Liquid supply system

Abstract

The utility model belongs to the technical field of wafer cleaning, and particularly relates to a liquid supply system which comprises a heating tank, a main heater and a temperature sensor are arranged in the heating tank, the top of the heating tank is provided with a heating water inlet, an air inlet and an air outlet, and the bottom of the heating tank is provided with a heating water outlet; an auxiliary heater and a temperature sensor are arranged in the heat preservation tank, a heat preservation water inlet is formed in the top of the heat preservation tank, a heat preservation water outlet is formed in the side wall of the heat preservation tank, the heat preservation water inlet is communicated with the heating water inlet through a pipeline, and a pneumatic valve is arranged on the pipeline; the air inlet is suitable for pressurizing the heating tank; the main heater completes heating of a medium in the heating tank, and the auxiliary heater completes heat preservation of the medium in the heat preservation tank; the heating tank can be pressurized through the air inlet, the upper temperature limit of the medium is increased, and compared with normal-pressure heating, the medium can absorb more energy.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer cleaning, and in particular relates to a liquid supply system. Background Art

[0002] Wafers need to be cleaned during the production process, and the cleaning medium has different temperature requirements. The existing cleaning method is to set up a cleaning tank, set up a heater in the cleaning tank, add the cleaning medium into the cleaning tank, and directly heat the cleaning medium in the cleaning tank;

[0003] However, directly adding the medium into the cleaning tank will reduce the temperature of the original medium in the cleaning tank and affect the cleaning efficiency of the wafer. Utility Model Content

[0004] The utility model aims to provide an industrial system for reducing the temperature fluctuation of a cleaning medium in a cleaning tank.

[0005] In order to solve the above technical problems, the utility model provides a liquid supply system, including: a heating tank, wherein a main heater and a temperature sensor are arranged in the heating tank, a heating water inlet, an air inlet and an exhaust port are arranged on the top of the heating tank, and a heating water outlet is arranged on the bottom of the heating tank; an insulation tank, wherein an auxiliary heater and a temperature sensor are arranged in the insulation tank, a insulation water inlet is arranged on the top of the insulation tank, and an insulation water outlet is arranged on the side wall of the insulation tank, the insulation water inlet is connected to the heating water inlet through a pipeline, and a pneumatic valve is arranged on the pipeline, and the air inlet is suitable for pressurizing the heating tank.

[0006] Preferably, the exhaust port is connected to the outside through a pipeline, and a pneumatic valve is provided on the pipeline.

[0007] Preferably, a pressure relief pipeline is connected to the pipeline connected to the exhaust port, a pressure relief valve is arranged on the pressure relief pipeline, and two ends of the pressure relief pipeline are respectively connected to the front end and the rear end of the pneumatic valve on the pipeline of the exhaust port.

[0008] Preferably, a pressure sensor is provided on the pressure relief pipeline.

[0009] Preferably, the air inlet is connected to an air source via a pipeline, and a pneumatic valve is provided on the pipeline.

[0010] Preferably, a liquid level sensor is provided on the side wall of the heating tank.

[0011] Preferably, the side wall of the heating tank is provided with an overflow port, the overflow port is connected to the outside through a pipeline, and a pneumatic valve is provided on the pipeline.

[0012] Preferably, the heat-insulating water outlet is connected to the cleaning tank through a pipeline, and a liquid resistance meter is provided on the pipeline.

[0013] Preferably, a liquid level sensor is provided in the insulation tank.

[0014] Preferably, a waste outlet is provided at the bottom of the heat preservation tank, the waste outlet is connected to the outside through a pipeline, and a pneumatic valve is provided on the pipeline.

[0015] Preferably, a liquid replenishing port is provided at the bottom of the heat preservation tank.

[0016] The beneficial effects of the utility model are:

[0017] 1. Heat the medium by setting up a heating tank, and store the heated medium in the insulation tank for insulation. When the medium needs to be added to the cleaning tank, directly add the medium in the insulation tank.

[0018] 2. The main heater completes the heating of the medium in the heating tank, and the auxiliary heater completes the insulation of the medium in the insulation tank;

[0019] 3. The heating tank can be pressurized through the air inlet to increase the upper temperature limit of the medium, which can make the medium absorb more energy compared to normal pressure heating.

