Substrate warping shaping jig

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a substrate warping shaping jig which comprises a shaping seat and a pressing assembly. The shaping seat is provided with at least one shaping position, and each shaping position comprises at least two protrusions used for bearing products; the pressing assembly is arranged on the shaping base and used for applying pressure enabling a base plate of the product to deform to the product borne on the protrusion. According to the above configuration, the device utilizes the height difference of the protrusions and combines the pressing force of the pressing assembly, so that the substrate of the product is subjected to warping deformation, the warping deformation of the substrate can be flexibly controlled by controlling the height of the protrusions and the pressing force of the pressing assembly, and finally the substrate is shaped after high-temperature baking and the radian of the finished product is controlled. The jig is easy and effective to operate, good in warping adjusting effect and free of springback.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a substrate warping shaping jig. Background Art

[0002] The packaging process is an important part of semiconductor manufacturing. For some semiconductors, the substrate needs to be warped after encapsulation.

[0003] The warpage of the substrate directly affects the heat dissipation performance of the product, and thus affects the service life of the product. For some semiconductor devices, the substrate is required to have a corresponding warpage deformation to meet its heat dissipation needs. At this time, the warpage of the substrate needs to be precisely controlled so that the warpage degree of the substrate meets the use requirements.

[0004] The purpose of existing technical means for controlling substrate warpage is usually to reduce the warpage of the substrate, for example, by applying pressure to the substrate to make it fit on a plane to improve the phenomenon of substrate warpage. Therefore, the existing technical means for controlling substrate warpage are not suitable for the above-mentioned use scenarios where the substrate warpage is required to have a specific shape.

[0005] To this end, the utility model provides a substrate warping shaping jig, which is used to adjust the warping of the substrate to accurately control the warping shape of the substrate. Utility Model Content

[0006] The purpose of the utility model is to provide a substrate warping shaping jig, which is coordinated by multiple bosses and a pressure component. The bosses are used to support products, and the pressure component is used to apply pressure to the products so that the parts of the substrate of the product located between the bosses are warped and deformed, so as to accurately control the warping shape of the substrate.

[0007] The utility model provides a substrate warping shaping fixture, comprising: a shaping seat and a pressing component;

[0008] The shaping seat is provided with at least one shaping position, and the shaping position includes at least two protrusions for carrying the product;

[0009] The pressing assembly is arranged on the shaping seat, and is used to apply pressure to the product carried on the protrusion to deform its base plate.

[0010] Optionally, the shaping seat comprises a first shaping seat and a second shaping seat which are connected to each other, the shaping position is arranged on the first shaping seat, and the pressing assembly is arranged on the second shaping seat.

[0011] Optionally, the shaping position further includes a groove, which is an annular groove and is opened on the shaping seat, the protrusion is arranged on the shaping seat, and the groove surrounds the protrusion.

[0012] Optionally, the shaping position further includes a recessed area arranged on the shaping seat, the protrusion is arranged in the recessed area and the groove surrounds the recessed area.

[0013] Optionally, a plurality of avoidance holes are provided on the second shaping seat, and each of the avoidance holes is arranged in one-to-one correspondence with each of the shaping positions.

[0014] Optionally, an anti-reversal piece is further provided on the first shaping seat and / or the second shaping seat, and the anti-reversal piece is used to identify the placement direction of the first shaping seat and / or the second shaping seat.

[0015] Optionally, the substrate warping shaping fixture further includes a supporting member and a connecting member, wherein the supporting member is used to support between the first shaping seat and the second shaping seat so as to form a shaping space therebetween, and the first shaping seat is detachably connected to the second shaping seat via the connecting member.

[0016] Optionally, the substrate warping shaping jig further includes a positioning member, and the positioning member is provided on the first shaping seat and / or the second shaping seat for positioning the first shaping seat and the second shaping seat.

[0017] Optionally, a weight-reducing hole is provided on the first shaping seat and / or the second shaping seat.

[0018] Optionally, the clamping assembly includes a clamping terminal and a potential energy member, wherein the clamping terminal is arranged on the second molding seat and moves in a direction close to or away from the first molding seat; and the potential energy member provides the clamping terminal with a potential energy to move toward the first molding seat.

