Channel cleaning device and single crystal furnace
By designing a channel cleaning device including hoses, friction parts and winding parts, the problems of degradation of cleaning effects and deposition of impurities in the prior art are solved, and efficient channel cleaning and device maintenance are achieved.
Patent Information
- Application Number
- CN202421408690.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-19
- Publication Date
- 2025-03-28
- Estimated Expiration
- 2034-06-19
AI Technical Summary
After long-term use of existing automated cleaning devices, the cleaning effect will decrease, and impurities deposited on the cleaning device will cause premature damage to the device and recontamination of the channels.
A channel cleaning device is designed, including a hose, a friction member and a winding member. The hose is driven and rotated by a driving unit. The friction member scrapes the granular impurities on the inner wall of the passage, and the winding member rotates and wraps around the filament or mesh impurities in the passage.
It realizes efficient cleaning of different types of impurities in the channel, avoids the deposit of impurities on the cleaning device, extends the service life of the device, and improves the cleaning effect of the channel.
Smart Images
Figure CN222684836U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal silicon production, in particular to a channel cleaning device and a single crystal furnace. Background Art
[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon and forms single crystal silicon rods by the Czochralski method. When producing single crystal silicon rods, it is necessary to continuously introduce inert gas into the single crystal furnace to prevent the silicon rods from being oxidized. After the single crystal furnace has been used for a period of time, granular, blocky or filamentary impurities are easily attached to its air inlet channel. Therefore, the air inlet channel needs to be cleaned to ensure smooth passage.
[0003] In the prior art, an automatic cleaning device is generally installed in the channel. However, although the automatic cleaning device can quickly clean the channel, a layer of impurities will be deposited on the cleaning device after long-term use, resulting in a decrease in the subsequent cleaning effect of the channel. Utility Model Content
[0004] In order to solve at least one of the problems mentioned in the background technology, the utility model provides an automatic cleaning device and a single crystal furnace, which have good cleaning effect.
[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0006] In a first aspect, the utility model provides a channel cleaning device, comprising a hose, a friction member and a winding member, wherein a first end of the hose forms a connecting portion, and the connecting portion is configured to be transmission-connected to a driving unit;
[0007] There are multiple friction members, which are arranged on the outer peripheral surface of the hose, and the wrapping member is arranged on the second end of the hose, and the wrapping member is a curved elastic member;
[0008] The driving unit is used to drive the hose to rotate so as to scrape the granular or block impurities deposited on the inner wall of the channel through the friction member on the outer wall of the hose. The winding member is configured to rotate driven by the hose so as to wind the filamentary or mesh impurities attached to the channel through the rotating winding member.
[0009] As an optional embodiment, the hose includes a first hose and a second hose, the first end of the first hose is connected to the first end of the second hose, the second end of the first hose forms a connecting portion, the friction part is arranged on the outer peripheral surface of the second hose, and the winding part is arranged on the second end of the second hose.
[0010] As an optional implementation, it further includes a fixing block, which is sealed at the second end of the second hose, and one end of the wrapping piece is connected to the fixing block.
[0011] As an optional implementation, it further includes a flexible member, which is wrapped around the outer circumference of the fixed block and is used to wipe the inner wall of the channel.
[0012] As an optional implementation, the winding member includes a metal wire, the metal wire is in a spiral shape, and the metal wire is bent and extended along the length direction of the hose.
[0013] As an optional implementation, the first hose is a rubber hose, and the second hose is a metal sleeve.
[0014] As an optional implementation, the first end of the first hose is trumpet-shaped, and the diameter of the second end of the first hose is smaller than the diameter of the second hose.
[0015] As an optional implementation, the friction member includes a metal ring, the outer peripheral surface of the second hose has a plurality of mounting holes, and at least one metal ring is hung in one mounting hole.
[0016] As an optional implementation, the mounting holes are evenly distributed in an array on the outer circumferential surface of the second hose, and the axial direction of the mounting holes is consistent with the length direction of the hose.
[0017] In a second aspect, the utility model further provides a single crystal furnace, comprising a channel cleaning device according to any one of the first aspects, wherein the channel cleaning device is used to clean an air inlet channel of the single crystal furnace.
