Auxiliary heating mechanism and reaction device

Abstract

The utility model provides an auxiliary heating mechanism and a reaction device, the auxiliary heating mechanism is arranged in a reaction furnace, and the auxiliary heating mechanism comprises an auxiliary heating pipe; the supporting sleeve is arranged on the auxiliary heat pipe in a sleeving mode, a radiation opening is formed in the supporting sleeve, and the radiation opening is used for enabling heat generated by the auxiliary heat pipe to be radiated out of the supporting sleeve; the supporting sleeve is used for being connected with a reacting furnace. According to the auxiliary heating mechanism and the reaction device, in the process that the auxiliary heating pipe generates heat, the supporting sleeve can bear the weight in the auxiliary heating pipe through the structural strength of the supporting sleeve so as to support the auxiliary heating pipe. In this way, the probability that the auxiliary heat pipe is broken due to the fact that the auxiliary heat pipe cannot bear the weight of the auxiliary heat pipe can be reduced by strengthening supporting of the auxiliary heat pipe, and the service life of the auxiliary heat pipe can be prolonged.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic and semiconductor product processing, and in particular to an auxiliary heating mechanism and a reaction device. Background Art

[0002] In the process of photovoltaic and semiconductor product production, sheet materials need to be heated in a reactor and then subjected to coating processing. The electric heating wires arranged around the reactor wall and the auxiliary heating pipes arranged in the reactor can heat the sheet materials in the reactor.

[0003] The two ends of the auxiliary heating tube can be connected to the two ends of the reactor, but the tube body of the auxiliary heating tube lacks support, resulting in the auxiliary heating tube breaking after a period of use due to the inability of the structural strength to support the weight of the auxiliary heating tube, resulting in a poor service life of the auxiliary heating tube. Utility Model Content

[0004] In view of the above, it is necessary to provide an auxiliary heating mechanism and a reaction device to solve the above defects.

[0005] In the first aspect, an embodiment of the present application provides an auxiliary heating mechanism, which is arranged in a reaction furnace, and the auxiliary heating mechanism includes: an auxiliary heating pipe; a support sleeve, which is arranged on the auxiliary heating pipe, and a radiation port is opened on the support sleeve, and the radiation port is used to radiate the heat generated by the auxiliary heating pipe to the outside of the support sleeve; the support sleeve is used to be connected to the reaction furnace.

[0006] Optionally, the support sleeve includes: a sleeve portion, the radiation port is opened on the peripheral wall of the sleeve portion, and the sleeve portion is used to be sleeved on the auxiliary heat pipe; a support portion, the support portion is connected to the inner wall of the radiation port, the support portion is used to partially block the radiation port and divide the radiation port into multiple sub-ports, the multiple sub-ports are spaced apart in the length direction of the sleeve portion, and the support portion is used to stop the auxiliary heat pipe.

[0007] Optionally, the auxiliary heating mechanism further includes: a receiving seat, the receiving seat is used to be connected to one end of the reaction furnace in the length direction, and the receiving seat is used to receive the supporting sleeve to achieve the receiving of the auxiliary heating pipe.

[0008] Optionally, a receiving groove is provided on the receiving seat, and the receiving groove is used to accommodate one end of the support sleeve in the length direction, and the side wall of the receiving groove is used to stop the support sleeve to limit the movement of the support sleeve and the auxiliary heat pipe.

[0009] Optionally, the receiving groove passes through the receiving seat along the length direction of the support sleeve, and the auxiliary heating mechanism also includes: a blocking member, which is connected to the receiving seat and is located at one end of the receiving seat in the length direction of the support sleeve, and the height of the blocking member is less than the wall thickness of the support sleeve. The blocking member is used to partially block the side of the receiving seat that is penetrated, and the blocking member is used to stop the support sleeve to limit the movement of the support sleeve in the length direction.

[0010] Optionally, the auxiliary heating mechanism further includes: a rotation limiting clamp connected to the receiving seat, and the rotation limiting clamp is used to cooperate with the receiving seat to clamp the support sleeve to limit the rotation of the support sleeve.

[0011] Optionally, a reflective layer is provided on the inner wall of the support sleeve, and the reflective layer is used to reflect the heat generated by the auxiliary heat pipe so that the reflected heat is radiated to the outside of the support sleeve through the radiation port.

