Crystal growth furnace mechanism to reduce crystal breakage

Abstract

The present application relates to the technical field of sapphire growth, and in particular to a crystal growth furnace mechanism for reducing crystal breakage, comprising: a main support frame, on which a lifting mechanism is provided; a support seat, which is provided on the lifting mechanism, and one end of a seed crystal rod passes through the support seat; a crystal position fine-tuning structure, which is provided on the support seat and sleeved on the seed crystal rod, and a crystal rotation transmission structure is provided on the crystal position fine-tuning structure; a crystal balance sensor system, which is sleeved on the crystal rotation transmission structure; a cooling structure, which is provided on the support seat, and the cooling structure is sleeved on the middle part of the seed crystal rod; and a vacuum bellows, which is sleeved on the seed crystal rod and is located at one end of the cooling structure away from the support seat. The structure of the crystal growth furnace mechanism for reducing crystal breakage is relatively simple, and by collecting and processing the electrical signal from the crystal balance sensor system, abnormal information is fed back to the operator in a timely manner, so that the operator can handle it in advance, thereby reducing the occurrence of crystal breakage.

Description

Technical Field

[0001] The present application relates to the technical field of sapphire growth, and in particular to a crystal growth furnace mechanism for reducing crystal breakage. Background Art

[0002] Sapphire belongs to the third generation semiconductor material, and the sapphire crystal growth furnace is its main production equipment. The existing sapphire crystal growth furnace is difficult to operate, has a low degree of automation, a long production cycle, is prone to various abnormal situations, and requires operators to have rich experience. However, the actual production rate of crystal breakage is still high, wasting a lot of manpower, material resources and time costs.

[0003] For example, the sapphire crystal growth furnace lifting and rotating device disclosed in CN202671718U includes: a seed crystal lifting rod and a rotating device, and a pulling device. The seed crystal lifting rod is inserted into the crystal growth furnace, and the crystal growth furnace is heated to solidify and grow the raw materials in the crystal growth furnace, and the seed crystal lifting rod is rotated by the rotating device, and the pulling device is used to pull at the same time, so as to ensure the growth of sapphire. However, in the actual use of the sapphire crystal growth furnace lifting and rotating device, since the seed crystal lifting rod is inserted into the crystal growth furnace, the temperature of the seed crystal lifting rod is too high, which will affect the normal working performance of the seed crystal lifting rod. Utility Model Content

[0004] A technical problem to be solved by the present application is that during actual use of the sapphire crystal growth furnace pulling and rotating device in the prior art, since the seed crystal pulling rod is inserted into the crystal growth furnace, the temperature of the seed crystal pulling rod is too high, which will affect the normal working performance of the seed crystal pulling rod.

[0005] To solve the above technical problems, an embodiment of the present application provides a crystal growth furnace mechanism for reducing crystal breakage, comprising: a main support frame, on which a lifting mechanism is provided; a support seat, which is provided on the lifting mechanism, and one end of a seed crystal rod passes through the support seat; a crystal position fine-tuning structure, which is provided on the support seat and sleeved on the seed crystal rod, and a crystal rotation transmission structure is provided on the crystal position fine-tuning structure; a crystal balance sensing system, which is sleeved on the crystal rotation transmission structure; a cooling structure, which is provided on the support seat, and the cooling structure is sleeved on the middle part of the seed crystal rod; and a vacuum bellows, which is sleeved on the seed crystal rod and is located at one end of the cooling structure away from the support seat.

[0006] In some embodiments, a water inlet and a water outlet are provided on the cooling structure.

[0007] In some embodiments, the crystal balance sensing system includes a plurality of weight sensors, and the plurality of weight sensors are disposed on the outer peripheral wall of the crystal rotation transmission structure.

[0008] In some embodiments, there are four weight sensors, and the four weight sensors are spaced apart on the outer wall of the crystal rotation transmission structure.

[0009] In some embodiments, the lifting mechanism includes: a rotating member, which is arranged on the main support frame and has a slider on the rotating member, and the support seat is connected to the slider; a driving member, which is arranged at one end of the rotating member and drives the rotating member to rotate.

