Washing device and polycrystalline silicon production system

Abstract

The utility model discloses a washing device and a polycrystalline silicon production system. The washing device comprises a washing unit with a cavity and a driving unit, a washing liquid outlet of the washing unit is communicated with a washing liquid inlet of the washing unit through the driving unit, and the elevation of the washing liquid inlet of the washing unit is higher than that of the washing liquid outlet of the washing unit; the washing unit comprises a washing tower, a first blocking piece is arranged in the washing tower, the first blocking piece and at least part of the side wall of the washing tower are enclosed to form a washing liquid cavity with an opening in the top, and a washing liquid outlet of the washing unit is communicated with the washing liquid cavity. The washing device provided by the utility model has the characteristics of difficulty in blockage and longer continuous operation time.

Description

Technical Field

[0001] The utility model relates to a washing device and a polysilicon production system, belonging to the field of applied chemical industry. Background Art

[0002] At present, the mainstream polysilicon production process in China adopts the modified Siemens method, which uses hydrogen to reduce gaseous trichlorosilane in the reduction furnace, and chemically deposits the trichlorosilane on the silicon core in the reduction furnace to generate rod-shaped polysilicon. The reduction furnace production process is an intermittent operation, and the furnace needs to be opened regularly to unload the polysilicon rods and install the silicon core. Before the reduction furnace stops depositing and opens the furnace, nitrogen needs to be used to replace the gas in the reduction furnace multiple times, and the silicon powder replacement waste gas enters the washing tower, where water is used for spray washing.

[0003] In the prior art, washing liquid is usually extracted from the bottom of the washing tower and pumped into the top of the washing tower by a circulating pump for spray washing. However, since the washing liquid contains silicon powder, the washing tower has the disadvantages of easy blockage of the circulation pipeline and short continuous operation time.

[0004] Therefore, developing a washing device that is not easy to clog and has a long continuous operation time has become a research direction. Utility Model Content

[0005] The utility model provides a washing device which has the characteristics of being not easily blocked and having a long continuous operation time.

[0006] The utility model also provides a polysilicon production system, which has the characteristic of long continuous operation time.

[0007] The utility model provides a washing device, which comprises a washing unit with a cavity and a driving unit;

[0008] The washing liquid outlet of the washing unit is connected to the washing liquid inlet of the washing unit through the driving unit, and the washing liquid inlet of the washing unit is at a higher elevation than the washing liquid outlet of the washing unit;

[0009] The washing unit comprises a washing tower, a first blocking member is arranged in the washing tower, the first blocking member is enclosed with at least part of the side wall of the washing tower to form a washing liquid cavity with a top opening, and a washing liquid outlet of the washing unit is connected with the washing liquid cavity.

[0010] The washing device as described above, wherein the height of the first blocking member is greater than or equal to 30% of the height of the washing tower.

[0011] In the washing device as described above, the percentage of the projection area of ​​the washing liquid cavity on the reference plane to the projection area of ​​the washing tower side wall on the reference plane is greater than or equal to 30%, and the reference plane is perpendicular to the height direction of the washing tower.

[0012] The washing device as described above, wherein the washing tower is further provided with a second blocking member connected to at least part of the side wall of the washing tower, the projection of the second blocking member on the reference plane covers the projection of the first blocking member on the reference plane, and the reference plane is perpendicular to the height direction of the washing tower;

[0013] The washing liquid inlet of the washing unit has a higher elevation than the second blocking member, and the second blocking member has a higher elevation than the first blocking member.

[0014] The washing device as described above, wherein, further comprises a sedimentation unit, wherein the washing liquid outlet of the washing unit is connected to the washing liquid inlet of the washing unit through the sedimentation unit and the driving unit in sequence.

[0015] In the washing device as described above, the precipitation unit comprises N precipitation chambers connected in sequence, each precipitation chamber is provided with at least one precipitation chamber silicon powder discharge port at the bottom, and N≥2.

