Shielding oil nozzle disc and vacuum coating machine

Abstract

The utility model discloses a shielding oil nozzle disc and a vacuum coating machine, and relates to the technical field of vacuum coating, the shielding oil nozzle disc comprises a nozzle disc body, the nozzle disc body is provided with two spaced H-shaped oil nozzle openings along the length direction, and the two oil nozzle openings are communicated with each other. The two oil nozzle openings are arranged close to the edges of the two sides of the nozzle disc body respectively. The shielding oil nozzle disc adapts to process requirements and is uniform in evaporation and coating.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a shielding oil nozzle plate and a vacuum coating machine using the shielding oil nozzle plate. Background Art

[0002] At present, the blank margins required for vacuum coating of metallized films for capacitors are basically made by non-contact oil shielding process, and the shielding oil is vaporized at high temperature by a vacuum coating machine under vacuum state. A number of oil nozzles with rectangular openings are designed according to the evaporation specifications and the required width of the margins, and a layer of shielding oil coating is sprayed on the blank margins required on the evaporation surface of the dielectric film. When the dielectric film coated with the shielding oil coating is wound through the coating cold drum, the evaporation source deposits the high-temperature molten metal physically vapor-phase onto the evaporation surface of the dielectric film to metallize it. At this time, the metal attached to the place coated with the shielding oil coating cannot be deposited due to the interference of the low surface tension performance of the shielding oil, and instantly separates from the middle and moves horizontally to both sides and attaches to the areas without shielding oil on both sides of the oil coating, forming a blank margin of the metallized film.

[0003] To prevent the oil nozzle from scratching the dielectric film during the evaporation winding process, there must be a certain gap (about 0.3mm) between the vacuum coating machine oil nozzle and the dielectric film. In addition, due to the pressure difference between the inside and outside of the oil shielding evaporation device, the oil vapor flow evaporating through the oil nozzle will be more or less scattered on both sides, making the sprayed shielding oil coating thick in the middle and discrete and unstable on both edges. In process control, when the oil temperature is too high, the amount of evaporated oil is too much, and the oil vapor pressure is too high, the oil vapor scattering amplitude through the oil nozzle is too large, the degree of shielding oil coating will become wider, and the margin of the plated metallized film may become wider than the benchmark. When the oil temperature is too low, the amount of evaporated oil is too small, and the oil vapor pressure is too low, the shielding oil coating will be thin on both edges due to scattering, and the shielding strength will decrease. The margin width of the plated metallized film may become narrower than the benchmark, and the metal layer on the edge is thin and unclear. Therefore, this coating process defect has a great influence on the consistency control of the margin width of the evaporated metallized film, and the control difficulty is relatively large.

[0004] With the continuous development of the new energy market, some metallized films with ultra-wide margins (width exceeding 5mm) and low-resistance metallized films that require low-speed evaporation with multiple strings and multiple margins have been applied. The shielding oil coating area required for evaporation of such products has greatly increased. In addition to the increased consumption of shielding oil, when a large area of ​​shielding oil coating passes through the evaporation source, the high-temperature thermal radiation of the evaporation source will evaporate the excess shielding oil remaining after shielding the metal at the margin (especially for multi-string and multi-margin low-resistance films, the evaporation speed is low and the evaporation thermal radiation energy is higher), polluting the entire evaporation space, causing interference with metal adhesion, contamination of metal coatings and other adverse problems. Therefore, when evaporating such products, the existing shielding oil evaporation equipment and coating processes will face severe challenges. Utility Model Content

[0005] The main purpose of the utility model is to provide a shielding oil nozzle disc, aiming to provide a shielding oil nozzle disc which is adapted to process requirements and has uniform evaporation coating.

[0006] To achieve the above-mentioned purpose, the shielding oil nozzle plate proposed in the utility model is used for shielding the evaporation of oil. The shielding oil nozzle plate includes a nozzle plate body, and the nozzle plate body is provided with two spaced-apart and H-shaped oil nozzle openings along the length direction. The two oil nozzle openings are respectively arranged near the two side edges of the nozzle plate body.

[0007] Optionally, the oil nozzle opening is arranged at a position 1 mm away from the edge of the nozzle disc body.

[0008] Optionally, the oil nozzle opening includes a first opening area and second opening areas symmetrically arranged on both sides of the first opening area, and the width of the first opening area is defined as d1, the width of the second opening area is defined as d2, and d2=1 / 2d1.