[0010] In some embodiments, the lifting mechanism further includes a transmission guide rail, which is disposed on the main support frame, and a sliding block is disposed on the transmission guide rail, and the sliding block is connected to the support seat.

[0011] In some embodiments, a limit block is further included, which is disposed on the support seat and located at one end of the rotating member.

[0012] In some embodiments, a position sensor is also included, and the position sensor is arranged on the main supporting frame.

[0013] In some embodiments, a support frame is also included, and the support frame is provided with a vacuum bellows.

[0014] In some embodiments, the crystal position fine-tuning structure is a threaded fine-tuning structure.

[0015] Through the above technical scheme, the present application provides a crystal growth furnace mechanism for reducing crystal breakage, including: a main support frame, on which a lifting mechanism is provided; a support seat, which is provided on the lifting mechanism, and one end of the seed crystal rod passes through the support seat; a crystal position fine-tuning structure, which is provided on the support seat and sleeved on the seed crystal rod, and a crystal rotation transmission structure is provided on the crystal position fine-tuning structure; a crystal balance sensing system, which is sleeved on the crystal rotation transmission structure; a cooling structure, which is provided on the support seat, and the cooling structure is sleeved on the middle part of the seed crystal rod; and a vacuum bellows, which is sleeved on the seed crystal rod and is located at one end of the cooling structure away from the support seat.

[0016] By setting a lifting mechanism on the main support frame, the lifting mechanism can be used to drive the support seat to perform lifting and lowering movements. The seed crystal rod penetrates the support seat, and the lifting mechanism can be used to drive the seed crystal rod to perform lifting and lowering movements. At the same time, a crystal position fine-tuning structure is set on the support seat, and a crystal rotation transmission structure is provided on the crystal position fine-tuning structure. The crystal rotation transmission structure can be used to drive the seed crystal rod to rotate, so as to remove impurities in the sapphire stock solution in the crystal growth furnace. A crystal balance sensing system is provided on the crystal rotation transmission structure, and the crystal balance sensing system is used to detect whether the seed crystal rod is in a balanced state. If it is not in a balanced state, the state of the seed crystal rod can be adjusted by the crystal position fine-tuning structure until the seed crystal rod is in a balanced state. A vacuum bellows is sleeved on the seed crystal rod, and the vacuum bellows is connected to the upper cover of the crystal growth furnace, so as to ensure the sealing of the connection between the seed crystal rod and the crystal growth furnace. In addition, a cooling structure is set in the middle of the seed crystal rod, so as to cool the seed crystal rod, avoid the temperature of the seed crystal rod being too high, and ensure the normal working performance of the seed crystal rod.

[0017] The structure of the crystal growth furnace mechanism for reducing crystal breakage is relatively simple. By collecting and processing the electrical signals from the crystal balance sensor system, abnormal information is fed back to the operator in time, so that the operator can handle it in advance, thereby reducing the occurrence of crystal breakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 It is a structural schematic diagram of a crystal growth furnace mechanism for reducing crystal breakage disclosed in an embodiment of the present application.

[0020] Description of reference numerals:

[0021] 1. Main support frame; 2. Lifting mechanism; 3. Support seat; 4. Sub-crystal rod; 5. Crystal position fine-tuning structure; 6. Crystal rotation transmission structure; 7. Crystal balance sensing system; 8. Cooling structure; 9. Vacuum bellows; 10. Water inlet; 11. Water outlet; 12. Rotating part; 13. Driving part; 14. Transmission guide rail; 15. Limit block; 16. Position sensor; 17. Support frame. DETAILED DESCRIPTION

[0022] The following is a further detailed description of the implementation methods of the present application in conjunction with the accompanying drawings and examples. The detailed descriptions of the following examples and the accompanying drawings are used to exemplarily illustrate the principles of the present application, but cannot be used to limit the scope of the present application. The present application can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

[0023] The present application provides these embodiments to make the present application thorough and complete, and to fully express the scope of the present application to those skilled in the art. It should be noted that unless otherwise specifically stated, the relative arrangement of the parts and steps, the composition of the materials, the numerical expressions and the numerical values ​​set forth in these embodiments should be interpreted as being merely exemplary, and not as limiting.

