Lens clamping mechanism, optical system and semiconductor optical detection equipment

Abstract

The utility model belongs to the technical field of optical detection, and particularly relates to a lens clamping mechanism, an optical system and semiconductor optical detection equipment. The lens clamping mechanism comprises a support and an air floating module, wherein the support is provided with a channel; the air floating module is connected to the support and used for clamping the lens in the channel, and the outer circumferential wall of the lens and the inner circumferential wall of the channel are arranged at an interval. The optical system comprises a lens clamping mechanism and an air path control module, and the air path control module is used for controlling the air floating module to work, so that the lens is clamped in the channel of the support. And under the action of the air floatation module, the lens is suspended in the channel. Therefore, after the vibration transmitted by the bracket is buffered by the air floating module, the influence of the vibration on the lens is greatly reduced, and the stability of the optical system is improved.

Description

Technical Field

[0001] The present application belongs to the field of optical detection technology, and in particular, relates to a lens clamping mechanism, an optical system and a semiconductor optical detection device. Background Art

[0002] In semiconductor optical inspection equipment, multiple or single optical lenses are used in both the incident light path and the receiving light path. Optical lenses are generally an optical element made of transparent materials (such as glass, crystal, etc.). Optical lenses are the most basic optical elements that make up the optical system in semiconductor optical inspection equipment.

[0003] At present, there are three main existing methods for fixing optical lenses. First, the optical lens is pressed onto a fixed bracket using a spring pressure plate; second, the optical lens is bonded to the fixed bracket using hot melt adhesive; third, the optical lens is fixed with a lens sleeve and the lens sleeve is installed on the fixed bracket.

[0004] However, in the above three methods, the optical lens and the fixing bracket are all rigidly connected. When the fixing bracket vibrates, the vibration will be transmitted to the optical lens, thereby reducing the stability of the optical path. Utility Model Content

[0005] The present application provides a lens clamping mechanism, an optical system and a semiconductor optical detection device to solve the technical problem that in the existing lens fixing method, vibration is easily transmitted to the optical lens, thereby reducing the stability of the optical path.

[0006] According to one aspect of the present application, a lens clamping mechanism is provided, including a bracket and an air flotation module, wherein the bracket is provided with a channel; the air flotation module is connected to the bracket and is used to clamp the lens in the channel, and the outer peripheral wall of the lens is spaced apart from the inner peripheral wall of the channel.

[0007] In an optional solution of the present application, the air flotation module includes a plurality of air flotation units, and the plurality of air flotation units are arranged at intervals along the circumference of the channel.

[0008] In an optional solution of the present application, the flotation unit includes at least one airbag, which includes a telescopic sac and an air guide tube; the telescopic sac is arranged in the channel and can expand and contract in an extension direction perpendicular to the channel; one end of the air guide tube is connected to the telescopic sac, and the other end of the air guide tube extends out of the bracket.

[0009] In an optional solution of the present application, the telescopic bladder is formed with a plurality of grooves, and the plurality of grooves are located on opposite sides of the telescopic bladder and are spaced apart in the expansion and contraction direction.

[0010] In an optional solution of the present application, the bracket is further provided with at least one annular groove, which is arranged on the inner circumferential wall of the channel; the annular groove is used to fix the telescopic bladder, which is arranged to be able to expand to protrude from the inner circumferential wall of the channel.

[0011] In an optional solution of the present application, the number of airbags in the flotation unit is equal to the number of annular grooves and both are multiple; the multiple annular grooves are arranged at intervals along the extension direction of the channel, and the multiple airbags in the flotation unit are arranged side by side in the corresponding annular grooves in the extension direction of the channel.

[0012] According to another aspect of the present application, an optical system is provided, including an air circuit control module and the above-mentioned lens clamping mechanism; the air circuit control module is connected to the air flotation module to control the operation of the air flotation module.

[0013] In an optional solution of the present application, the gas circuit control module includes multiple gas circuit control units; the number of gas circuit control units is the same as the number of air flotation units in the air flotation module, and each gas circuit control unit is connected to each air flotation unit one by one to control the corresponding air flotation unit.

