Vacuum chuck for ultrasonic probe machining

Abstract

The utility model relates to a vacuum suction cup for ultrasonic probe machining. The vacuum suction cup comprises a suction cup body, an adsorption panel and a spring plug. A vacuum cavity is formed in the suction cup body, and a plurality of first suction holes communicated with the vacuum cavity are formed in the suction cup body. The adsorption panel is oppositely connected with the suction cup body, and second suction holes corresponding to the first suction holes are formed in the adsorption panel. And a mounting cavity for mounting a spring plug is formed between the sucker main body and the adsorption panel. The spring plug comprises a spring and a plug body which are connected with each other, a gap is formed between the plug body and the cavity wall of the mounting cavity, and the first air suction hole, the gap and the second air suction hole are sequentially communicated to form an airflow channel for airflow to pass through. The plug body is attached to the surface of the suction cup body under the action of airflow pressure, so that the airflow channel is closed. According to the vacuum chuck, automatic control over the effective adsorption area can be achieved through the spring plug, and reliable adsorption of workpieces is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of medical device manufacturing, in particular to a vacuum suction cup used for ultrasonic probe processing. Background Art

[0002] Ultrasonic diagnostic instruments use ultrasonic detection technology to understand the data and morphology of human tissue structure through measurement. Current ultrasonic inspection equipment generally includes an equipment body and an ultrasonic probe, and the ultrasonic probe is connected to the equipment body through a probe connector.

[0003] The ultrasonic probe includes an ultrasonic probe matching layer, which is mostly made of non-magnetic thin sheet material. The ultrasonic probe matching layer is usually fixed by paraffin bonding or vacuum suction cup adsorption during plane grinding.

[0004] Among them, the processing accuracy during paraffin bonding is not high and it is difficult to meet the use requirements.

[0005] As for the way the vacuum suction cup absorbs the workpiece, due to the different sizes of the workpieces to be absorbed, some workpieces fail to cover all the suction holes on the vacuum suction cup, so that the vacuum state of the vacuum suction cup is destroyed, thereby affecting the absorption effect of the vacuum suction cup on the workpiece. Utility Model Content

[0006] One purpose of the utility model is to solve the deficiencies in the prior art and to provide a vacuum chuck for ultrasonic probe processing which can reliably adsorb workpieces.

[0007] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0008] A vacuum chuck for ultrasonic probe processing, comprising:

[0009] A suction cup body, wherein a vacuum cavity is provided therein, and a plurality of first suction holes communicating with the vacuum cavity are provided on the suction cup body;

[0010] An adsorption panel is connected to the suction cup body and is attached to the surface of the suction cup body. The adsorption panel is provided with second air suction holes corresponding to the first air suction holes.

[0011] A spring plug is arranged between the suction cup body and the suction panel in a one-to-one correspondence with the first suction hole, and an installation cavity for installing the spring plug is formed between the suction cup body and the suction panel;

[0012] The spring plug includes a connected spring and a plug body, and there is a gap between the plug body and the wall of the installation cavity. The first air suction hole, the gap and the second air suction hole are connected in sequence to form an air flow channel for air to pass through. When the air flow pressure from the second air suction hole to the first air suction hole is greater than the elastic force of the spring, the plug body adheres to the surface of the suction cup body under the action of the air flow pressure, so that the air flow channel is closed.

[0013] In one embodiment, the suction cup body is provided with a first through hole for accommodating a spring, and the adsorption panel is provided with a second through hole for accommodating a plug body. The first through hole and the second through hole together form an installation cavity, and a gap is provided between the second through hole and the plug body.

[0014] In one embodiment, the first through hole and the second through hole are coaxially arranged, and the radial dimension of the second through hole is greater than the radial dimension of the first through hole.

[0015] In one embodiment, the first air suction hole is coaxially arranged with the first through hole, the radial dimension of the first air suction hole is smaller than the radial dimension of the first through hole, a step surface is formed at the connection between the first air suction hole and the first through hole, and the end of the spring away from the plug body abuts against the step surface.

[0016] In one embodiment, the second air suction hole is coaxially arranged with the second through hole, and a radial dimension of the second air suction hole is smaller than a radial dimension of the second through hole.

[0017] In one embodiment, the suction cup body includes a suction cup frame and a suction baffle, the suction baffle is fixedly installed in the suction cup frame, a vacuum cavity is formed between the suction cup frame and the suction baffle, and the first suction hole and the first through hole are both arranged on the suction baffle.