[0024] It should be noted that, in the description of this application, unless otherwise specified, the meaning of "multiple" is greater than or equal to two; the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicating the orientation or positional relationship, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0025] In addition, the words "first", "second" and similar words used in this application do not indicate any order, quantity or importance, but are only used to distinguish different parts. "Vertical" does not mean vertical in the strict sense, but is within the tolerance range. "Parallel" does not mean parallel in the strict sense, but is within the tolerance range. "Include" or "comprising" and similar words mean that the elements before the word include the elements listed after the word, and do not exclude the possibility of including other elements.

[0026] It should also be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances. When a specific device is described as being located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.

[0027] All terms used in this application have the same meaning as those understood by those of ordinary skill in the art to which this application belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, such as general dictionaries, should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined herein.

[0028] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0029] See also Figure 1As shown, an embodiment of the present application provides a crystal growth furnace mechanism for reducing crystal breakage, comprising: a main support frame 1, on which a lifting mechanism 2 is provided; a support seat 3, which is provided on the lifting mechanism 2, and one end of a seed crystal rod 4 passes through the support seat 3; a crystal position fine-tuning structure 5, which is provided on the support seat 3 and sleeved on the seed crystal rod 4, and a crystal rotation transmission structure 6 is provided on the crystal position fine-tuning structure 5; a crystal balance sensing system 7, which is sleeved on the crystal rotation transmission structure 6; a cooling structure 8, which is provided on the support seat 3, and the cooling structure 8 is sleeved on the middle part of the seed crystal rod 4; and a vacuum bellows 9, which is sleeved on the seed crystal rod 4 and is located at one end of the cooling structure 8 away from the support seat 3.

[0030] By setting a lifting mechanism 2 on the main support frame 1, the lifting mechanism 2 can be used to drive the support seat 3 to perform lifting and lowering movements. The seed crystal rod 4 penetrates the support seat 3, and the lifting mechanism 2 can be used to drive the seed crystal rod 4 to perform lifting and lowering movements. At the same time, a crystal position fine-tuning structure 5 is set on the support seat 3, and a crystal rotation transmission structure 6 is provided on the crystal position fine-tuning structure 5. The crystal rotation transmission structure 6 can be used to drive the seed crystal rod 4 to rotate, so as to remove impurities in the sapphire raw liquid in the crystal growth furnace. A crystal balance sensor system 7 is provided on the crystal rotation transmission structure 6. The crystal balance sensor system 7 is used to detect whether the seed crystal rod 4 is in a balanced state. If it is not in a balanced state, the state of the seed crystal rod 4 can be adjusted by the crystal position fine-tuning structure 5 until the seed crystal rod 4 is in a balanced state. A vacuum bellows 9 is sleeved on the seed crystal rod 4, and the vacuum bellows 9 is connected to the upper cover of the crystal growth furnace, thereby ensuring the sealing of the connection between the seed crystal rod 4 and the crystal growth furnace. Furthermore, the cooling structure 8 is disposed in the middle of the seed crystal rod 4 , so as to cool the seed crystal rod 4 , thereby preventing the temperature of the seed crystal rod 4 from being too high, and ensuring the normal working performance of the seed crystal rod 4 .

[0031] The structure of the crystal growth furnace mechanism for reducing crystal breakage is relatively simple. By collecting and processing the electrical signals from the crystal balance sensor system 7, abnormal information is fed back to the operator in time, so that the operator can handle it in advance, thereby reducing the occurrence of crystal breakage.

[0032] In some embodiments, a water inlet 10 and a water outlet 11 are provided on the cooling structure 8. The cooling structure 8 is a water cooling structure, and therefore, the water inlet 10 and the water outlet 11 are provided on the cooling structure 8, and cooling water can be transported from the water inlet 10 into the cooling structure 8 and flow out from the water outlet 11.

[0033] In some embodiments, the crystal balance sensing system 7 includes a plurality of weight sensors, which are disposed on the outer peripheral wall of the crystal rotation transmission structure 6. Specifically, there are four weight sensors, which are disposed on the outer wall of the crystal rotation transmission structure 6 at intervals.