[0018] The channel cleaning device provided by the utility model comprises a hose, a friction piece and a winding piece, wherein the first end of the hose forms a connecting portion, and the connecting portion is configured to be transmission-connected to a driving unit; there are a plurality of friction pieces, and the plurality of friction pieces are arranged on the outer peripheral surface of the hose; the winding piece is arranged on the second end of the hose, and the winding piece is a curved elastic piece; the driving unit is used to drive the hose to rotate, so as to scrape the granular or block-shaped impurities deposited on the inner wall of the channel through the friction piece on the outer wall of the hose, and the winding piece is configured to rotate driven by the hose, so as to wind the filamentous or mesh-shaped impurities attached to the channel through the rotating winding piece.
[0019] When using the channel cleaning device provided by the utility model to clean the air intake channel of a single crystal furnace, the first end of the hose can be connected to the driving unit, and then the hose and the winding piece at the front end of the hose can be extended into the channel to be cleaned. Since the hose and the winding piece have a certain elasticity, they can be bent to a certain extent in the channel to adapt to the shape of the channel. After starting the driving unit, the driving unit transmits torque to the hose and the winding piece in turn, and the hose and the winding piece rotate in the channel. When the hose rotates, the friction piece on its outer peripheral surface can scrape the granular or block impurities deposited on the inner wall of the channel, so that these granular or block impurities become dust, which can be blown out of the single crystal furnace through the airflow; while the friction piece is cleaning the impurities on the inner wall of the channel, the rotating winding piece at the front end of the hose can wrap the filamentary or mesh impurities in the channel around it, so as to clean the filamentary or mesh impurities in the channel. After cleaning, the cleaning device can be taken out of the channel, and the cleaning device can be cleaned to a certain extent. After cleaning, the channel can also be cleaned for a second time, which is extremely convenient to use. The channel cleaning device provided by the utility model can simultaneously clean different types of impurities in the channel through the friction part and the winding part, and the cleaning device can be conveniently cleaned after cleaning, thus avoiding the deposition of impurities on the cleaning device and greatly improving the cleaning effect of the channel. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.
[0021] Figure 1 A schematic diagram of the first overall structure of the channel cleaning device provided by an embodiment of the utility model;
[0022] Figure 2 A second overall structural diagram of the channel cleaning device provided by an embodiment of the utility model;
[0023] Figure 3 for Figure 1 The main view;
[0024] Figure 4 for Figure 1 Enlarged view of point A in the middle.
[0025] Description of reference numerals:
[0026] 100-cleaning device;
[0027] 110-hose;
[0028] 111- first hose;
[0029] 112 - second hose;
[0030] 1121-Mounting hole;
[0031] 120-friction parts;
[0032] 130- winding piece;
[0033] 140-Fixed block. DETAILED DESCRIPTION
[0034] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0035] In the application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inside", "outside", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the utility model and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.
[0036] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those skilled in the art, the specific meanings of these terms in this utility model can be understood according to specific circumstances.
[0037] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.
[0038] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.
[0039] After a single crystal furnace has been used for a period of time, granular, blocky or filamentous impurities are easily attached to its air inlet channel. Therefore, the air inlet channel needs to be cleaned to ensure the smooth flow of the channel. In the prior art, an automatic cleaning device is generally installed in the channel. However, although the automatic cleaning device can quickly clean the channel, a layer of impurities will be deposited on the cleaning device after long-term use. These impurities will not only cause the automatic cleaning device to be damaged prematurely, but will also fall back into the channel after the channel is cleaned, resulting in incomplete channel cleaning.