[0012] Optionally, the auxiliary heat pipe includes: a heating wire, the heating wire is used to be energized and generate heat; a pipe sleeve, the pipe sleeve is sleeved on the heating wire, and the supporting sleeve is sleeved on the pipe sleeve.

[0013] In a second aspect, an embodiment of the present application provides a reaction device, comprising: a reaction furnace; and an auxiliary heating mechanism such as any of the above items, wherein the auxiliary heating mechanism is disposed in the reaction furnace.

[0014] Optionally, the reaction furnace includes: a furnace tube, the auxiliary heating mechanism is arranged in the furnace tube; two flanges, the two flanges are respectively arranged at both ends of the furnace tube, and both ends of the support rod of the auxiliary heating mechanism are respectively connected to the two flanges.

[0015] Through the auxiliary heat mechanism and reaction device provided by the present application, in the process of the auxiliary heat pipe generating heat, the support sleeve can bear the weight in the auxiliary heat pipe through its own structural strength to support the auxiliary heat pipe. In this way, by strengthening the support for the auxiliary heat pipe, the probability of the auxiliary heat pipe breaking due to being unable to bear its own weight can be reduced, and the service life of the auxiliary heat pipe can be increased. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the partial structure of the reaction device in the embodiment of the present application.

[0017] Figure 2 It is a schematic diagram of the partial structure of the auxiliary heating mechanism in the embodiment of the present application.

[0018] Figure 3 It is a cross-sectional view of the auxiliary heat pipe and the support sleeve in the embodiment of the present application.

[0019] Figure 4 yes Figure 1 Enlarged view of IV in the middle.

[0020] Figure 5 It is a schematic diagram of the structure of the receiving seat in the embodiment of the present application.

[0021] Description of main component symbols:

[0022] 100. reaction device; 101. flange; 102. auxiliary heating mechanism; 10. auxiliary heating pipe; 11. pipe sleeve; 12. heating wire; 20. support sleeve; 21. radiation port; 22. sleeve portion; 23. support portion; 30. reflection layer; 40. receiving seat; 41. receiving groove; 42. blocking member; 50. rotation limiting clamp. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0024] In the present application, the term "plurality" refers to two or more. In addition, it should be understood that in the description of the present application, the terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0025] In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0026] See also Figure 1 , Figure 1 A reaction device 100 provided by the present application is shown. The reaction device 100 can accommodate sheet materials and perform coating processing on the sheet materials.

[0027] In the embodiments of the present application, the type of sheet material is not specifically limited. For example, the sheet material may be, but is not limited to, a silicon sheet, a silicon carbide sheet, a wafer, and the like.

[0028] In the embodiments of the present application, there is no specific limitation on the principle of coating the sheet material by the reaction device 100. For example, the reaction device 100 may perform a plasma enhanced chemical vapor deposition (PECVD) process to coat the sheet material.

[0029] In an embodiment of the present application, the reaction device 100 may include a reaction furnace. The length direction of the reaction furnace may be defined as a first direction, the width direction as a second direction, and the height direction as a third direction. For example, the first direction may be as follows: Figure 1 The X direction and its reverse direction shown, the second direction can be as follows Figure 1 The Y direction and its reverse direction shown, the third direction can be as follows Figure 1 The Z direction and its opposite direction are shown.

[0030] The reaction furnace may include a furnace tube (not shown) and two flanges 101. The furnace tube extends in a first direction, and is a tube body with two ends in the first direction passing through. One flange 101 is fixedly connected to one end of the furnace tube in the first direction, and the other flange 101 is fixedly connected to the other end of the furnace tube in the first direction.

[0031] In the embodiments of the present application, there is no specific limitation on the fixing method during the fixed connection and fixed installation. For example, the fixing method may include, but is not limited to, welding fixing, bolt fixing, snap fixing, integral molding fixing, etc.

[0032] It can be understood that the reactor can also include two end covers (not shown). The two end covers correspond to the two flanges 101 one by one. Each flange 101 can be detachably connected to the corresponding end cover. The two end covers can achieve the closure of the two ends of the reactor.