[0034] The weight sensor is an S-shaped weight sensor, and the weight sensors are arranged at intervals on the outer wall of the crystal rotation transmission structure 6, and can receive the weight signal of the crystal on the sub-crystal rod 4; at the same time, the setting of four weight sensors can transmit the state of the sub-crystal rod 4 to the servo control system, and the operator can make fine adjustments according to actual conditions to make the sub-crystal rod 4 in a balanced state.

[0035] In this embodiment, the crystal position fine-tuning structure 5 is a threaded fine-tuning structure.

[0036] In some embodiments, the lifting mechanism 2 includes: a rotating member 12, which is arranged on the main support frame 1, and a slider is provided on the rotating member 12, and the support seat 3 is connected to the slider; a driving member 13, which is arranged at one end of the rotating member 12, and the driving member 13 drives the rotating member 12 to rotate.

[0037] By setting the rotating member 12 on the main support frame 1 and using the driving member 13 to drive the rotating member 12 to rotate, since a slider is set on the rotating member 12 and the slider is connected to the support seat 3, the rotating member 12 can be driven to rotate by the driving member 13, and the support seat 3 can be driven to move relative to the main support frame 1, that is, the position of the sub-crystal rod 4 is adjusted, thereby avoiding the occurrence of crystal breakage.

[0038] The rotating member 12 is a lead screw, and the driving member 13 is a motor.

[0039] In some embodiments, the lifting mechanism 2 further includes a transmission guide rail 14 , which is disposed on the main support frame 1 , and a sliding block is disposed on the transmission guide rail 14 , and the sliding block is connected to the support seat 3 .

[0040] The transmission guide rails 14 are arranged on both sides of the main support frame 1, that is, they are symmetrically arranged. Sliding blocks are arranged on the transmission guide rails 14, and the sliding blocks are also connected to the support seat 3. That is, when the driving member 13 drives the support seat 3 to move up and down through the rotating member 12, the support seat 3 also moves along the transmission guide rails 14, playing a supporting and guiding role, so that the lifting and lowering movement of the sub-crystal rod 4 is more stable.

[0041] In some embodiments, the crystal growth furnace mechanism for reducing crystal breakage further includes a limit block 15 , which is disposed on the support seat 3 and located at one end of the rotating member 12 .

[0042] The setting of the limit block 15 can limit the travel of the support base 3, thereby ensuring the stable operation of the support base 3.

[0043] In some embodiments, the crystal growth furnace mechanism for reducing crystal breakage further includes a position sensor 16 , and the position sensor 16 is disposed on the main support frame 1 .

[0044] The position sensor 16 is set to determine the position of the support seat 3 relative to the main support frame 1, that is, the position of the support seat 3 and the sub-crystal rod 4 can be adjusted according to the crystal growth condition on the sub-crystal rod 4, that is, the weight of the growing crystal. The speed and position information of the lifting and lowering are fed back by the limit block 15, the servo signal and the position sensor 16, which improves the stability and controllability of the crystal lifting;

[0045] There are two position sensors 16 , which are symmetrically arranged on both sides of the main supporting frame 1 .

[0046] In some embodiments, the crystal growth furnace mechanism for reducing crystal breakage further includes a support frame 17, and the support frame 17 is disposed on the vacuum bellows 9. The arrangement of the support frame 17 can fix and support the vacuum bellows 9, thereby ensuring a stable connection between the vacuum bellows 9 and the crystal growth furnace, and further ensuring the sealing of the crystal growth furnace.

[0047] The parts of the crystal growth furnace mechanism that reduces crystal breakage are made by CNC processing, with strict processing accuracy controlled. High-quality weight sensors and servo control systems are used. After assembly, the lifting accuracy is improved by 20% to 0.08mm, the rotation end face runout error of the seed crystal rod 4 is improved by 20% to 0.03mm, and the weight accuracy error is improved by 50% to 0.5g.

