Micro-leakage valve control device

Abstract

The utility model discloses a micro-leakage valve control device which comprises a shell, a flange, a micro-leakage valve, a coupler, a motor and an encoder. A cavity is formed in the shell, and an opening is formed in the bottom wall of the shell. The flange is installed on the outer wall of the bottom of the shell and right faces the opening. The top of the micro-leakage valve is sleeved with the flange, and the micro-leakage valve is provided with a rotating shaft capable of adjusting the opening degree of the micro-leakage valve. The bottom end of the coupler is connected with the top end of a rotating shaft of the micro-leakage valve. The motor is installed in the cavity, an output shaft of the motor is connected with the top end of the coupler and used for driving a rotating shaft of the micro-leakage valve to rotate, and then the opening degree of the micro-leakage valve is adjusted. The encoder is installed in the cavity, connected with an output shaft of the motor and used for detecting the opening degree of the micro-leakage valve. According to the micro-leakage valve control device, the rotating shaft of the micro-leakage valve can be driven by the motor to rotate to control opening and closing of the micro-leakage valve, and the adjusting precision of the opening degree of the micro-leakage valve is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of valves, and in particular relates to a micro-leakage valve control device. Background Art

[0002] Ultra-high vacuum chamber is an indispensable configuration for equipment in the fields of surface physical chemistry, semiconductor physics, microelectronics, etc. Sample processing and gas-solid reaction in this type of chamber require the use of micro-leak valves to accurately control the gas intake, and the intake range is generally 10 -10 mbar~10 -5 mbar.

[0003] Ultra-high altitude vacuum micro-leakage valves have a variety of different structures, one of which uses a stainless steel valve body and a sealing sheet for sealing the internal channel of the valve body. The internal channel of the stainless steel valve body is provided with a super-hard alloy that can fit tightly with the sealing sheet. When the micro-leakage valve is opened or closed, the surface pressure of the sealing sheet can be changed by rotating the valve body wheel, and the size of the contact surface between the sealing sheet and the super-hard alloy in the internal channel of the valve body can be changed to adjust the gas conductivity of the internal channel of the valve body, thereby regulating the gas flow.

[0004] At present, the opening and closing and opening adjustment of ultra-high altitude vacuum micro-leakage valves mainly rely on manual operation, resulting in poor accuracy of opening adjustment, which cannot meet the requirements of ultra-high vacuum chambers for gas flow control accuracy.

[0005] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0006] The utility model aims to provide a micro-leakage valve control device, which can control the opening and closing of the micro-leakage valve by driving the rotating shaft of the micro-leakage valve through a motor, and improve the adjustment accuracy of the opening of the micro-leakage valve.

[0007] In order to achieve the above-mentioned purpose, a specific embodiment of the utility model provides a micro-leakage valve control device, including a housing, a flange, a micro-leakage valve, a coupling, a motor and an encoder. A cavity is provided inside the housing, and an opening is provided on the bottom wall of the housing. The flange is mounted on the bottom outer wall of the housing and is arranged opposite to the opening. The top of the micro-leakage valve is sleeved in the flange, and the micro-leakage valve has a rotating shaft capable of adjusting its opening. The bottom end of the coupling is connected to the top end of the rotating shaft of the micro-leakage valve. The motor is installed in the cavity, and the output shaft of the motor is connected to the top end of the coupling, which is used to drive the rotating shaft of the micro-leakage valve to rotate, thereby adjusting the opening of the micro-leakage valve. The encoder is installed in the cavity, and the encoder is connected to the output shaft of the motor, which is used to detect the opening of the micro-leakage valve.

[0008] In one or more embodiments of the present invention, the motor is a stepper motor.

[0009] In one or more embodiments of the present invention, the micro-leakage valve control device further comprises a motor bracket arranged in the cavity, wherein the bottom end of the motor bracket is connected to the bottom inner wall of the shell, and the top end is connected to the bottom end of the motor.

[0010] In one or more embodiments of the present invention, the motor bracket is constructed as four rods, and the four rods are distributed at four corners of the bottom end of the motor.

[0011] In one or more embodiments of the present invention, the micro-leakage valve control device further includes an encoder bracket disposed in the cavity, wherein the bottom end of the encoder bracket is connected to the top end of the motor, and the top end is connected to the bottom end of the encoder.