[0020] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by implementing the present invention.

[0021] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is a stereogram of a preferred embodiment of the liquid supply system of the utility model.

[0024] In the figure:

[0025] 1. Heating tank;

[0026] 11. Main heater; 12. Heating water inlet; 13. Air inlet; 14. Air outlet; 15. Heating water outlet; 16. Pressure relief pipeline; 17. Pressure relief valve; 18. Overflow port;

[0027] 2. Insulation tank;

[0028] 21. Auxiliary heater; 22. Insulation water inlet; 23. Insulation water outlet; 24. Liquid resistance meter; 25. Waste outlet; 26. Liquid replenishment port;

[0029] 3. Temperature sensor;

[0030] 4. Pneumatic valve;

[0031] 5. Pressure sensor;

[0032] 6. Liquid level sensor. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] Embodiment 1, as Figure 1 As shown, a liquid supply system of this embodiment includes: a heating tank 1, wherein a main heater 11 and a temperature sensor 3 are arranged in the heating tank 1, a heating water inlet 12, an air inlet 13 and an exhaust port 14 are arranged on the top of the heating tank 1, and a heating water outlet 15 is arranged on the bottom of the heating tank 1; an insulation tank 2, wherein a secondary heater 21 and a temperature sensor 3 are arranged in the insulation tank 2, a insulation water inlet 22 is arranged on the top of the insulation tank 2, and an insulation water outlet 23 is arranged on the side wall of the insulation tank 2, the insulation water inlet 22 is connected to the heating water inlet 12 through a pipeline, and the pipeline A pneumatic valve 4 is arranged on the road, and the air inlet 13 is suitable for pressurizing the heating tank 1; in short, a heating tank 1 is arranged to heat the medium, and the heated medium is stored in the insulation tank 2 for insulation, and when the medium needs to be added to the cleaning tank, the medium in the insulation tank 2 is directly added; further, the main heater 11 completes the heating of the medium in the heating tank 1, and the auxiliary heater 21 completes the insulation of the medium in the insulation tank 2; further, the heating tank 1 can be pressurized through the air inlet 13 to increase the upper temperature limit of the medium, and the medium can absorb more energy compared with normal pressure heating.

[0035] The exhaust port 14 is connected to the outside through a pipeline, and a pneumatic valve 4 is provided on the pipeline; in short, the heating tank 1 can be depressurized through the exhaust port 14, and when the heating water inlet 12 is taking in liquid, the pneumatic valve 4 on the pipeline of the exhaust port 14 is always open to balance the pressure and facilitate the addition of the medium.

[0036] A pressure relief pipeline 16 is connected to the pipeline connected to the exhaust port 14, and a pressure relief valve 17 is arranged on the pressure relief pipeline 16, and the two ends of the pressure relief pipeline 16 are respectively connected to the front end and the rear end of the pneumatic valve 4 on the pipeline of the exhaust port 14; in short, one end of the pressure relief pipeline 16 is connected to the front end of the pneumatic valve 4 on the pipeline of the exhaust port 14, so that the front end of the pressure relief valve 17 can be equal to the pressure in the heating tank 1. When the pressure in the heating tank 1 is too high, the pressure can be released directly through the pressure relief valve 17.

[0037] The pressure relief pipeline 16 is provided with a pressure sensor 5 ; in short, the pressure in the heating tank 1 can be detected in real time through the pressure sensor 5 .

[0038] The air inlet 13 is connected to the air source through a pipeline, and a pneumatic valve 4 is provided on the pipeline; in short, the start and stop of air intake can be controlled by the pneumatic valve 4 on the pipeline of the air inlet 13 .

[0039] The side wall of the heating tank 1 is provided with a liquid level sensor 6 ; in short, the liquid level in the heating tank 1 can be detected by the liquid level sensor 6 .

[0040] The side wall of the heating tank 1 is provided with an overflow port 18 , which is connected to the outside through a pipeline, and a pneumatic valve 4 is provided on the pipeline; in short, the heating tank 1 can overflow through the overflow port 18 to avoid excessive medium in the heating tank 1 .

[0041] The heat-insulating water outlet 23 is connected to the cleaning tank through a pipeline, and a liquid resistance meter 24 is arranged on the pipeline; in short, the resistance value of the cleaning medium can be detected by the liquid resistance meter 24.

