A sapphire wafer directional processing fixture

Abstract

The utility model relates to the technical field of wafer processing, and specifically to a sapphire wafer directional processing fixture, comprising a workbench, a frame, a moving mechanism, a tool, a spraying mechanism, a driving component, a turntable, a transmission component, a plurality of power components, a plurality of sliding components and a plurality of clamping plates, wherein the other end of the driving component is detachably connected to the turntable, the transmission component is detachably connected to the driving component, one end of a plurality of power components is detachably connected to the transmission component, the other end of a plurality of power components is detachably connected to the turntable, one end of each sliding component is detachably connected to the corresponding power component, the other end of a plurality of sliding components is detachably connected to the turntable, and each clamping plate is detachably connected to the corresponding sliding component. Through the above-mentioned structural arrangement, the problem that the slider is easily loosened and cannot be moved due to the movement of the slider driven by the lead screw is solved, thereby failing to clamp the sapphire wafer.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a sapphire wafer directional processing fixture. Background Art

[0002] Currently, sapphire wafers are cut using special bonding tools on the market. Since sapphire wafers come in different sizes, each size of sapphire requires a bonding tool of the same size. In addition, existing bonding tools cannot stably fix the sapphire, which can easily cause the sapphire to loosen and fall off during the rotational cutting of the sapphire wafer.

[0003] In order to solve the above problems, the prior art patent (CN214394866U) discloses a sapphire wafer directional processing fixture, including a workbench, a U-shaped frame is fixedly installed on the side wall of the workbench, a rotating disk is rotatably installed on the inner side wall of the U-shaped frame, a motor whose output shaft is fixedly connected to the rotating disk is fixedly installed on the side wall of the U-shaped frame, a placement groove is opened on the side wall of the rotating disk, a plurality of groups of clamping plates distributed in an annular shape are slidably installed in the placement groove, the clamping plates are connected to the clamping components located on the rotating disk, a mounting plate located on one side of the rotating disk is slidably installed on the side wall of the workbench, and the mounting plate is connected to the mounting plate. A moving component located on the workbench is connected, an adjusting component is installed on the side wall of the mounting plate facing the rotating disk, the mounting plate is connected to the tool through the adjusting component, and a clamping component composed of a slide groove, a ball screw, a slider, and a turntable is provided, so sapphire wafers of various models and sizes can be further clamped and fixed; by providing a fixing component composed of a mounting groove, a fixing part, a spring and a card slot, the position of the turntable can be fixed, effectively preventing the turntable from loosening during the rotation cutting process, and thus effectively preventing the sapphire wafer from loosening and falling off during the cutting process.

[0004] However, in the above-mentioned prior art, the slider is driven to move by the lead screw, and the slider is easily loosened, resulting in inability to move, thereby failing to clamp the sapphire wafer. Utility Model Content

[0005] The utility model aims to provide a sapphire wafer directional processing fixture, which solves the technical problem in the prior art that a slider is driven to move by a lead screw, the slider is easily loosened, resulting in inability to move, thereby failing to clamp the sapphire wafer.

[0006] To achieve the above-mentioned purpose, the utility model adopts a sapphire wafer directional processing fixture, including a workbench, a frame, a moving mechanism, a tool, a spraying mechanism, a driving assembly, a turntable, a transmission assembly, a plurality of power assemblies, a plurality of sliding assemblies and a plurality of clamps, the frame being detachably connected to the workbench and located at the upper end of the workbench, the moving mechanism being detachably connected to the workbench and located at one end of the workbench, the tool being detachably connected to the moving mechanism and located at one end of the moving mechanism, the spraying mechanism being detachably connected to the frame and located at one end of the frame and penetrating the frame, the driving assembly being detachably connected to the frame and located at one end of the frame, and the other end of the driving assembly being detachably connected to the turntable The disk is detachably connected and is located inside the turntable and passes through the turntable. The transmission assembly is detachably connected to the drive assembly and is located at one end of the drive assembly. One ends of several power assemblies are detachably connected to the transmission assembly and are evenly arranged at one end of the transmission assembly. The other ends of several power assemblies are detachably connected to the turntable and are evenly arranged at one end of the turntable. One end of each sliding assembly is detachably connected to the corresponding power assembly and is located at one end of the corresponding power assembly. The other ends of several sliding assemblies are detachably connected to the turntable and are evenly arranged on one side of the turntable. Each splint is detachably connected to the corresponding sliding assembly and is located at one end of the corresponding sliding assembly.