[0012] In one or more embodiments of the present invention, the encoder bracket includes a first plate body, a second plate body extending downward from both sides of the first plate body, and a third plate body bent from the second plate body toward the first plate body. The first plate body is connected to the bottom end of the encoder, and the third plate body is connected to the top end of the motor.

[0013] In one or more embodiments of the present invention, the first plate body is provided with an escape opening through which the output shaft of the power supply machine and / or the shaft of the encoder passes.

[0014] In one or more embodiments of the present invention, the micro-leakage valve control device also includes a motor driver disposed in the cavity. The motor driver is mounted on the top inner wall of the shell and is electrically connected to the motor. The motor driver is used to control the start and stop of the motor.

[0015] In one or more embodiments of the present invention, the micro-leakage valve control device further includes a signal processor disposed in the cavity. The signal processor is mounted on the top inner wall of the housing and is electrically connected to the encoder.

[0016] In one or more embodiments of the present invention, a plurality of heat dissipation holes are provided on the top wall of the housing.

[0017] Compared with the prior art, the micro-leakage valve control device of the utility model can drive the rotation shaft of the micro-leakage valve to rotate by a motor, thereby controlling the opening and closing of the micro-leakage valve, realizing the automation and electrification control of the micro-leakage valve, and reducing the erroneous operation caused by human operation. In addition, by changing the rotation angle of the micro-leakage valve rotation shaft by a motor, the opening of the micro-leakage valve can be controlled, the adjustment accuracy of the micro-leakage valve opening can be improved, and the adjustment error can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the implementation of the utility model or the technical solution in the prior art, the following is a brief introduction to the drawings required for the implementation or the prior art description. Obviously, the drawings described below are only some implementations recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 This is a three-dimensional structural diagram of a micro-leakage valve control device in one embodiment of the utility model;

[0020] Figure 2 This is a cross-sectional structural diagram of a micro-leakage valve control device in one embodiment of the utility model;

[0021] Figure 3 This is an exploded structural diagram of a micro-leakage valve control device in one embodiment of the utility model;

[0022] Figure 4 It is a partial stereoscopic diagram of a micro-leakage valve control device in one embodiment of the utility model;

[0023] Figure 5 This is a three-dimensional structural diagram of a motor, an encoder and an encoder bracket in one embodiment of the utility model.

[0024] Explanation of main figure marks: 1. shell, 101. cavity, 102. opening, 103. heat dissipation hole, 104. interface, 2. flange, 3. micro-leakage valve, 4. motor, 5. motor bracket, 6. coupling, 7. encoder, 8. encoder bracket, 801. first plate body, 802. second plate body, 803. third plate body, 804. avoidance opening, 9. motor driver, 10. signal processor. DETAILED DESCRIPTION

[0025] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the implementation of the present invention will be clearly and completely described below in conjunction with the drawings in the implementation of the present invention. Obviously, the described implementation is only a part of the implementation of the present invention, not all of the implementations. Based on the implementation of the present invention, all other implementations obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0026] In the description of the present invention, it should be understood that the terms "upper", "lower", "top", "bottom", "vertical", "horizontal", "axial", "radial", "circumferential", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0027] Reference Figures 1 to 5 As shown, a micro-leakage valve control device in one embodiment of the utility model comprises a housing 1, a flange 2, a micro-leakage valve 3, a coupling 6, a motor 4 and an encoder 7. A cavity 101 is provided inside the housing 1, and an opening 102 is provided on the bottom wall. The flange 2 is mounted on the bottom outer wall of the housing 1 and is arranged opposite to the opening 102. The top of the micro-leakage valve 3 is sleeved in the flange 2, and the micro-leakage valve 3 has a rotating shaft capable of controlling the opening. The bottom end of the coupling 6 is connected to the top end of the rotating shaft of the micro-leakage valve 3. The motor 4 is installed in the cavity 101, and the output shaft of the motor 4 is connected to the top end of the coupling 6, which is used to drive the rotating shaft of the micro-leakage valve 3 to rotate, thereby adjusting the opening of the micro-leakage valve 3. The encoder 7 is installed in the cavity 101, and the encoder 7 is connected to the output shaft of the motor 4, which is used to detect the opening of the micro-leakage valve 3.

[0028] Compared with the traditional manual adjustment method of the micro-leakage valve, according to the above structural design, the operator can control the motor 4 to drive the rotation shaft of the micro-leakage valve 3 to control the opening and closing of the micro-leakage valve 3, thereby realizing the automation and electrification control of the micro-leakage valve 3 and reducing erroneous operations caused by human operation.

