Raw material cavity assembly and vacuum coating equipment

Abstract

The utility model is applicable to the technical field of coating equipment, and provides a raw material cavity component and vacuum coating equipment, the raw material cavity component comprises a sublimation bin body internally provided with a sublimation cavity, and the sublimation bin body is provided with a discharge port communicated with the sublimation cavity; the door plate is connected with the sublimation bin body and is used for opening or closing the discharging opening; the honeycomb plate is arranged in the sublimation cavity from the discharging opening in a push-pull manner, and is provided with a plurality of honeycomb holes for placing a coating material; the porous pressing plate is detachably arranged on the honeycomb plate in a covering manner; the cracking cavity is communicated with the sublimation cavity; one end of the bent pipeline is connected with the top of the sublimation cavity, and the other end of the bent pipeline is connected with the cracking cavity. According to the raw material cavity assembly provided by the utility model, heat radiation flowing back into the sublimation cavity from the cracking cavity can be reduced, a coating material is heated more uniformly and is not easy to cake, and the working reliability of the raw material cavity assembly is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a raw material chamber component and vacuum coating equipment. Background Art

[0002] Vacuum coating is a process method that forms a thin film with desired properties on the surface of metal, plastic and other workpieces under a high vacuum environment. It is widely used in various fields of electronic equipment manufacturing. For example, in order to improve the waterproof and hydrophobic properties of assembled mobile phones, plasma enhanced chemical vapor deposition (PECVD) can be used to coat the mobile phones. After coating, the gaps on the surface of the mobile phone form a protective coating, giving the mobile phone excellent waterproof and hydrophobic effects. Among them, the vacuum coating equipment generally includes a raw material chamber component, a coating component and a vacuum component which are connected in sequence. The raw material chamber component includes a sublimation chamber and a cracking chamber connected to the sublimation chamber. The coating component includes a coating chamber. The vacuum component includes a cold trap and a vacuum pump. The coating process of the vacuum coating equipment is as follows: first, under vacuum conditions, the workpiece is placed in the coating chamber, and the coating material is placed in the sublimation chamber. The coating material is heated to about 150°C in the sublimation chamber and sublimated into a gas. The gaseous coating material enters the cracking chamber. When heated to a temperature of about 600°C, the molecular bonds of the gaseous coating material are broken and cracked into reactive gases. The reactive gases enter the coating chamber from the cracking chamber and are deposited and polymerized on the surface of the workpiece in the coating chamber to form a film layer. The vacuum pump continuously evacuates the coating chamber. During the evacuation process, the unreacted reactive gases in the coating chamber are collected in the cold trap under the action of the vacuum pump.

[0003] In the prior art, the sublimation chamber of the raw material chamber assembly of the vacuum coating equipment is directly connected to the side of the cracking chamber by a straight tube, so that the sublimation chamber and the cracking chamber are connected. However, due to the high temperature in the cracking chamber, the heat radiation of the cracking chamber is easily caused to flow back into the sublimation chamber through the straight tube, resulting in a large heat loss in the cracking chamber and easily causing the door panel of the sublimation chamber to deform. Moreover, the coating material in the sublimation chamber is directly placed on a placement plate in the sublimation chamber for heating and sublimation, the heating is uneven, the coating material is easily agglomerated, and the utilization rate of the coating material is affected. Utility Model Content

[0004] The utility model provides a raw material chamber component, aiming to solve the problems in the raw material chamber component of the vacuum coating equipment in the prior art that the heat radiation of the cracking chamber is easy to flow back into the sublimation chamber, the heat loss in the cracking chamber is large and it is easy to cause the door panel of the sublimation chamber to deform, and the coating material in the sublimation chamber is unevenly heated and easy to agglomerate.