[0016] In the washing device as described above, N=2, the washing liquid inlet of the first sedimentation chamber is connected to the washing liquid outlet of the washing unit, and the liquid outlet of the second sedimentation chamber is connected to the washing liquid inlet of the washing unit through the driving unit.

[0017] The washing device as described above, wherein it further comprises a nitrogen supply unit and a reduction unit, wherein the nitrogen supply unit is connected to the replacement gas inlet of the washing unit through the reduction unit.

[0018] The washing device as described above, wherein it further comprises a water replenishing unit, wherein a replenishing water outlet of the water replenishing unit is connected to a replenishing water inlet of the washing unit.

[0019] The utility model also provides a polysilicon production system, which comprises any one of the above-mentioned washing devices.

[0020] The washing device provided by the utility model has the characteristics of being not easy to be blocked and having a long continuous operation time. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced one by one below. Obviously, the drawings in the following description are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0022] Figure 1 A structural diagram of a first washing device provided in the first aspect of the utility model;

[0023] Figure 2 for Figure 1 Equipment diagram of the washing device shown;

[0024] Figure 3 An equipment diagram of a second washing device provided by the utility model;

[0025] Figure 4 The equipment diagram of the third washing device provided by the utility model;

[0026] Figure 5 A structural diagram of a fourth washing device provided by the utility model;

[0027] Figure 6 for Figure 5 Equipment diagram of the washing unit shown.

[0028] Description of reference numerals:

[0029] A-nitrogen supply unit;

[0030] A1-Plant nitrogen source;

[0031] B-reduction unit;

[0032] B1-reduction furnace;

[0033] C-washing unit;

[0034] C1-wash tower;

[0035] C11 - first blocking member;

[0036] C12 - second blocking member;

[0037] D-precipitation unit;

[0038] D1- Sedimentation tank;

[0039] D11-first precipitation chamber;

[0040] D12-second precipitation chamber;

[0041] E-drive unit;

[0042] E1-centrifugal pump;

[0043] F-water replenishment unit;

[0044] F1-factory washing water source. DETAILED DESCRIPTION

[0045] In order to enable those skilled in the art to better understand the scheme of the utility model, the utility model is further described in detail below. The specific implementation methods listed below are only for describing the principles and features of the utility model. The examples are only used to explain the utility model and do not limit the scope of the utility model. Based on the embodiments of the utility model, all other implementation methods obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0046] Figure 1 A structural diagram of a washing device provided in the first aspect of the utility model, such as Figure 1 As shown, the washing device comprises a C-washing unit having a cavity and an E-driving unit;

[0047] The washing liquid outlet of the C-washing unit is connected to the washing liquid inlet of the C-washing unit through the E-driving unit, and the washing liquid inlet of the C-washing unit is at a higher elevation than the washing liquid outlet of the C-washing unit;

[0048] The C-washing unit includes a C1-washing tower, in which a C11-first blocking member is arranged. The C11-first blocking member and at least part of the side wall of the C1-washing tower are enclosed to form a washing liquid cavity with an opening at the top. The washing liquid outlet of the C-washing unit is connected to the washing liquid cavity.

[0049] The C-washing unit is used to wash the object to be processed. Specifically, the object to be processed enters the cavity of the C-washing unit, and the washing liquid moves in the cavity along the direction of gravity to wash the object to be processed.

[0050] The C-washing unit includes a washing liquid inlet and a washing liquid outlet, wherein the washing liquid inlet is at a higher elevation than the washing liquid outlet. The washing liquid enters the C-washing unit from the washing liquid inlet, moves in the direction of gravity, washes the objects to be processed during the movement, and leaves the C-washing unit from the washing liquid outlet.

[0051] The E-drive unit is used to drive the washing liquid, specifically, to drive the washing liquid to be transported from the washing liquid outlet of the C-washing unit at a lower elevation to the washing liquid inlet of the C-washing unit. The utility model does not limit the specific equipment selection of the E-drive unit. In one embodiment, the E-drive unit is an E1-centrifugal pump. The setting of the E-drive unit can realize the circulation of the washing liquid of the C-washing unit.