[0014] In an optional solution of the present application, the air circuit control unit includes a pressure regulating valve and an underpressure valve; the pressure regulating valve is connected to the air bag in the air flotation unit via the underpressure valve.

[0015] According to yet another aspect of the present application, a semiconductor optical detection device is provided, comprising the above-mentioned optical system.

[0016] In summary, the lens clamping mechanism, optical system and semiconductor optical detection equipment provided by the present application have at least the following beneficial effects:

[0017] The optical system includes a lens clamping mechanism and an air path control module. The lens clamping mechanism is composed of a bracket and an air flotation module. The air path control module is connected to the air flotation module to control the operation of the air flotation module to clamp the lens in the channel of the bracket.

[0018] Under the action of the air flotation module, the lens is suspended in the channel, that is, the outer wall of the lens is spaced from the inner wall of the channel. In this way, the vibration transmitted through the bracket is buffered by the air flotation module, which greatly reduces the impact of the vibration on the lens and improves the stability of the optical system. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific implementation or the prior art description. Obviously, the drawings described below are some implementations of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 A schematic diagram of an optical system provided according to one embodiment of the present application.

[0021] Figure 2 for Figure 1 Schematic diagram of the middle bracket;

[0022] Figure 3 for Figure 1 Schematic diagram of the airbag.

[0023] The reference numerals are as follows:

[0024] 100. Lens clamping mechanism;

[0025] 110. Bracket;

[0026] 120, air flotation module; 12a, air flotation unit; 121, air bag; 1211, telescopic bag; 1212, air guide tube;

[0027] 200, gas circuit control module; 210, gas circuit control unit; 211, pressure regulating valve; 212, underpressure valve; 213, multi-way valve;

[0028] H1, channel; H2, mounting through hole; D, groove; C, ring groove. DETAILED DESCRIPTION

[0029] In the description of the present application, it should be understood that if terms such as "inner", "outer", "axial", "radial", and "circumferential" appear to indicate orientation or positional relationships, unless otherwise specified, they are understood to be based on the orientation or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the present application.

[0030] In addition, if there is a feature defined as "first" or "second", it is only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Features defined as "first" or "second" may explicitly or implicitly include at least one of the defined features. If there is a description of "plurality", the general meaning is to include at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0031] In this application, unless otherwise clearly specified and limited, the terms such as "installed", "connected", "connected", "fixed" and so on should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection, it can be a direct connection, or it can be an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0032] In the description of this specification, if the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" appear, it means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0033] At present, there are three main ways to fix lenses in optical systems. The first is to use a spring pressure piece to press the lens onto a fixed bracket; the second is to use hot melt adhesive to bond the lens onto the fixed bracket; the third is to use a lens sleeve to fix the lens and install the lens sleeve onto the fixed bracket.

[0034] The lens here may be a lens, a reflector, etc., and the lens may refer to a focusing lens, a diverging lens, etc. The inventors have found that there are at least the following problems with the above three fixing methods.

[0035] First, in these three fixing methods, the lens and the fixing bracket are rigidly connected, which can easily transmit vibration to the lens, thereby affecting the stability of the optical path.

[0036] Secondly, among these three fixing methods, a lens of one size can only match a fixing bracket of one size. The optical system generally uses lenses of multiple different sizes, so it is necessary to design fixing brackets of multiple sizes, which increases the cost.

[0037] Thirdly, when the first or second fixing method is adopted, deformation or scratches may be caused to the edge of the lens, and the lens is not easy to adjust to achieve alignment with the optical axis after installation.

[0038] To this end, the present application provides an optical system. Figure 1 Schematic diagram of an optical system provided according to one embodiment of the present application. Figure 1 The optical system includes a lens clamping mechanism 100 and an air path control module 200.

[0039] The lens clamping mechanism 100 includes a support 110 and an air flotation module 120. The support 110 is provided with a channel H1. The air flotation module 120 is connected to the support 110 and is used to clamp the lens in the channel H1, and the outer peripheral wall of the lens is spaced from the inner peripheral wall of the channel H1.

