Transition device for vacuum device and vacuum device

Abstract

The utility model discloses a transition device for a vacuum device and the vacuum device, comprising a drying chamber, the drying chamber is provided with a drying sealing cavity, and a sealing door of the vacuum device can be opened or closed in the drying sealing cavity; the drying chamber is provided with a drying sealing door which can be opened or closed; and the air purification device is used for enabling the dry sealing cavity to obtain a dry gas atmosphere. According to the utility model, the drying chamber is arranged as a transition space for external connection of the vacuum equipment, so that the vacuum equipment is thoroughly isolated from external environment air, and the drying chamber keeps a dry gas atmosphere all the time by utilizing the air purification equipment; only dry air in the drying chamber enters the vacuum chamber of the vacuum device, and various defects that in the prior art, environment air enters the vacuum chamber are overcome.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum environment production equipment, in particular to a transition device for a vacuum device and a vacuum device. Background Art

[0002] Large industrial vacuum equipment, such as vacuum evaporation equipment used in the vacuum evaporation process of OLED liquid crystal screens, has a large vacuum chamber. During production, the vacuum chamber needs to be evacuated, and its atmospheric pressure can reach 10 -5 Pa, when the sealed door needs to be opened, such as when maintenance or loading and removing products are required, the vacuum chamber will restore the outdoor air pressure. After the sealed door is opened, outside air will enter the sealed chamber, and substances in the air, especially moisture, will adhere to the inner wall of the sealed chamber. It is difficult to remove even if the vacuum is evacuated in time, which will also have an adverse effect on quickly reaching the required vacuum degree. Therefore, heating and drying are required to remove moisture in order to meet the stringent process environment requirements. However, some materials do not allow heating and baking. For example, paragraph 0037 of KR102285887B1 mentions: When the temperature of the vacuum and heat treatment process exceeds 70°C, due to the rapid temperature rise in the vacuum, pinholes may appear on the surface of the organic material, thereby reducing the surface morphology of the organic material. If the pressure of the vacuum and heat treatment process is higher than 10 -3 If the vacuum and heat treatment process is carried out for less than 5 minutes, the dehumidification effect may be reduced. If it exceeds 30 minutes, the morphology of the surface of the organic material may be reduced. Therefore, dehumidification is a difficult technical problem to deal with. For some magnetic materials, heating is not allowed because it may cause the risk of demagnetization. Based on this, a non-heating method is urgently needed to solve the above problems. Utility Model Content

[0003] In view of the above-mentioned shortcomings of the prior art, the utility model provides a transition device for a vacuum device.

[0004] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0005] A transition device for a vacuum device, comprising:

[0006] A transition device for a vacuum device, wherein the vacuum device is provided with a vacuum chamber, comprising:

[0007] A drying chamber, wherein the drying chamber is provided with a drying sealed cavity, and the vacuum chambers of one or more vacuum devices are connected to the drying sealed cavity through the sealed doors provided therein; or the vacuum chambers of one or more vacuum devices are provided in the drying sealed cavity; the drying chamber is provided with a drying sealed door; the drying chamber is at least one;

[0008] An air purification device is provided with an air inlet pipeline and an air outlet pipeline, both of which are connected to a dry sealed cavity, and the air purification device is used to enable the dry sealed cavity to obtain a dry gas atmosphere.

[0009] The utility model sets a drying chamber as a transition space for the external connection of the vacuum equipment, completely isolating the vacuum equipment from the external ambient air. The drying chamber uses air purification equipment to keep a dry gas atmosphere all the time. If necessary, it can also be heated and dehumidified and then lowered to room temperature or required temperature without causing any adverse effects on the vacuum equipment. When the sealed door of the vacuum device is opened, only dry air in the drying chamber will enter the vacuum chamber of the vacuum device, eliminating the various drawbacks of the ambient air with high water content entering the vacuum chamber in the prior art. The operator wears sealed protective clothing and a mask to enter the drying chamber, and can only open the sealed door of the vacuum equipment when it is detected that the gas atmosphere in the drying chamber meets the requirements.

[0010] Furthermore, the air purification device is provided with a purification column for removing moisture and a fan for returning the air in the dry sealed cavity to the sealed cavity through the air inlet pipeline, the purification column and the air outlet pipeline. In order to reduce the adhesion of moisture on the inner surface of the vacuum chamber, a purification column (the relevant purification material can refer to the existing technology) is used to circulate the air in the drying chamber to meet strict technical requirements.

