Small cooling base for heating wire of LED epitaxial furnace

Abstract

The utility model belongs to the technical field of epitaxial furnaces, in particular to an LED epitaxial furnace heating wire small cooling base which comprises a base body, the top of the base body is fixedly connected with a first cooling water channel and a second cooling water channel, and the first cooling water channel and the second cooling water channel are both in an arc disc shape. The two ends of the first cooling water channel and the second cooling water channel are fixedly communicated with a water inlet pipe and a water outlet pipe respectively; the water inlet pipe and the water outlet pipe are arranged so that cooling water can be conveniently guided in and guided out, meanwhile, the fastening bolts are arranged so that the support can be conveniently fixed and detached, and the fixing buckles are arranged so that the water inlet pipe can be conveniently fixed. Through the arrangement of the first cooling water channel and the second cooling water channel which are uniformly distributed, the base can be uniformly and quickly cooled, so that the service life of the cooling base is effectively ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of epitaxial furnaces, in particular to a small cooling base for heating wires of an LED epitaxial furnace. Background Art

[0002] With the rapid development of the LED industry, the precision requirements of chips are getting higher and higher. In the LED production process, the epitaxial furnace is a very critical link.

[0003] The cooling base is an important component of the LED epitaxial furnace heating wire. In a vacuum environment, the temperature reaches over 1200 degrees, and cooling water is introduced in this high temperature environment to repeatedly perform hot and cold exchanges.

[0004] However, the cooling pipeline structure on the existing cooling base is not reasonable enough, and the cooling base cannot be cooled evenly, which easily causes cracks in some positions of the cooling base, thereby affecting the service life of the cooling base. Utility Model Content

[0005] The utility model aims to solve the problem that the cooling pipeline structure proposed in the above background technology is not reasonable enough and the cooling base cannot be cooled evenly, and proposes a small cooling base for heating wires of LED epitaxial furnace.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A small cooling base for heating wires of an LED epitaxial furnace comprises a base body, the top of which is fixedly connected with a first cooling water channel and a second cooling water channel, the first cooling water channel and the second cooling water channel are both in an arc-shaped disk shape, and the first cooling water channel and the second cooling water channel are respectively fixedly connected with a water inlet pipe and a water outlet pipe at both ends.

[0008] Preferably, the base body is provided with a plurality of fixing holes.

[0009] Preferably, the top of the base body is fixedly connected to a bracket via a plurality of fastening bolts, and a fixing buckle corresponding to the water inlet pipe is fixedly connected to the bracket.

[0010] Compared with the prior art, the utility model has the following beneficial effects:

[0011] 1. In the utility model, by setting the evenly distributed first cooling water channel and the second cooling water channel, the base can be cooled evenly and quickly, thereby effectively ensuring the service life of the cooling base;

[0012] 2. The setting of the water inlet pipe and the water outlet pipe can facilitate the introduction and export of cooling water. At the same time, the setting of the fastening bolts can facilitate the fixation and disassembly of the bracket, and the setting of the fixing buckle can facilitate the fixation of the water inlet pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a structural schematic diagram of a small cooling base for heating wires of an LED epitaxial furnace proposed by the utility model;

[0014] Figure 2 The utility model is a schematic diagram of the upward structure of a small cooling base for heating wires of an LED epitaxial furnace.

[0015] In the figure: 1 base body, 2 first cooling water channel, 3 second cooling water channel, 4 water inlet pipe, 5 water outlet pipe, 6 fixing hole, 7 fastening bolt, 8 bracket, 9 fixing buckle. DETAILED DESCRIPTION

[0016] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0017] Reference Figure 1-2 A small cooling base for heating wire of LED epitaxial furnace comprises a base body 1, a plurality of fixing holes 6 are arranged on the base body 1, and the top of the base body 1 is fixedly connected with a first cooling water channel 2 and a second cooling water channel 3 for cooling the base body 1;

[0018] In this embodiment, the first cooling water channel 2 and the second cooling water channel 3 are both in an arc-shaped disc shape, and both ends of the first cooling water channel 2 and the second cooling water channel 3 are respectively fixedly connected with a water inlet pipe 4 and a water outlet pipe 5 for introducing and exporting cooling water;

[0019] In this embodiment, the top of the base body 1 is fixedly connected to a bracket 8 by a plurality of fastening bolts 7 for setting a fixing buckle 9, and a fixing buckle 9 corresponding to the water inlet pipe 4 is fixedly connected to the bracket 8 to facilitate fixing the water inlet pipe 4.

[0020] In this embodiment, the provision of the water inlet pipe 4 and the water outlet pipe 5 can facilitate the introduction and discharge of cooling water. Meanwhile, the provision of the fastening bolts 7 can facilitate the fixing and disassembly of the bracket 8. The provision of the fixing buckle 9 can facilitate the fixing of the water inlet pipe 4.

[0021] In this embodiment, by providing the evenly distributed first cooling water channel 2 and the second cooling water channel 3, the base can be cooled evenly and quickly, thereby effectively ensuring the service life of the cooling base.

[0022] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A small cooling base for heating wires of an LED epitaxial furnace, comprising a base body (1), characterized in that: The top of the base body (1) is fixedly connected to a first cooling water channel (2) and a second cooling water channel (3); the first cooling water channel (2) and the second cooling water channel (3) are both in the shape of an arc disk; and the two ends of the first cooling water channel (2) and the second cooling water channel (3) are respectively fixedly connected to a water inlet pipe (4) and a water outlet pipe (5).

2. The small cooling base for heating wires of an LED epitaxial furnace according to claim 1, characterized in that: The base body (1) is provided with a plurality of fixing holes (6).

3. The small cooling base for heating wires of an LED epitaxial furnace according to claim 1, characterized in that: The top of the base body (1) is fixedly connected to a bracket (8) via a plurality of fastening bolts (7), and a fixing buckle (9) corresponding to the water inlet pipe (4) is fixedly connected to the bracket (8).

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