[0042] A liquid level sensor 6 is disposed in the insulation tank 2; in short, the liquid level sensor 6 can ensure that the medium level in the insulation tank 2 is normal, thereby preventing the insulation tank 2 from having too little medium and being unable to supply liquid to the cleaning tank.

[0043] A waste outlet 25 is provided at the bottom of the insulation tank 2 , and the waste outlet 25 is connected to the outside through a pipeline, and a pneumatic valve 4 is provided on the pipeline; in short, the medium in the insulation tank 2 can be discharged and replaced through the waste outlet 25 .

[0044] The bottom of the insulation tank 2 is provided with a liquid replenishing port 26; when the insulation tank 2 is initially provided with liquid, and when the heating tank 1 fails and cannot supply liquid to the insulation tank 2, the insulation tank 2 can be supplied with liquid through the liquid replenishing port 26;

[0045] The pneumatic valve 4 in the present application is an electrically controlled pneumatic valve 4 , which is electrically connected to the central control machine and controlled by the central control machine; and each sensor is electrically connected to the central control machine respectively to input each information into the central control machine.

[0046] All devices (parts without specific structure) selected in this application are universal standard parts or parts known to those skilled in the art, and their structures and principles can be known by those skilled in the art through technical manuals or conventional experimental methods. In addition, the software programs involved in this application are all prior art, and this application does not involve any improvement to the software programs.

[0047] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0048] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0049] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A liquid supply system, characterized in that: include: A heating tank (1), wherein a main heater (11) and a temperature sensor (3) are arranged in the heating tank (1), a heating water inlet (12), an air inlet (13) and an air outlet (14) are arranged at the top of the heating tank (1), and a heating water outlet (15) is arranged at the bottom of the heating tank (1); A heat preservation tank (2), wherein a secondary heater (21) and a temperature sensor (3) are arranged in the heat preservation tank (2), a heat preservation water inlet (22) is arranged at the top of the heat preservation tank (2), a heat preservation water outlet (23) is arranged at the side wall of the heat preservation tank (2), the heat preservation water inlet (22) is connected to the heating water inlet (12) via a pipeline, and a pneumatic valve (4) is arranged on the pipeline, and The air inlet (13) is suitable for pressurizing the heating tank (1).

2. The liquid supply system according to claim 1, characterized in that: The exhaust port (14) is in communication with the outside via a pipeline, and a pneumatic valve (4) is provided on the pipeline.

3. The liquid supply system according to claim 2, characterized in that: A pressure relief pipeline (16) is connected to the pipeline connected to the exhaust port (14), a pressure relief valve (17) is provided on the pressure relief pipeline (16), and two ends of the pressure relief pipeline (16) are respectively connected to the front end and the rear end of the pneumatic valve (4) on the pipeline of the exhaust port (14).

4. The liquid supply system according to claim 3, characterized in that: The pressure relief pipeline (16) is provided with a pressure sensor (5).

5. The liquid supply system according to claim 1, characterized in that: The air inlet (13) is connected to an air source via a pipeline, and a pneumatic valve (4) is provided on the pipeline.

6. The liquid supply system according to claim 1, characterized in that: A liquid level sensor (6) is provided on the side wall of the heating tank (1).

7. The liquid supply system according to claim 1, characterized in that: An overflow port (18) is provided on the side wall of the heating tank (1); the overflow port (18) is connected to the outside through a pipeline, and a pneumatic valve (4) is provided on the pipeline.

8. The liquid supply system according to claim 1, characterized in that: The heat-insulating water outlet (23) is connected to the cleaning tank via a pipeline, and a liquid resistance meter (24) is provided on the pipeline.

9. The liquid supply system according to claim 8, characterized in that: A liquid level sensor (6) is arranged in the heat preservation tank (2).

10. The liquid supply system according to claim 9, characterized in that: The bottom of the heat preservation tank (2) is provided with a waste discharge port (25), the waste discharge port (25) is connected to the outside through a pipeline, and a pneumatic valve (4) is provided on the pipeline.

11. The liquid supply system according to claim 10, characterized in that: The bottom of the heat preservation tank (2) is provided with a liquid replenishing port (26).

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