[0005] The utility model is implemented by providing a raw material chamber component for vacuum coating equipment, comprising:

[0006] A sublimation chamber is provided in the sublimation chamber, wherein the sublimation chamber is provided with a discharge port connected to the sublimation chamber;

[0007] A door panel connected to the sublimation bin body and used for opening or closing the discharge port;

[0008] A honeycomb plate installed in the sublimation chamber in a push-pull manner from the discharge port, wherein the honeycomb plate is provided with a plurality of honeycomb holes for placing the coating material;

[0009] A porous pressing plate detachably covered on the honeycomb plate;

[0010] a pyrolysis chamber connected to the sublimation chamber; and

[0011] A bent pipe, one end of which is connected to the top of the sublimation chamber, and the other end of which is connected to the cracking chamber.

[0012] Preferably, the raw material chamber assembly further comprises:

[0013] A filter layer is detachably covered on the porous pressing plate.

[0014] Preferably, two ends of the curved pipe are located at different heights respectively; and / or the curved pipe is an L-shaped pipe.

[0015] Preferably, the porous pressing plate is a stainless steel plate.

[0016] Preferably, the diameter of the honeycomb holes is 8 to 15 mm.

[0017] Preferably, the door panel is a stainless steel door; and / or the honeycomb panel is an aluminum panel.

[0018] Preferably, the mesh size of the filter layer is 400-600 meshes.

[0019] Preferably, the sublimation chamber body is an integrated aluminum structure, and the sublimation chamber is a square chamber.

[0020] Preferably, the sublimation bin body is provided with an annular sealing ring arranged around the discharge port, and the door panel is in contact with and cooperates with the annular sealing ring.

[0021] The utility model also provides a vacuum coating device, comprising the raw material chamber component as mentioned above.

[0022] The utility model provides a raw material chamber component that connects a cracking chamber and a sublimation chamber by using a bent pipe, thereby reducing the heat radiation from the cracking chamber backflowing into the sublimation chamber, reducing the heat loss in the cracking chamber, and avoiding deformation of the door panel of the sublimation chamber caused by excessive temperature in the sublimation chamber; by arranging a honeycomb plate that can be pulled out and installed in the sublimation chamber, the coating material is placed in the honeycomb holes of the honeycomb plate, and the heat conduction contact area of ​​the coating material is increased, so that the coating material is not easy to agglomerate, ensuring that the coating material is fully sublimated and improving the utilization rate of the coating material; at the same time, a porous pressing plate is arranged above the honeycomb plate, and the porous pressing plate is used to filter the large-particle coating material after sublimation to prevent the large-particle solid coating material from entering the cracking chamber, and the porous pressing plate is used to cover the honeycomb plate to prevent the displacement and thermal deformation of the honeycomb plate caused by vacuuming, thereby improving the working reliability of the raw material chamber component. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A three-dimensional diagram of a raw material chamber assembly provided in an embodiment of the utility model;

[0024] Figure 2 A three-dimensional diagram of a part of the structure of a raw material chamber assembly provided in an embodiment of the utility model;

[0025] Figure 3 A three-dimensional diagram of another part of the structure of a raw material chamber assembly provided in an embodiment of the utility model;

[0026] Figure 4 A schematic diagram of a vacuum coating device provided in an embodiment of the utility model. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0028] A raw material chamber component provided by the embodiment of the utility model connects the cracking chamber and the sublimation chamber by a bent pipe, thereby reducing the heat radiation refluxed from the cracking chamber to the sublimation chamber, reducing the heat loss in the cracking chamber, and avoiding deformation of the door panel of the sublimation chamber caused by excessive temperature in the sublimation chamber; by providing a honeycomb panel that can be pulled out and installed in the sublimation chamber, the coating material is placed in the honeycomb holes of the honeycomb panel, thereby increasing the thermal contact area of ​​the coating material, making it difficult for the coating material to agglomerate, ensuring that the coating material is fully sublimated, and improving the utilization rate of the coating material; at the same time, a porous pressing plate is provided above the honeycomb panel, and the porous pressing plate is used to filter the large-particle coating material after sublimation to prevent the large-particle solid coating material from entering the cracking chamber, and the porous pressing plate is used to cover the honeycomb panel to prevent the displacement and thermal deformation of the honeycomb panel caused by vacuumization, thereby improving the working reliability of the raw material chamber component.