[0007] Wherein, the driving assembly includes a motor and a driving rod, and the driving rod is fixedly connected to the output end of the motor.

[0008] Wherein, the transmission assembly includes a transmission rod, a driving gear and a transmission gear, the transmission rod is detachably connected to the driving rod and is located at one end of the driving rod, the driving gear is detachably connected to the transmission rod and is located at one end of the transmission rod, and the transmission gear is meshed with the driving gear.

[0009] Each of the power assemblies includes a power gear and a gear block, the power gear is meshed with the transmission gear, and the gear block is meshed with the power gear.

[0010] Each of the sliding assemblies includes a slide rail and a slider, wherein the slide rail is detachably connected to the turntable and is located at one end of the turntable, one end of the slider is detachably connected to the slide rail and is located inside the slide rail, and the other end of the slider is detachably connected to the tooth block and is located at one end of the tooth block.

[0011] Among them, the sapphire wafer orientation processing fixture also includes a plurality of screws, a plurality of nuts and a plurality of rubber pads, each of the screws is detachably connected to the corresponding clamping plate and is located at one end of the corresponding clamping plate, each of the rubber pads is detachably connected to the corresponding screw and is located at one end of the corresponding screw, and each of the nuts is detachably connected to the corresponding screw and is located at the other end of the corresponding screw.

[0012] The utility model discloses a sapphire wafer orientation processing fixture, wherein the driving component is detachably connected to the frame and is located at one end of the frame, the other end of the driving component is detachably connected to the turntable and is located inside the turntable and passes through the turntable, the transmission component is detachably connected to the driving component and is located at one end of the driving component, one end of a plurality of the power components is detachably connected to the transmission component and is evenly arranged at one end of the transmission component, the other end of a plurality of the power components is detachably connected to the turntable and is evenly arranged at one end of the turntable, one end of each of the sliding components is detachably connected to the corresponding power component and is located at the corresponding One end of the force component and the other ends of several sliding components are detachably connected to the turntable and are evenly arranged on one side of the turntable. Each clamp is detachably connected to the corresponding sliding component and is located at one end of the corresponding sliding component. The driving component drives the transmission component to rotate in the turntable, and the transmission component drives several power components to rotate, and several power components drive several sliding components to move, and several sliding components drive several clamps to move, thereby clamping the sapphire wafer. This method can effectively solve the problem that the slider is easily loosened and cannot be moved when the slider is driven by the lead screw, thereby failing to clamp the sapphire wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0014] Figure 1 It is a structural schematic diagram of the first embodiment of the utility model.

[0015] Figure 2 It is a structural schematic diagram of the transmission component of the utility model.

[0016] Figure 3 It is a structural schematic diagram of the drive assembly of the utility model.

[0017] Figure 4It is a structural schematic diagram of the second embodiment of the utility model.

[0018] Figure 5 The utility model Figure 4 A magnified view of the structure at A.

[0019] 101-workbench, 102-frame, 103-moving mechanism, 104-tool, 105-spraying mechanism, 106-turntable, 107-motor, 108-driving rod, 109-transmission rod, 110-driving gear, 111-transmission gear, 112-power gear, 113-tooth block, 114-slide rail, 115-slider, 116-clamp, 201-screw, 202-nut, 203-rubber sleeve. DETAILED DESCRIPTION

[0020] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, but should not be understood as limiting the present invention.

[0021] The first embodiment of the present application is:

[0022] See also Figure 1 to Figure 3 ,in Figure 1 It is a structural schematic diagram of the first embodiment of the utility model. Figure 2 It is a structural schematic diagram of the transmission component of the utility model. Figure 3 It is a structural schematic diagram of the drive assembly of the utility model.

[0023] The utility model provides a sapphire wafer directional processing fixture, including a workbench 101, a frame 102, a moving mechanism 103, a tool 104, a spraying mechanism 105, a turntable 106, a motor 107, a driving rod 108, a transmission rod 109, a driving gear 110, a transmission gear 111, a power gear 112, a gear block 113, a slide rail 114, a slider 115 and a clamping plate 116. The above scheme solves the problem that the slider 115 is easily loosened when the slider 115 is driven to move by the lead screw, resulting in the inability to move, thereby failing to clamp the sapphire wafer.

