Pipeline bubble discharging device of chemical supply equipment

Abstract

The utility model provides a pipeline bubble removing device of chemical supply equipment. The pipeline bubble removing device is used between a liquid supply machine table and a chemical process machine table and comprises a bubble removing container, a first liquid supply pipeline, a second liquid supply pipeline and a bubble removing pipeline. The bubble discharging container is defined with an upper direction and a lower direction and is provided with an internal space, and the internal space is divided into an upper part corresponding to the upper direction and a lower part corresponding to the lower direction; the first liquid supply pipeline and the second liquid supply pipeline are respectively connected between one position of the lower part and the liquid supply machine table and between the other position of the lower part and the chemical process machine table; the bubble discharging pipeline is connected to the upper part and is connected to the liquid supply machine table in a returning manner; therefore, the effect of really removing bubbles in the pipeline for the liquid medicine to flow can be achieved.

Description

Technical Field

[0001] The present application relates to the technical field related to bubbles in pipelines of chemical processes, and in particular to a pipeline bubble removal device for chemical supply equipment. Background Art

[0002] Nowadays, chemical supply equipment is often used in panel factories, wafer recycling, and semiconductor manufacturing, etc. Chemical supply equipment requires liquid medicine (such as acid) to carry out the required process (such as etching).

[0003] However, bubbles will accumulate in the supply pipeline of the chemical liquid. At this time, the process machine will misjudge the pipeline as empty when the chemical liquid is needed due to the bubbles, which will cause the machine to shut down or even the entire production line to shut down, resulting in huge production losses.

[0004] The existing practice is to only install a debubbler on the front-end supply machine itself, but the back-end pipelines used to connect to the process machines are not debubbled. Bubbles will still be generated in the pipelines due to various reasons, and the risk of machine or production line shutdown still exists.

[0005] Therefore, how to improve the above-mentioned deficiencies of the prior art is a major issue that the inventors of this application are eager to solve. Utility Model Content

[0006] In view of the above-mentioned technical problems and defects, the purpose of the present application is to provide a pipeline bubble removal device for chemical supply equipment, which can remove bubbles in the pipeline through which the drug solution flows.

[0007] In order to achieve the above-mentioned purpose, the present application provides a pipeline bubble removal device of a chemical supply equipment, which is used between a liquid supply machine and a chemical process machine, and the pipeline bubble removal device includes: at least one bubble removal container, the bubble removal container is defined as an upper direction according to the natural movement direction of bubbles and is defined as a lower direction opposite to the upper direction, the bubble removal container has an internal space, and the internal space is divided into an upper part corresponding to the upper direction and a lower part corresponding to the lower direction; at least one first liquid supply pipeline, the first liquid supply pipeline is connected between a place of the lower part and the liquid supply machine; at least one second liquid supply pipeline, the second liquid supply pipeline is connected between another place of the lower part and the chemical process machine; and at least one bubble removal pipeline, the bubble removal pipeline is connected to the upper part and is connected back to the liquid supply machine.

[0008] Optionally, the upper portion has a cover body facing upward, and the bubble exhaust pipeline is connected to the cover body.

[0009] Optionally, the cover body is semicircular and is a half-circular cover protruding toward the upward direction, and the bubble discharge pipeline is connected to the semicircle center of the semicircular cover.

[0010] Optionally, the bubble discharge container is defined as a longitudinal direction with the upper direction and the lower direction and has a transverse direction perpendicular to the longitudinal direction, the bubble discharge pipeline is connected to the upper part along the longitudinal direction, and the first liquid supply pipeline and the second liquid supply pipeline are both connected to the lower part along the transverse direction.

[0011] Optionally, at least one control valve is further included, and the control valve is connected between the two ends of the bubble removal pipeline.