[0029] Please refer to Figure 1-Figure 3 The present utility model embodiment provides a raw material chamber component 1, which is used in a vacuum coating device, and includes:

[0030] A sublimation chamber 11 is provided with a sublimation chamber 110, and the sublimation chamber 11 is provided with a discharge port 111 connected to the sublimation chamber 110;

[0031] A door panel 12 connected to the sublimation chamber 11 and used to open or close the discharge port 111;

[0032] The discharge port 111 can be pushed and pulled to be installed on the honeycomb plate 13 in the sublimation chamber 110, and the honeycomb plate 13 is provided with a plurality of honeycomb holes 131 for placing the coating material;

[0033] A porous pressing plate 17 detachably covering the honeycomb plate 13;

[0034] a cracking chamber 15 communicating with the sublimation chamber 110; and

[0035] The bent pipe 16 has one end connected to the top of the sublimation chamber 110 and the other end connected to the cracking chamber 15 .

[0036] In the embodiment of the utility model, a raw material chamber component is provided, by connecting the cracking chamber 15 and the sublimation chamber 110 with a bent pipe 16, so as to prevent the heat radiation in the cracking chamber 15 from flowing back into the sublimation chamber 110 along a straight line, reduce the heat radiation in the cracking chamber 15 flowing back into the sublimation chamber 110, reduce the heat loss in the cracking chamber 15, and prevent the temperature in the sublimation chamber 110 from being too high, causing the door panel 12 of the sublimation chamber 110 to be deformed; and, a honeycomb panel 13 is provided that can be pulled out and installed in the sublimation chamber 110, and the coating material is placed in the honeycomb hole 131 of the honeycomb panel 13, so as to increase the heat conduction contact area of ​​the coating material, so that the coating material It is not easy to agglomerate, so that the coating material can be fully sublimated, and the utilization rate of the coating material is improved; a porous pressing plate 17 is arranged above the honeycomb plate 13. On the one hand, the porous pressing plate 17 is used to filter the large-particle solid coating material to prevent the large-particle coating material from entering the cracking chamber 15. On the other hand, the porous pressing plate 17 is used to cover the honeycomb plate 13 to prevent the heat radiation in the cracking chamber 15 from directly flowing back to the honeycomb plate 13, thereby playing a heat insulation role and preventing the honeycomb plate 13 from being deformed by high temperature. The porous pressing plate 17 covers the honeycomb plate 13 to prevent the displacement of the honeycomb plate 13 due to vacuuming, thereby improving the working reliability of the raw material chamber assembly.

[0037] In the embodiment of the utility model, the sublimation chamber 110 and the cracking chamber 15 are both provided with corresponding heating devices (not shown in the figure). The coating material is heated to 150°C in the honeycomb plate 13 in the sublimation chamber 110 and sublimated into a gas. The gaseous coating material moves upward through the porous pressing plate 17. The gaseous coating material enters the cracking chamber 15 through the bent pipe 16. The gaseous coating material is heated to 600°C in the cracking chamber 15 and cracked into reactive gas with reactive activity. The reactive gas then enters the coating chamber of the vacuum coating equipment from the cracking chamber 15 to deposit the coating.

[0038] As an embodiment of the present invention, the sublimation chamber body 11 is an integrated aluminum structure, and the sublimation chamber 110 is a square chamber.

[0039] In this embodiment, compared with the cylindrical sublimation chamber 110, the square sublimation chamber 110 has higher space utilization, which can improve space utilization; moreover, the aluminum sublimation chamber 11 can improve the overall high temperature resistance of the sublimation chamber 11 and conduct heat faster.

[0040] As an embodiment of the present invention, the door panel 12 is rotatably connected to the sublimation chamber body 11 to facilitate opening and closing of the door panel 12 .

[0041] As an embodiment of the present invention, the door panel 12 is a stainless steel door. The door panel 12 has good high temperature resistance and is less likely to deform, so that the sublimation chamber 110 maintains good sealing performance.

[0042] As an embodiment of the present invention, the honeycomb panel 13 is an aluminum panel, and the good thermal conductivity of aluminum material is utilized to facilitate the heating of the coating material.

