Double-arm manipulator rotation control mechanism with stroke limiting structure

Abstract

The utility model provides a double-arm manipulator rotation control mechanism with a stroke limiting structure, which comprises a supporting assembly component, a driving adapter component, a power driving component, a transmission output component, a linkage connection component, a stroke calibration component and a stroke sensing component, according to the rotation control mechanism for the double-arm manipulator, the stroke calibration assembly and the stroke sensing assembly are adopted, the rotation range of the manipulator can be accurately calibrated and sensed, collision caused by mechanical limiting can be reduced, and therefore the operation stability and control precision of the manipulator are improved, collision caused by the fact that the manipulator exceeds the range is reduced, and the reliability of the manipulator is improved. The service life of the mechanical arm can be prolonged, when the stroke probe or the limiting probe senses a specific signal, the driving motor can adjust the running state in real time or conduct start-stop switching, the response speed and flexibility of the system can be improved, and by accurately calibrating and sensing the rotation range of the mechanical arm, the mechanical arm can be accurately controlled. The potential safety problem caused by exceeding the preset range can be avoided, and the safety of the whole system can be enhanced.

Description

Technical Field

[0001] The utility model relates to semiconductor production equipment, in particular to a double-arm wafer taking and placing manipulator rotation control mechanism with a travel limit structure. Background Art

[0002] Patent document CN216830948U discloses a manipulator with a limited protection structure, which includes a displacement component, a manipulator and a limit mechanism. The limit mechanism includes: a limit frame, a limit rod, a moving frame, a positioning component, a connecting component and a fixing component. The displacement component drives the manipulator to move. A limit frame is provided on the outside of the displacement component. A limit rod is installed on the displacement component. The limit rod moves along the inside of the limit frame to limit the moving trajectory of the manipulator. The moving frame can move and fix the inside of the limit frame through the positioning component and the connecting component, which is convenient for limiting the moving distance of the manipulator. The fixing component can stop the displacement component from working and fix the moving position of the manipulator, which is convenient for the manipulator to use. However, this structure uses a single sensor and a mechanical limit to limit the movement of the manipulator. When the rotation process of the manipulator exceeds the range, it is limited by the machine. Collisions will occur during the limiting process, which will affect the operation stability and control accuracy of the manipulator. Therefore, it is necessary to optimize its structure to overcome the above defects. Utility Model Content

[0003] The utility model aims to provide a double-arm manipulator rotation control mechanism with a stroke limit structure to improve its operation stability.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] A double-arm manipulator rotation control mechanism with a travel limit structure, comprising:

[0006] A support assembly component is installed in a wafer handling device and has an assembly space inside;

[0007] A drive coupling assembly, which is mounted in the support assembly assembly via a rotating structure and can rotate in the support assembly assembly;

[0008] A power-driven rotating assembly is installed in the supporting assembly and connected with the driving matching assembly, and the driving matching assembly is driven to rotate by the power-driven rotating assembly;

[0009] The transmission output assembly is installed in the support assembly assembly through a rotating structure and can rotate in the support assembly assembly. The transmission output assembly corresponds to the position of the drive matching assembly and is connected to the manipulator to drive the manipulator to rotate;

[0010] A linkage connection component, which is located in the support assembly component and cooperates with the drive matching component and the transmission output component, so that the drive matching component can drive the transmission output component to rotate through the linkage connection component;

[0011] Also includes:

[0012] A stroke calibration component, which is installed in the drive adapter component and can rotate together with the drive adapter component, and the stroke calibration component calibrates the rotation range of the drive adapter component;

[0013] A stroke sensing component is installed in the supporting assembly component and cooperates with the stroke calibration component and the power drive component. The stroke sensing component senses the rotation range of the stroke calibration component, and the power drive component runs or stops according to the sensing signal obtained by the stroke sensing component.

[0014] Specifically, the support assembly includes:

[0015] A support housing seat, which is formed by enclosing plates and fixed in the wafer handling device by connecting bolts, forming an assembly space inside the support housing seat;

[0016] A pair of deceleration supports are provided, each of which is installed at the bottom of the support shell seat, with its top exposed from the inner side of the support shell seat and its bottom protruding below the support shell seat.