[0040] In view of this, the utility model provides a channel cleaning device 100, including a hose 110, a friction member 120 and a winding member 130. The first end of the hose 110 forms a connecting portion, and the connecting portion is configured to be transmission-connected to a driving unit; there are multiple friction members 120, and the multiple friction members 120 are arranged on the outer peripheral surface of the hose 110. The winding member 130 is arranged at the second end of the hose 110, and the winding member 130 is a curved elastic member. When cleaning the air intake channel of the single crystal furnace, the first end of the hose 110 can be connected to the driving unit, and then the hose 110 and the winding piece 130 at the front end of the hose 110 are extended into the channel to be cleaned, and the driving unit transmits the torque to the hose 110 and the winding piece 130 in turn, and the hose 110 and the winding piece 130 are rotated in the channel. When the hose 110 rotates, the friction piece 120 on its outer peripheral surface can scrape the granular or block impurities deposited on the inner wall of the channel; at the same time, the winding piece 130 can wrap the filamentary or mesh impurities in the channel around it, so as to clean the filamentary or mesh impurities in the channel. After cleaning, the cleaning device 100 can be taken out of the channel, and the cleaning device can be cleaned to a certain extent. After cleaning, the channel can also be cleaned for a second time. It is extremely convenient to use and greatly improves the cleaning effect of the channel.
[0041] Figure 1 A schematic diagram of the first overall structure of the channel cleaning device provided by an embodiment of the utility model; Figure 2 A second overall structural diagram of the channel cleaning device provided by an embodiment of the utility model; Figure 3 for Figure 1 The main view of Figure 4 for Figure 1 The enlarged view of point A in the middle. You can refer to Figures 1 to 4The embodiment of the utility model provides a channel cleaning device 100, including a hose 110, a friction member 120 and a winding member 130. The first end of the hose 110 forms a connecting portion, and the connecting portion is configured to be transmission-connected to a driving unit; the friction member 120 has a plurality of friction members 120, and the plurality of friction members 120 are arranged on the outer peripheral surface of the hose 110. The winding member 130 is arranged at the second end of the hose 110, and the winding member 130 is a curved elastic member; the driving unit is used to drive the hose 110 to rotate, so as to scrape the granular or block impurities deposited on the inner wall of the channel through the friction member 120 on the outer wall of the hose 110, and the winding member 130 is configured to rotate driven by the hose 110, so as to wind the filamentary or mesh impurities attached to the channel through the rotating winding member 130.
[0042] The driving unit may specifically be a motor, the connecting portion may be mounted on a rotating shaft of the motor, and the hose 110 rotates together with the rotating shaft of the motor.
[0043] When using the channel cleaning device 100 provided by the embodiment of the utility model to clean the air intake channel of the single crystal furnace, the first end of the hose 110 can be connected to the driving unit, and then the hose 110 and the wrapping piece 130 at the front end of the hose 110 are extended into the channel to be cleaned. Since the hose 110 and the wrapping piece 130 have a certain elasticity, they can be bent to a certain extent in the channel to adapt to the shape of the channel. After starting the driving unit, the driving unit sequentially transmits the torque to the hose 110 and the wrapping piece 130, and the hose 110 and the wrapping piece 130 rotate in the channel. When the hose 110 rotates, its outer The friction member 120 on the peripheral surface can scrape the granular or block impurities deposited on the inner wall of the channel, so that these granular or block impurities become dust, and these dust can be blown out of the single crystal furnace through the airflow; while the friction member 120 cleans the impurities on the inner wall of the channel, the winding member 130 rotating at the front end of the hose 110 can wind the filamentary or mesh impurities in the channel thereon, so as to clean the filamentary or mesh impurities in the channel. After cleaning, the cleaning device 100 can be taken out of the channel, and the cleaning device can be cleaned to a certain extent. After cleaning, the channel can also be cleaned for a second time, which is very convenient to use. The channel cleaning device 100 provided by the embodiment of the utility model can simultaneously clean different types of impurities in the channel through the friction member 120 and the winding member 130, and it is convenient to clean the cleaning device 100 after cleaning, thereby avoiding the deposition of impurities on the cleaning device 100 and greatly improving the cleaning effect of the channel.
[0044] In the above embodiment, the hose 110 may include a first hose 111 and a second hose 112, the first end of the first hose 111 is connected to the first end of the second hose 112, the second end of the first hose 111 forms a connection portion, the friction member 120 is disposed on the outer peripheral surface of the second hose 112, and the winding member 130 is disposed on the second end of the second hose 112. The hose 110 is formed by connecting the first hose 111 and the second hose 112, so that the cleaning device 100 can be easily extended into the channel. In a scenario, the second hose 112 and the winding member 130 can be first extended into the channel with cleaning, and then the first hose 111 and the second hose 112 are connected together, which can save operating space and avoid the cleaning device 100 being too long and inconvenient to operate.