[0019] To summarize, the substrate warping shaping jig includes a shaping seat and a pressing assembly; the shaping seat is provided with at least one shaping position, and the shaping position includes at least two protrusions for supporting the product; the pressing assembly is provided on the shaping seat, and the pressing assembly is used to apply pressure to the product supported on the protrusion to deform its substrate.

[0020] With such configuration, the above device utilizes the height difference between the protrusion and the shaping surface, combined with the pressing force of the pressing component, to cause the product substrate to warp and deform. By controlling the height of the protrusion and the pressing force of the pressing component, the warping deformation of the substrate can be flexibly controlled, and finally the shaping is performed after high-temperature baking to control the curvature of the finished product. The jig is simple and effective to operate, and has a good warping adjustment effect without rebound. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a side view structural schematic diagram of a substrate warping shaping fixture according to an embodiment of the utility model;

[0022] Figure 2 It is a schematic diagram of the three-dimensional structure of a substrate warping shaping fixture according to one embodiment of the utility model;

[0023] Figure 3 It is a structural schematic diagram of a second shaping seat in one embodiment of the utility model;

[0024] Figure 4 This is a schematic structural diagram of a first shaping seat according to an embodiment of the utility model;

[0025] Figure 5 for Figure 4 A schematic diagram of the enlarged structure of point A;

[0026] Figure 6 This is a schematic diagram of a top view of the first shaping seat according to an embodiment of the utility model;

[0027] Figure 7 for Figure 6 Schematic diagram of the Ⅰ-Ⅰ cross-sectional structure;

[0028] Figure 8 for Figure 7 Schematic diagram of the enlarged structure of point B;

[0029] Fig. 9 Schematic diagram of the warping shaping principle.

[0030] Among them, in the attached drawings:

[0031] 10-forming seat; 101-first forming seat; 102-second forming seat; 11-forming position; 111-protrusion; 112-groove; 113-recessed area; 12-avoidance hole; 13-weight reduction hole; 14-installation sleeve; 15-positioning hole;

[0032] 20- clamping assembly; 21- clamping terminal; 22- potential energy member;

[0033] 30-Anti-reverse piece;

[0034] 40- support member;

[0035] 50-connecting piece;

[0036] 60- positioning piece;

[0037] 70-product; 71-housing; 72-substrate. DETAILED DESCRIPTION

[0038] The following is a further detailed description of the substrate warping shaping fixture proposed by the utility model in combination with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the utility model will become clearer. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model.

[0039] As used in the present invention, the singular forms "one", "an", and "the" include plural objects, the term "or" is usually used to include the meaning of "and / or", the term "several" is usually used to include the meaning of "at least one", and the terms "at least two" or "a plurality" are usually used to include the meaning of "two or more". In addition, the terms "first", "second", and "third" are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features. In addition, as used in the present invention, "installed", "connected", "connected", and one element "set" on another element should be understood in a broad sense, usually only indicating that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements can be direct or indirect through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element can be in any orientation such as inside, outside, above, below or one side of another element, unless the content clearly indicates otherwise. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used relative to the exemplary embodiments as shown in the figures, with the upward or upper direction toward the top of the corresponding figure, and the downward or lower direction toward the bottom of the corresponding figure.

[0040] Please refer to Figure 1 and Figure 2 As shown, this embodiment provides a substrate warping shaping fixture, including a shaping seat 10 and a pressing assembly 20;

[0041] The shaping seat 10 comprises a first shaping seat 101 and a second shaping seat 102 which are connected to each other. The shaping position 11 is arranged on the first shaping seat 101 , and the pressing assembly 20 is arranged on the second shaping seat 102 .

[0042] In this embodiment, the first shaping seat 101 and the second shaping seat 102 are both rectangular plate structures, wherein the first shaping seat 101 is used as a base for placing products, and the second shaping seat 102 is connected to the first shaping seat 101, and the second shaping seat 102 is located above the first shaping seat 101.

[0043] The shaping position 11 is arranged on the first shaping seat 101, and the shaping position 11 includes four protrusions 111 for carrying the product (see Figure 4 and Figure 5 As shown in the figure, four protrusions 111 are arranged at four corners. When the four corners of the product are placed on the protrusions 111, the middle part of the product is suspended. The clamping assembly 20 is arranged on the second shaping seat 102. The clamping assembly 20 is used to apply pressure to the product carried on the protrusions 111 to deform its substrate, thereby controlling the warping deformation of the substrate.

