Baking device for spin coater

Abstract

The utility model discloses a baking device for a spin coater. The baking device comprises a base, a lifting supporting part and a drying assembly, the base is arranged on the supporting part, and the drying assembly comprises a plurality of supporting columns, a first mounting plate, a plurality of guide columns, a heating plate and a bearing disc; the lifting supporting part comprises a seventh air cylinder, a second mounting plate and a supporting bracket, the seventh air cylinder is vertically arranged on the base, and the piston rod end of the seventh air cylinder is connected with the second mounting plate; the multiple supporting brackets are distributed on the periphery of the second mounting plate. Compared with a common heating disc in the prior art, the heating disc can be used in cooperation with an external conveying device such as a mechanical arm through the lifting supporting part in the using process, the automation degree is higher, the production efficiency is improved, and the heating disc is suitable for large-scale production. And balls 331 arranged on the bearing disc 314 can realize uniform heating when the wafer is baked, so that the drying effect is better.

Description

Technical Field

[0001] The utility model relates to the field of photolithography technology devices, in particular to a baking device for a glue spreader. Background Art

[0002] In the process of using a coating machine to produce and process wafers, baking the wafers after coating is a very important step, and its baking effect directly affects the production quality. The baking device used in the prior art is usually an ordinary heating plate, and a fixed bracket is provided on the upper part of the heating plate, and the wafer is placed on the fixed bracket. When a more advanced external conveying device such as a robot is used, it is inconvenient for the robot to take the wafers on the bracket with a fixed height, which affects the production efficiency.

[0003] Designing a baking device for a glue spreader with better baking effect and higher degree of automation is an urgent problem to be solved. Utility Model Content

[0004] The purpose of the utility model is to overcome the problems existing in the prior art and to provide a baking device for a glue homogenizer. The baking effect of the device is better and the degree of automation is higher, thereby improving the production efficiency and production quality.

[0005] The utility model proposes the following technical solutions:

[0006] A baking device for a glue leveler, the baking device comprising a base, a lifting support part, and a drying component;

[0007] The base is arranged on the supporting part, and the drying assembly includes a plurality of supporting columns, a first mounting plate, a plurality of guiding columns, a heating plate, and a supporting tray. The plurality of supporting columns are arranged at the lower part of the first mounting plate and distributed around the first mounting plate, so as to support and fix the first mounting plate on the base. The plurality of guiding columns are arranged at the upper part of the first mounting plate and distributed around the first mounting plate. The heating plate is arranged on the plurality of guiding columns, and the supporting tray is arranged on the heating plate.

[0008] The lifting support part includes a seventh cylinder, a second mounting plate, and a support bracket. The seventh cylinder is vertically arranged on the base. A through slot is provided at a position corresponding to the seventh cylinder on the first mounting plate. The piston rod end of the seventh cylinder passes through the through slot and is connected to the second mounting plate. A through guide hole is provided at a position corresponding to a plurality of guide posts on the second mounting plate. The plurality of guide posts pass through the corresponding guide holes on the second mounting plate.

[0009] There are a plurality of support brackets distributed around the second mounting plate.

[0010] Each of the support brackets has three connecting parts formed by two bends, the three connecting parts include a first connecting part, a second connecting part, and a third connecting part, the first connecting part is perpendicular to the second connecting part, the second connecting part is perpendicular to the third connecting part, the first connecting part is parallel to the third connecting part, and the bending direction of the first connecting part is consistent with the bending direction of the third connecting part; the first connecting part is connected to the second mounting plate, and the third connecting part is extended on the upper part of the supporting tray;

[0011] A through long groove is provided on the support tray at a position corresponding to the third connection portion of each support bracket, and when the seventh cylinder drives the second mounting plate to move downward and then drives the third connection portion of the support bracket to move downward, the long groove is used to accommodate the third connection portion;

[0012] A columnar body is provided at the end of each of the third connecting parts, a shaft mounting hole is provided at the end of each of the third connecting parts, a connecting shaft is provided at the lower part of the columnar body, and the connecting shaft is embedded in the shaft mounting hole.

[0013] A plurality of ball placement grooves are distributed on the upper portion of the support tray, and balls are arranged in the ball placement grooves.

[0014] The support tray, the heating plate and the guide column are fixed by bolts.

[0015] The above-mentioned baking device for a glue spreader has at least the following beneficial effects:

[0016] 1. In the present invention, by providing a lifting support part, when a more advanced external conveying device such as a robot is used, the robot is used to facilitate the taking of wafers, thereby increasing production efficiency.

[0017] 2. In the present invention, the three-section connection portion of the support bracket can enable the support bracket to cross the heating plate and the support tray, so that the third connection portion is located on the upper part of the support tray to receive the wafer.