[0033] In the embodiments of the present application, the detachable connection method is not specifically limited. For example, the detachable connection method may include bolt connection, snap connection, etc.

[0034] It is understood that the sheet material can enter the furnace tube through one end of the furnace tube. A heating mechanism can be arranged inside or outside the furnace tube, and the heating mechanism can be arranged around the furnace tube, and the heating mechanism can heat the sheet material.

[0035] In the embodiments of the present application, the type of the heating mechanism is not specifically limited. For example, the heating mechanism may be an electric heating wire, which can generate heat to heat the sheet material after being energized.

[0036] In the embodiment of the present application, the reaction furnace may further include an auxiliary heating mechanism 102 . The auxiliary heating mechanism 102 is disposed in the furnace tube and may be connected to the two flanges 101 .

[0037] Please also read Figure 2 and Figure 3 , the auxiliary heating mechanism 102 may include an auxiliary heating pipe 10 and a support sleeve 20. The auxiliary heating pipe 10 and the support sleeve 20 both extend in the first direction. The auxiliary heating pipe 10 can generate heat to increase the temperature inside the furnace pipe and heat the sheet material inside the furnace pipe. The support sleeve 20 is a sleeve with at least one end passing through. The support sleeve 20 is sleeved on the auxiliary heating pipe 10, that is, the auxiliary heating pipe 10 is located in the support sleeve 20. In the first direction, one end of the support sleeve 20 is connected to a flange 101, and the other end is connected to another flange 101. The support sleeve 20 is relatively fixed to the reactor by connecting with the two flanges 101.

[0038] A radiation port 21 is provided on the peripheral wall of the support sleeve 20, and the radiation port 21 is connected to the furnace tube. The radiation port 21 can expose part of the structure of the auxiliary heating tube 10, and the heat generated by the auxiliary heating tube 10 can be radiated to the outside of the support sleeve 20 through the radiation port 21, and radiated to the sheet material in the furnace tube, so as to heat the sheet material.

[0039] It can be understood that the support sleeve 20 connected to the two flanges 101 can support the auxiliary heat pipe 10, so that the auxiliary heat pipe 10 is relatively fixedly arranged in the furnace pipe; and the heat generated by the auxiliary heat pipe 10 can be transferred to the sheet material in the furnace pipe through the radiation port 21. Compared with the solution of directly supporting both ends of the auxiliary heat pipe 10 in the related art, the sleeve 20 of the auxiliary heat pipe 10 can make the support sleeve 20 bear the gravity of the auxiliary heat pipe 10, thereby strengthening the support of the auxiliary heat pipe 10 through the support sleeve 20, reducing the risk of the auxiliary heat pipe 10 breaking due to being unable to bear its own weight.

[0040] In the embodiments of the present application, the structure of the auxiliary heat pipe 10 is not specifically limited. For example, the auxiliary heat pipe 10 may include a pipe sleeve 11 and a heating wire 12. The pipe sleeve 11 is a hollow sleeve. The heating wire 12 is accommodated in the pipe sleeve 11 and is fixedly connected to the pipe sleeve 11. The heating wire 12 can generate heat after being energized.

[0041] In the embodiment of the present application, there is no specific limitation on the material of the tube sleeve 11. For example, the material of the tube sleeve 11 can be, but is not limited to, quartz.

[0042] In the embodiment of the present application, there is no specific limitation on the material of the support sleeve 20. For example, the material of the support sleeve 20 may be, but is not limited to, silicon carbide.

[0043] It can be understood that the radiation port 21 can be opened on the side of the support sleeve 20 facing the sheet material. For example, the support sleeve 20 can be located at the top of the furnace tube, and the sheet material can be located in the middle of the furnace tube in the third direction, that is, the height of the support sleeve 20 is greater than the height of the sheet material; the radiation port 21 can be opened at the bottom of the support sleeve 20.

[0044] It is understood that the number of the auxiliary heat pipes 10 can be one or more, and the embodiments of the present application are not limited to this. Figure 1 As shown, the number of the auxiliary heat pipes 10 may be three, and the three auxiliary heat pipes 10 may be arranged at intervals in the second direction.