[0011] Furthermore, the air purification device controls the air dew point value in the dry sealed cavity to be less than -76°C or the water content to be less than 1 ppm.

[0012] Furthermore, the transition device also includes a transition chamber, one side of which is sealed to the side where the dry sealing door is located, the transition chamber is provided with a transition sealing cavity, and the transition chamber is provided with a transition sealing door that can be opened or closed to lead to the external atmospheric environment.

[0013] Furthermore, the transition chamber is provided with a circulation drying device for circulating and drying the air in the transition sealing cavity.

[0014] Furthermore, the shared or independent circulating drying device includes a shared or independent air purification column, a fan, air outlet and air inlet pipelines, and an electrically controlled valve.

[0015] Furthermore, the air replacement device is provided with an exhaust device for extracting the air in the transition sealing cavity and an air replenishing device for injecting dry air into the transition sealing cavity.

[0016] Furthermore, the air supply device includes an air supply pipeline connected to the air outlet pipeline and an electric control valve arranged on the air supply pipeline.

[0017] The utility model also provides a vacuum device, comprising a vacuum chamber for production and any transition device as described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1-5 Schematic diagrams of different embodiments of the transition device for a vacuum device of the present invention.

[0020] The numbers in the figure represent:

[0021] 1. Vacuum device; 11. Vacuum chamber; 12. Sealed door; 2. Transition device; 21. Dry sealed cavity; 22. Dry sealed door; 3. Air purification device; 31. Purification column; 32. Fan; 33. Air inlet pipeline; 34. Air outlet pipeline; 4. Transition chamber; 41. Exhaust device; 42. Air supply pipeline; 43. Electric control valve; 44. Transition sealed cavity; 45. Transition sealed door; 331 / 332 / 333 / 341 / 342 / 343, electric control valve. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] The utility model is further described below in conjunction with embodiments.

[0024] In some embodiments, please refer to the attached instructions. Figure 1 , a transition device for a vacuum device 1, comprising:

[0025] A drying chamber 2, one side of the drying chamber 2 is sealed and connected to the side of the sealing door 12 of the vacuum device 1, the drying chamber 2 is provided with a drying sealing cavity 21, and the sealing door 12 of the vacuum device 1 can be opened or closed in the drying sealing cavity 21; the drying chamber 2 is provided with a drying sealing door 22 that can be opened or closed;

[0026] The air purification device 3 is provided with an air inlet pipeline 33 and an air outlet pipeline 34, both of which are connected to the dry sealed cavity 21, and the air purification device 3 is used to enable the dry sealed cavity 21 to obtain a dry gas atmosphere.

[0027] In some embodiments, there may be one, two or more vacuum devices, and the above-mentioned sealed connection is performed through the side wall of the drying chamber. The drying chamber may be rectangular and similar to a corridor, and multiple vacuum devices may be arranged on both sides. The power of the air purification device is adjusted accordingly, and multiple air purification devices may also be matched. The utility model sets a drying chamber as a transition space for the external connection of the vacuum equipment, completely isolating the vacuum equipment from the external ambient air. The drying chamber uses the air purification equipment to maintain a dry gas atmosphere. If necessary, it can also be heated and dehumidified and then lowered to room temperature or required temperature without causing any adverse effects on the vacuum equipment. When the sealed door of the vacuum device is opened, only the dry air in the drying chamber will enter the vacuum chamber of the vacuum device, eliminating the various drawbacks of ambient air entering the vacuum chamber in the prior art. The operator wears sealed protective clothing and a mask to enter the drying chamber, and can only open the sealed door of the vacuum equipment when it is detected that the gas atmosphere in the drying chamber meets the requirements.

[0028] In some embodiments, the air purification device 3 is provided with a purification column 31 for removing moisture and a fan 32 for returning the air in the dry sealed cavity 21 to the sealed cavity 21 via an air inlet pipe 33, a purification column 31 and an air outlet pipe 34. In order to reduce the content of impurities such as moisture in the air in the cavity, and further reduce the adhesion of impurities such as moisture on the inner surface of the vacuum chamber, a purification column 31 (the relevant purification material can refer to the prior art) is used to circulate the air in the drying chamber 2 to meet strict technical requirements.

[0029] In some embodiments, the air purification device 3 controls the air dew point value in the dry sealed cavity 21 to be less than -76°C or the water content to be less than 1 ppm, so as to meet the requirements of the production process.