[0017] In one embodiment of the present invention, the supporting housing is a cylindrical shell structure, and its top is open.

[0018] In one embodiment of the utility model, the deceleration support is implemented by a harmonic reducer.

[0019] The drive adapter assembly includes:

[0020] A pair of matching support wheels is provided, each matching support wheel is located in a supporting shell seat respectively, and is installed on the top of the speed reduction support through a rotating shaft, and can rotate on the speed reduction support.

[0021] The power drive assembly includes:

[0022] A driving motor is provided with a pair, each driving motor is respectively installed at the bottom of the reduction support, and its power output shaft is engaged with the matching support wheel, and the matching support wheel is driven to rotate by the driving motor.

[0023] The transmission output components include:

[0024] The output wheel disc is provided with a pair, each output wheel disc is installed in the supporting shell seat through a rotating shaft and corresponds to the position of the matching support wheel. The output wheel disc can rotate in the supporting shell seat. The output wheel disc is connected with the manipulator through a transmission structure and can drive the manipulator to rotate.

[0025] In one embodiment of the utility model, the top of the supporting housing is sealed with a top plate, and the top of the output wheel disc is exposed from above the top plate.

[0026] The linkage components include:

[0027] A pair of linkage belts are provided, each linkage belt is respectively sleeved on the output wheel disc and the matching support wheel, and when the matching support wheel rotates, the output wheel disc can be driven to rotate through the linkage belt.

[0028] In one embodiment of the utility model, the linkage connection assembly also includes a tensioning idler wheel, which is provided with a pair of tensioning idlers, each tensioning idler wheel is respectively installed in the supporting shell seat through a rotating structure, and is engaged with the inner wall of the linkage ring belt. The tensioning idler wheel tensions the linkage ring belt so that the matching support wheel and the output wheel disc are closely matched with the linkage ring belt.

[0029] The travel calibration kit includes:

[0030] A pair of calibration baffles are provided, each of which is installed on the top of the matching support wheel and can rotate with the matching support wheel. The edge of the calibration baffle has a calibration flange, which is a fan-shaped structure. It extends along the circumference of the calibration baffle and protrudes radially toward the outside of the calibration baffle. Its length is smaller than the circumference of the calibration baffle. The rotation range of the matching support wheel is calibrated by the calibration flange.

[0031] The travel sensing components include:

[0032] A travel probe, which is provided with a pair, each travel probe is installed in the support shell seat and cooperates with the calibration flange. It is electrically connected to the drive motor through the industrial computer. The travel probe senses the rotation stroke of the calibration flange, and the drive motor adjusts the operating state according to the sensing data;

[0033] A pair of limit probes are provided, each of which is installed in a supporting shell and cooperates with the calibration flange. It is electrically connected to the drive motor through an industrial computer. The limit probe senses whether the calibration flange is within the sensing range of the limit probe, and the drive motor switches the start and stop states according to the sensing data.

[0034] In one embodiment of the utility model, the travel probe and the limit probe are respectively implemented by photoelectric sensors, and their structures and installation and operation principles are prior arts, so they are not described in detail.

[0035] The advantages of the utility model are:

[0036] The dual-arm manipulator rotation control mechanism adopts a stroke calibration component and a stroke sensing component, which can accurately calibrate and sense the rotation range of the manipulator, help reduce collisions caused by mechanical limits, thereby improving the operating stability and control accuracy of the manipulator. Since collisions caused by exceeding the range are reduced, component wear will be reduced accordingly, thereby extending the service life of the manipulator. When the stroke probe or limit probe senses a specific signal, the drive motor can adjust the operating status or start and stop switching in real time, which can enhance the response speed and flexibility of the system. By accurately calibrating and sensing the rotation range of the manipulator, potential safety problems caused by exceeding the predetermined range can be avoided, and the safety of the entire system can be enhanced. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a structural schematic diagram of a double-arm manipulator rotation control mechanism with a travel limit structure proposed by the utility model;