[0045] In some cases, each support sleeve 20 may be provided with an auxiliary heat pipe 10, that is, the number of support sleeves 20 is equal to the number of auxiliary heat pipes 10. In other cases, a support sleeve 20 may be provided with multiple through grooves, and the multiple through grooves may be arranged at intervals in the second direction, and each through groove may accommodate an auxiliary heat pipe 10, that is, the number of support sleeves 20 may be less than the number of auxiliary heat pipes 10. The embodiments of the present application are not limited to this.

[0046] In some embodiments, each support sleeve 20 may include a sleeve portion 22 and a support portion 23. The sleeve portion 22 and the support portion 23 are integrally formed. The sleeve portion 22 is a cylindrical sleeve with at least one end passing through. The radiation port 21 is opened on one side of the sleeve portion 22. The auxiliary heat pipe 10 is accommodated in the corresponding sleeve portion 22. The support portion 23 is protruding from the inner wall of the radiation port 21 and extends along the circumferential direction of the sleeve portion 22. The support portion 23 can divide the radiation port 21 into a plurality of sub-ports. The plurality of sub-ports are spaced apart in the length direction of the sleeve portion 22 (i.e., the first direction). The support portion 23 can stop the auxiliary heat pipe 10 from the bottom to receive the tube body of the auxiliary heat pipe 10.

[0047] In the embodiment of the present application, there is no specific limitation on the number of the supporting parts 23. When the number of the supporting parts 23 is N, the number of the sub-ports on the supporting sleeve 20 can be N+1. Figure 2 As shown, each support sleeve 20 includes a support portion 23, and the support portion 23 is located in the middle of the radiation port 21, thereby dividing the radiation port 21 into two sub-ports.

[0048] It is understood that the sheet material can be loaded on a carrier, and then the carrier loaded with a plurality of sheet materials is moved into the furnace tube, and then the reaction furnace is operated to process the sheet material in the furnace tube. The carrier can be a quartz boat or a graphite boat.

[0049] Each furnace tube can accommodate multiple carriers, and when the furnace tube accommodates multiple carriers, the multiple carriers can be arranged in a first direction. The portion between the two ends of each carrier in the first direction is used to carry multiple sheet materials. The support portion 23 can be arranged corresponding to the end of the carrier in the first direction, that is, when the carrier is located in the furnace tube, the projection of each support portion 23 in the third direction can coincide with the projection of the end of a carrier in the third direction. In this way, the portion of the auxiliary heat pipe 10 blocked by the support portion 23 can correspond to the end position of the carrier that does not need to participate in the coating process. Compared with the situation where the portion of the auxiliary heat pipe 10 blocked by the support portion 23 corresponds to the position of the sheet material, the occurrence of uneven heating of the sheet material can be reduced, the efficiency of heating the sheet material can be improved, and thus the efficiency of the coating process of the sheet material can be improved.

[0050] In some embodiments, Figure 3As shown, the width of the auxiliary heat pipe 10 in the second direction is greater than the width B of the radiation port 21 in the second direction.

[0051] It can be understood that the sleeve 11 of the auxiliary heat pipe 10 can be a cylindrical sleeve, and the width A of the auxiliary heat pipe 10 in the second direction can be equal to the diameter of the sleeve 11. The width B of the radiation port 21 in the second direction is the distance between the two side walls of the radiation port 21 in the second direction. When the width B of the radiation port 21 is smaller than the width A of the auxiliary heat pipe 10, the side wall of the support sleeve 20 at a position close to the radiation port 21 can stop the auxiliary heat pipe 10, thereby cooperating with the support portion 23 to limit the movement of the auxiliary heat pipe 10, and reducing the probability of the auxiliary heat pipe 10 falling through the radiation port 21.

[0052] At the same time, under the limitation of the width of the radiation port 21, the auxiliary heating tube 10 forms a fan-shaped radiation area α through the radiation port 21, and the radiation area α can be directed toward the sheet material, so that the heat generated by the auxiliary heating tube 10 is gathered to the position in the furnace tube for placing the sheet material, thereby improving the heating efficiency of the sheet material.

[0053] In some embodiments, a reflective layer 30 may be provided on the inner wall of the support sleeve 20. The reflective layer 30 may reflect the heat generated by the auxiliary heat pipe 10 to the radiation port 21, so that the heat is radiated to the outside of the support sleeve 20 and to the sheet material through the radiation port 21.