[0018] In one of the embodiments, a mounting hole for mounting one end of the spring is provided on the plug body.

[0019] In one of the embodiments, a plurality of suction grooves are further provided on the adsorption panel, and the plurality of suction grooves are connected to the plurality of second suction holes in a one-to-one correspondence.

[0020] In one embodiment, each suction groove is a circular groove, the center of each suction groove is coaxially arranged with the corresponding second suction hole, and each suction groove is connected with the corresponding second suction hole through a connecting groove.

[0021] In one of the embodiments, a suction hole connected to the vacuum chamber is provided on the circumferential side wall of the suction cup body, and an air pipe joint is connected to the suction hole.

[0022] It can be seen from the above technical solution that the utility model has at least the following advantages and positive effects:

[0023] In the utility model, the vacuum suction cup includes a suction cup body, a suction panel and a spring plug. The spring plug is placed in the air flow channel between the suction panel and the suction cup body. When the air flow channel is not covered by the workpiece, the pressure of the sucked air flow will be greater than the elastic force of the spring, so that the plug body fits on the surface of the suction cup body, so that the air flow channel is closed. At this time, the spring plug can automatically seal the air flow channel to prevent the air leakage and pressure release of the air flow channel from affecting the adsorption effect of the vacuum suction cup on the workpiece. Therefore, the vacuum suction cup of the present application can realize automatic control of the effective adsorption area through the spring plug to ensure reliable adsorption of the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic structural diagram of a vacuum suction cup used for ultrasonic probe processing according to an embodiment of the utility model.

[0025] Figure 2 yes Figure 1 Schematic diagram of the exploded structure of the vacuum suction cup shown Figure 1 .

[0026] Figure 3 yes Figure 1 Schematic diagram of the exploded structure of the vacuum suction cup shown Figure 2 .

[0027] Figure 4 yes Figure 1 Schematic diagram of the vacuum suction cup in use.

[0028] Figure 5 yes Figure 1 An enlarged schematic diagram of point A of the structure shown.

[0029] Figure 6 yes Figure 4 An enlarged schematic diagram of point B of the structure shown.

[0030] The following are the descriptions of the reference numerals:

[0031] 10-vacuum suction cup; 20-workpiece;

[0032] 100-suction cup body; 110-vacuum chamber; 120-first suction hole; 130-first through hole; 140-step surface; 150-suction cup frame; 151-bottom frame; 152-side frame; 153-step groove; 160-suction baffle; 170-exhaust hole; 180-trachea joint;

[0033] 200 - adsorption panel; 210 - second air suction hole; 220 - second through hole; 230 - air suction groove; 240 - connecting through groove;

[0034] 300-spring plug; 310-spring; 320-plug body; 321-mounting hole;

[0035] 400-Mounting cavity. DETAILED DESCRIPTION

[0036] Typical embodiments that embody the features and advantages of the present invention will be described in detail in the following description. It should be understood that the present invention can have various changes in different embodiments without departing from the scope of the present invention, and the descriptions and illustrations therein are essentially for illustrative purposes rather than for limiting the present invention.

[0037] In the description of the present application, it should be understood that in the embodiments shown in the drawings, the indications of directions or positional relationships (such as up, down, left, right, front and back, etc.) are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation. These descriptions are appropriate when these elements are in the positions shown in the drawings. If the descriptions of the positions of these elements change, the indications of these directions also change accordingly.

[0038] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0039] The vacuum suction cup for ultrasonic probe processing of the utility model is mainly used in the surface grinding of the ultrasonic probe matching layer, and is used to adsorb the ultrasonic probe matching layer for grinding. Usually, the ultrasonic probe matching layer material may include: non-magnetic materials such as ceramics, graphite, resin and composite materials. The thickness of the ultrasonic probe matching layer is usually 0.1mm~1mm±0.005mm. That is, the ultrasonic probe matching layer is mostly a non-magnetic thin sheet structure, so a vacuum suction cup that can uniformly and reliably adsorb the ultrasonic probe matching layer is needed.