[0052] The present invention does not limit the connection method between the washing liquid outlet of the C-washing unit, the E-driving unit, and the washing liquid inlet of the C-washing unit. In one embodiment, a pipeline connection is used.

[0053] In one embodiment, the C-washing unit comprises a C1-washing tower. It is well known in the art that the C1-washing tower contains a cavity, and in this embodiment, the inner space of the C1-washing tower is the washing device cavity, the washing liquid inlet of the C1-washing tower is the washing liquid inlet of the C-washing unit, and the washing liquid outlet of the C1-washing tower is the washing liquid outlet of the C-washing unit.

[0054] Figure 2 for Figure 1 The equipment diagram of the device shown. Figure 2 As shown, Figure 2 It includes a C1-washing tower, a C11-first blocking member, and an E1-centrifugal pump. The C1-washing tower is provided with a C11-first blocking member, which is enclosed with at least part of the side wall of the C1-washing tower to form a washing liquid cavity with an opening at the top, and the washing liquid outlet of the C-washing unit is connected to the washing liquid cavity.

[0055] The function of the C11-first barrier is to separate a washing liquid chamber in the C1-washing tower. The side wall and the bottom of the washing liquid chamber are formed by the C11-first barrier and at least part of the side wall of the C1-washing tower. The top of the washing liquid chamber is open and communicated with the tower space inside the C1-washing tower. That is, as the washing liquid level in the C1-washing tower rises, when the liquid level is equal to or higher than the elevation of the top opening of the washing liquid chamber, the washing liquid will enter the washing liquid chamber from the top opening of the washing liquid.

[0056] Furthermore, the washing liquid chamber is also connected to the washing liquid outlet of the C-washing unit. After the washing liquid enters the washing liquid chamber from the top opening of the washing liquid, when the height of the washing liquid chamber is equal to or higher than the washing liquid outlet elevation of the C-washing unit, the washing liquid will leave the C-washing unit from the washing liquid outlet of the C-washing unit, pass through the E-drive unit, and enter the C1-washing tower from the washing liquid inlet of the C-washing unit, completing the circulation of the washing liquid.

[0057] When the object to be treated is a gas containing water-insoluble solids, the solids enter the washing liquid and are deposited at the bottom of the washing liquid. The C11-first blocking member is arranged in the C1-washing tower, and the washing liquid cavity formed can control the upper supernatant of the washing liquid to enter the washing liquid cavity, and prevent the solids contained in the bottom of the washing liquid from entering the washing liquid cavity, thereby reducing the amount of solid impurities entering the E-drive unit and its affiliated pipelines, reducing the probability of pipeline blockage and equipment damage, so that the washing device provided by the utility model has a longer continuous operation time and lower operating costs.

[0058] The washing device provided by the utility model is not limited to the type of the object to be treated, and the device is particularly suitable for washing gas containing water-insoluble solids. In one embodiment, the object to be treated is nitrogen containing silicon powder.

[0059] It can be understood that in order to discharge the solid impurities deposited in the C1-washing tower, in one embodiment, at least one solid impurity discharge port is provided at the bottom of the C1-washing tower; further, in one embodiment, at least one solid impurity discharge port is provided in the washing liquid chamber, and the elevation of the solid impurity discharge port is lower than the washing liquid outlet of the C-washing unit.

[0060] In one embodiment, the height of the C11-first barrier is greater than or equal to 30% of the height of the C1-washing tower. The C11-first barrier with the above characteristics can obtain washing liquid at a higher liquid level, and the washing liquid contains fewer solid impurities, so that the washing device provided by the utility model has a longer continuous operation time and lower operation cost.

[0061] Further, in one embodiment, the percentage of the projection area of ​​the washing liquid cavity on the reference plane to the projection area of ​​the C1-washing tower side wall on the reference plane is greater than or equal to 30%, and the reference plane is perpendicular to the height direction of the C1-washing tower.