[0054] It can be understood that the heat generated by the auxiliary heat pipe 10 can be radiated to the position where the radiation port 21 is not provided in the support sleeve 20, and this part of the heat cannot heat the sheet material without reflection. The reflective layer 30 can reflect the heat that was not originally radiated toward the sheet material to the sheet material through the radiation port 21, so as to reduce the waste of the heat generated by the auxiliary heat pipe 10 and improve the heating efficiency of the sheet material.

[0055] It can be understood that the reflective layer 30 can be disposed on the inner wall of the sleeve portion 22 instead of being disposed on the inner wall of the support portion 23 .

[0056] In the embodiment of the present application, the type of the reflective layer 30 is not specifically limited. For example, the reflective layer 30 can be a coating applied to the inner wall of the support sleeve 20, and the material of the reflective layer 30 can be, but is not limited to, ceramic. Exemplarily, the reflective layer 30 can be a white ceramic reflective coating applied to the inner wall of the support sleeve 20.

[0057] For another example, the reflective layer 30 may be a mirror reflective film fixedly connected to the inner wall of the support sleeve 20 , and the material of the reflective layer 30 may be, but is not limited to, aluminum alloy, steel alloy, and the like.

[0058] Please also read Figure 4 and Figure 5In some embodiments, the auxiliary heating mechanism 102 may further include a plurality of sockets 40. The socket 40 may be fixedly mounted on the flange 101, and at least one socket 40 may be fixedly mounted on each flange 101. A receiving groove 41 is provided on the socket 40. The receiving groove 41 may accommodate the end of the support sleeve 20 in the first direction, and the inner wall of the receiving groove 41 may stop against the support sleeve 20, thereby enabling the socket 40 to receive the auxiliary heating pipe 10. In this way, the support sleeve 20 and the auxiliary heating pipe 10 may be relatively fixedly connected to the two flanges 101, so that the support sleeve 20 and the auxiliary heating pipe 10 are relatively fixedly arranged in the furnace pipe.

[0059] It can be understood that the number of receiving grooves 41 can be equal to the number of auxiliary heat pipes 10, each receiving groove 41 can receive a corresponding support sleeve 20 or a unique partial structure of the support sleeve 20, and the inner wall of the receiving groove 41 can abut against the support sleeve 20 to limit the movement of the auxiliary heat pipe 10 and the support sleeve 20 in a direction perpendicular to the first direction (for example, in the second direction). In the embodiments of the present application, the number of receiving grooves 41 is not specifically limited.

[0060] In some cases, such as Figure 1 As shown, a receiving seat 40 may be provided on each flange 101, and a plurality of receiving grooves 41 may be provided on each receiving seat 40. The plurality of receiving grooves 41 are arranged at intervals in the second direction. The plurality of receiving grooves 41 correspond to the plurality of supporting sleeves 20 provided in the furnace tube one by one, and each receiving groove 41 may receive one end of the corresponding receiving sleeve, thereby realizing the receiving of the corresponding auxiliary heat pipe 10.

[0061] In other cases, a plurality of receiving seats 40 may be provided on each flange 101, and a receiving groove 41 may be provided on each receiving seat 40. The plurality of receiving seats 40 on the same flange 101 are arranged at intervals in the second direction. The plurality of receiving seats 40 on the same flange 101 correspond one-to-one to the plurality of supporting sleeves 20 provided in the furnace tube, and each receiving groove 41 may receive one end of the corresponding supporting sleeve 20, so that each receiving seat 40 can receive the corresponding auxiliary heat pipe 10.

[0062] In some other cases, a receiving seat 40 may be provided on each flange 101, and a plurality of receiving grooves 41 may be provided on each receiving seat 40. The plurality of receiving grooves 41 are arranged at intervals in the second direction. The support sleeve 20 provided in the furnace tube is sleeved on the plurality of auxiliary heat pipes 10, and the shape of the end of the support sleeve 20 is adapted to the side of each receiving seat 40 having the receiving groove 41 provided thereon, and the plurality of receiving grooves 41 can simultaneously receive one end of the same support sleeve 20, thereby realizing the reception of the plurality of auxiliary heat pipes 10 in the support sleeve 20.