[0040] See also Figure 1 and Figure 2 As shown, a vacuum suction cup 10 for ultrasonic probe processing according to an embodiment of the present application includes a suction cup body 100, a suction panel 200 and a spring plug 300. A vacuum cavity 110 is provided in the suction cup body 100, and a plurality of first suction holes 120 connected to the vacuum cavity 110 are provided on the suction cup body 100. The suction panel 200 is relatively connected to the suction cup body 100 and is attached to the surface of the suction cup body 100, and second suction holes 210 are provided on the suction panel 200 corresponding to each first suction hole 120.

[0041] The spring plug 300 is arranged between the suction cup body 100 and the adsorption panel 200 in a one-to-one correspondence with the first air suction hole 120, and an installation cavity 400 for installing the spring plug 300 is formed between the suction cup body 100 and the adsorption panel 200. The spring plug 300 includes a spring 310 and a plug body 320 connected to each other, and there is a gap between the plug body 320 and the cavity wall of the installation cavity 400. The first air suction hole 120, the gap and the second air suction hole 210 are connected in sequence to form an airflow channel for airflow to pass through. When the airflow pressure flowing from the second air suction hole 210 to the first air suction hole 120 is greater than the elastic force of the spring 310, the plug body 320 is attached to the surface of the suction cup body 100 under the action of the airflow pressure, so that the airflow channel is closed.

[0042] The vacuum suction cup 10 may be a rectangular block structure as a whole. It is understood that in other embodiments, the vacuum suction cup 10 may also be a circular block structure. Alternatively, the vacuum suction cup 10 may also be other suitable shapes.

[0043] In the present application, the vacuum suction cup 10 is mainly used to fix and install the ultrasonic probe matching layer (hereinafter referred to as the workpiece 20) through air pressure adsorption to ensure that the workpiece 20 will not be displaced during the processing and cause processing errors.

[0044] In the present application, the vacuum suction cup 10 includes a suction cup body 100, an adsorption panel 200 and a spring plug 300. The spring plug 300 is placed in the air flow channel between the adsorption panel 200 and the suction cup body 100. When the air flow channel is not covered by the workpiece 20, the pressure of the sucked air flow will be greater than the elastic force of the spring 310, so that the plug body 320 fits on the surface of the suction cup body 100, so that the air flow channel is closed. At this time, the spring plug 300 can automatically seal the air flow channel to prevent the air leakage and pressure release of the air flow channel from affecting the adsorption effect of the vacuum suction cup 10 on the workpiece 20. The vacuum suction cup 10 of the present application can realize automatic control of the effective adsorption area through the spring plug 300 to ensure reliable adsorption of the workpiece 20.

[0045] like Figure 1 As shown, the vacuum suction cup 10 includes a suction cup body 100, and the suction cup body 100 is used to be fixed to the workbench of the surface grinder. Figure 2 and Figure 3 In one embodiment, the suction cup body 100 includes a suction cup frame 150 and a suction baffle 160, wherein the suction baffle 160 is fixedly installed in the suction cup frame 150, and a vacuum chamber 110 is formed between the suction cup frame 150 and the suction baffle 160. The first suction hole 120 is provided on the suction baffle 160.

[0046] like Figure 3As shown, a plurality of first suction holes 120 are evenly distributed on the suction baffle 160. The evenly arranged first suction holes 120 are conducive to the vacuum suction cup 10 to evenly absorb the workpiece 20.

[0047] like Figure 2 As shown, for example, the suction cup frame 150 has a bottom frame 151 and a circumferential side frame 152. The side frame 152 is provided with a step groove 153 for fixing and installing the suction baffle 160. The suction baffle 160 is installed in the step groove 153.

[0048] It can be understood that in other embodiments, the suction cup frame 150 and the suction baffle 160 can also be an integrated structure.

[0049] like Figure 4 As shown, there is a gap between the suction baffle 160 and the bottom frame 151 of the suction cup frame 150 , so that a vacuum chamber 110 can be formed between the suction cup frame 150 and the suction baffle 160 .

[0050] In one embodiment, a suction hole 170 communicating with the vacuum chamber 110 is disposed on the circumferential side wall of the suction cup body 100. For example, the suction hole 170 may be disposed through the side frame 152 of the suction cup frame 150.

[0051] like Figure 1 As shown, an air pipe joint 180 is connected to the air extraction hole 170. The air pipe joint 180 can be conveniently connected to the air pipe of an external vacuum generator.

[0052] See also Figure 4 As shown, the vacuum suction cup 10 includes a suction panel 200 connected to the suction cup body 100. The surface of the suction panel 200 facing away from the suction cup body 100 is used for suction and bonding the workpiece 20.