[0045] In the above embodiment, a fixing block 140 may be further included, and the fixing block 140 is blocked at the second end of the second hose 112, and one end of the wrapping piece 130 is connected to the fixing block 140. By setting the fixing block 140, on the one hand, the second end of the hose 110 can be blocked to prevent impurities in the channel from entering the interior of the hose 110, which is inconvenient for subsequent cleaning. On the other hand, the fixing block 140 can also support the hose 110 to prevent excessive deformation of the hose 110 when it rotates. At the same time, the fixing block 140 can also serve as an installation base for the wrapping piece 130, which is convenient for setting the wrapping piece 130.
[0046] In the above embodiment, a flexible member may also be included, and the flexible member is wrapped around the outer periphery of the fixed block 140, and the flexible member is used to wipe the inner wall of the channel. It can be understood that the friction member 120 can process the granular or block impurities on the inner wall of the channel into dust, but the dust may adhere to the channel, and it is difficult to completely clean it only by the friction member 120 with a large roughness. At this time, the inner wall of the channel can be wiped by the flexible member on the outer periphery of the fixed block 140, so as to wipe the dust remaining on the inner wall of the channel. The flexible member can be made of cotton and linen fabrics, etc.
[0047] In the above embodiment, the winding member 130 may include a metal wire, which is in a spiral shape and bends and extends along the length direction of the hose 110. It can be understood that when the second hose 112 rotates under the drive of the driving unit, the spiral metal wire rotates together with the second hose 112, so that the filamentary or mesh impurities in the channel are wound around the metal wire, and due to the special structure of the metal wire, the impurities wound thereon are firmly connected and will not easily fall back into the channel, and the spiral structure formed by the metal wire itself occupies very little space, and a large number of filamentary or mesh impurities can be wound thereon, which has an excellent cleaning effect on filamentary and mesh impurities. Figures 1 to 3 As shown, there can be a plurality of metal wires, and the plurality of metal wires are interlaced and twisted together to form a winding structure with a more stable structure.
[0048] In the above embodiment, the first hose 111 can be a rubber hose, and the second hose 112 is a metal sleeve. It can be understood that the friction member 120 is arranged on the second hose 112. Therefore, in general, when cleaning the channel, the first hose 111 is partially or completely located outside the channel, so the requirements for the first hose 111 are relatively low. The use of a rubber hose for the first hose 111 can save costs on the one hand, and on the other hand, the rubber hose 110 has good toughness and elasticity, which is convenient for bending and connecting with the drive unit. Among them, the metal sleeve structure is similar to a water pipe for showering, which is formed by connecting multiple short metal pipes end to end. This metal sleeve can be bent to a certain extent to adapt to channels of different shapes, and also has good structural strength and wear resistance, and is very durable.
[0049] In the above embodiment, the first end of the first hose 111 may be trumpet-shaped, and the diameter of the second end of the first hose 111 is smaller than the diameter of the second hose 112. Specifically, the trumpet-shaped design of the first end of the first hose 111 can increase the strength of the connection between the first hose 111 and the second hose 112, and the smaller diameter of the second end of the first hose 111 than the diameter of the second hose 112 can prevent the first hose 111 from contacting the inner wall of the channel, thereby protecting the first hose 111.
[0050] like Figure 4 As shown, in the above embodiment, the friction member 120 may include a metal ring, and the outer peripheral surface of the second hose 112 has a plurality of mounting holes 1121, and at least one metal ring is hung in one mounting hole 1121. When the second hose 112 rotates in the channel, the metal ring on the outer wall of the second hose 112 is swung, thereby scraping and hitting the granular and block impurities deposited on the inner wall of the channel. The granular and block impurities deposited on the inner wall of the channel can be processed into dust by scraping and hitting the metal ring, and then the dust can be blown away from the channel by a blowing device. Since these metal rings are movable, they can change their own posture when facing a large external force, so the impact of the metal ring on the inner wall of the channel can be reduced to avoid damaging the inner wall of the channel.