[0040] Furthermore, the air circuit control module 200 is connected to the air flotation module 120 to control the operation of the air flotation module 120 .

[0041] In this embodiment, the lens clamping mechanism 100 is composed of a bracket 110 and an air flotation module 120 . The air path control module 200 is connected to the air flotation module 120 to control the operation of the air flotation module 120 to clamp the lens in the channel H1 of the bracket 110 .

[0042] Specifically, under the action of the air flotation module 120, the lens is suspended in the channel H1, that is, the outer peripheral wall of the lens does not contact the inner peripheral wall of the channel H1. In this way, the vibration transmitted by the bracket 110 is buffered by the air flotation module 120, which greatly reduces the impact of the vibration on the lens and improves the stability of the optical system.

[0043] It should be understood that the channel H1 here is a light path passage, and the light path can pass through the channel H1 via the lens. In the illustrated embodiment, the channel H1 is a circular channel, which corresponds to a circular lens. Of course, the channel H1 can also be a square channel, which corresponds to a square lens. In other words, the shape of the channel H1 is not limited to the illustrated embodiment, and can be designed according to the shape of the lens.

[0044] In a further optional embodiment, the air flotation module 120 includes a plurality of air flotation units 12a, and the plurality of air flotation units 12a are arranged at intervals along the circumference of the channel H1.

[0045] In this embodiment, the air floating module 120 is composed of at least two air floating units 12 a , and the lens is clamped in the channel H1 through the cooperation of a plurality of air floating units 12 a arranged in the circumference of the channel H1 .

[0046] Furthermore, the gas circuit control module 200 includes multiple gas circuit control units 210, the number of which is the same as the number of air flotation units 12a in the air flotation module 120, and each gas circuit control unit 210 is connected to each air flotation unit 12a in a one-to-one correspondence to control the corresponding air flotation unit 12a.

[0047] In this embodiment, the number of the gas path control units 210 in the gas path control module 200 is mainly determined by the number of the air floating units 12 a , and each gas path control unit 210 is used to control one air floating unit 12 a .

[0048] In a specific application, the air circuit control unit 210 is mainly used to control the air pressure of the air floating unit 12a to clamp the lens and fine-tune the position of the lens in the channel H1.

[0049] In a preferred embodiment, the plurality of air flotation units 12a in the air flotation module 120 are arranged symmetrically about the center line of the channel H1. In other words, the angle formed by the line connecting any two adjacent air flotation units 12a and the center line of the channel H1 is the same.

[0050] It should be understood that when the air pressure of all air floating units 12a is the same, the lens can be automatically centered in the channel H1. When the air pressure of each air floating unit 12a is different, the lens will move toward the one with relatively lower air pressure among the air floating units 12a to fine-tune the position of the lens in the channel H1, so as to facilitate the alignment with the optical axis.

[0051] In the illustrated embodiment, there are four air flotation units 12a in the air flotation module 120, and the four air flotation units 12a are symmetrically arranged about the center line of the channel H1. Specifically, the acute angle formed by the line connecting two adjacent air flotation units 12a and the center line of the channel H1 is 90°, that is, they are arranged opposite to each other.

[0052] It should be understood that when the air pressures of the four air floating units 12a are the same, the lens can be automatically centered in the channel H1. By adjusting the air pressures of the four air floating units 12a, the position of the lens in the channel H1 can be fine-tuned.

[0053] It should be noted that the number of the air flotation units 12a in the air flotation module 120 is not limited to the illustrated embodiment, and illustratively, may be 3, 5, 6, etc.

[0054] Figure 2 for Figure 1 Schematic diagram of the middle bracket 110. Figure 3 for Figure 1 Schematic diagram of the airbag 121. Figure 2 and Figure 3 In a further optional embodiment, the air flotation unit 12a includes at least one airbag 121 , and the airbag 121 includes a telescopic bag body 1211 and an air guide tube 1212 .