[0063] In some embodiments, the receiving groove 41 can penetrate the receiving seat 40 in the first direction. A blocking member 42 is fixedly connected to the receiving seat 40. In this way, the blocking member 42 can block the movement of the support sleeve 20 in the first direction. On one flange 101, the blocking member 42 is located at one end of the corresponding receiving seat 40 away from the other flange 101 in the first direction. The blocking member 42 can be convexly arranged on the inner wall of the receiving groove 41 to partially block one side of the receiving groove 41 in the first direction. The blocking member 42 can stop the support sleeve 20, thereby limiting the movement of the support sleeve 20 in the first direction.

[0064] It can be understood that the number of the blocking members 42 can be equal to the number of the receiving grooves 41 , and a blocking member 42 can be protruded from the inner wall of each receiving groove 41 .

[0065] It can be understood that the height of the blocking member 42 in the third direction is less than or equal to the wall thickness of the support sleeve 20. In this way, the blocking member 42 can avoid the auxiliary heat pipe 10 while blocking the support sleeve 20, so that when the staff needs to inspect the auxiliary heat pipe 10, they can directly pull out the auxiliary heat pipe 10 from the support sleeve 20 without removing the support sleeve 20 from the receiving seat 40, which can improve the convenience of the staff.

[0066] Meanwhile, in some embodiments, each support sleeve 20 is sleeved on a corresponding auxiliary heat pipe 10. The auxiliary heat mechanism 102 may further include a rotation limiting clamp 50. The rotation limiting clamp 50 may be fixedly mounted on the corresponding receiving seat 40, and cooperate with the corresponding receiving seat 40 to clamp the support sleeve 20, thereby limiting the rotation of the support sleeve 20 through friction.

[0067] It can be understood that the rotation of the support sleeve 20 is limited by the rotation limit clamp 50 and the receiving seat 40, so that when the reactor is coating the sheet material, the radiation area can be maintained facing the sheet material, and the situation in which the direction of the radiation area α changes due to the rotation of the support sleeve 20 can be reduced, thereby improving the heating efficiency of the sheet material.

[0068] In some cases, the number of the rotation-limiting clips 50 may be less than the number of the sockets 40, and the socket 40 on one flange 101 is fixedly connected to the rotation-limiting clip 50, while the socket 40 on the other flange 101 is not connected to the rotation-limiting clip 50. In other cases, each socket 40 is fixedly connected to a rotation-limiting clip 50. The embodiments of the present application are not limited to this.

[0069] It is understandable that Figure 1 and Figure 4As shown, when only one of the receiving seats 40 on the flange 101 is connected to the rotation-limiting clip 50 to clamp one end of the support sleeve 20, the rotation-limiting clip 50 can cooperate with the blocking member 42 on the receiving seat 40 and the rotation-limiting clip 50 to limit the expansion of the support sleeve 20, so that the support sleeve 20 will only expand in one direction (for example, Figure 1 The support sleeve 20 is stretched in the opposite direction of the X direction shown in FIG. 2 , and after the support sleeve 20 is cooled, the end of the support sleeve 20 away from the rotation limiting clamp 50 returns to the position before expansion.

[0070] During the assembly process of the auxiliary heating mechanism 102 proposed in the embodiment of the present application, after the support sleeve 20 is received on the receiving seats 40 corresponding to the two flanges 101, the staff can rotate the support sleeve 20 so that the radiation port 21 faces the position in the furnace tube for placing the sheet material, and then fix the rotation limit clip 50 on the supporting seat to limit the rotation of the support sleeve 20. Then the staff can extend the auxiliary heating pipe 10 into the support sleeve 20 through one end of the support sleeve 20, so that the support sleeve 20 is sleeved on the corresponding auxiliary heating pipe 10, and the auxiliary heating pipe 10 is fixed in the furnace tube.