[0062] The reference plane is perpendicular to the height direction of the C1-washing tower. The reference plane passes through the C1-washing tower body, and the area of ​​the quasi-circular area formed by the intersection with the C1-washing tower is the projection area of ​​the side wall of the C1-washing tower on the reference plane, that is, the cross-sectional area of ​​the C1-washing tower. In one embodiment, the projection area of ​​the washing liquid cavity on the reference plane accounts for a percentage of greater than or equal to 30% of the projection area of ​​the side wall of the C1-washing tower on the reference plane.

[0063] The larger the percentage of the projected area of ​​the washing liquid chamber on the reference plane to the projected area of ​​the side wall of the C1-washing tower on the reference plane, the larger the volume of the washing liquid chamber, the slower the liquid flow rate in the washing liquid chamber, and the solid impurities contained in the washing liquid in the washing liquid chamber can be further precipitated, thereby reducing the solid impurity concentration of subsequent units, so that the washing device provided by the utility model has a longer continuous operation time and a lower operating cost.

[0064] Figure 3 This is a diagram of the second type of washing device provided by the utility model. Figure 3 As shown, the C1-washing tower is also provided with a C12-second blocking member connected to at least part of the side wall of the C1-washing tower, and the projection of the C12-second blocking member on the reference plane covers the projection of the C11-first blocking member on the reference plane, and the reference plane is perpendicular to the height direction of the C1-washing tower;

[0065] The elevation of the washing liquid inlet of the C-washing unit is higher than that of the C12-second blocking member, and the elevation of the C12-second blocking member is higher than that of the C11-first blocking member.

[0066] The function of the C12-second blocking member is to prevent the washing liquid from the washing liquid inlet of the C-washing unit from carrying solid impurities and falling directly into the washing liquid cavity. Specifically, the elevation of the C12-second blocking member is higher than that of the C11-first blocking member, and the projection of the C12-second blocking member on the reference plane covers the projection of the C11-first blocking member on the reference plane. Then, the C12-second blocking member can prevent the washing liquid from the washing liquid inlet from carrying solid impurities and falling directly into the washing liquid cavity. Under the action of the C12-second blocking member, the washing liquid first falls into the bottom of the C1-washing tower below the washing liquid cavity. As the liquid level rises, it overflows from the upper edge of the C11-first blocking member (the top opening of the washing liquid cavity) into the washing liquid cavity, and then leaves the C-washing unit from the washing liquid outlet of the C-washing unit, thereby further reducing the concentration of solid impurities entering the washing liquid cavity and subsequent units, so that the washing device provided by the utility model has a longer continuous operation time and lower operation costs.

[0067] In one embodiment, the washing device provided by the utility model further includes a D-precipitation unit, and the washing liquid outlet of the C-washing unit is connected to the washing liquid inlet of the C-washing unit through the D-precipitation unit and the E-driving unit in sequence.

[0068] The D-precipitation unit receives the washing liquid obtained after washing the object to be treated. The washing liquid leaves the C-washing unit through the washing liquid outlet of the C-washing unit and enters the D-precipitation unit through the washing liquid inlet of the D-precipitation unit for precipitation treatment. The washing liquid containing solid impurities enters the D-precipitation unit, where the solid impurities settle under the action of gravity, completing the separation process from the washing liquid.

[0069] The present invention does not limit the specific equipment selection of the D-precipitation unit. In one embodiment, the D-precipitation unit is a D1-precipitation tank.

[0070] The washing liquid obtained after the solid impurities are precipitated enters the C-washing unit again through the washing liquid inlet of the C-washing unit under the action of the E-driving unit. Since the washing liquid inlet of the C-washing unit is at a higher elevation than the washing liquid outlet of the C-washing unit, the washing liquid re-entering the C-washing unit falls under the action of gravity and washes the replacement gas again during the falling process, and then leaves the C-washing unit through the washing liquid outlet of the C-washing unit and enters the D-precipitation unit to start the next cycle.