[0038] Figure 2 This is a top view of the institution;

[0039] Figure 3 It is a structural diagram of the stroke calibration component. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0041] like Figure 1 to Figure 3As shown, the double-arm manipulator rotation control mechanism with a stroke limit structure proposed by the utility model includes a support assembly component, a drive matching component, a power drive rotation component, a transmission output component, a linkage connection component, a stroke calibration component and a stroke sensing component. The support assembly component is installed in a wafer pick-and-place device, and has an assembly space inside. The drive matching component is installed in the support assembly component through a rotating structure and can rotate in the support assembly component. The power drive rotation component is installed in the support assembly component and connected with the drive matching component. The drive matching component is driven to rotate by the power drive rotation component. The transmission output component is installed in the support assembly component through a rotating structure and can rotate in the support assembly component. The position of the dynamic matching component corresponds to that of the dynamic matching component and is connected with the manipulator, so as to drive the manipulator to rotate. The linkage connection component is located in the supporting assembly component and cooperates with the driving matching component and the transmission output component, so that the driving matching component can drive the transmission output component to rotate through the linkage connection component. The stroke calibration component is installed in the driving matching component and can rotate with the driving matching component. The rotation range of the driving matching component is calibrated by the stroke calibration component. The stroke sensing component is installed in the supporting assembly component and cooperates with the stroke calibration component and the power drive component. The rotation range of the stroke calibration component is sensed by the stroke sensing component, and the power drive component runs or stops according to the sensing signal obtained by the stroke sensing component.

[0042] In Example 1, the support assembly component includes a support shell 110 and a deceleration support 120. The support shell is formed by enclosing plates and is fixed in the wafer placement equipment by connecting bolts to form an assembly space inside it. A pair of deceleration supports are provided, and each deceleration support is respectively installed at the bottom of the support shell, with its top exposed from the inner side of the support shell and its bottom protruding below the support shell.

[0043] The driving coupling assembly comprises a coupling support wheel 200, a pair of which is provided. Each coupling support wheel is located in a supporting shell seat, and is installed on the top of a reduction support seat through a rotating shaft, and can rotate on the reduction support seat.

[0044] The power drive assembly includes a driving motor 300, and a pair of driving motors are provided. Each driving motor is installed at the bottom of the reduction support respectively, and its power output shaft is engaged with the matching support wheel, and the matching support wheel is driven to rotate by the driving motor.

[0045] The transmission output assembly includes an output wheel disc 400, and a pair of output wheel discs are provided. Each output wheel disc is installed in the support shell seat through a rotating shaft and corresponds to the position of the matching support wheel. It can rotate in the support shell seat. The output wheel disc is connected to the manipulator through a transmission structure and can drive the manipulator to rotate.

[0046] The linkage connection component includes a linkage belt 500, and a pair of linkage belts are provided. Each linkage belt is respectively sleeved on the output wheel disc and the matching support wheel. When the matching support wheel rotates, the output wheel disc can be driven to rotate through the linkage belt.

[0047] The stroke calibration assembly includes a calibration baffle 600, and a pair of calibration baffles are provided. Each calibration baffle is installed on the top of the matching support wheel respectively, and can rotate with the matching support wheel. The edge of the calibration baffle has a calibration flange 610, and the calibration flange is a fan-shaped structure. It extends along the circumference of the calibration baffle and protrudes radially toward the outside of the calibration baffle. Its length is less than the circumference of the calibration baffle. The rotation range of the matching support wheel is calibrated by the calibration flange.

[0048] The stroke sensing component includes a stroke probe 710 and a limit probe 720. A pair of stroke probes are provided, each of which is installed in a supporting shell seat and cooperates with the calibration flange. It is electrically connected to the drive motor through an industrial computer. The stroke probe senses the rotation stroke of the calibration flange, and the drive motor adjusts the operating state according to the sensing data. A pair of limit probes are provided, each of which is installed in a supporting shell seat and cooperates with the calibration flange. It is electrically connected to the drive motor through an industrial computer. The limit probe senses whether the calibration flange is in the sensing range of the limit probe, and the drive motor switches the start and stop state according to the sensing data.