[0018] 3. In the utility model, a plurality of ball placement grooves are arranged on the upper part of the tray, and balls are arranged in the ball placement grooves. The arrangement of the balls can make the heating of the wafer more uniform, and the balls have the function of heat conduction, but the contact area between the balls and the wafer is extremely small, so as to avoid the disadvantage of uneven local heating caused by placing the wafer directly on the tray, and the wafer can be heated fully and evenly.

[0019] 4. Compared with the common heating tray in the prior art, the present invention can be used in conjunction with an external conveying device such as a robot through the lifting support part, which has a higher degree of automation, improves production efficiency, and is suitable for large-scale production. The ball bearings arranged on the tray can achieve uniform heating of the wafers during baking, and the drying effect is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the utility model;

[0021] Figure 2 It is another overall structural schematic diagram of an embodiment of the utility model;

[0022] Figure 3 This is a schematic diagram of the overall structure of the tray of the utility model embodiment;

[0023] Figure 4 It is a schematic diagram of the structure of a plurality of baking devices provided in an embodiment of the utility model;

[0024] Figure 5 is another structural schematic diagram of an embodiment of the utility model in which multiple baking devices are arranged;

[0025] Among them, 300-base, 310-support column, 311-first mounting plate, 312-guide column, 313-heating plate, 314-support tray, 320-seventh cylinder, 321-second mounting plate, 322-support bracket, 315-through slot, 323-guide hole, 324-first connecting part, 325-second connecting part, 326-third connecting part, 327-long slot, 328-columnar body, 329-rotating shaft mounting hole, 330-ball placement groove, 331-ball, 332-bolt. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0027] Please refer to Figure 1-Figure 5 As shown, a baking device for a glue-spinning machine, the baking device includes a base 300, a lifting support part, and a drying component;

[0028] The drying assembly includes a plurality of support columns 310, a first mounting plate 311, a plurality of guide columns 312, a heating plate 313, and a tray 314. The plurality of support columns 310 are arranged at the lower part of the first mounting plate 311 and distributed around the first mounting plate 311 to support and fix the first mounting plate 311 on the base 300. The plurality of guide columns 312 are arranged at the upper part of the first mounting plate 311 and distributed around the first mounting plate 311. The heating plate 313 is arranged on the plurality of guide columns 312, and the tray 314 is arranged on the heating plate 313.

[0029] The lifting support part includes a seventh cylinder 320, a second mounting plate 321, and a support bracket 322. The seventh cylinder 320 is vertically arranged on the base 300. A through slot 315 is provided at a position corresponding to the seventh cylinder 320 on the first mounting plate 311. The piston rod end of the seventh cylinder 320 passes through the through slot 315 and is connected to the second mounting plate 321. A through guide hole 323 is provided at a position corresponding to the plurality of guide posts 312 on the second mounting plate 321. The plurality of guide posts 312 pass through the corresponding guide holes 323 on the second mounting plate 321.

[0030] There are a plurality of support brackets 322 , which are distributed around the second mounting plate 321 .

[0031] By setting up the lifting support part, when using a more advanced external conveying device such as a robot, it is convenient to take the wafer with the robot, and the production efficiency is higher.

[0032] Each support bracket 322 has three connecting parts formed by two bends, and the three connecting parts include a first connecting part 324, a second connecting part 325, and a third connecting part 326. The first connecting part 324 and the second connecting part 325 are arranged perpendicularly, the second connecting part 325 and the third connecting part 326 are arranged perpendicularly, the first connecting part 324 and the third connecting part 326 are arranged in parallel, and the bending direction of the first connecting part 324 is consistent with the bending direction of the third connecting part 326; the first connecting part 324 is connected to the second mounting plate 321, and the third connecting part 326 is extended on the upper part of the supporting tray 314;

[0033] The three-section connection portion arrangement allows the support bracket 322 to cross the heating plate 313 and the tray 314 , so that the third connection portion 326 is located on the upper portion of the tray 314 to receive the wafer.

[0034] A through long groove 327 is opened on the support tray 314 at a position corresponding to the third connection part 326 of each support bracket 322. When the seventh cylinder 320 drives the second mounting plate 321 to move downward and then drives the third connection part 326 of the support bracket 322 to move downward, the long groove 327 is used to accommodate the third connection part 326; when the third connection part 326 descends into the long groove 327, the chip supported thereon is also placed on the support tray 314 for heating.