[0044] The above structure utilizes the height difference between the protrusion 111 and the surface of the shaping position 11, combined with the pressing force of the pressing assembly 20, to cause the product substrate to warp and deform. By controlling the height of the protrusion 111 and the pressing force of the pressing assembly 20, the warping and deformation of the substrate can be flexibly controlled, and finally the shaping is performed after high-temperature baking to control the curvature of the finished product. The jig is simple and effective to operate, and has a good warping adjustment effect without rebound.

[0045] In this embodiment, the second shaping seat 102 is arranged above the first shaping seat 101, and the pressing assembly 20 is arranged on the second shaping seat 102, and the pressing assembly 20 is used to apply a pressing force downward. In other alternative embodiments, the positions of the first shaping seat 101 and the second shaping seat 102 are interchangeable, and the pressing assembly 20 is used to apply a pressing force upward.

[0046] In this embodiment, the shaping seat 10 is a split structure consisting of a first shaping seat 101 and a second shaping seat 102. In other alternative embodiments, the shaping seat 10 can be an integrated structure (i.e., only one of the first shaping seat 101 and the second shaping seat 102 is retained), and the protrusion 111 and the pressing assembly 20 can be both disposed on the integrated shaping seat 10.

[0047] Please refer to Figure 3 and Figure 4 As shown, in this embodiment, eight shaping positions 11 are arranged on the first shaping seat 101, and eight avoidance holes 12 are opened on the second shaping seat 102, and each avoidance hole 12 is arranged in a one-to-one correspondence with each shaping position 11. The corresponding arrangement here means that at least a part of a avoidance hole 12 in its opening direction overlaps with the corresponding shaping position 11. The projection of the avoidance hole 12 in the vertical direction in this embodiment completely overlaps with the corresponding shaping position 11.

[0048] The shaping position 11 is arranged on the upper surface of the first shaping seat 101, and each shaping position 11 can be equipped with one product. Therefore, the first shaping seat 101 can be equipped with eight products at the same time to achieve warpage shaping for the eight products at the same time.

[0049] like Figure 4As shown, the shaping positions 11 are arranged in two rows, and each row is provided with four shaping positions 11 arranged along the length direction of the first shaping seat 101. Similarly, the second shaping seat 102 is adaptively provided with two rows of avoidance holes 12, and the avoidance holes 12 are arranged opposite to the corresponding shaping positions 11 to avoid the products placed on the shaping positions 11, and at the same time, it is also convenient to observe the posture changes of the products.

[0050] In this embodiment, the overall shape of the shaping position 11 is a rectangular structure, and accordingly, the avoidance hole 12 is also a rectangular hole. The shape and size of the shaping position 11 and the shape and size of the avoidance hole 12 can be adaptively adjusted based on the shape of the product to be shaped, and the position of the avoidance hole 12 can be adaptively adjusted based on the structure of the product to be avoided.

[0051] like Figure 3 As shown, in this embodiment, four weight-reducing holes 13 are provided on the second shaping seat 102, and the weight-reducing holes 13 are square holes. Each weight-reducing hole 13 is arranged along the length direction of the second shaping seat 102, and the weight-reducing holes 13 are located between two rows of avoidance holes 12. In other alternative embodiments, the weight-reducing holes 13 can also be provided on the first shaping seat 101 at the same time, or only on the first shaping seat 101, and the shape, number and opening position of the weight-reducing holes 13 can be adjusted based on actual needs.

[0052] In this embodiment, two rows of eight shaping positions 11 are provided. In other alternative embodiments, the number of shaping positions 11 can be adaptively adjusted based on actual use requirements, such as three rows of twelve or other numbers.

[0053] Please refer to Figure 1 As shown, the clamping assembly 20 includes a clamping terminal 21 and a potential member 22. The clamping terminal 21 moves in a direction close to or away from the first shaped seat 101 ( Figure 1 The potential energy member 22 provides the clamping terminal 21 with a potential energy to move toward the direction close to the first shaping seat 101.