[0049] In Example 2, the supporting assembly component includes a supporting shell 110 and a deceleration support 120. The supporting shell is formed by enclosing plates and is fixed in the wafer placement equipment by connecting bolts to form an assembly space inside it. A pair of deceleration supports are provided, and each deceleration support is respectively installed at the bottom of the supporting shell, with its top exposed from the inner side of the supporting shell and its bottom protruding below the supporting shell.

[0050] In this embodiment, the supporting housing is a cylindrical shell structure, and its top is open.

[0051] In this embodiment, the reduction support is implemented by a harmonic reducer.

[0052] The driving coupling assembly comprises a coupling support wheel 200, a pair of which is provided. Each coupling support wheel is located in a supporting shell seat, and is installed on the top of a reduction support seat through a rotating shaft, and can rotate on the reduction support seat.

[0053] The power drive assembly includes a driving motor 300, and a pair of driving motors are provided. Each driving motor is installed at the bottom of the reduction support respectively, and its power output shaft is engaged with the matching support wheel, and the matching support wheel is driven to rotate by the driving motor.

[0054] The transmission output assembly includes an output wheel disc 400, and a pair of output wheel discs are provided. Each output wheel disc is installed in the support shell seat through a rotating shaft and corresponds to the position of the matching support wheel. It can rotate in the support shell seat. The output wheel disc is connected to the manipulator through a transmission structure and can drive the manipulator to rotate.

[0055] In this embodiment, the top of the supporting housing is sealed with a top plate, and the top of the output wheel disc is exposed from above the top plate.

[0056] The linkage connection component includes a linkage belt 500, and a pair of linkage belts are provided. Each linkage belt is respectively sleeved on the output wheel disc and the matching support wheel. When the matching support wheel rotates, the output wheel disc can be driven to rotate through the linkage belt.

[0057] In this embodiment, the linkage connection component also includes a tensioning idler wheel 510, which is provided with a pair of tensioning idlers, each of which is installed in the supporting shell seat through a rotating structure, and abuts against the inner wall of the linkage belt. The tensioning idler wheel tensions the linkage belt so that the matching support wheel and the output wheel disc are closely matched with the linkage belt.

[0058] The stroke calibration assembly includes a calibration baffle 600, and a pair of calibration baffles are provided. Each calibration baffle is installed on the top of the matching support wheel respectively, and can rotate with the matching support wheel. The edge of the calibration baffle has a calibration flange 610, and the calibration flange is a fan-shaped structure. It extends along the circumference of the calibration baffle and protrudes radially toward the outside of the calibration baffle. Its length is less than the circumference of the calibration baffle. The rotation range of the matching support wheel is calibrated by the calibration flange.

[0059] The stroke sensing component includes a stroke probe 710 and a limit probe 720. A pair of stroke probes are provided, each of which is installed in the supporting shell seat and cooperates with the calibration flange. It is electrically connected to the drive motor through an industrial computer. The stroke probe senses the rotation stroke of the calibration flange, and the drive motor adjusts the operating state according to the sensing data. A pair of limit probes are provided, each of which is installed in the supporting shell seat and cooperates with the calibration flange. It is electrically connected to the drive motor through an industrial computer. The limit probe senses whether the calibration flange is in the sensing range of the limit probe, and the drive motor switches the start-stop state according to the sensing data. The process of the industrial computer adjusting and switching the operation and start-stop state of the drive motor according to the sensing data adopts the existing technology, so it is not elaborated here.

[0060] In this embodiment, the travel probe and the limit probe are respectively served by photoelectric sensors, which are composed of a transmitter, a receiver and a detection circuit. The transmitter transmits a light signal, the receiver receives and converts it into an electrical signal, and then processes and applies it through the detection circuit to detect the position, shape, size and other information of the object. When the calibration flange is located in the installation range of the travel probe and the limit probe, the travel probe and the limit probe can be blocked, and the receiver cannot receive the light signal. When the calibration flange exceeds the installation range of the travel probe and the limit probe, the receiver can receive the light signal. Its structure and installation and operation principle are existing technologies, so they are not described in detail.