[0053] Among them, the adsorption panel 200 is detachably connected to the suction cup frame 150. For example, a connection through hole may be provided at the edge of the adsorption panel 200, and a corresponding screw hole is provided on the suction cup body 100. The adsorption panel 200 and the suction cup body 100 can be detachably connected by screws inserted into the connection through holes and tightened and fixed in the screw holes. It can be understood that in other implementations, the adsorption panel 200 and the suction cup body 100 can also be detachably connected by means of a snap connection structure, a magnetic attraction structure, etc.

[0054] See also Figure 4As shown, the adsorption panel 200 is provided with a second air suction hole 210 corresponding to and connected with the first air suction hole 120. When the vacuum generator is connected to the vacuum suction cup 10 and air is sucked out, the external air flows out of the vacuum suction cup 10 through the second air suction hole 210, the first air suction hole 120, the vacuum chamber 110 and the air suction hole 170 in sequence. When the workpiece 20 is placed on the adsorption panel 200, due to the pressure difference formed by the vacuum negative pressure of the vacuum chamber 110 and the atmospheric pressure on the surface of the workpiece 20, the workpiece 20 is adsorbed on the adsorption panel 200.

[0055] like Figure 2 As shown, the plurality of second suction holes 210 can be evenly distributed on the suction panel 200. The evenly arranged second suction holes 210 are conducive to the vacuum suction cup 10 evenly sucking the workpiece 20. Figure 5 In one embodiment, the adsorption panel 200 is further provided with a plurality of suction grooves 230, and the plurality of suction grooves 230 are connected to the plurality of second suction holes 210 in a one-to-one correspondence. The suction grooves 230 are provided on the surface of the adsorption panel 200 for bonding with the workpiece 20.

[0056] In this embodiment, a plurality of suction grooves 230 are provided, and the plurality of suction grooves 230 are provided in one-to-one correspondence with the plurality of second suction holes 210. Each suction groove 230 is communicated with the corresponding second suction hole 210. By providing the suction grooves 230, the adsorption force of the adsorption panel 200 can be effectively increased, and the adsorption panel 200 can adsorb the workpiece 20 more evenly.

[0057] like Figure 5 As shown, in one embodiment, each suction groove 230 is a circular groove. The center of each suction groove 230 can be coaxially arranged with the corresponding second suction hole 210. Each suction groove 230 can be connected to the corresponding second suction hole 210 through the connecting groove 240. Due to the provision of the suction groove 230, the surface of the adsorption panel 200 can have more and finer airflow passages, so that the adsorption force on the workpiece 20 can be more uniform and refined, so that the deformation phenomenon of the sheet-like workpiece 20 when being adsorbed can be effectively avoided.

[0058] like Figure 2 and Figure 3 As shown, in the embodiment of the present application, the number of spring plugs 300 corresponds to the number of first suction holes 120. Specifically, the spring plugs 300 are arranged between the suction cup body 100 and the suction panel 200 in a one-to-one correspondence with the first suction holes 120. More specifically, the spring plugs 300 are installed in the installation cavity 400 between the suction baffle 160 and the suction panel 200.

[0059] like Figure 6As shown, the spring plug 300 includes a spring 310 and a plug body 320 connected to each other. The plug body 320 may be a cylindrical structure. In one example, a mounting hole 321 for mounting one end of the spring 310 is provided on the plug body 320. By providing the mounting hole 321, the connection between the plug body 320 and the spring 310 can be facilitated.

[0060] See also Figure 5 and Figure 6 As shown, in one embodiment, the suction cup body 100 is provided with a first through hole 130 for accommodating the spring 310. Specifically, the first through hole 130 is provided on the suction baffle 160.

[0061] In the embodiment of the present application, the first air suction hole 120 and the first through hole 130 are both disposed on the air suction baffle 160. For example, the first air suction hole 120 may be coaxially arranged with the first through hole 130.

[0062] like Figure 6 As shown, the radial dimension of the first air suction hole 120 may be smaller than the radial dimension of the first through hole 130. A step surface 140 is formed at the connection between the first air suction hole 120 and the first through hole 130, and the end of the spring 310 away from the plug body 320 abuts against the step surface 140. Such a design can facilitate the installation of the spring 310.