[0030] In some embodiments, in order to reduce the impact of the external environment on the drying chamber, the transition device further includes a transition chamber 4, one side of which is sealed and connected to the side where the drying sealed door 22 is located, and the transition chamber 4 is provided with a transition sealed cavity 44, and the transition chamber 4 is provided with an openable or closable transition sealed door 45 leading to the atmospheric environment. In this way, before personnel and materials enter and exit the drying chamber 2, they first stay in the transition chamber 4 until the air in the transition chamber is replaced with dry air, and then open the drying sealed door 22 to enter the transition chamber 4.

[0031] In some embodiments, the transition chamber is provided with a circulation drying device for circulating and drying the air in the transition sealing cavity 44 .

[0032] The circulating drying device may be a shared or independent circulating drying device, including a shared or independent air purification column 31, a fan 32, an air outlet pipeline 34 and an air inlet pipeline 33, and an electric control valve, etc.

[0033] In some embodiments, the transition chamber 4 may also be provided with an air replacement device for replacing the air in the transition sealing cavity 44 with dry gas.

[0034] In practical application, the air replacement device is provided with an exhaust device 41 for extracting air from the transition sealing cavity 44 and an air supply device for injecting dry air into the transition sealing cavity 44. The air supply device has the functions of circulating and purifying the air in the transition sealing cavity and purging the transition sealing cavity 44 with dry air.

[0035] In order to save costs and simplify the structure, the air supply device includes an air supply pipeline 42 connected to the air outlet pipeline 34 and an electric control valve 43 arranged on the air supply pipeline 42. When the electric control valve 43 is opened, the dry air treated by the purification column 31 can be injected into the transition sealing cavity 44, so that the gas atmosphere in the transition sealing cavity 44 is quickly consistent with the gas atmosphere in the drying sealing cavity 21, and the condition for opening the drying sealing door 22 is quickly reached.

[0036] In some embodiments, Figure 2 As shown, Figure 1 Different from the example of FIG. 1 , a part of the vacuum chamber 11 of the vacuum device is located in the dry sealed cavity 21, and Figure 3 In the example of FIG. 1 , the entire vacuum chamber 11 is located in the dry sealed cavity 21 .

[0037] The utility model also provides a vacuum device 1, comprising a vacuum chamber 11 for production and any transition device as described above.

[0038] In some embodiments, multiple vacuum devices 1 share a transition device, such as Figure 4As shown, three vacuum devices 1 share one transition device. The vacuum chambers 11 of the three vacuum devices 1 are respectively connected to the three side walls of the transition device through the sealing door 12 and the dry sealing chamber 21. Another side wall of the transition device is provided with a dry sealing door 22. A dry sealing door 22 is provided between the dry sealing chamber 21 and the transition sealing chamber 44. The transition device is also provided with a transition sealing door 45 connected to the external space (atmospheric environment). The three vacuum chambers 11 are used for production. When a vacuum chamber 11 needs to load or take out materials, the sealing door 12 corresponding to the vacuum chamber 11 will be opened. Before opening the sealing door 12, it is necessary to ensure that the gas atmosphere in the dry sealing chamber 21 meets the requirements to prevent external impurities (especially moisture) from entering the vacuum chamber 11. The circulating drying device includes an air purification column 31, a fan 32, an air outlet pipeline 34 and an air inlet pipeline 33, and an electric control valve (the electric control valves 331 and 332 on one side of the air inlet pipeline 33 respectively control the opening and closing of the air inlet pipeline 33 connected to the drying sealed cavity 21 and the transition sealed cavity 44; the electric control valves 341 and 342 on one side of the air outlet pipeline 34 respectively control the opening and closing of the air outlet pipeline 34 connected to the drying sealed cavity 21 and the transition sealed cavity 44). The working principle is as follows: when a vacuum chamber 11 needs to load or take out materials, before opening the sealed door 12, it is necessary to ensure that the gas atmosphere in the dry sealed chamber 21 meets the requirements. At this time, the dry sealed chamber 21 needs to be circulated and dried, and the electric control valves 331 and 341 are opened, and the fan 32 is opened to drive the gas in the dry sealed chamber 21 back to the dry sealed chamber 21 through the air inlet pipe 33, the air purification column 31, the fan 32, and the air outlet pipe 34, and reciprocate until the internal atmosphere meets the requirements. Then open the sealed door 12 to take out the materials from the vacuum chamber 11, or load the materials in the dry sealed chamber 21 into the vacuum chamber 11. Similarly, when transferring the materials in the drying sealed chamber 21 to the transition sealed chamber 44, it is also necessary to first circulate and dry the atmosphere of the transition sealed chamber 44. Specifically, before opening the drying sealed door 22, it is necessary to ensure that the gas atmosphere in the transition sealed chamber 44 meets the requirements. At this time, the transition sealed chamber 44 needs to be circulated and dried, and the electric control valves 332 and 342 are opened, and the fan 32 is opened to drive the gas in the transition sealed chamber 44 back to the transition sealed chamber 44 through the air inlet pipe 33, the air purification column 31, the fan 32, and the air outlet pipe 34, and reciprocate until the internal atmosphere meets the requirements. Then the material can be transferred to the transition sealed chamber 44, and after closing the drying sealed door 22, the transition sealed door 45 can be opened to take out the material.The principle of the process of sending external materials into the vacuum chamber 11 is similar. First, the sealing door 12 and the drying sealing door 22 are closed. At this time, the transition sealing door 45 is opened, and after the external materials are sent into the transition sealing cavity 44, the transition sealing door 45 is closed again. Then, the electric control valves 332 and 342 and the fan 32 of the circulation drying device are opened to drive the gas in the transition sealing cavity 44 back to the transition sealing cavity 44 through the air inlet pipeline 33, the air purification column 31, the fan 32, and the air outlet pipeline 34, and the reciprocating cycle is carried out until the internal atmosphere meets the requirements. Then open the drying sealing door 22, transfer the materials from the transition sealing cavity 44 to the drying sealing cavity 21, and then perform a circulation drying treatment on the drying sealing cavity 21. If the internal atmosphere meets the requirements, open the sealing door 12 to move the materials into the vacuum chamber 11. By controlling the opening and closing of different electric control valves, the drying sealing cavity 11 and the transition sealing cavity 44 can be circulated and dried separately or simultaneously. The control is carried out according to the needs of the working conditions, and no further description is given.