[0029] Moreover, the opening of the micro-leakage valve 3 can be adjusted by changing the rotation angle of the rotating shaft of the micro-leakage valve 3 through the motor 4. Compared with manual adjustment, the motor has higher adjustment accuracy, which can reduce the adjustment error and facilitate the operator to better control the vacuum degree inside the vacuum equipment connected to the micro-leakage valve 3.

[0030] In one embodiment, the motor 4 can be a stepper motor, a servo motor or other types of motors 4. The stepper motor can convert an electrical pulse signal into an angular displacement. Each time a pulse signal is input, the rotor of the stepper motor rotates an angle. The angular displacement output is proportional to the number of pulses input, and the rotation speed is proportional to the pulse frequency. After the output shaft of the stepper motor is connected to the rotating shaft of the driving micro-leakage valve 3, the opening, closing and fine-tuning of the micro-leakage valve 3 can be accurately controlled.

[0031] Reference Figures 2 to 4 As shown, the micro-leakage valve control device also includes a motor bracket 5 arranged in the cavity 101 , the bottom end of the motor bracket 5 is connected to the bottom inner wall of the housing 1 , and the top end is connected to the bottom end of the motor 4 .

[0032] The motor bracket 5 may be constructed as a plurality of rods, which are arranged at intervals between the motor 4 and the bottom wall of the housing 1 to support the motor 4. Preferably, the motor bracket 5 may be constructed as four rods, which are distributed in a rectangular shape.

[0033] Similarly, in order to fix and support the encoder 7, refer to Figure 3 and Figure 4 As shown, the micro-leakage valve control device further includes an encoder bracket 8 disposed in the cavity 101 , the bottom end of the encoder bracket 8 is connected to the top end of the motor 4 , and the top end is connected to the bottom end of the encoder 7 .

[0034] In one embodiment, the encoder bracket 8 may be constructed as a thin plate-like structure.

[0035] Specifically, refer to Figure 5 As shown, the encoder bracket 8 includes a first plate 801, second plates 802 extending downward from both sides of the first plate 801, and a third plate 803 bent from the second plate 802 toward the first plate 801, and the third plate 803 can be bent in the direction between the two second plates 802, or in the direction away from the two second plates 802. The third plate 803 is connected to the top of the motor 4, and the first plate 801 is relatively protruding from the third plate 803 and connected to the bottom of the encoder 7, so as to fix the encoder 7 to the top of the motor 4.

[0036] Furthermore, considering that the output shaft of the motor 4 needs to be connected to the shaft corresponding to the encoder 7, an escape opening 804 is provided on the first plate 801 for either the output shaft of the power supply machine 4 or the shaft of the encoder 7 to pass through.

[0037] In one embodiment, reference Figure 2 and Figure 3 As shown, in order to remotely control the opening and closing of the micro-leakage valve 3 and adjust its opening degree, the micro-leakage valve control device also includes a motor driver 9 arranged in the cavity 101. The motor driver 9 is installed on the top inner wall of the shell 1 and is electrically connected to the motor 4. The motor driver 9 is used to control the start and stop of the motor 4.

[0038] The motor driver 9 can also be electrically connected or communicatively connected to other controllers and a host computer with an operation interface, so that the operator can more conveniently control the opening and closing and the opening degree of the micro-leakage valve 3 .

[0039] Furthermore, a knob capable of controlling the rotation of the motor 4 can be provided on the controller, so that the operator can manually control the opening and closing and the opening degree of the micro-leakage valve 3 through the knob, so that the micro-leakage valve control device in the embodiment of the utility model can be suitable for more application scenarios.

[0040] In one embodiment, the micro-leakage valve control device further includes a signal processor 10 disposed in the cavity 101, the signal processor 10 is mounted on the top inner wall of the housing 1, and is electrically connected to the encoder 7. The signal processor 10 has a processing chip and an acquisition chip, and can digitally process the coded pulse signal in the encoder 7.

[0041] Reference Figure 1 and Figure 3 As shown, a plurality of heat dissipation holes 103 are provided on the top wall of the housing 1. The heat dissipation holes 103 can be concentratedly distributed on the top wall of the housing 1 or evenly distributed on the top wall of the housing 1, and the specific distribution method can be selected according to actual needs.