[0063] See also Figure 5 and Figure 6 As shown, in one embodiment, the adsorption panel 200 is provided with a second through hole 220 for accommodating the plug body 320 , the first through hole 130 and the second through hole 220 together form a mounting cavity 400 , and a gap is provided between the second through hole 220 and the plug body 320 .

[0064] like Figure 6 As shown, the first through hole 130 can be coaxially arranged with the second through hole 220. The radial dimension of the second through hole 220 is greater than the radial dimension of the first through hole 130. That is, the installation cavity 400 can be substantially a T-shaped hole structure. Such a design can facilitate the positioning and installation of the spring plug 300.

[0065] It is understood that in other implementations, the installation cavity 400 may be entirely provided on the air suction baffle 160 . That is, only the second air suction hole 210 is provided on the adsorption panel 200 . The installation cavity 400 and the first air suction hole 120 are both provided on the air suction baffle 160 .

[0066] like Figure 6As shown, the second air suction hole 210 and the second through hole 220 on the suction panel 200 are connected to each other, so that the outside air can enter the vacuum chamber 110 of the suction cup body 100 through the second air suction hole 210 and the gap between the second through hole 220 and the plug body 320. In one embodiment, the second air suction hole 210 and the second through hole 220 can be coaxially arranged. The radial dimension of the second air suction hole 210 is smaller than the radial dimension of the second through hole 220.

[0067] In the embodiment of the present application, the first suction hole 120, the gap between the second through hole 220 and the plug body 320, and the second suction hole 210 are connected in sequence to form an airflow channel for airflow to pass through. When the vacuum generator is connected to the vacuum suction cup 10 and air is pumped out, the external air enters the vacuum chamber 110 through the airflow channel and flows out of the vacuum suction cup 10 through the suction hole 170. When the workpiece 20 is placed on the adsorption panel 200, due to the pressure difference formed by the vacuum negative pressure of the vacuum chamber 110 and the atmospheric pressure on the surface of the workpiece 20, the workpiece 20 is adsorbed on the adsorption panel 200.

[0068] Since the coverage of workpieces 20 of different sizes is different, for some small-sized workpieces 20, it can only cover the second suction holes 210 on the upper part of the adsorption panel 200. For details, please refer to Figure 6 That is, some small-sized workpieces 20 can only cover part of the air flow channel of the vacuum chuck 10 .

[0069] See also Figure 6 , there is an air flow channel covered by the workpiece 20, and the vacuum chamber 110 and the outside air are blocked by the workpiece 20. When the air in the vacuum chamber 110 is continuously evacuated, only a small amount of air flow is generated in the air flow channel, so the plug body 320 can be kept in the initial position under the action of the spring 310. Due to the pressure difference formed by the vacuum negative pressure of the vacuum chamber 110 and the atmospheric pressure on the surface of the workpiece 20, the workpiece 20 is firmly adsorbed on the adsorption panel 200.

[0070] There is no airflow channel covered by the workpiece 20, and the vacuum chamber 110 is connected to the outside air through the airflow channel. A large amount of outside air is sucked in to form an airflow. When the amount of air passing through the airflow channel is so large that the airflow pressure is greater than the elastic force of the spring 310, the spring 310 is compressed so that the plug body 320 is adsorbed and attached to the surface of the suction baffle 160, so that the airflow channel is closed. Therefore, the vacuum suction cup 10 can effectively ensure that there is no air leakage in the airflow channel not covered by the workpiece 20, and avoid air leakage and pressure relief in the part not covered by the workpiece 20, thereby effectively ensuring the adsorption force of the vacuum suction cup 10.

[0071] In the embodiment of the present application, each spring plug 300 can work independently in each air flow channel.

[0072] The vacuum suction cup 10 of the present application includes a suction cup body 100, a suction panel 200 and a spring plug 300. The spring plug 300 is placed in the air flow channel between the suction panel 200 and the suction cup body 100. When the air flow channel is not covered by the workpiece 20, the pressure of the sucked air flow will be greater than the elastic force of the spring 310, so that the plug body 320 fits on the surface of the suction cup body 100, so that the air flow channel is closed. At this time, the spring plug 300 can play an automatic sealing effect to prevent air leakage and pressure relief from affecting the adsorption effect of the vacuum suction cup 10 on the workpiece 20.