[0024] According to the present specific embodiment, the frame 102 is detachably connected to the workbench 101 and is located at the upper end of the workbench 101; the moving mechanism 103 is detachably connected to the workbench 101 and is located at one end of the workbench 101; the tool 104 is detachably connected to the moving mechanism 103 and is located at one end of the moving mechanism 103; the spraying mechanism 105 is detachably connected to the frame 102 and is located at one end of the frame 102 and passes through the frame 102; the driving assembly is detachably connected to the frame 102 and is located at one end of the frame 102; the other end of the driving assembly is detachably connected to the turntable 106 and is located inside the turntable 106 and passes through the turntable 106; the transmission assembly is detachably connected to the driving assembly and is located at one end of the driving assembly; one end of several of the power assemblies is detachably connected to the transmission assembly and is evenly arranged at one end of the transmission assembly; several of the power assemblies The other end is detachably connected to the turntable 106 and is evenly arranged at one end of the turntable 106, one end of each sliding assembly is detachably connected to the corresponding power assembly and is located at one end of the corresponding power assembly, the other ends of several sliding assemblies are detachably connected to the turntable 106 and are evenly arranged on one side of the turntable 106, each clamp 116 is detachably connected to the corresponding sliding assembly and is located at one end of the corresponding sliding assembly, the moving mechanism 103 is used to move the tool 104, the spraying mechanism 105 is used to cool down during processing, the sapphire wafer is placed on the turntable 106, the driving assembly drives the transmission assembly to rotate in the turntable 106, the transmission assembly drives several power assemblies to rotate, several power assemblies drive several sliding assemblies to move, and several sliding assemblies drive several clamps 116 to move, thereby clamping the sapphire wafer, so as to stably clamp the sapphire wafer.

[0025] The driving assembly includes a motor 107 and a driving rod 108 . The driving rod 108 is fixedly connected to an output end of the motor 107 . The motor 107 drives the driving rod 108 to rotate.

[0026] Secondly, the transmission assembly includes a transmission rod 109, a driving gear 110 and a transmission gear 111. The transmission rod 109 is detachably connected to the driving rod 108 and is located at one end of the driving rod 108. The driving gear 110 is detachably connected to the transmission rod 109 and is located at one end of the transmission rod 109. The transmission gear 111 is engaged with the driving gear 110. The driving rod 108 drives the transmission rod 109 to rotate, the transmission rod 109 drives the driving gear 110 to rotate, and the driving gear 110 drives the transmission gear 111 to rotate.

[0027] At the same time, each of the power components includes a power gear 112 and a tooth block 113. The power gear 112 is meshed with the transmission gear 111, and the tooth block 113 is meshed with the power gear 112. The transmission gear 111 drives the power gear 112 to rotate, and the power gear 112 drives the tooth block 113 to move.

[0028] In addition, each of the sliding assemblies includes a slide rail 114 and a slider 115. The slide rail 114 is detachably connected to the turntable 106 and is located at one end of the turntable 106. One end of the slider 115 is detachably connected to the slide rail 114 and is located inside the slide rail 114. The other end of the slider 115 is detachably connected to the tooth block 113 and is located at one end of the tooth block 113. The tooth block 113 drives the slider 115 to move inside the slide rail 114.

[0029] A sapphire wafer directional processing fixture using the present embodiment is used in specific use. The moving mechanism 103 is used to move the tool 104, and the spraying mechanism 105 is used to cool down during processing. The sapphire wafer is placed on the turntable 106, and the motor 107 drives the driving rod 108 to rotate, and the transmission rod 109 drives the driving gear 110 to rotate, and the driving gear 110 drives the transmission gear 111 to rotate, and the transmission gear 111 drives the power gear 112 to rotate, and the power gear 112 drives the tooth block 113 to move, and the tooth block 113 drives the slider 115 to move in the slide rail 114, and the slider 115 drives the clamp 116 to move, so as to stably clamp the sapphire wafer.

[0030] The second embodiment of the present application is:

[0031] Based on the first embodiment, please refer to Figure 4 and Figure 5 ,in Figure 4 It is a structural schematic diagram of the second embodiment of the utility model. Figure 5 The utility model Figure 4 A magnified view of the structure at A.

[0032] The utility model provides a sapphire wafer directional processing fixture which also includes a plurality of screws 201, a plurality of nuts 202 and a plurality of rubber pads.

