High-temperature heater with built-in electrode

Abstract

The high-temperature heater comprises a heater body, the heater body comprises a base, a lower layer plate, a sandwich plate, a middle plate and an upper layer plate, an electrode plate is installed between the upper layer plate and the middle plate, a heating element is installed between the middle plate and the sandwich plate, and a heat insulation element is installed between the sandwich plate and the lower layer plate; the heating element is connected with the conductive column, and the electrode is connected to the current feed-in interface through the bias voltage radio frequency module. Compared with the prior art, the heating device has the advantages that the heating device can be heated to more than 900 DEG C, the high-temperature-resistant electrode is arranged in the heating device, so that bias radio frequency can be carried out under the high-temperature condition, various process combinations are realized, the process uniformity of wafers is improved, the blowing air channel is arranged in the heating device, the heating element is prevented from being oxidized, and the service life of the heating device is prolonged.

Description

Technical Field

[0001] The utility model relates to a heater, in particular to a high-temperature heater with built-in electrodes. Background Art

[0002] In the field of wafer manufacturing, the wafer needs to reach a certain set temperature before the plasma stripping and plasma etching processes, and then the process can be carried out; the conventional method is to heat the heater to a certain temperature, place the wafer on the upper surface of the heater, and heat the wafer by heat conduction. When the wafer reaches the set temperature, process testing can be carried out; conventional heaters can only be used in a vacuum environment and are made of metal. They are equipped with heating rods inside for heating. The materials are usually aluminum alloy and stainless steel. Due to the properties of the materials themselves, the heating temperature of aluminum alloy heaters usually does not exceed 400 degrees, and the heating temperature of stainless steel heaters usually does not exceed 650 degrees; when faced with some processes that require heating temperatures to reach 700-1000 degrees or even higher, conventional heaters cannot meet the requirements.

[0003] In etching equipment, bias radio frequency is usually applied to the electrode plate inside the heater to improve the magnetic field distribution and plasma bombardment on the wafer surface, but conventional electrode plates are made of aluminum alloy and cannot work above 400 degrees.

[0004] Therefore, developing a high-temperature heater with built-in electrodes has become an urgent problem to be solved by those skilled in the art. Utility Model Content

[0005] The utility model is to solve the above-mentioned shortcomings and provides a high-temperature heater with built-in electrodes.

[0006] The above-mentioned purpose of the utility model is achieved through the following technical solutions: a high-temperature heater with built-in electrodes, including a heater body, the heater body including a base, a lower plate, a sandwich plate, an intermediate plate and an upper plate, an electrode plate is installed between the upper plate and the intermediate plate, the electrode is connected to the current feed interface through a bias radio frequency module to realize bias radio frequency, change the magnetic field distribution and airflow distribution on the surface of the wafer, and realize various process requirements; a heating element is installed between the intermediate plate and the sandwich plate, and a heat insulation element is installed between the sandwich plate and the lower plate; the heating element is connected to a conductive column, and heating is realized by powering on, and can be heated to 900 degrees or above, and the heat insulation element can effectively isolate the damage to the lower parts caused by high temperature. The heater can be used in vacuum, atmosphere, high and low pressure environments.

[0007] Furthermore, the heater body is made of quartz.

[0008] Furthermore, the heat insulation element is mainly made of opaque quartz, which can isolate heat conduction.

[0009] Furthermore, the heating element is made of metal material or non-metal material; the metal material is usually tungsten, molybdenum, rhenium, titanium, etc., and the non-metal material is graphite, silicon carbide, etc., and it can also be a heating wire or a heating tube.

[0010] Furthermore, the electrode plate is made of metal material or non-metal material; the metal material is usually tungsten, molybdenum, rhenium, titanium, platinum or their alloys, and the non-metal material is graphite, graphene, conductive ceramics, etc. These materials can work in a high temperature environment above 650 degrees.

[0011] Furthermore, three circular through holes are provided on the top of the heater body, which can cooperate with the lifting and lowering of a lift pin.

[0012] Furthermore, a thermocouple is provided in the heater body for monitoring the temperature and achieving temperature control.

[0013] Furthermore, the heater body is provided with a gas feed channel, through which non-oxidizing gas (such as nitrogen, helium, argon, etc.) is introduced. The heating element is in a high-temperature heating state for a long time. If the inside is filled with atmosphere, the element will be oxidized. It is necessary to use non-oxidizing gas for purging to prevent oxidation and at the same time increase the service life of the heater.

[0014] Compared with the prior art, the utility model has the following advantages: the utility model can be heated to above 900 degrees, and has a built-in high-temperature resistant electrode, so that it can perform bias radio frequency under high temperature conditions, realize a variety of process combinations, improve the process uniformity of the wafer, and is equipped with a purge airway inside to prevent oxidation of the heating element and increase the service life of the heater. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a semi-exploded structural schematic diagram of the utility model.