[0039] Figure 5 An example is Figure 4 In the example, two groups are mirror-set, with a total of 6 vacuum chambers 11, two drying sealed chambers 21, sharing a transition sealed chamber, and sharing a set of circulating drying devices. The circulating drying operations of the two drying sealed chambers 21 and the transition sealed chamber are controlled by controlling the electric control valves 331 / 332 / 333 / 341 / 342 / 343. The working principle refers to the aforementioned working principle and will not be repeated here.

[0040] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A transition device for a vacuum device, the vacuum device having a vacuum chamber, characterized in that: include: A drying chamber, wherein the drying chamber is provided with a drying sealed cavity, and the vacuum chambers of one or more vacuum devices are connected to the drying sealed cavity through the sealed doors provided therein; or the vacuum chambers of one or more vacuum devices are provided in the drying sealed cavity; the drying chamber is provided with a drying sealed door; the drying chamber is at least one; An air purification device is provided with an air inlet pipeline and an air outlet pipeline, both of which are connected to a dry sealed cavity, and the air purification device is used to enable the dry sealed cavity to obtain a dry gas atmosphere.

2. The transition device for a vacuum device according to claim 1, characterized in that: The air purification device is provided with a purification column for removing moisture and a fan for returning the air in the dry sealed cavity to the sealed cavity through an air inlet pipeline, the purification column and an air outlet pipeline.

3. The transition device for a vacuum device according to claim 2, characterized in that: The air purification device controls the air dew point value in the dry sealed cavity to be less than -76°C or the water content to be less than 1 ppm.

4. The transition device for a vacuum device according to claim 3, characterized in that: The transition device also includes a transition chamber, one side of which is sealed to the side where the drying sealing door is located, the transition chamber is provided with a transition sealing cavity, and the transition chamber is provided with a transition sealing door that can be opened or closed.

5. The transition device for a vacuum device according to claim 4, characterized in that: The transition chamber is provided with an air replacement device for replacing the air in the transition sealing cavity with dry gas.

6. The transition device for a vacuum device according to claim 5, characterized in that: The air replacement device is provided with an air replenishing device for circulating and purifying the air in the transition sealing cavity or using dry air for blowing.

7. The transition device for a vacuum device according to claim 6, characterized in that: The air supply device comprises an air supply pipeline connected with the air outlet pipeline and an electric control valve arranged on the air supply pipeline.

8. A vacuum device, characterized in that: The invention comprises a vacuum chamber for production and any transition device as claimed in claims 1 to 7.

9. The vacuum device according to claim 8, characterized in that One or more vacuum chambers are connected to the dry sealed cavity through a sealed door provided therein; or, one or more vacuum chambers are provided in the dry sealed cavity.

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