[0071] In one embodiment, the D-precipitation unit includes N precipitation chambers connected in sequence, each precipitation chamber is provided with at least one precipitation chamber silicon powder discharge port at the bottom, and N≥2.

[0072] The D-sedimentation unit slows down the liquid flow rate by increasing the flow area, so that the solid impurities in the washing liquid settle under the action of gravity. Providing multiple mutually connected sedimentation chambers in the D-sedimentation unit is equivalent to adding multiple baffles connected to the bottom of the D-sedimentation unit in the D-sedimentation unit. The solid impurities slide down along the baffles to the bottom of the D-sedimentation unit due to the obstruction of the baffles during the sedimentation, thereby achieving the purpose of removing the solid impurities in the washing liquid. Correspondingly, the cavity walls of the multiple sedimentation chambers are equivalent to baffles. The solid impurities are blocked by the cavity walls during the sedimentation and slide to the bottom of the sedimentation chamber. The water flows from the upper end of the sedimentation chamber into the next sedimentation chamber, completing the removal of the solid impurities.

[0073] Providing mutually interconnected sedimentation chambers in the D-sedimentation unit helps to reduce the volume of the D-sedimentation unit, reduce construction costs, and improve the solid impurity removal efficiency of the D-sedimentation unit.

[0074] Furthermore, in one embodiment, at least one solid impurity discharge port is provided at the bottom of each sedimentation chamber to discharge the solid impurities accumulated at the bottom of the sedimentation chamber, thereby improving the operation efficiency of the D-sedimentation unit.

[0075] Figure 4 This is a diagram of the third type of washing device provided by the utility model. Figure 4 As shown, N=2, the D1-sedimentation tank is provided with a D11-first sedimentation chamber and a D12-second sedimentation chamber, wherein the washing liquid inlet of the D11-first sedimentation chamber is connected to the washing liquid outlet of the C-washing unit, and the liquid outlet of the D12-second sedimentation chamber is connected to the washing liquid inlet of the C-washing unit through the E-drive unit.

[0076] In this embodiment, the number of sedimentation chambers is 2, the washing liquid inlet of the D11-first sedimentation chamber is connected to the washing liquid outlet of the C-washing unit, and the liquid outlet of the D12-second sedimentation chamber is connected to the washing liquid inlet of the C-washing unit through the E-driving unit. Providing two sedimentation chambers in the D-sedimentation unit can further improve the solid impurity removal efficiency of the D-sedimentation unit while reducing the construction cost.

[0077] In one embodiment, the washing device provided by the utility model further includes an A-nitrogen supply unit and a B-reduction unit, and the A-nitrogen supply unit is connected to the replacement gas inlet of the C-washing unit through the B-reduction unit.

[0078] The above-mentioned device can be used to prepare polysilicon. Specifically, the raw materials including hydrogen and silicon trichloride undergo oxidation-reduction reaction in the B-reduction unit to generate silicon element. The utility model does not limit the specific equipment selection of the B-reduction unit. In one embodiment, the B-reduction unit is a B1-reduction furnace. The production process of the B1-reduction furnace is an intermittent operation, and the furnace needs to be opened regularly to unload polysilicon rods and install silicon cores. Before the B1-reduction furnace stops depositing and opens the furnace, it is necessary to use nitrogen from the A-nitrogen supply unit to replace the gas in the B1-reduction furnace multiple times, and the replacement gas (the component is nitrogen including silicon powder) needs to enter the C-washing unit for further processing. The utility model does not limit the specific equipment selection of the A-nitrogen supply unit. In one embodiment, the A-nitrogen supply unit is the A1-plant nitrogen source.

[0079] Figure 5 This is a structural diagram of another washing device provided by the utility model. Figure 5 As shown, the washing device provided by the utility model includes not only A-nitrogen supply unit, B-reduction unit, C-washing unit, D-precipitation unit, and E-driving unit connected in sequence, but also F-water replenishment unit, and the replenishment water outlet of the F-water replenishment unit is connected to the replenishment water inlet of the C-washing unit.