[0042] Preferably, the heat dissipation holes 103 may be concentrated in two areas on the top wall of the housing 1 , one area being relatively close to the motor driver 9 and the other area being relatively close to the signal processor 10 .

[0043] In one embodiment, reference Figure 1 and Figure 3 As shown, a plurality of interfaces 104 for connecting external cables are provided on the top wall of the housing 1. Some of the interfaces 104 are respectively electrically connected to the motor driver 9, the signal processor 10 and other electronic components, so as to connect the motor driver 9, the signal processor 10 and other electronic components to the external control components through cables, so as to realize the output of internal signals of the micro-leak valve control device and the input of external signals. Another part of the interfaces 104 is responsible for connecting to the wires connected to the power supply, so as to supply power to the motor driver 9, the signal processor 10 and other electronic components.

[0044] In one embodiment, the micro-leakage valve control device also includes a reducer (not shown in the figure), which can be arranged between the output shaft of the motor 4 and the coupling 6 to reduce the rotation speed of the micro-leakage valve 3, improve the control accuracy of the motor 4 on the micro-leakage valve 3, and thereby improve the adjustment accuracy of the opening of the micro-leakage valve 3.

[0045] Preferably, the reducer can be a planetary reducer with compact structure, small size, high rigidity and large torque transmission.

[0046] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be considered exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0047] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each implementation mode may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A micro-leakage valve control device, characterized in that: include: A housing (1) having a cavity (101) therein and an opening (102) on the bottom wall; A flange (2) is mounted on the bottom outer wall of the housing (1) and is disposed opposite to the opening (102); A micro-leakage valve (3), the top of which is sleeved in the flange (2), and the micro-leakage valve (3) has a rotating shaft capable of adjusting its opening; A coupling (6), the bottom end of which is connected to the top end of the rotating shaft of the micro-leakage valve (3); A motor (4) is installed in the cavity (101), the output shaft of the motor (4) is connected to the top end of the coupling (6), and is used to drive the rotating shaft of the micro-leakage valve (3) to rotate, thereby adjusting the opening of the micro-leakage valve (3); and An encoder (7) is installed in the cavity (101); the encoder (7) is connected to the output shaft of the motor (4) and is used to detect the opening of the micro-leakage valve (3).

2. The micro-leakage valve control device according to claim 1, characterized in that: The motor (4) is a stepping motor.

3. The micro-leakage valve control device according to claim 1, characterized in that: The micro-leakage valve control device further comprises a motor bracket (5) arranged in the cavity (101), the bottom end of the motor bracket (5) being connected to the bottom inner wall of the housing (1), and the top end being connected to the bottom end of the motor (4).

4. The micro-leakage valve control device according to claim 3, characterized in that: The motor bracket (5) is constructed as four rod bodies, and the four rod bodies are distributed at the four corners of the bottom end of the motor (4).

5. The micro-leakage valve control device according to claim 1, characterized in that: The micro-leakage valve control device further comprises an encoder bracket (8) arranged in the cavity (101), the bottom end of the encoder bracket (8) being connected to the top end of the motor (4), and the top end being connected to the bottom end of the encoder (7).

6. The micro-leakage valve control device according to claim 5, characterized in that: The encoder bracket (8) comprises a first plate body (801), a second plate body (802) extending downward from both sides of the first plate body (801), and a third plate body (803) bent from the second plate body (802) toward the first plate body (801), the first plate body (801) being connected to the bottom end of the encoder (7), and the third plate body (803) being connected to the top end of the motor (4).

7. The micro-leakage valve control device according to claim 6, characterized in that: The first plate (801) is provided with an escape opening (804) for the output shaft of the motor (4) and / or the shaft of the encoder (7) to pass through.

8. The micro-leakage valve control device according to claim 1, characterized in that: The micro-leakage valve control device further comprises a motor driver (9) disposed in the cavity (101); the motor driver (9) is mounted on the top inner wall of the housing (1) and is electrically connected to the motor (4); the motor driver (9) is used to control the start and stop of the motor (4).

9. The micro-leakage valve control device according to claim 1, characterized in that: The micro-leakage valve control device further comprises a signal processor (10) disposed in the cavity (101); the signal processor (10) is mounted on the top inner wall of the housing (1) and is electrically connected to the encoder (7).

10. The micro-leakage valve control device according to claim 1, characterized in that: A plurality of heat dissipation holes (103) are provided on the top wall of the housing (1).

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