[0054] Please continue to refer to Figure 1As shown, the second shaping seat 102 is provided with a mounting sleeve 14, and the inner cavity of the mounting sleeve 14 passes through the second shaping seat 102. The clamping terminal 21 can be vertically slidably sleeved in the mounting sleeve 14, and the clamping terminal 21 can move vertically close to or away from the first shaping seat 101. During the use of the substrate warping shaping fixture, the first shaping seat 101 is placed on the workbench, at which time the first shaping seat 101 is located at the bottom of the substrate warping shaping fixture, and the second shaping seat 102 is located above the first shaping seat 101. The product composed of the shell and the substrate is placed on the protrusion 111 on the first shaping seat 101, and then the potential energy member 22 applies a downward potential energy to the clamping terminal 21, so that the clamping terminal 21 moves downward, presses on the product, and causes the substrate of the product to warp and deform.

[0055] In this embodiment, the potential energy member 22 includes a spring, the clamping terminal 21 is a cylindrical structure, the clamping terminal 21 is a stepped shaft, the small diameter section of the clamping terminal 21 can be slidably sleeved in the mounting sleeve 14, the large diameter section of the clamping terminal 21 is located between the first shaped seat 101 and the second shaped seat 102, and the potential energy member 22 is sleeved on the small diameter section of the clamping terminal 21. It should be ensured that the inner cavity of the mounting sleeve 14 is a stepped cavity, and its small diameter cavity is for the clamping terminal 21 to pass through, the potential energy member 22 is located in the large diameter cavity of the mounting sleeve 14, and the two ends of the potential energy member 22 are respectively connected to the bottom of the inner cavity of the mounting sleeve 14 and the end surface of the large diameter section of the clamping terminal 21. When the first shaped seat 101 and the second shaped seat 102 are relatively positioned, the potential energy member 22 is in a compressed state and stores elastic potential energy, then the potential energy member 22 has the potential energy to drive the clamping terminal 21 to slide toward the first shaped seat 101 side, so that the clamping terminal 21 can be pressed on the product.

[0056] In other alternative embodiments, the potential energy member may include a magnet and an attracting member that can be attracted by the magnet. The magnet may be disposed on the clamping terminal 21, and the clamping terminal 21 may be further entirely composed of a permanent magnet. The attracting member may be an object with ferromagnetism, such as made of iron, nickel, or an iron-nickel alloy. Of course, in some other embodiments, those skilled in the art may select other structures for the potential energy member according to the prior art, and the present invention is not limited thereto.

[0057] Please refer to Figure 4 As shown, an anti-reversal member 30 is further provided on the upper surface of the first shaping seat 101 , and the anti-reversal member 30 is used to identify the placement direction of the first shaping seat 101 to prevent the first shaping seat 101 from being reversed during use.

[0058] In this embodiment, the anti-reverse member 30 is an anti-reverse protrusion structure disposed on the upper surface of the first shaping seat 101. Figure 4Two anti-reverse protrusion structures are arranged on both sides of the width of each shaping position 11, which are used to mark the placement direction of the front and back sides of the first shaping seat 101.

[0059] The anti-reverse member 30 can not only be used to prevent the first shaping seat 101 from reversing, but the anti-reversal member 30 can also cooperate with the groove on the product to prevent the product placed on the protrusion 111 from reversing.

[0060] In other alternative embodiments, an anti-reverse protrusion structure may be added on the upper surface of the first shaping seat 101 to mark the left and right directions of the first shaping seat 101. For example, an anti-reverse protrusion structure is added near the left edge of the upper surface of the first shaping seat 101 to mark the left side to prevent the first shaping seat 101 from being reversed in the left and right directions.

[0061] In other alternative embodiments, the anti-reversal member 30 may also adopt a groove structure or a color mark or other structure with an identification function.

[0062] In this embodiment, the anti-reverse member 30 is disposed on the first shaping seat 101. In other alternative embodiments, based on use requirements, the anti-reverse member 30 may also be disposed on the second shaping seat 102 at the same time, or the anti-reverse member may be disposed only on the second shaping seat 102.

[0063] Please refer to Figures 1 to 4 As shown, the substrate warping shaping fixture also includes a support member 40 and a connector 50, wherein the support member 40 is used to support between the first shaping seat 101 and the second shaping seat 102 so that a shaping space is formed therebetween, and the first shaping seat 101 is detachably connected to the second shaping seat 102 via the connector 50.