[0012] Optionally, the bubble removal container, the first liquid supply pipeline, the second liquid supply pipeline, the bubble removal pipeline and the control valve are all provided in plurality, and the plurality of bubble removal containers and the plurality of control valves are all accommodated in a box body, and each of the first liquid supply pipelines, each of the second liquid supply pipelines and each of the bubble removal pipelines passes through the box body.

[0013] Optionally, at least one reflux box is further included, the bubble removal pipeline has two ends, and the reflux box is connected between the two ends of the bubble removal pipeline.

[0014] Compared with the prior art, the present application has the following effects: it can effectively eliminate bubbles in the pipeline for the flow of liquid medicine. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A partial plan view of the chemical supply equipment of this application;

[0016] Figure 2 It is a top view schematic diagram of the pipeline bubble removal device in the present application (the reflux box is omitted);

[0017] Figure 3 This application is based on Figure 2 A partial cross-sectional schematic diagram of a single bubble discharge container when viewed from the side is also provided.

[0018] Reference numerals: 100: pipeline bubble removal device;

[0019] 1: the first liquid supply pipeline;

[0020] 2: The second liquid supply pipeline;

[0021] 3: Bubble exhaust pipeline;

[0022] 4: bubble discharge container;

[0023] 40: internal space;

[0024] 41: upper part;

[0025] 411: cover body;

[0026] 4111: Semicircle center;

[0027] 42: lower part;

[0028] 5: Control valve;

[0029] 6: box body;

[0030] 7: Reflux box;

[0031] 800: Chemical process machine;

[0032] 900: liquid supply machine;

[0033] A: Upward direction;

[0034] B: Downward direction;

[0035] D1: vertical;

[0036] D2: Horizontal. DETAILED DESCRIPTION

[0037] The detailed description and technical contents of the present application are described below with reference to the accompanying drawings. However, the accompanying drawings are only provided for reference and explanation and are not intended to limit the present application.

[0038] The present application provides a pipeline bubble removal device for chemical supply equipment, such as Figure 1 As shown, the chemical supply equipment includes at least one chemical process machine 800 and a liquid supply machine 900. The liquid supply machine 900 can supply liquid to the chemical process machine 800 to perform the required process. The pipeline degassing device 100 in the present application is connected between the liquid supply machine 900 and the chemical process machine 800 to remove bubbles in the pipeline before the liquid enters the chemical process machine 800.

[0039] like Figures 1 to 3 As shown, the pipeline bubble removal device 100 includes: at least one first liquid supply pipeline 1, at least one second liquid supply pipeline 2, at least one bubble removal pipeline 3 and at least one bubble removal container 4.

[0040] The present application does not limit the number of the first liquid supply pipeline 1, the second liquid supply pipeline 2, the bubble discharge pipeline 3 and the bubble discharge container 4, which can be two as shown in the figure or one not shown in the figure. The following description will take one as an example.

[0041] The bubble discharge container 4 is defined as an upper direction A according to the natural movement direction of the bubbles, and is defined as a lower direction B opposite to the upper direction A. The bubble discharge container 4 has an internal space 40, and the internal space 40 is divided into an upper part 41 and a lower part 42, wherein the upper part 41 corresponds to the upper direction A, and the lower part 42 corresponds to the lower direction B. In detail, under the action of gravity, the bubbles will move from the surface to the direction opposite to the surface, and this movement direction is the natural movement direction, that is, the upper direction A; the internal space 40 is directly divided into an upper part 41 and a lower part 42, and the upper part 41 and the lower part 42 are as shown in FIG. Figure 3 No dividers are shown, but this application is not limited to this and the presence of dividers is also acceptable.

[0042] One end of the first liquid supply line 1 is connected to a point of the lower part 42, and the other end is connected to the liquid supply machine 900; one end of the second liquid supply line 2 is connected to another point of the lower part 42, and the other end is connected to the chemical process machine 800; therefore, the bubble removal container 4 is connected between the first liquid supply line 1 and the second liquid supply line 2. One end of the bubble removal line 3 is connected to the upper part 41, and the other end is connected back to the liquid supply machine 900 to return the liquid containing bubbles to the liquid supply machine 900 for recycling.