[0080] In one embodiment, the washing device provided by the utility model uses water as washing liquid. As the washing process proceeds, the washing liquid is lost, and at this time, the F-water replenishment unit is required to provide additional water as washing liquid. Specifically, the replenishment water from the F-water replenishment unit enters the C-washing unit through the replenishment water inlet of the C-washing unit. The utility model does not limit the specific equipment selection of the F-water replenishment unit, and it only needs to provide washing liquid. In one embodiment, the F-water replenishment unit is the washing water source of the factory area.

[0081] Figure 6 for Figure 5 The equipment connection diagram of the device shown. Figure 6 As shown, the device includes A1-plant nitrogen source, B1-reduction furnace, C1-washing tower, D1-precipitation tank, E1-centrifugal pump connected in sequence, and also includes F1-plant washing water source connected to B1-reduction furnace. Among them, C1-washing tower includes C11-first blocking member and C12-second blocking member, and D1-precipitation tank includes D11-first precipitation chamber and D12-second precipitation chamber.

[0082] During operation, nitrogen from the A-nitrogen supply unit enters the B1-reduction furnace to form replacement gas with silicon powder, and the replacement gas enters the C1-washing tower and is washed by the washing liquid. The washing liquid contacts the replacement gas in the direction of gravity, transfers the silicon powder in the replacement gas to the washing liquid, and the remaining gas of the replacement gas is discharged from the venting outlet at the top of the B1-reduction furnace. The washing liquid carrying silicon powder gathers at the bottom of the C1-washing tower, the liquid level rises, and overflows into the washing liquid chamber surrounded by the C11-first blocking member, passes through the D11-first precipitation chamber and the D12-second precipitation chamber respectively, and is sent back to the upper part of the C1-washing tower by the E1-centrifugal pump to complete the sequential washing liquid circulation. The precipitated silicon powder can be discharged from the bottom of the C1-washing tower, the bottom of the washing liquid chamber, the D11-first precipitation chamber, and the bottom of the D12-second precipitation chamber.

[0083] The second aspect of the present invention provides a polysilicon production system, which includes any of the above-mentioned washing devices. Since the washing device provided by the present invention has the characteristics of not being easily blocked and having a long continuous operation time, the polysilicon production system provided by the present invention also has the characteristics of not being easily blocked and having a long continuous operation time.

[0084] The washing device provided by the utility model is described in detail below through specific embodiments.

[0085] Example

[0086] This embodiment uses Figure 6 The equipment shown is produced.

[0087] like Figure 6 As shown, the device includes A1-plant nitrogen source, B1-reduction furnace, C1-washing tower, D1-precipitation tank, E1-centrifugal pump connected in sequence, and also includes F1-plant washing water source connected to B1-reduction furnace. Among them, C1-washing tower includes C11-first blocking member and C12-second blocking member, and D1-precipitation tank includes D11-first precipitation chamber and D12-second precipitation chamber.

[0088] Among them, A1-plant nitrogen source belongs to A-nitrogen supply unit; B1-reduction furnace belongs to B-reduction unit; C1-washing tower, C11-first blocking member and C12-second blocking member belong to C-washing unit; D1-sedimentation tank, D11-first sedimentation chamber and D12-second sedimentation chamber belong to D-sedimentation unit; E1-centrifugal pump belongs to E-drive unit; F1-plant washing water source belongs to F-water replenishment unit.

[0089] During operation, nitrogen from the A-nitrogen supply unit enters the B1-reduction furnace to form replacement gas with silicon powder, and the replacement gas enters the C1-washing tower and is washed by the washing liquid. The washing liquid contacts the replacement gas in the direction of gravity, transfers the silicon powder in the replacement gas to the washing liquid, and the remaining gas of the replacement gas is discharged from the venting outlet at the top of the B1-reduction furnace. The washing liquid carrying silicon powder gathers at the bottom of the C1-washing tower, the liquid level rises, and overflows into the washing liquid chamber surrounded by the C11-first blocking member, passes through the D11-first precipitation chamber and the D12-second precipitation chamber respectively, and is sent back to the upper part of the C1-washing tower by the E1-centrifugal pump to complete the sequential washing liquid circulation. The precipitated silicon powder can be discharged from the bottom of the C1-washing tower, the bottom of the washing liquid chamber, the D11-first precipitation chamber, and the bottom of the D12-second precipitation chamber.