[0009] The utility model also provides a vacuum coating machine, which includes:

[0010] Unwinding device, used for unwinding dielectric film;

[0011] Shielding oil evaporation device, used for gasification of shielding oil;

[0012] As described above, the shielding oil nozzle plate is arranged on the shielding oil evaporation device;

[0013] A coating cold drum device, wherein the coating cold drum device and the shielding oil evaporation device are arranged at intervals;

[0014] An aluminum metal evaporation device, wherein the aluminum metal evaporation device is arranged adjacent to the coating cold drum device;

[0015] A zinc metal evaporation device, wherein the zinc metal evaporation device is arranged adjacent to the coating cold drum device;

[0016] Winding device, used for winding metallized film;

[0017] There are multiple winding guide rollers, and the dielectric film passes through the shielding oil evaporation device, the coating cold drum device, the aluminum metal evaporation device and the zinc metal evaporation device in sequence under the traction of the unwinding device, the winding guide roller and the winding device to achieve evaporation and winding.

[0018] The technical solution of the utility model includes a nozzle plate body, and the nozzle plate body is respectively provided with H-shaped oil nozzle openings near the edges of both sides. Since a technical means of changing the shape of the oil nozzle opening and thus adjusting the pressure at different positions of the oil nozzle opening is adopted, the technical problem of the difficulty in controlling the margin width of the rectangular opening oil nozzle opening during evaporation in the prior art is effectively solved, thereby achieving a technical effect of adapting to process requirements and uniform evaporation coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a structural schematic diagram of an embodiment of the shielding oil nozzle plate of the utility model;

[0020] Figure 2 It is a schematic diagram of the structure of a nozzle plate with a rectangular opening in the prior art;

[0021] Figure 3 This is a schematic structural diagram of an embodiment of the vacuum coating machine of the utility model;

[0022] Description of Figure Numbers:

[0023] Vacuum coating machine 100; unwinding device 10; shielding oil evaporation device 20; shielding oil nozzle plate 30; oil nozzle port 31; coating cold drum device 40; aluminum metal evaporation device 50; zinc metal evaporation device 60; winding device 70; winding guide roller 80. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0026] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] In addition, in the present utility model, descriptions such as "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0028] The utility model provides a shielding oil nozzle plate 30, which is used for shielding oil evaporation.

[0029] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0030] In the embodiment of the present utility model, Figure 1 As shown, the shielding oil nozzle plate 30 includes a nozzle plate body, which is provided with two spaced-apart H-shaped oil nozzle openings 31 along the length direction, and the two oil nozzle openings 31 are respectively arranged near the two side edges of the nozzle plate body.

[0031] The utility model is improved on the basis of the original rectangular opening. The structure of the rectangular opening is as follows Figure 2As shown, the setting position of the oil nozzle opening 31 remains unchanged, and the width of the middle part of the oil nozzle opening 31 is narrowed, and the design is an English letter "H" shaped opening, so that when the evaporation shielding oil vapor flow passes through the nozzle opening, the pressure of the middle narrowed part increases, and then the middle part of the steam flow is gathered to the relatively small pressure parts of the two edge openings, and the evaporation rate is accelerated. In addition, relative to the middle part of the horizontal opening, the two edges with widened opening width are equivalent to two longitudinally extending openings, and the possible scattering direction of the steam flow passing through it also changes to the longitudinal direction (the same direction as the winding and traveling of the dielectric film) and is superimposed. The amount of oil in the coating is concentrated and uniform, which improves the existing process nozzle spray shielding oil coating two edges of the oil discrete instability defect. At the same time, the amount of oil in the middle of the coating is reduced, which solves the problem of oil pollution caused by the increase of the shielding oil coating area and the excessive amount of oil in the middle volatilizing again through the thermal radiation of the evaporation source. The control temperature that meets the shielding coating oil amount required by the process can also be determined by eliminating the appearance change of insufficient oil in the middle area of ​​the coating, making the control visual and reducing the difficulty of operation.

[0032] The technical solution of the utility model includes a nozzle plate body, and the nozzle plate body is respectively provided with H-shaped oil nozzle openings 31 near the edges on both sides. Since a technical means of changing the shape of the oil nozzle openings 31 and thereby adjusting the pressure at different positions of the oil nozzle openings 31 is adopted, the technical problem of the difficulty in controlling the margin width of the rectangular opening oil nozzle openings 31 during evaporation in the prior art is effectively solved, thereby achieving a technical effect of adapting to process requirements and uniform evaporation coating.

[0033] In the embodiment of the present utility model, the oil nozzle opening 31 is arranged at a position 1 mm away from the edge of the nozzle plate body. The arrangement position of the oil nozzle opening 31 corresponds to the position of the blank margin.