[0043] It should be noted that the one point and the other point of the lower portion 42 may be opposite to each other as shown in the figure, or may not be opposite to each other (not shown in the figure), and the present application does not limit this.

[0044] By this, Figure 3 And with Figure 1 and Figure 2 As shown, the liquid medicine flowing from the first liquid supply pipeline 1 to the second liquid supply pipeline 2 will pass through the lower portion 42 of the bubble removal container 4. Once bubbles are generated in the liquid medicine flowing into the internal space 40, they will move from the lower portion 42 to the upper portion 41 according to the upward direction A and accumulate on the inner top wall (component symbols are not marked) of the upper portion 41 of the bubble removal container 4. At this time, since the bubble removal pipeline 3 is connected here, the accumulated bubbles can be drawn away, so that the liquid medicine output to the chemical process machine 800 through the second liquid supply pipeline 2 no longer has bubbles. Therefore, the pipeline bubble removal device 100 of the present application does have the effect of removing bubbles in the pipeline.

[0045] In order to allow the bubbles in the bubble discharge container 4 to be accumulated smoothly on the inner top wall of the upper portion 41, the inner top wall of the upper portion 41 and the inner bottom wall (not marked with element symbols) of the lower portion 42 must be as follows: Figure 3 As shown, there is an appropriate distance so that even if the liquid level of the liquid increases in the internal space 40 due to different inlet and outlet flow rates or other reasons, some space can be retained between the inner top wall and the liquid level.

[0046] Specifically, the upper portion 41 has a cover 411, the bubble discharge pipe 3 is connected to the cover 411, and the cover 411 has the aforementioned inner top wall (without element symbol). Figure 3 As shown, the cover body 411 can be a semicircular cover that is semicircular and bulges upward in the direction A, and the bubble removal pipeline 3 is connected to the semicircular center 4111 of the semicircular cover. In this way, even if bubbles accumulate around the inner top wall at the beginning, because the cover body 411 is a semicircular cover, the bubbles can be concentrated toward the semicircular center 4111 along the arc-shaped concave inner top wall, and thus can be more easily sucked out by the bubble removal pipeline 3 and removed.

[0047] It should be noted that if Figure 3 As shown, the bubble discharge container 4 is further defined as a longitudinal direction D1 according to the upper direction A and the lower direction B, and is defined as a transverse direction D2 perpendicular to the longitudinal direction D1. In other words, the upper direction A and the lower direction B both belong to the longitudinal direction D1. The bubble discharge pipeline 3 is connected to the upper part 41 along the longitudinal direction D1 corresponding to the inner top wall, and the first liquid supply pipeline 1 and the second liquid supply pipeline 2 are both connected to the lower part 42 along the transverse direction D2. Specifically, the first liquid supply pipeline 1, the second liquid supply pipeline 2, the bubble discharge pipeline 3 and the bubble discharge container 4 are connected to each other in a substantially inverted T shape (see Figure 3 ).

[0048] like Figures 1 to 3 As shown, the pipeline degassing device 100 of the present application may also include at least one control valve 5. The control valve 5 is connected to the degassing pipeline 3 and is located between the degassing container 4 and the chemical process machine 800, so as to use the control valve 5 to control the flow of the liquid medicine, which may be automatic control or manual control, and the present application does not limit this.

[0049] In addition, if Figure 1 As shown, the pipeline degassing device 100 of the present application may also include at least one reflux box 7. The reflux box 7 is connected between the two ends of the degassing pipeline 3 and is located between the chemical process machine 800 and the liquid supply machine 900, so as to utilize the reflux box 7 to recover the liquid containing bubbles, and finally allow the liquid containing bubbles to flow back to the liquid supply machine 900 for recycling and reuse.