[0033] According to this specific embodiment, each of the screws 201 is detachably connected to the corresponding clamping plate 116 and is located at one end of the corresponding clamping plate 116. Each of the rubber pads is detachably connected to the corresponding screw 201 and is located at one end of the corresponding screw 201. Each of the nuts 202 is detachably connected to the corresponding screw 201 and is located at the other end of the corresponding screw 201. The screws 201 install the rubber pad on the clamping plate 116, and the nuts 202 fix the rubber pad on the screws 201, so as to prevent the clamping plate 116 from damaging the sapphire wafer when clamping the sapphire wafer.

[0034] When using a sapphire wafer orientation processing fixture of this embodiment, the screw 201 installs the rubber pad on the clamp 116, and the nut 202 fixes the rubber pad on the screw 201, so as to prevent the clamp 116 from damaging the sapphire wafer when clamping the sapphire wafer.

[0035] The above disclosure is only a preferred embodiment of the present invention, and certainly cannot be used to limit the scope of rights of the present invention. Ordinary technicians in this field can understand that all or part of the processes of the above embodiment and equivalent changes made according to the claims of the present invention still fall within the scope covered by the utility model.

Claims

1. A sapphire wafer directional processing fixture, comprising a workbench, a frame, a moving mechanism, a tool and a spraying mechanism, wherein the frame is detachably connected to the workbench and is located at the upper end of the workbench, the moving mechanism is detachably connected to the workbench and is located at one end of the workbench, the tool is detachably connected to the moving mechanism and is located at one end of the moving mechanism, the spraying mechanism is detachably connected to the frame and is located at one end of the frame and penetrates the frame, characterized in that: It also includes a driving assembly, a turntable, a transmission assembly, a plurality of power assemblies, a plurality of sliding assemblies and a plurality of clamping plates, wherein the driving assembly is detachably connected to the frame and is located at one end of the frame, the other end of the driving assembly is detachably connected to the turntable and is located inside the turntable and passes through the turntable, the transmission assembly is detachably connected to the driving assembly and is located at one end of the driving assembly, one ends of a plurality of power assemblies are detachably connected to the transmission assembly and are evenly arranged at one end of the transmission assembly, the other ends of a plurality of power assemblies are detachably connected to the turntable and are evenly arranged at one end of the turntable, one end of each sliding assembly is detachably connected to the corresponding power assembly and is located at one end of the corresponding power assembly, the other ends of a plurality of sliding assemblies are detachably connected to the turntable and are evenly arranged at one side of the turntable, and each clamping plate is detachably connected to the corresponding sliding assembly and is located at one end of the corresponding sliding assembly.

2. The sapphire wafer orientation processing fixture as claimed in claim 1, characterized in that: The driving assembly comprises a motor and a driving rod, and the driving rod is fixedly connected to the output end of the motor.

3. The sapphire wafer orientation processing fixture as claimed in claim 2, characterized in that: The transmission assembly includes a transmission rod, a driving gear and a transmission gear. The transmission rod is detachably connected to the driving rod and is located at one end of the driving rod. The driving gear is detachably connected to the transmission rod and is located at one end of the transmission rod. The transmission gear is meshed with the driving gear.

4. The sapphire wafer orientation processing fixture as claimed in claim 3, characterized in that: Each of the power assemblies comprises a power gear and a gear block, wherein the power gear is meshed with the transmission gear, and the gear block is meshed with the power gear.

5. The sapphire wafer orientation processing fixture as claimed in claim 4, characterized in that: Each sliding assembly includes a slide rail and a slider, wherein the slide rail is detachably connected to the turntable and is located at one end of the turntable, one end of the slider is detachably connected to the slide rail and is located inside the slide rail, and the other end of the slider is detachably connected to the tooth block and is located at one end of the tooth block.

6. The sapphire wafer orientation processing fixture as claimed in claim 5, characterized in that: The sapphire wafer orientation processing fixture also includes a plurality of screws, a plurality of nuts and a plurality of rubber pads, each of the screws is detachably connected to the corresponding clamping plate and is located at one end of the corresponding clamping plate, each of the rubber pads is detachably connected to the corresponding screw and is located at one end of the corresponding screw, and each of the nuts is detachably connected to the corresponding screw and is located at the other end of the corresponding screw.

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