[0073] The vacuum suction cup 10 of the present application can increase the suction force of the suction panel 200 by providing a plurality of suction grooves 230 on the suction panel 200, so that the suction panel 200 can more evenly suction the workpiece 20. Furthermore, by providing the suction grooves 230 on the surface of the suction panel 200, the surface of the suction panel 200 can have more and finer airflow passages, so that the suction force on the workpiece 20 can be more uniform and finer, and thus the deformation phenomenon of the sheet-like workpiece 20 when being sucked can be effectively avoided.

[0074] The above embodiments are merely exemplary descriptions of the structures. The structures in the embodiments are not fixed combination structures. In the absence of structural conflicts, the structures in multiple embodiments can be used in any combination.

[0075] Although the utility model has been described with reference to several typical embodiments, it should be understood that the terms used are illustrative and exemplary, rather than restrictive. Since the utility model can be implemented in a variety of forms without departing from the spirit or essence of the utility model, it should be understood that the above-mentioned embodiments are not limited to any of the aforementioned details, but should be widely interpreted within the spirit and scope defined by the attached claims, so all changes and modifications falling within the scope of the claims or their equivalents should be covered by the attached claims.

Claims

1. A vacuum chuck for ultrasonic probe processing, characterized in that: include: A suction cup body, wherein a vacuum cavity is provided therein, and the suction cup body is provided with a plurality of first suction holes connected with the vacuum cavity; A suction panel, which is connected to the suction cup body and is attached to the surface of the suction cup body, and the suction panel is provided with second suction holes corresponding to the first suction holes; A spring plug, which is arranged between the suction cup body and the suction panel in a one-to-one correspondence with the first suction hole, and an installation cavity for installing the spring plug is formed between the suction cup body and the suction panel; The spring plug includes a spring and a plug body connected to each other, and there is a gap between the plug body and the cavity wall of the installation cavity. The first air suction hole, the gap and the second air suction hole are connected in sequence to form an air flow channel for air to pass through. When the air flow pressure flowing from the second air suction hole to the first air suction hole is greater than the elastic force of the spring, the plug body adheres to the surface of the suction cup body under the action of the air flow pressure, so that the air flow channel is closed.

2. The vacuum chuck for ultrasonic probe processing according to claim 1, characterized in that: The suction cup body is provided with a first through hole for accommodating the spring, and the adsorption panel is provided with a second through hole for accommodating the plug body. The first through hole and the second through hole together form the installation cavity, and the gap is provided between the second through hole and the plug body.

3. The vacuum chuck for ultrasonic probe processing according to claim 2, characterized in that: The first through hole is coaxially arranged with the second through hole, and a radial dimension of the second through hole is larger than a radial dimension of the first through hole.

4. The vacuum chuck for ultrasonic probe processing according to claim 2, characterized in that: The first air suction hole is coaxially arranged with the first through hole, the radial dimension of the first air suction hole is smaller than the radial dimension of the first through hole, a step surface is formed at the connection between the first air suction hole and the first through hole, and the end of the spring away from the plug body abuts against the step surface.

5. The vacuum chuck for ultrasonic probe processing according to claim 2, characterized in that: The second air suction hole is coaxially arranged with the second through hole, and a radial dimension of the second air suction hole is smaller than a radial dimension of the second through hole.

6. The vacuum chuck for ultrasonic probe processing according to claim 2, characterized in that: The suction cup body includes a suction cup frame and an air suction baffle, the suction baffle is fixedly installed in the suction cup frame, the vacuum chamber is formed between the suction cup frame and the air suction baffle, and the first air suction hole and the first through hole are both arranged on the air suction baffle.

7. The vacuum chuck for ultrasonic probe processing according to claim 1, characterized in that: The plug body is provided with a mounting hole for mounting one end of the spring.

8. The vacuum chuck for ultrasonic probe processing according to any one of claims 1 to 7, characterized in that: The adsorption panel is also provided with a plurality of air suction grooves, and the plurality of air suction grooves are connected with the plurality of the second air suction holes in a one-to-one correspondence.

9. The vacuum chuck for ultrasonic probe processing according to claim 8, characterized in that: Each of the air suction grooves is a circular groove, the center of each of the air suction grooves is coaxially arranged with the corresponding second air suction hole, and each of the air suction grooves is connected with the corresponding second air suction hole through a connecting through groove.

10. The vacuum chuck for ultrasonic probe processing according to any one of claims 1 to 7, characterized in that: An air extraction hole communicating with the vacuum chamber is provided on the circumferential side wall of the suction cup body, and an air pipe joint is connected to the air extraction hole.

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