[0055] The telescopic bag 1211 is disposed in the channel H1 and can expand and contract in a direction perpendicular to the extension of the channel H1. One end of the air guide tube 1212 is connected to the telescopic bag 1211, and the other end of the air guide tube 1212 extends out of the bracket 110.

[0056] In this embodiment, the air floating unit 12 a is composed of at least one air bag 121 , and the air bag 121 is composed of a telescopic bag body 1211 and an air guide tube 1212 .

[0057] The bellows 1211 can expand and contract under the action of air pressure, and the air guide tube 1212 is used to introduce gas into the bellows 1211. Specifically, the two ends of the air guide tube 1212 are respectively connected to the bellows 1211 and the air circuit control unit 210, and the bellows 1211 is inflated and deflated by the air circuit control unit 210 to adjust the air pressure of the bellows 1211.

[0058] The telescopic capsule 1211 can expand and contract in a direction perpendicular to the extension of the passage H1 under the action of air pressure, thereby clamping the lens and fine-tuning the position of the lens in the passage H1.

[0059] In the illustrated embodiment, the side wall of the passage H1 is provided with a plurality of installation through holes H2 spaced apart along the circumferential direction, and the installation through holes H2 allow the air duct 1212 to pass through, so as to connect the air path control unit 210 with the telescopic bag 1211 through the air duct 1212 .

[0060] During the process of inflating the corresponding telescopic bladders 1211 through each air path control unit 210, each telescopic bladder 1211 expands, and the range enclosed by each telescopic bladder 1211 gradually shrinks and squeezes the edge of the lens, thereby fixing the lens.

[0061] During the process of deflating the corresponding telescopic bag 1211 through a certain air path control unit 210, the air pressure of the telescopic bag 1211 decreases and gradually shrinks. Accordingly, the lens will move toward the telescopic bag 1211, thereby achieving fine adjustment of the lens position.

[0062] It should be understood that this fixing method can avoid damaging the edge of the lens due to hard contact. In addition, since the telescopic capsule 1211 has a certain amount of telescopic deformation, it can be adapted to lenses of more specifications and sizes. That is, the lens clamping mechanism 100 has better applicability, reduces design workload, and reduces costs.

[0063] It should be noted that, in the illustrated embodiment, the extension direction of the channel H1 is the axial direction of the channel H1 , and the expansion and contraction direction of the telescopic capsule 1211 is the radial direction of the channel H1 .

[0064] Furthermore, the air circuit control unit 210 includes a pressure regulating valve 211 and an underpressure valve 212. The pressure regulating valve 211 is connected to the air bag 121 in the air flotation unit 12a via the underpressure valve 212.

[0065] In this embodiment, the pressure regulating valve 211 in the air circuit control unit 210 is connected to an air source and can adjust the air pressure to control the inflation and deflation of the telescopic bag 1211. Each air bag 121 is matched with an underpressure valve 212, which mainly plays a role in ensuring the safety of the air circuit control unit 210.

[0066] Specifically, when a certain airbag 121 leaks, the underpressure valve 212 corresponding to the airbag 121 will sense the drop in air pressure and automatically close, thereby preventing further gas flow. By closing the underpressure valve 212, the leaking airbag 121 can be isolated to ensure that its leakage does not affect the air path. In this way, the risk of the lens loosening due to leakage can be reduced.

[0067] In a further optional embodiment, the bracket 110 is further provided with at least one annular groove C, which is provided on the inner peripheral wall of the channel H1. The annular groove C is used to fix the telescopic capsule 1211, which is provided to be able to expand to protrude from the inner peripheral wall of the channel H1.

[0068] In this embodiment, at least a portion of the telescopic capsule 1211 of the airbag 121 is embedded in the annular groove C, and the telescopic capsule 1211 is limited by the annular groove C. It should be understood that the telescopic capsule 1211 can ensure that a portion of it protrudes from the inner circumferential wall of the channel H1 when inflated, that is, when each airbag 121 cooperates to clamp the lens, the outer circumferential wall of the lens is spaced apart from the inner circumferential wall of the channel H1, so as to achieve the effect of being suspended in the channel H1.