[0064] Please refer to Figure 4 As shown, in this embodiment, four support members 40 are provided, and the support members 40 are connected to the first shaping seat 101, and the four support members 40 are respectively provided at the four corners of the first shaping seat 101. The support members 40 are cylindrical boss structures, and the four support members 40 are of equal height. The four corners of the second shaping seat 102 are respectively supported on the four cylindrical bosses, so the first shaping seat 101 and the second shaping seat 102 are arranged in parallel, and the shaping space between the first shaping seat 101 and the second shaping seat 102 is naturally determined, and the shaping space is used to accommodate the product.

[0065] In other alternative embodiments, the support member 40 can be a support block of a rectangular parallelepiped or a support structure of other shapes. In addition, in other alternative embodiments, the support member 40 can also be connected to the second shaping seat 102.

[0066] Please refer to Figure 1 and Figure 2As shown, in this embodiment, the connecting member 50 adopts a locking structure, and the movable buckle of the locking member is connected to the second shaping seat 102 through a hinge, and the fixed buckle of the locking member is fixedly connected to the first shaping seat 101. When the second shaping seat 102 is supported on the supporting member 40 and positioned relative to the first shaping seat 101, the movable buckle is buckled on the fixed buckle to realize the detachable connection between the first shaping seat 101 and the second shaping seat 102.

[0067] In other alternative embodiments, the connecting member 50 may also be connected by bolts, snap-fit ​​or other known detachable connection methods.

[0068] Please continue to refer to Figures 1 to 4 As shown, the substrate warping shaping fixture further includes a positioning member 60, and the positioning member 60 is disposed on the first shaping seat 101. Here, the positioning member 60 is disposed on the first shaping seat 101, including the positioning member 60 being directly connected to the first shaping seat 101 and the positioning member 60 being indirectly connected to the first shaping seat 101 through other members. Figure 4 As shown, in this embodiment, four positioning members 60 are provided and are arranged one by one with four supporting members 40, and the positioning members 60 are indirectly connected to the first shaping seat 101 through the supporting members 40. Specifically, the positioning members 60 are cylindrical pin shaft structures, and the positioning members 60 are coaxially connected to the upper end of the supporting members 40, and the outer diameter of the positioning members 60 is smaller than the outer diameter of the supporting members 40. Figure 3 As shown, a positioning hole 15 is adaptively opened on the second shaping seat 102. When the second shaping seat 102 is supported on the support member 40, the positioning member 60 passes through the positioning hole 15 on the second shaping seat 102, so that the first shaping seat 101 and the second shaping seat 102 are relatively positioned, and the first shaping seat 101 and the second shaping seat 102 are accurately positioned by the support member 40 and the positioning member 60.

[0069] In this embodiment, the positioning member 60 is indirectly connected to the first shaping seat 101 through the support member 40. In other alternative embodiments, the positioning member 60 may also be directly connected to the first shaping seat 101. In addition, the positioning member 60 may also be arranged on the second shaping seat 102, and the specific arrangement position of the positioning member 60 may be adjusted based on actual use requirements.

[0070] Please refer to Figures 4 to 8 As shown, the shaping seat 11 further includes a groove 112, which is an annular groove and is opened on the upper surface of the first shaping seat 101. The protrusion 111 is arranged on the first shaping seat 101, and the groove 112 surrounds the protrusion 111.

[0071] The groove 112 is a rectangular frame structure, so that the upper surface of the first shaping seat 101 surrounded by the groove 112 is a rectangular area. There are four protrusions 111, which are arranged at the four corners of the rectangular area. In this embodiment, the protrusion 111 is a square protrusion structure, which is adapted to the four corners of the above-mentioned rectangular area.

[0072] The upper surface of the protrusion 111 is used to carry the product, and its upper surface is in direct contact with the substrate of the product. In this embodiment, the upper surface of the protrusion 111 is a planar structure. In other alternative embodiments, the upper surface of the protrusion 111 can be set to a concave arc structure, and the size of the arc of the upper surface is adapted to the warping deformation required by the substrate. Of course, the upper surface of the protrusion 111 can also be set to a spherical surface or other structures.

[0073] Combination Figure 7 and Figure 8 As shown, further, the shaping position 11 also includes a recessed area 113 arranged on the first shaping seat 101, and the protrusion 111 is arranged in the recessed area 113. The recessed area 113 is surrounded by the groove 112, and the recessed area 113 is slightly lower than the upper surface of other positions of the first shaping seat 101. Through the cooperation of the height difference between the protrusion 111 and the recessed area 113, a space for avoiding the warping deformation of the product is formed to facilitate the warping deformation of the product. At the same time, through the setting of the groove 112, it is used to avoid the edge position of the product to prevent interference of the product during the warping deformation process.