[0035] Please refer to Figure 4 As shown, a columnar body 328 is provided at the end of each third connection part 326, a shaft mounting hole 329 is provided at the end of each third connection part 326, a connecting shaft (not shown) is provided at the lower part of the columnar body 328, and the connecting shaft (not shown) is embedded in the shaft mounting hole 329. The arrangement of the columnar body 328 facilitates the receiving tray 314 to receive the wafer. The detachable columnar body 328 facilitates the operator to replace it in time.

[0036] A plurality of ball placement grooves 330 are provided on the upper portion of the tray 314, and balls 331 are provided in the ball placement grooves 330. The provision of the balls 331 can make the heating of the wafer more uniform, and the balls 331 have a heat-conducting effect, but the contact area between the balls 331 and the wafer is extremely small, so as to avoid the disadvantage of uneven local heating caused by directly placing the wafer on the tray 314, and the wafer can be fully and evenly heated.

[0037] Please refer to Figure 4 As shown, the tray 314, the heating plate 313, and the guide column 312 are fixed by bolts 332. That is, bolt holes are opened on the tray 314, the heating plate 313, and the guide column 312, and the bolts 332 pass through the tray 314 and the heating plate 313 and are screwed on the guide column 312.

[0038] When using this device, multiple settings can be made.

[0039] Compared with the common heating plate in the prior art, the device can be used in conjunction with an external conveying device such as a manipulator through the lifting support part, which has a higher degree of automation, improves production efficiency, and is suitable for large-scale production. The ball bearings 331 arranged on the tray 314 can achieve uniform heating of the wafer during baking, and the drying effect is better.

[0040] In the description of the present invention, the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "vertical", "horizontal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the purpose of describing the present invention rather than requiring the present invention to be constructed or operated in a specific position, and therefore cannot be understood as a limitation on the present invention. The terms "connected" and "connected" in the present invention should be understood in a broad sense, for example, it can be a connection or a detachable connection; it can be a direct connection or an indirect connection through an intermediate component. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0041] The above is a preferred embodiment of the present invention, and the description of the specific embodiment is only used to better understand the concept of the present invention. For ordinary technicians in this technical field, several improvements or equivalent substitutions can be made according to the principle of the present invention, and these improvements or equivalent substitutions are also considered to fall within the protection scope of the present invention.

Claims

1. A baking device for a glue homogenizer, characterized in that: The baking device comprises a base, a lifting support part, and a drying component; The base is arranged on the supporting part, and the drying assembly includes a plurality of supporting columns, a first mounting plate, a plurality of guiding columns, a heating plate, and a supporting tray. The plurality of supporting columns are arranged at the lower part of the first mounting plate and distributed around the first mounting plate, so as to support and fix the first mounting plate on the base. The plurality of guiding columns are arranged at the upper part of the first mounting plate and distributed around the first mounting plate. The heating plate is arranged on the plurality of guiding columns, and the supporting tray is arranged on the heating plate. The lifting support part includes a seventh cylinder, a second mounting plate, and a support bracket. The seventh cylinder is vertically arranged on the base. A through slot is provided at a position corresponding to the seventh cylinder on the first mounting plate. The piston rod end of the seventh cylinder passes through the through slot and is connected to the second mounting plate. A through guide hole is provided at a position corresponding to a plurality of guide posts on the second mounting plate. The plurality of guide posts pass through the corresponding guide holes on the second mounting plate. There are a plurality of support brackets distributed around the second mounting plate.

2. The baking device for a glue spinner according to claim 1, characterized in that: Each of the support brackets has three connecting parts formed by two bends, the three connecting parts include a first connecting part, a second connecting part, and a third connecting part, the first connecting part is perpendicular to the second connecting part, the second connecting part is perpendicular to the third connecting part, the first connecting part is parallel to the third connecting part, and the bending direction of the first connecting part is consistent with the bending direction of the third connecting part; the first connecting part is connected to the second mounting plate, and the third connecting part is extended on the upper part of the supporting tray; A through long groove is provided on the support tray at a position corresponding to the third connection portion of each support bracket. When the seventh cylinder drives the second mounting plate to move downward and then drives the third connection portion of the support bracket to move downward, the long groove is used to accommodate the third connection portion.

3. The baking device for a glue spinner according to claim 2, characterized in that: A columnar body is provided at the end of each of the third connecting parts, a shaft mounting hole is provided at the end of each of the third connecting parts, a connecting shaft is provided at the lower part of the columnar body, and the connecting shaft is embedded in the shaft mounting hole.

4. The baking device for a glue spinner according to claim 1, characterized in that: A plurality of ball placement grooves are distributed on the upper portion of the support tray, and balls are arranged in the ball placement grooves.

5. The baking device for a glue spinner according to claim 2, characterized in that: The support tray, the heating plate and the guide column are fixed by bolts.

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