[0061] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", "right" and the like indicating orientation or positional relationship appear, it should be understood that the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the equipment or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. A dual-arm manipulator rotation control mechanism with a travel limit structure, comprising: A support assembly component is installed in a wafer handling device and has an assembly space inside; A drive coupling assembly, which is mounted in the support assembly assembly via a rotating structure and can rotate in the support assembly assembly; A power drive rotating assembly is installed in the support assembly and connected with the drive matching assembly, and the power drive rotating assembly drives the drive matching assembly to rotate; The transmission output assembly is installed in the support assembly assembly through a rotating structure and can rotate in the support assembly assembly. The transmission output assembly corresponds to the position of the drive matching assembly and is connected to the manipulator to drive the manipulator to rotate; A linkage connection component, which is located in the support assembly component and cooperates with the drive matching component and the transmission output component, so that the drive matching component can drive the transmission output component to rotate through the linkage connection component; It is characterized by further comprising: A stroke calibration component, which is installed in the drive adapter component and can rotate together with the drive adapter component, and the stroke calibration component calibrates the rotation range of the drive adapter component; The stroke sensing component is installed in the support assembly component and cooperates with the stroke calibration component and the power drive rotation component. The stroke sensing component senses the rotation range of the stroke calibration component.

2. A dual-arm manipulator rotation control mechanism with a travel limit structure according to claim 1, characterized in that: The support assembly includes: A support housing seat, which is formed by enclosing plates and fixed in the wafer handling device by connecting bolts, forming an assembly space inside the support housing seat; A pair of deceleration supports are provided, each of which is installed at the bottom of the support shell seat, with its top exposed from the inner side of the support shell seat and its bottom protruding below the support shell seat.

3. A dual-arm manipulator rotation control mechanism with a travel limit structure according to claim 2, characterized in that: The drive adapter assembly includes: A pair of matching support wheels is provided, each matching support wheel is located in a supporting shell seat and is installed on the top of the speed reduction support seat through a rotating shaft.

4. A dual-arm manipulator rotation control mechanism with a travel limit structure according to claim 3, characterized in that: The power drive assembly includes: A pair of driving motors are provided, each driving motor is respectively installed at the bottom of a reduction support, and its power output shaft is engaged with a matching support wheel.

5. The dual-arm manipulator rotation control mechanism with a travel limit structure according to claim 3, characterized in that: The transmission output components include: The output wheel disc is provided with a pair, each output wheel disc is installed in the supporting shell seat through a rotating shaft and corresponds to the position of the matching support wheel. The output wheel disc is connected with the manipulator through a transmission structure.

6. A dual-arm manipulator rotation control mechanism with a travel limit structure according to claim 5, characterized in that: The linkage components include: A pair of linkage belts are provided, and each linkage belt is respectively sleeved on the output wheel disc and the matching support wheel.

7. A dual-arm manipulator rotation control mechanism with a travel limit structure according to claim 4, characterized in that: The travel calibration kit includes: A pair of calibration baffles are provided, each of which is installed on the top of the matching support wheel. The edge of the calibration baffle has a calibration flange, which is a fan-shaped structure. It extends along the circumference of the calibration baffle and protrudes radially toward the outside of the calibration baffle. Its length is less than the circumference of the calibration baffle.

8. The dual-arm manipulator rotation control mechanism with a travel limit structure according to claim 7, characterized in that: The travel sensing components include: A travel probe, which is provided with a pair, each travel probe is installed in the support shell seat and cooperates with the calibration flange. It is electrically connected to the drive motor through the industrial computer, and the travel probe senses the rotation stroke of the calibration flange; A pair of limit probes are provided, each of which is installed in a supporting shell and cooperates with the calibration flange. It is electrically connected to the drive motor through an industrial computer, and the limit probe senses whether the calibration flange is within the sensing range of the limit probe.

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