[0048] The working process of the crystal growth furnace mechanism for reducing crystal breakage is as follows: insert the seed crystal rod 4 into the crystal growth furnace and contact it with the sapphire stock solution. At the same time, the crystal rotation transmission mechanism is used to drive the seed crystal rod 4 to rotate, remove impurities in the sapphire stock solution, change the temperature in the crystal growth furnace, and start crystal growth. The crystal position fine-tuning structure 5 can be used to fine-tune the seed crystal rod 4, and the adjustment is manual. When the sapphire on the seed crystal rod 4 grows to a certain position, the lifting mechanism 2 is used to lift the seed crystal rod 4, and the support seat 3 is driven to move up and down along the crystal support seat 3, and then the sapphire growth continues.

[0049] So far, various embodiments of the present application have been described in detail. In order to avoid obscuring the concept of the present application, some details known in the art are not described. Based on the above description, those skilled in the art can fully understand how to implement the technical solution disclosed herein.

[0050] Although some specific embodiments of the present application have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present application. It should be understood by those skilled in the art that the above embodiments may be modified or some technical features may be replaced by equivalents without departing from the scope and spirit of the present application. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict.

Claims

1. A crystal growth furnace mechanism for reducing crystal breakage, characterized in that: include: A main supporting frame (1), wherein a lifting mechanism (2) is provided on the main supporting frame (1); A support seat (3) is arranged on the lifting mechanism (2), and one end of the seed crystal rod (4) passes through the support seat (3); A crystal position fine-tuning structure (5) is arranged on the support seat (3) and sleeved on the daughter crystal rod (4); a crystal rotation transmission structure (6) is arranged on the crystal position fine-tuning structure (5); A crystal balance sensing system (7) is sleeved on the crystal rotation transmission structure (6); A cooling structure (8) is arranged on the support seat (3), and the cooling structure (8) is sleeved on the middle part of the seed crystal rod (4); and A vacuum bellows (9) is sleeved on the seed crystal rod (4) and is located at an end of the cooling structure (8) away from the support seat (3).

2. The crystal growth furnace mechanism for reducing crystal breakage according to claim 1, characterized in that: The cooling structure (8) is provided with a water inlet (10) and a water outlet (11).

3. The crystal growth furnace mechanism for reducing crystal breakage according to claim 1, characterized in that: The crystal balance sensing system (7) comprises a plurality of weight sensors, and the plurality of weight sensors are arranged on the outer peripheral wall of the crystal rotation transmission structure (6).

4. The crystal growth furnace mechanism for reducing crystal breakage according to claim 3, characterized in that: There are four weight sensors, which are arranged at intervals on the outer wall of the crystal rotation transmission structure (6).

5. The crystal growth furnace mechanism for reducing crystal breakage according to any one of claims 1 to 4, characterized in that: The lifting mechanism (2) comprises: A rotating member (12) is arranged on the main supporting frame (1), and a sliding block is arranged on the rotating member (12), and the supporting seat (3) is connected to the sliding block; A driving member (13) is arranged at one end of the rotating member (12), and the driving member (13) drives the rotating member (12) to rotate.

6. The crystal growth furnace mechanism for reducing crystal breakage according to claim 5, characterized in that: The lifting mechanism (2) further comprises a transmission guide rail (14), wherein the transmission guide rail (14) is arranged on the main support frame (1), and a sliding block is arranged on the transmission guide rail (14), and the sliding block is connected to the support seat (3).

7. The crystal growth furnace mechanism for reducing crystal breakage according to claim 6, characterized in that: It also comprises a limit block (15), wherein the limit block (15) is arranged on the support seat (3) and is located at one end of the rotating member (12).

8. The crystal growth furnace mechanism for reducing crystal breakage according to claim 7, characterized in that: It also comprises a position sensor (16), wherein the position sensor (16) is arranged on the main supporting frame (1).

9. The crystal growth furnace mechanism for reducing crystal breakage according to claim 1, characterized in that: It also comprises a support frame (17), wherein the support frame (17) is arranged on the vacuum bellows (9).

10. The crystal growth furnace mechanism for reducing crystal breakage according to claim 1, characterized in that: The crystal position fine-tuning structure (5) is a threaded fine-tuning structure.

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