[0043] As an embodiment of the present invention, the porous pressing plate 17 is a stainless steel plate, so that the porous pressing plate 17 has good high temperature resistance and can effectively prevent the porous pressing plate 17 and the honeycomb plate 13 from being deformed by heat.

[0044] As an embodiment of the present utility model, the sublimation chamber body 11 is provided with an annular sealing ring 18 arranged around the discharge port 111 , and the door panel 12 is in contact with and cooperates with the annular sealing ring 18 .

[0045] In this embodiment, the door panel 12 is in contact with and cooperates with the annular sealing ring 18 to achieve sealing of the door panel 12 and improve the sealing effect of the sublimation chamber 110 .

[0046] In the embodiment of the utility model, the honeycomb panel 13 can be pushed and pulled in the sublimation chamber 110 from the discharge port 111. The honeycomb panel 13 is pushed into the sublimation chamber 110 along the discharge port 111 or pulled out of the sublimation chamber 110, which is convenient for installing and removing the honeycomb panel 13 and placing the coating material on the honeycomb panel 13.

[0047] In the embodiment of the utility model, a plurality of honeycomb holes 131 are arranged on the honeycomb plate 13, and the plurality of honeycomb holes 131 are evenly arranged on the honeycomb plate 13. Each honeycomb hole 131 is arranged along the vertical direction, and the coating material is filled in the honeycomb hole 131 to realize wrapped heating of the coating material and increase the heating contact area of ​​the coating material.

[0048] As an embodiment of the present invention, the diameter of the honeycomb hole 131 is 8 to 15 mm, which can ensure a good heating effect and avoid the problem of difficulty in adding materials and reduced volume due to the small diameter of the honeycomb hole 131.

[0049] As an embodiment of the present utility model, the raw material chamber assembly 1 further includes:

[0050] The filter layer 14 is detachably covered on the porous pressing plate 17 .

[0051] In this embodiment, the filter holes on the filter layer 14 filter the gaseous coating material again. The filter layer 14 is used to prevent larger particles from passing through the filter layer 14 and prevent larger particles from entering the cracking chamber 15, thereby further improving the filtering effect.

[0052] As an embodiment of the present invention, the mesh number of the filter layer 14 is 400-600 meshes, which can effectively prevent large particles from passing through.

[0053] As an embodiment of the present invention, the filter layer 14 is a stainless steel filter layer with good high temperature resistance.

[0054] As an embodiment of the present invention, the bending pipe 16 is an L-shaped pipe, which is easy to process. Of course, the bending pipe 16 can also be a pipe with other bending shapes. For example, the bending pipe 16 can also be a Z-shaped, S-shaped, etc.

[0055] As an embodiment of the present invention, two ends of the curved pipe 16 are located at different heights.

[0056] In this embodiment, one end of the bent pipe 16 is connected to the top of the sublimation chamber 110, and the other end is connected to the side of the cracking chamber 15. Since the two ends of the bent pipe 16 are respectively located at different heights, the two ends of the bent pipe 16 will not be directly opposite, which can further prevent the heat radiation in the cracking chamber 15 from flowing back into the sublimation chamber 110 in a straight line, reduce the heat radiation in the cracking chamber 15 that flows back into the sublimation chamber 110, and reduce the temperature and heat loss in the cracking chamber 15.

[0057] As an embodiment of the present invention, the height difference between the two ends of the curved pipe 16 is 20 to 30 centimeters.

[0058] As an embodiment of the present invention, the raw material chamber assembly 1 further comprises a cabinet 19 , and the sublimation chamber 11 and the cracking chamber 15 are mounted on the cabinet 19 . Rollers may be provided at the bottom of the cabinet 19 to facilitate the flexible movement of the raw material chamber assembly 1 .

[0059] Please refer to Figure 4 The utility model also provides a vacuum coating device, including the raw material chamber assembly 1 of the above embodiment. The vacuum coating device of the utility model embodiment can reduce the heat radiation from the cracking chamber 15 to the sublimation chamber 110 by setting the above raw material chamber assembly, reduce the heat loss in the cracking chamber 15, and is not easy to cause the door panel 12 of the sublimation chamber 110 to deform due to the excessive temperature of the sublimation chamber 110, and increase the heat conduction contact area of ​​the sublimation chamber 110 to the coating material, prevent the raw materials from agglomerating, ensure the full sublimation of the coating material, and improve the utilization rate of the coating material.