[0071] During the operation of the reaction device 100 and the auxiliary heat mechanism 102 proposed in the embodiment of the present application, part of the heat generated by the auxiliary heat pipe 10 is directly transferred to the outside of the support sleeve 20 through the radiation port 21, and the remaining part is reflected by the reflective layer 30 and then transferred to the outside of the support sleeve 20 through the radiation port 21. In the process of the auxiliary heat pipe 10 generating heat, the support sleeve 20 can bear the weight of the auxiliary heat pipe 10 through its own structural strength to achieve support for the auxiliary heat pipe 10. In this way, by strengthening the support for the auxiliary heat pipe 10, the probability of the auxiliary heat pipe 10 breaking due to being unable to bear its own weight can be reduced, and the service life of the auxiliary heat pipe 10 can be increased.

[0072] It is obvious to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or basic features of the present application. Therefore, no matter from which point of view, the above embodiments of the present application should be regarded as exemplary and non-restrictive, and the scope of the present application is defined by the attached claims rather than the above description, and therefore it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present application.

Claims

1. An auxiliary heating mechanism, arranged in a reaction furnace, characterized in that: The auxiliary heating mechanism comprises: Auxiliary heat pipe; A support sleeve, wherein the support sleeve is sleeved on the auxiliary heat pipe, and a radiation port is opened on the support sleeve, and the radiation port is used to radiate the heat generated by the auxiliary heat pipe to the outside of the support sleeve; the support sleeve is used to be connected to the reaction furnace.

2. The auxiliary heating mechanism according to claim 1, characterized in that: The support sleeve comprises: A sleeve portion, wherein the radiation port is provided on a peripheral wall of the sleeve portion, and the sleeve portion is used for being sleeved on the auxiliary heat pipe; A support portion is connected to the inner wall of the radiation port, the support portion is used to partially cover the radiation port and divide the radiation port into a plurality of sub-ports, the plurality of sub-ports are spaced apart in the length direction of the sleeve portion, and the support portion is used to stop the auxiliary heat pipe.

3. The auxiliary heating mechanism according to claim 1, characterized in that: The auxiliary heating mechanism also includes: A receiving seat, wherein the receiving seat is used to be connected to one end of the reaction furnace in the length direction, and the receiving seat is used to receive the supporting sleeve to achieve the reception of the auxiliary heat pipe.

4. The auxiliary heating mechanism according to claim 3, characterized in that: The receiving seat is provided with a receiving groove, and the receiving groove is used to accommodate one end of the support sleeve in the length direction. The side wall of the receiving groove is used to stop the support sleeve to limit the movement of the support sleeve and the auxiliary heat pipe.

5. The auxiliary heating mechanism according to claim 4, characterized in that: The receiving groove passes through the receiving seat along the length direction of the supporting sleeve, and the auxiliary heating mechanism further includes: A blocking member, which is connected to the receiving seat and is located at one end of the receiving seat in the length direction of the support sleeve. The height of the blocking member is less than the wall thickness of the support sleeve. The blocking member is used to partially block the side of the receiving seat that is penetrated. The blocking member is used to stop the support sleeve to limit the movement of the support sleeve in the length direction.

6. The auxiliary heating mechanism according to claim 3, characterized in that: The auxiliary heating mechanism also includes: A rotation limiting clamp is connected to the receiving seat, and is used to cooperate with the receiving seat to clamp the support sleeve to limit the rotation of the support sleeve.

7. The auxiliary heating mechanism according to claim 1, characterized in that: A reflective layer is arranged on the inner wall of the support sleeve, and the reflective layer is used to reflect the heat generated by the auxiliary heat pipe so that the reflected heat is radiated to the outside of the support sleeve through the radiation port.

8. The auxiliary heating mechanism according to claim 1, characterized in that: The auxiliary heat pipe comprises: A heating wire, the heating wire is used to be energized and generate heat; The pipe sleeve is sleeved on the heating wire, and the supporting sleeve is sleeved on the pipe sleeve.

9. A reaction device, characterized in that: include: Reactor; The auxiliary heating mechanism according to any one of claims 1 to 8, wherein the auxiliary heating mechanism is arranged in the reaction furnace.

10. The reaction device according to claim 9, characterized in that: The reactor comprises: A furnace tube, wherein the auxiliary heating mechanism is arranged in the furnace tube; Two flanges are respectively arranged at two ends of the furnace tube, and two ends of the support rod of the auxiliary heating mechanism are respectively connected to the two flanges.

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