[0016] Figure 2 It is a schematic diagram of the overall structure of the utility model.

[0017] Figure 3 It is a schematic diagram of the longitudinal section where two conductive pillars of the utility model are located.

[0018] Figure 4 It is a schematic diagram of the longitudinal section where the current feed-in interface and the thermocouple of the utility model are located.

[0019] Figure 5 It is a schematic diagram of the top view of the sandwich panel in the utility model. DETAILED DESCRIPTION

[0020] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0021] like Figures 1 to 5As shown, a high temperature heater with built-in electrodes comprises a heater body 1, wherein the heater body 1 is made of quartz, and three circular through holes 2 are opened on the top of the heater body 1 to cooperate with the lifting and lowering of a lift pin.

[0022] The heater body 1 includes a base 101 , a lower plate 102 , an interlayer plate 103 , a middle plate 104 and an upper plate 105 .

[0023] The electrode plate 3 is installed between the upper plate 105 and the middle plate 104; the electrode plate 3 is connected to the current feed interface 4 through the bias RF module 10 to realize bias RF, change the magnetic field distribution and airflow distribution on the surface of the wafer, and realize various process requirements. The electrode plate 3 is made of metal material or non-metal material; the metal material is usually tungsten, molybdenum, rhenium, titanium, platinum or its alloy, and the non-metal material is graphite, graphene, conductive ceramics, etc. These materials can work in a high temperature environment above 650 degrees.

[0024] A heating element 5 is installed between the middle plate 104 and the sandwich plate 103. The heating element 5 is installed in a heating element installation groove 106 provided on the sandwich plate 103. The heating element 5 is made of metal material or non-metal material; the metal material is usually tungsten, molybdenum, rhenium, titanium, etc., and the non-metal material is graphite, silicon carbide, etc., and it can also be a heating wire or a heating tube.

[0025] A heat-insulating element 6 is installed between the sandwich plate 103 and the lower plate 102. The heat-insulating element 6 is mainly made of opaque quartz and can isolate heat conduction. The heating element 5 is connected to the conductive column 7 and is powered on to achieve heating. The heating can be heated to 900 degrees or above. The heat-insulating element 6 can effectively isolate the damage to the lower components caused by high temperature.

[0026] The heater body 1 of the utility model is provided with a thermocouple 8 for monitoring the temperature and realizing temperature control. In addition, the heater body 1 is provided with a gas feeding channel 9, through which a non-oxidizing gas (such as nitrogen, helium, argon, etc.) is introduced. The heating element 5 is in a high-temperature heating state for a long time. If the interior is filled with air, the element will be oxidized. It is necessary to use a non-oxidizing gas for purging to prevent oxidation and improve the service life of the heater. The gas feeding channel 9 is provided with a gas inlet 901 and a gas outlet 902, which are respectively located at the two ends of the heating element mounting groove 106.

[0027] The heater of the utility model can be used in vacuum, atmosphere, high pressure and low pressure environments.

[0028] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A high temperature heater with a built-in electrode, comprising a heater body, characterized in that: The heater body includes a base, a lower plate, a sandwich plate, an intermediate plate and an upper plate. An electrode plate is installed between the upper plate and the intermediate plate, a heating element is installed between the intermediate plate and the sandwich plate, and an insulation element is installed between the sandwich plate and the lower plate. The heating element is connected to a conductive column, and the electrode is connected to a current feed interface through a biased RF module.

2. A high temperature heater with built-in electrodes according to claim 1, characterized in that: The heater body is made of quartz.

3. The high temperature heater with built-in electrodes according to claim 1, characterized in that: The thermal insulation element is mainly opaque quartz.

4. The high temperature heater with built-in electrodes according to claim 1, characterized in that: The heating element is made of a metal material or a non-metal material. The metal material is usually tungsten, molybdenum, rhenium or titanium, and the non-metal material is graphite or silicon carbide.

5. The high temperature heater with built-in electrodes according to claim 1, characterized in that: The electrode plate is made of a metal material or a non-metal material. The metal material is tungsten, molybdenum, rhenium, titanium, platinum or an alloy thereof. The non-metal material is graphite, graphene or conductive ceramic.

6. The high temperature heater with built-in electrodes according to claim 1, characterized in that: The top of the heater body is provided with three circular through holes to cooperate with the lifting and lowering of the ejector pin.

7. The high temperature heater with built-in electrodes according to claim 1, characterized in that: A thermocouple is arranged in the heater body.

8. The high temperature heater with built-in electrodes according to claim 1, characterized in that: The heater body is provided with a gas feeding channel.

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