[0034] In the embodiment of the utility model, the oil nozzle opening 31 includes a first opening area and a second opening area symmetrically arranged on both sides of the first opening area, and the width of the first opening area is defined as d1, and the width of the second opening area is defined as d2, d2=1 / 2d1. The utility model narrows the width of the middle part by about 50%, so that the pressure in the middle part of the oil nozzle opening 31 where the opening is narrowed increases, while the width of the openings at the two edges remains unchanged and the pressure is relatively reduced, thereby changing the evaporation rate of the oil vapor flow through the middle and two edges of the oil nozzle opening 31, the oil vapor flow in the middle part becomes smaller, and the flow at the two edges with wider openings and lower pressure increases, thereby reducing the oil volume distribution in the middle part of the oil coating.

[0035] The utility model also provides a vacuum coating machine 100, such as Figure 3As shown, the vacuum coating machine 100 includes a unwinding device 10, a shielding oil evaporation device 20, a shielding oil nozzle plate 30, a coating cold drum device 40, an aluminum metal evaporation device 50, a zinc metal evaporation device 60, a winding device 70 and a winding guide roller 80. The specific structure of the shielding oil nozzle plate 30 refers to the above embodiment. Since the vacuum coating machine 100 adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here.

[0036] In an embodiment of the utility model, the unwinding device 10 is used for unwinding the dielectric film, the shielding oil evaporation device 20 is used for gasification of the shielding oil, the shielding oil nozzle plate 30 is arranged on the shielding oil evaporation device 20, the coating cold drum device 40 and the shielding oil evaporation device 20 are arranged at intervals, the aluminum metal evaporation device 50 is arranged adjacent to the coating cold drum device 40, the zinc metal evaporation device 60 is arranged adjacent to the coating cold drum device 40, the winding device 70 is used for winding the metallized film, and there are multiple winding guide rollers 80. Under the traction of the unwinding device 10, the winding guide rollers 80 and the winding device 70, the dielectric film passes through the shielding oil evaporation device 20, the coating cold drum device 40, the aluminum metal evaporation device 50 and the zinc metal evaporation device 60 in sequence to achieve evaporation and winding.

[0037] Specifically, when the vacuum degree of the coating machine vacuum chamber reaches 10 -4 Mpa, the coating winding system is turned on, the dielectric film passes through the shielding oil evaporation device 20 to heat and vaporize the shielding oil, and the oil is evaporated and coated on the evaporation surface of the dielectric film according to the amount of oil required by the process, and then it is wound through the coating cold drum device 40 (temperature -20±5℃), the aluminum metal evaporation device 50 and the zinc metal evaporation device 60 respectively vaporize the metal aluminum and zinc at high temperature and physically vapor deposit them on the evaporation surface of the dielectric film coated with the shielding oil coating. At this time, the metal attached to the place coated with the shielding oil coating cannot be deposited due to the interference of the low surface tension of the shielding oil, and is instantly separated from the middle and translated to both sides and attached to the shielding oil-free areas on both sides of the oil coating, forming a blank margin of the metallized film, and then the winding device 70 is wound to complete the evaporation of the metallized film for capacitors with blank margins.

[0038] The above are only optional embodiments of the present invention, and do not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly used in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A shielding oil nozzle plate for shielding oil evaporation, characterized in that: The shielding oil nozzle plate comprises a nozzle plate body, and the nozzle plate body is provided with two spaced-apart H-shaped oil nozzle openings along the length direction, and the two oil nozzle openings are respectively arranged close to the two side edges of the nozzle plate body.

2. The shielding oil nozzle plate according to claim 1, characterized in that: The oil nozzle opening is arranged at a position 1 mm away from the edge of the nozzle plate body.

3. The shielding oil nozzle plate according to claim 1, characterized in that: The oil nozzle opening includes a first opening area and second opening areas symmetrically arranged on both sides of the first opening area. The width of the first opening area is defined as d1, the width of the second opening area is defined as d2, and d2=1 / 2d1.

4. A vacuum coating machine, characterized in that: The vacuum coating machine comprises: Unwinding device, used for unwinding dielectric film; Shielding oil evaporation device, used for gasification of shielding oil; The shielding oil nozzle plate according to any one of claims 1 to 3, wherein the shielding oil nozzle plate is arranged in the shielding oil evaporation device; A coating cold drum device, wherein the coating cold drum device and the shielding oil evaporation device are arranged at intervals; An aluminum metal evaporation device, wherein the aluminum metal evaporation device is arranged adjacent to the coating cold drum device; A zinc metal evaporation device, wherein the zinc metal evaporation device is arranged adjacent to the coating cold drum device; Winding device, used for winding metallized film; There are multiple winding guide rollers, and the dielectric film passes through the shielding oil evaporation device, the coating cold drum device, the aluminum metal evaporation device and the zinc metal evaporation device in sequence under the traction of the unwinding device, the winding guide roller and the winding device to achieve evaporation and winding.

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