[0090] Comparative Example

[0091] The equipment used in this comparative example is Figure 6 The washing tower is basically the same, except that the first blocking member and the second blocking member are not provided in the washing tower, the sedimentation tank is not provided, and the washing liquid outlet of the washing tower is directly connected to the centrifugal pump.

[0092] Test example

[0093] The devices of the embodiment and the comparative example were used to produce polysilicon respectively, and the continuous operation time of each device was counted. The data are shown in Table 1.

[0094] Table 1 Continuous running time data

[0095] Device Continuous operation time (days) Example 30 Comparative Example 7

[0096] It can be seen from Table 1 that the washing device provided by the utility model used in the embodiment has a longer continuous operation time.

[0097] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, a fixed connection can be made, or an indirect connection can be made through an intermediate medium, or the internal connection between two elements can be made, or the interaction relationship between two elements can be made. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0098] The terms "first", "second", "third", "fourth", etc. (if any) in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein, for example. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0099] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the comparative examples of the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the technical solutions of the embodiments of the utility model.

Claims

1. A washing device, characterized in that: It includes a washing unit having a cavity and a driving unit; The washing liquid outlet of the washing unit is connected to the washing liquid inlet of the washing unit through the driving unit, and the washing liquid inlet of the washing unit is at a higher elevation than the washing liquid outlet of the washing unit; The washing unit comprises a washing tower, a first blocking member is arranged in the washing tower, the first blocking member is enclosed with at least part of the side wall of the washing tower to form a washing liquid cavity with a top opening, and a washing liquid outlet of the washing unit is connected with the washing liquid cavity.

2. The washing device according to claim 1, characterized in that: The height of the first blocking member is greater than or equal to 30% of the height of the washing tower.

3. The washing device according to claim 1, characterized in that: The percentage of the projection area of ​​the washing liquid cavity on the reference plane to the projection area of ​​the side wall of the washing tower on the reference plane is greater than or equal to 30%, and the reference plane is perpendicular to the height direction of the washing tower.

4. The washing device according to claim 1, characterized in that: The washing tower is further provided with a second blocking member connected to at least part of the side wall of the washing tower, the projection of the second blocking member on the reference plane covers the projection of the first blocking member on the reference plane, and the reference plane is perpendicular to the height direction of the washing tower; The washing liquid inlet of the washing unit has a higher elevation than the second blocking member, and the second blocking member has a higher elevation than the first blocking member.

5. The washing device according to claim 1 or 4, characterized in that: It also includes a sedimentation unit, and the washing liquid outlet of the washing unit is connected to the washing liquid inlet of the washing unit through the sedimentation unit and the driving unit in sequence.

6. The washing device according to claim 5, characterized in that: The precipitation unit comprises N precipitation chambers which are connected in sequence, and at least one precipitation chamber silicon powder discharge port is arranged at the bottom of each precipitation chamber, and N≥2.

7. The washing device according to claim 6, characterized in that: N=2, the washing liquid inlet of the first sedimentation chamber is connected to the washing liquid outlet of the washing unit, and the liquid outlet of the second sedimentation chamber is connected to the washing liquid inlet of the washing unit through the driving unit.

8. The device according to claim 7, characterized in that It also includes a nitrogen supply unit and a reduction unit, wherein the nitrogen supply unit is communicated with the replacement gas inlet of the washing unit through the reduction unit.

9. The device according to claim 8, characterized in that It also includes a water replenishing unit, wherein the replenishing water outlet of the water replenishing unit is communicated with the replenishing water inlet of the washing unit.

10. A polysilicon production system, characterized in that: A washing device comprising the washing device according to any one of claims 1 to 9.

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