[0060] In the embodiment of the utility model, the vacuum coating equipment further comprises:

[0061] The coating assembly 2 is provided with a coating chamber 20 communicating with the cracking chamber 12;

[0062] The vacuum component 3 includes a cold trap 31 and a vacuum pump 32 connected to the cold trap 31 . The cold trap 31 is connected to the coating chamber 20 .

[0063] The gas outlet 13 of the cracking chamber 15 is connected to the coating chamber 20 through the first pipe 4, and the cold trap 31 is connected to the coating chamber 20 through the second pipe 5. Of course, the specific structure of the first pipe 4 is not limited to Figure 4 The "T" shape shown in the figure, the first pipeline 4 can also be a straight pipeline or a pipeline of other shapes, which is not limited here.

[0064] A raw material chamber component provided by the embodiment of the utility model connects the cracking chamber and the sublimation chamber by a bent pipe, thereby reducing the heat radiation refluxed from the cracking chamber to the sublimation chamber, reducing the heat loss in the cracking chamber, and avoiding deformation of the door panel of the sublimation chamber caused by excessive temperature in the sublimation chamber; by providing a honeycomb panel that can be pulled out and installed in the sublimation chamber, the coating material is placed in the honeycomb holes of the honeycomb panel, and the heat conduction contact area of ​​the coating material is increased, so that the coating material is not easy to agglomerate, ensuring that the coating material is fully sublimated and improving the utilization rate of the coating material; at the same time, a porous pressing plate is provided above the honeycomb panel, and the porous pressing plate is used to preliminarily filter the large-particle solid coating material to prevent the large-particle coating material from entering the cracking chamber, and the porous pressing plate is used to cover the honeycomb panel to prevent the displacement and thermal deformation of the honeycomb panel caused by vacuumization, thereby improving the working reliability of the raw material chamber component.

[0065] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A raw material chamber assembly for vacuum coating equipment, characterized in that: include: A sublimation chamber is provided in the sublimation chamber, wherein the sublimation chamber is provided with a discharge port connected to the sublimation chamber; A door panel connected to the sublimation bin body and used for opening or closing the discharge port; A honeycomb plate installed in the sublimation chamber in a push-pull manner from the discharge port, wherein the honeycomb plate is provided with a plurality of honeycomb holes for placing the coating material; A porous pressing plate detachably covered on the honeycomb plate; a cracking chamber connected to the sublimation chamber; and A bent pipe, one end of which is connected to the top of the sublimation chamber, and the other end of which is connected to the cracking chamber.

2. The raw material chamber assembly according to claim 1, characterized in that: The raw material chamber assembly also includes: A filter layer is detachably covered on the porous pressing plate.

3. The raw material chamber assembly according to claim 1, characterized in that: The two ends of the bent pipe are respectively located at different heights; and / or the bent pipe is an L-shaped pipe.

4. The raw material chamber assembly according to claim 1, characterized in that: The porous pressing plate is a stainless steel plate.

5. The raw material chamber assembly according to claim 1, characterized in that: The diameter of the honeycomb holes is 8 to 15 mm.

6. The raw material chamber assembly according to claim 1, characterized in that: The door panel is a stainless steel door; and / or the honeycomb panel is an aluminum panel.

7. The raw material chamber assembly according to claim 2, characterized in that: The mesh number of the filter layer is 400 to 600 meshes.

8. The raw material chamber assembly according to claim 1, characterized in that: The sublimation chamber body is an integrated aluminum structure, and the sublimation chamber is a square chamber.

9. The raw material chamber assembly according to claim 1, characterized in that: The sublimation warehouse body is provided with an annular sealing ring arranged around the discharge port, and the door plate is in contact with and cooperates with the annular sealing ring.

10. A vacuum coating device, characterized in that: It comprises a raw material chamber assembly as described in any one of claims 1 to 9.

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