[0069] In a further optional embodiment, the number of the airbags 121 in the air flotation unit 12a is equal to the number of the annular grooves C and both are plural.

[0070] The plurality of annular grooves C are arranged at intervals along the extending direction of the channel H1 , and the plurality of air bags 121 in the air flotation unit 12 a are arranged side by side in the corresponding annular grooves C in the extending direction of the channel H1 .

[0071] In this embodiment, there are multiple annular grooves C in the bracket 110, and a single air flotation unit 12a includes multiple air bags 121. Each air bag 121 in the single air flotation unit 12a is arranged in a different annular groove C, that is, the multiple air bags 121 in the single air flotation unit 12a are arranged in a one-to-one correspondence with the multiple annular grooves C.

[0072] Furthermore, the plurality of air bags 121 in a single air flotation unit 12a are arranged side by side in the extension direction of the channel H1 so as to be installed correspondingly in the plurality of annular grooves C arranged at intervals in the extension direction.

[0073] In a specific application, the multiple air bags 121 in a single air floating unit 12a can form a larger contact surface with the lens in the extension direction of the channel H1, so as to clamp a thicker lens. Alternatively, the air bags 121 in the same annular groove C in the multiple air floating units 12a can cooperate to clamp a lens, thereby clamping multiple lenses in the extension direction of the channel H1.

[0074] In the illustrated embodiment, the number of the annular grooves C is 2, the number of the air flotation units 12 a is 4, and the number of the air bags 121 in a single air flotation unit 12 a is 2, that is, the number of the air bags 121 is 8 in total.

[0075] The two annular grooves C are spaced apart in the axial direction of the channel H1 , and the two airbags 121 in the same air floating unit 12a are arranged side by side in the axial direction of the channel H1 , and the telescopic capsule 1211 in each airbag 121 can form a contact surface with the mirror surface.

[0076] It should be noted that the number of the annular grooves C is not limited to the illustrated embodiment, and should be designed according to the number of airbags 121 in a single air flotation unit 12a. In addition, the cross-sectional shape of the annular grooves C also needs to be designed according to the shape of the telescopic bladder 1211.

[0077] It should be understood that since the air path control unit 210 is connected to the air flotation unit 12a in a one-to-one correspondence, and each airbag 121 is matched with a corresponding underpressure valve 212, therefore, when there are multiple airbags 121 in each air flotation unit 12a, the number of underpressure valves 212 in each air path control unit 210 is equal to the number of airbags 121 in each air flotation unit 12a.

[0078] Furthermore, the air circuit control unit 210 further includes a multi-way valve 213 , and the pressure regulating valve 211 is connected to each airbag 121 through the multi-way valve 213 and via each underpressure valve 212 .

[0079] In other words, a single gas circuit control unit 210 further includes a multi-way valve 213 , through which the gas is diverted and connected to each gas bag 121 in the corresponding air flotation unit 12 a via the corresponding underpressure valve 212 .

[0080] In the illustrated embodiment, a single gas circuit control unit 210 includes one pressure regulating valve 211, two underpressure valves 212 and one three-way valve. The gas source introduced by the pressure regulating valve 211 is diverted through the three-way valve and flows to the two air bags 121 in the air flotation unit 12a matched with the two underpressure valves 212.

[0081] It should be noted that the number of the pressure regulating valves 211 , the underpressure valves 212 and the multi-way valves 213 in the air circuit control unit 210 can be adjusted according to the number of the airbags 121 in the air flotation unit 12a and is not limited to the illustrated embodiment.

[0082] In a further optional embodiment, the telescopic bladder 1211 is formed with a plurality of grooves D, and the plurality of grooves D are located on opposite sides of the telescopic bladder 1211 and are spaced apart in the expansion and contraction direction.

[0083] In this embodiment, a plurality of grooves D are formed on opposite sides of the telescopic capsule 1211, so that the structure of the telescopic capsule 1211 is similar to a compression spring structure, so that the telescopic capsule 1211 can expand and contract in one direction as much as possible. It should be noted that the structure of the telescopic capsule 1211 is not limited to the illustrated embodiment, and can also be other structures with one-way expansion and contraction functions.