[0074] In this embodiment, each shaping position 11 is equipped with four pressing components 20 through four protrusions 111 to meet the requirements of product warping deformation under pressure. In other alternative embodiments, the shape, number of protrusions and the shape of grooves can be adaptively adjusted based on actual use requirements. For example, two protrusions 111 are provided, and the two protrusions 111 are parallel and arranged in a long strip shape, and the two sides of the product are mounted on the two protrusions 111. In addition, the position of the pressing component 20 relative to the shaping position 11 can also be adaptively adjusted based on the force application position on the product.

[0075] Please refer to Fig. 9 As shown, in the warping shaping process, the product 70 is first placed on the protrusion 111, the middle of the product 70 is suspended, and pressure is applied to the shell 71 of the product 70 through the pressing assembly, so that the substrate 72 of the product is adaptively warped, and the lowest part of the substrate 72 after warping fits in the recessed area 113. After the warping of the substrate is fixed by the cooperation of the protrusion 111 and the pressing assembly, the warping deformation is fixed by high-temperature baking.

[0076] The above-mentioned substrate warping shaping jig can ensure that the substrate fits the shaping jig through the appropriate height of the protrusion 111 and the appropriate downward pressure, thereby forming a preset warping deformation, which is convenient for controlling the warping arc. The degree of warping deformation can be adjusted by modifying the height of the protrusion 111 and the downward pressure to adjust the final warping shape of the substrate, so as to achieve control of the substrate warping and meet the requirements of the finished product.

[0077] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0078] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation on the scope of the utility model. Any changes and modifications made by ordinary technicians in the field of the utility model based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A substrate warping shaping jig, characterized in that: include: Forming seat and clamping assembly; The shaping seat is provided with at least one shaping position, and the shaping position includes at least two protrusions for carrying the product; The pressing assembly is arranged on the shaping seat, and is used to apply pressure to the product carried on the protrusion to deform its base plate.

2. The substrate warping shaping jig according to claim 1, characterized in that: The shaping seat comprises a first shaping seat and a second shaping seat connected to each other, the shaping position is arranged on the first shaping seat, and the pressing assembly is arranged on the second shaping seat.

3. The substrate warping shaping jig according to any one of claims 1 or 2, characterized in that: The shaping position further comprises a groove, which is an annular groove and is opened on the shaping seat, the protrusion is arranged on the shaping seat, and the groove surrounds the protrusion.

4. The substrate warping shaping jig according to claim 3, characterized in that: The shaping position further comprises a recessed area arranged on the shaping seat, the protrusion is arranged in the recessed area and the groove surrounds the recessed area.

5. The substrate warping shaping jig according to claim 2, characterized in that: The second shaping seat is provided with a plurality of avoidance holes, and each of the avoidance holes is arranged in one-to-one correspondence with each of the shaping positions.

6. The substrate warping shaping jig according to claim 2, characterized in that: The first shaping seat and / or the second shaping seat is also provided with an anti-reversal piece, and the anti-reversal piece is used to identify the placement direction of the first shaping seat and / or the second shaping seat.

7. The substrate warping shaping jig according to claim 2, characterized in that: The substrate warping shaping fixture further includes a supporting member and a connecting member, wherein the supporting member is used to support between the first shaping seat and the second shaping seat so as to form a shaping space therebetween, and the first shaping seat is detachably connected to the second shaping seat via the connecting member.

8. The substrate warping shaping jig according to claim 2, characterized in that: The substrate warping shaping fixture further includes a positioning member, and the positioning member is arranged on the first shaping seat and / or the second shaping seat for positioning the first shaping seat and the second shaping seat.

9. The substrate warping shaping jig according to claim 2, characterized in that: The first shaping seat and / or the second shaping seat are provided with weight-reducing holes.

10. The substrate warping shaping jig according to claim 2, characterized in that: The clamping assembly includes a clamping terminal and a potential energy piece. The clamping terminal is arranged on the second shaping seat and moves in a direction close to or away from the first shaping seat. The potential energy piece provides the clamping terminal with a potential energy to move toward the first shaping seat.

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