the air duct plate (42), and the first fan (411) is used to drive the cooling fluid released by the first refrigerator (413) or the hot fluid heated by the first heater (412) to be discharged to the air duct plate (42).

7. The pre-temperature treatment equipment according to claim 2, characterized in that: The test area (1) comprises a first test position (11) and a second test position (12) arranged opposite to the wind balancing plate (43), and projections of the first test position (11) and the second test position (12) along the second direction fall into the wind balancing plate (43).

8. The pre-temperature treatment equipment according to claim 1, characterized in that: The first temperature control device (3) comprises a second fan (31), a second heater (32) and a second refrigerator (33); the second refrigerator (33) is used to provide a cooling fluid; an air inlet of the second fan (31) is connected to the space in the cavity; an air outlet of the second fan (31) is located below the test area (1) and the waiting area (2); the second fan (31) is used to drive the cooling fluid released by the second refrigerator (33) or the hot fluid heated by the second heater (32) to be discharged into the cavity.

9. The pre-temperature treatment equipment according to claim 3, characterized in that: The cavity comprises a material inlet (5), and the material inlet (5) is located at one end of the waiting area (2) away from the first temperature control device (3).

10. A sorting machine, characterized in that: It comprises the pre-temperature treatment equipment as described in any one of claims 1 to 9.

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