[0084] In summary, the lens clamping mechanism 100 provided by the present application is used in conjunction with the air path control module 200 to fix the lens, so that the lens can be suspended in the channel H1, avoiding damage to the edge of the lens, reducing the impact of vibration on the lens, and ensuring the stability of the optical system. In addition, it can adapt to lenses of different sizes and specifications, and has higher applicability. Moreover, it is convenient to align the lens with the channel H1, and it is also possible to fine-tune the position of the lens in the channel H1, which is more convenient for centering the optical axis.

[0085] Another aspect of the present application provides a semiconductor optical detection device, which includes the above-mentioned optical system. Obviously, since the above-mentioned optical system has better vibration resistance, the semiconductor optical detection device equipped with the optical system has better imaging performance. Of course, the semiconductor optical detection device also has other advantages brought by the optical system, which will not be repeated here.

[0086] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Those skilled in the art can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A lens clamping mechanism, characterized in that: It comprises a support (110) and an air flotation module (120), wherein the support (110) is provided with a channel (H1); The air flotation module (120) is connected to the bracket (110) and is used to clamp the lens in the channel (H1), and the outer peripheral wall of the lens is spaced apart from the inner peripheral wall of the channel (H1).

2. The lens clamping mechanism according to claim 1, characterized in that: The air flotation module (120) comprises a plurality of air flotation units (12a), and the plurality of air flotation units (12a) are arranged at intervals along the circumference of the channel (H1).

3. The lens clamping mechanism according to claim 2, characterized in that: The air flotation unit (12a) comprises at least one air bag (121), and the air bag (121) comprises a telescopic bag body (1211) and an air guide tube (1212); The telescopic bag (1211) is arranged in the channel (H1) and can expand and contract in an extension direction perpendicular to the channel (H1); One end of the air guide tube (1212) is connected to the telescopic bag (1211), and the other end of the air guide tube (1212) extends out of the bracket (110).

4. The lens holding mechanism according to claim 3, characterized in that: The telescopic sac (1211) is formed with a plurality of grooves (D), and the plurality of grooves (D) are located on two opposite sides of the telescopic sac (1211) and are arranged at intervals in the expansion and contraction direction.

5. The lens clamping mechanism according to claim 3, characterized in that: The bracket (110) is further provided with at least one annular groove (C), and the annular groove (C) is arranged on the inner peripheral wall of the channel (H1); The annular groove (C) is used to fix the telescopic bag (1211), and the telescopic bag (1211) is configured to be able to expand to protrude from the inner peripheral wall of the channel (H1).

6. The lens holding mechanism according to claim 5, characterized in that: The number of the air bags (121) in the air flotation unit (12a) is equal to the number of the annular grooves (C) and both are multiple; The plurality of annular grooves (C) are arranged at intervals along the extension direction of the channel (H1), and the plurality of air bags (121) in the air flotation unit (12a) are arranged side by side in the corresponding annular grooves (C) in the extension direction of the channel (H1).

7. An optical system, characterized in that: It comprises an air circuit control module (200) and a lens clamping mechanism (100) according to any one of claims 1 to 6; The air circuit control module (200) is connected to the air flotation module (120) to control the operation of the air flotation module (120).

8. The optical system according to claim 7, characterized in that The gas circuit control module (200) comprises a plurality of gas circuit control units (210); The number of the gas circuit control units (210) is the same as the number of the air flotation units (12a) in the air flotation module (120), and each of the gas circuit control units (210) is connected to each of the air flotation units (12a) in a one-to-one correspondence to control the corresponding air flotation unit (12a).

9. The optical system according to claim 8, characterized in that The gas circuit control unit (210) comprises a pressure regulating valve (211) and an underpressure valve (212); The pressure regulating valve (211) is connected to the air bag (121) in the air flotation unit (12a) via the underpressure valve (212).

10. A semiconductor optical detection device, characterized in that: Comprising an optical system according to any one of claims 7 to 9.

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