[0050] like Figure 1 and Figure 2 As shown, the pipeline bubble discharge device 100 of the present application may also include a box body 6, the bubble discharge container 4 and the control valve 5 are both accommodated in the box body 6, and the first liquid supply pipeline 1, the second liquid supply pipeline 2 and the bubble discharge pipeline 3 are all connected through the box body 6. Of course, you can also refer to Figure 2 As shown, an inner pipeline (not marked with component symbols) is first connected inside the box body 6, and corresponding connection holes or joints are set outside the box body 6. When the pipeline bubble removal device 100 is installed, most of the outer pipelines (not marked with component symbols) are connected to the corresponding connection holes or joints.

[0051] Still Figure 1 and Figure 2 As shown, the first liquid supply pipeline 1, the second liquid supply pipeline 2, the bubble discharge pipeline 3, the bubble discharge container 4 and the control valve 5 can be set to multiple. As shown in the figure, they are all set to two, and the number of settings can be determined according to actual needs.

[0052] In summary, the pipeline degassing device of the chemical supply equipment of the present application can indeed achieve the expected purpose and effect of use, and can solve the deficiencies of the prior art, so a patent application is filed.

[0053] The above description is only the preferred embodiment of the present application, and does not limit the scope of patent protection of the present application. Therefore, all equivalent structural changes made by using the description and drawings of the present application are also included in the scope of rights of the present application and are hereby stated.

Claims

1. A pipeline degassing device for chemical supply equipment, used between a liquid supply machine and a chemical process machine, characterized in that: The pipeline bubble removal device comprises: At least one bubble discharge container, the bubble discharge container is defined as an upper direction according to the natural movement direction of bubbles and is defined as a lower direction opposite to the upper direction, the bubble discharge container has an internal space, and the internal space is divided into an upper part corresponding to the upper direction and a lower part corresponding to the lower direction; at least one first liquid supply pipeline, the first liquid supply pipeline being connected between a point of the lower portion and the liquid supply machine; at least one second liquid supply pipeline, the second liquid supply pipeline being connected between another location of the lower portion and the chemical process machine; and At least one bubble discharge pipeline is connected to the upper portion and is connected back to the liquid supply machine.

2. The pipeline degassing device of the chemical supply equipment as claimed in claim 1, characterized in that: The upper part has a cover body facing the upward direction, and the bubble discharge pipeline is connected to the cover body.

3. The pipeline debubbling device of the chemical supply equipment as claimed in claim 2, characterized in that: The cover body is semicircular and is a half-circle cover protruding toward the upward direction, and the bubble discharge pipeline is connected to the semicircle center of the semicircle cover.

4. The pipeline degassing device of the chemical supply equipment as claimed in claim 1, characterized in that: The bubble discharge container is defined as a longitudinal direction by the upper direction and the lower direction and defines a transverse direction perpendicular to the longitudinal direction, the bubble discharge pipeline is connected to the upper part along the longitudinal direction, and the first liquid supply pipeline and the second liquid supply pipeline are both connected to the lower part along the transverse direction.

5. The pipeline debubbling device of the chemical supply equipment as claimed in claim 1, characterized in that: It also includes at least one control valve, which is connected between the two ends of the bubble discharge pipeline.

6. The pipeline debubbling device of the chemical supply equipment as claimed in claim 5, characterized in that: The bubble discharge container, the first liquid supply pipeline, the second liquid supply pipeline, the bubble discharge pipeline and the control valve are all provided in plurality, and the plurality of bubble discharge containers and the plurality of control valves are all accommodated in a box body, and each of the first liquid supply pipelines, each of the second liquid supply pipelines and each of the bubble discharge pipelines passes through the box body.

7. The pipeline degassing device of the chemical supply equipment as claimed in claim 1, characterized in that: It also includes at least one reflux box. The bubble removal pipeline has two ends, and the reflux box is connected between the two ends of the bubble removal pipeline.

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