[0051] In the above embodiment, the mounting holes 1121 can be evenly distributed in an array on the outer circumferential surface of the second hose 112, so that the channel can be cleaned more thoroughly, and the axial direction of the mounting holes 1121 can be consistent with the length direction of the hose 110. In this way, the rotation direction of the metal ring can be consistent with the rotation direction of the second hose 112, thereby improving the swinging force and flexibility of the metal ring.
[0052] In addition, an embodiment of the utility model further provides a single crystal furnace, including the channel cleaning device 100 in the above embodiment, the channel cleaning device 100 is used to clean the air intake channel of the single crystal furnace, the channel cleaning device 100 includes a hose 110, a friction member 120 and a winding member 130, the first end of the hose 110 forms a connecting portion, and the connecting portion is configured to be transmission-connected to a driving unit; there are multiple friction members 120, and the multiple friction members 120 are arranged on the outer peripheral surface of the hose 110, and the winding member 130 is arranged at the second end of the hose 110, and the winding member 130 is a curved elastic member; the driving unit is used to drive the hose 110 to rotate, so as to scrape the granular or block impurities deposited on the inner wall of the channel through the friction member 120 on the outer wall of the hose 110, and the winding member 130 is configured to rotate driven by the hose 110, so as to wind the filamentary or mesh impurities attached to the channel through the rotating winding member 130. By cleaning the air inlet passage of the single crystal furnace with the cleaning device 100, the cleanliness of the passage can be improved, thereby making the air flow in the passage smoother and improving the reliability of the single crystal furnace.
[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.
Claims
1. A channel cleaning device, characterized in that: It comprises a hose, a friction piece and a winding piece, wherein the first end of the hose forms a connecting portion, and the connecting portion is configured to be transmission-connected to a driving unit; There are a plurality of friction members, and the plurality of friction members are arranged on the outer peripheral surface of the hose. The wrapping member is arranged at the second end of the hose, and the wrapping member is a curved elastic member. The driving unit is used to drive the hose to rotate so as to scrape the granular or block impurities deposited on the inner wall of the channel through the friction member on the outer wall of the hose, and the winding member is configured to rotate under the drive of the hose so as to wind the filamentary or mesh impurities attached to the channel through the rotating winding member.
2. The channel cleaning device according to claim 1, characterized in that: The hose includes a first hose and a second hose, the first end of the first hose is connected to the first end of the second hose, the second end of the first hose forms the connecting portion, the friction member is arranged on the outer peripheral surface of the second hose, and the winding member is arranged on the second end of the second hose.
3. The channel cleaning device according to claim 2, characterized in that: It also includes a fixing block, which is sealed at the second end of the second hose, and one end of the wrapping piece is connected to the fixing block.
4. The channel cleaning device according to claim 3, characterized in that: It also includes a flexible member, which is wrapped around the outer periphery of the fixed block and is used to wipe the inner wall of the channel.
5. The channel cleaning device according to claim 4, characterized in that: The winding member comprises a metal wire, the metal wire is in a spiral shape, and the metal wire is bent and extended along the length direction of the hose.
6. The channel cleaning device according to any one of claims 2 to 5, characterized in that: The first hose is a rubber hose, and the second hose is a metal sleeve.
7. The channel cleaning device according to any one of claims 2 to 5, characterized in that: The first end of the first hose is trumpet-shaped, and the diameter of the second end of the first hose is smaller than the diameter of the second hose.
8. The channel cleaning device according to any one of claims 2 to 5, characterized in that: The friction member comprises a metal ring, and the outer peripheral surface of the second hose has a plurality of mounting holes, and at least one of the mounting holes is hung with at least one of the metal rings.
9. The channel cleaning device according to claim 8, characterized in that: The mounting holes are evenly distributed in an array on the outer circumferential surface of the second hose, and the axial direction of the mounting holes is consistent with the length direction of the hose.
10. A single crystal furnace, characterized in that: It comprises the channel cleaning device as described in any one of claims 1 to 9, and the channel cleaning device is used to clean the air inlet channel of the single crystal furnace.