Carbon dioxide treatment system for combustion exhaust gas
By designing a combustion exhaust treatment system including incineration equipment, cooling devices, suction and desorption devices and compression and liquefaction devices, the emission problems of carbon dioxide and volatile organic gases in the electronics and semiconductor industries are solved, and efficient recycling and purification of carbon dioxide is achieved, providing the industry with a high-purity carbon dioxide supply.
Patent Information
- Application Number
- CN202421287698.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2024-04-24
- Filing Date
- 2024-06-06
- Publication Date
- 2025-04-01
- Estimated Expiration
- 2034-06-06
AI Technical Summary
Volatile organic gases (VOCs) and carbon dioxide generated in the manufacturing process by the electronics and semiconductors are difficult to effectively recover and utilize, resulting in direct emission of these gases through the chimney.
A carbon dioxide treatment system for burning exhaust gas is designed, including incineration equipment, cooling equipment, suction and desorption equipment, chimneys, compression and liquefaction equipment and storage equipment. The carbon dioxide gas in the combustion exhaust gas is concentrated and recovered through suction and desorption and compression and liquefaction technology, and the concentration of carbon dioxide is further increased through purification equipment for reuse.
Effective concentration and recovery of carbon dioxide gas in combustion exhaust gas is achieved, resource utilization is improved, environmental pollution is reduced, and high-purity carbon dioxide supply to the semiconductor and electronic industries is provided.
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Figure CN222703309U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a carbon dioxide treatment system for combustion tail gas, and in particular to a system with the function of concentrating and recovering carbon dioxide gas in combustion tail gas, and is suitable for petrochemical plants, oil storage plants, scientific and technological manufacturing plants or similar areas. Background Art
[0002] Taiwan's semiconductor cluster is complete, advanced technology is developing rapidly, and the demand for related electronic chemicals and gases is growing. Chemical plants are striving to enter the supply chain. As the electronics industry grows, the demand for industrial gases will also increase simultaneously. The main domestic industrial gas suppliers are Lianhua Gas, Sanfu Gas, and Yadong Gas.
[0003] In response to the trend of green economy, OUCC starts with ethylene. The by-product of the process of manufacturing ethylene oxide is carbon dioxide. After carbon capture, the carbon dioxide is reused to produce high-purity liquid carbon dioxide. This product can be used in beverage and food grades, and can also enter the supply chain of the electronics and semiconductor industries. Currently, more than 70% of the carbon dioxide comes from reuse.
[0004] However, the electronics or semiconductor industries are prone to produce volatile organic gases (VOCs) when manufacturing products. Volatile organic gases (VOCs) are hydrocarbons. In addition, the burners use auxiliary fuels such as natural gas for heating, which will also produce carbon dioxide after combustion and oxidation. Currently, most of them are directly discharged through chimneys.
[0005] Therefore, in view of the above-mentioned shortcomings, the applicant hopes to propose a carbon dioxide treatment system for combustion exhaust gas that has the ability to concentrate and recover carbon dioxide gas in combustion exhaust gas, so that users can easily operate and assemble it. The applicant has devoted himself to researching and designing the system to provide user convenience, which is the creative motivation for the applicant's research and development. Utility Model Content
[0006] In view of the above technical problems, the present invention provides a carbon dioxide treatment system for combustion exhaust gas, in order to at least partially solve the above technical problems. Therefore, the specific technical solutions provided by the present invention are as follows.
[0007] The main purpose of the utility model is to provide a carbon dioxide treatment system for combustion exhaust gas, which is mainly designed by combining an incineration device, a cooling device, an adsorption and desorption device, a chimney, a compression and liquefaction device and at least one storage device. The incineration device discharges a combustion exhaust gas, which contains carbon dioxide gas. The combustion exhaust gas is first cooled by the cooling device and then sent to the adsorption and desorption device for adsorption and desorption of carbon dioxide gas. The desorbed carbon dioxide gas is then compressed and liquefied into liquid carbon dioxide by the compression and liquefaction device. The liquid carbon dioxide is stored by the storage device, so that the storage device with liquid carbon dioxide can be sent to a place for purification treatment, so that it has the efficiency of concentrating and recovering the carbon dioxide gas in the combustion exhaust gas, thereby increasing the overall practicality.
[0008] Another object of the utility model is to provide a carbon dioxide treatment system for combustion tail gas, which is sent to a place for purification through at least one storage device. The place is equipped with at least one purification device to purify the stored liquid carbon dioxide into either high-concentration liquid carbon dioxide or high-concentration gaseous carbon dioxide through the purification device. When the liquid carbon dioxide is purified into high-concentration, it is stored through at least one purification storage device to send the purified high-concentration liquid carbon dioxide to a factory for use. When the gaseous carbon dioxide is purified into high-concentration, the purification device is equipped with a purification pipeline, which is connected to a factory to transport the purified high-concentration gaseous carbon dioxide to the factory through the purification pipeline for use. The plant area referred to above is any one of a semiconductor process plant area, an electronic process plant area, an optoelectronic process plant area, a chemical process plant area, a petrochemical process plant area, an electroplating process plant area, a food process plant area, a drying and cleaning process plant area, and a pharmaceutical process plant area. For subsequent applications, it can be used in a process area that requires carbon dioxide gas or as one of the product raw materials, so that the purified carbon dioxide has the efficiency of recovery and can achieve the value of reuse, thereby increasing the overall usability.
[0009] Another object of the present invention is to provide a carbon dioxide treatment system for combustion exhaust gas, through the incineration equipment and a double-rotor volatile organic gas (VOC) treatment system or a single-rotor volatile organic gas (VOC) treatment system. Any combination design, wherein the incineration equipment is any one of a direct-fired incinerator (TO), a catalytic incinerator, and a regenerative thermal incinerator (RTO), enables the incineration equipment to perform high-temperature oxidation on the desorbed concentrated gas desorbed by the zeolite rotor to oxidize volatile organic compounds into main components including carbon dioxide and water. Next, the combustion exhaust gas is discharged to capture, separate, purify and utilize the carbon dioxide gas in the post-combustion exhaust gas. The system has the efficiency of simultaneously treating volatile organic gases (VOC) and carbon dioxide gases, so as to achieve the purpose of environmental protection, energy saving and carbon reduction, thereby increasing the overall operability.
[0010] In order to further understand the characteristics, features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention, but the attached drawings are only provided for reference and illustration and are not intended to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 Schematic diagram of the main system architecture using a rotary wheel for adsorption and desorption devices;
[0012] Figure 2 A schematic diagram of another system architecture using a rotary wheel for the adsorption and desorption device;
[0013] Figure 3 This is a schematic diagram of the structure of liquid carbon dioxide entering the purification equipment;
[0014] Figure 4 A schematic diagram of a first embodiment of gaseous carbon dioxide entering a purification device;
[0015] Figure 5 A schematic diagram of a second embodiment of gaseous carbon dioxide entering a purification device;
[0016] Figure 6 A schematic diagram of the main system architecture of the adsorption-desorption device using adsorbent materials;
[0017] Figure 7 Schematic diagram of another system architecture using adsorbent material for the adsorption-desorption device.
[0018] Explanation of symbols:
[0019] 1. Double-rotor volatile organic gas (VOC) treatment system;
[0020] 10. Incineration equipment; 101. Direct-fired incinerator (TO);
[0021] 11. Exhaust gas delivery pipeline; 111. Cooling device; 112. Fan; 113. Dust removal device;
[0022] 20. adsorption and desorption device; 201. adsorption material; 202. rotating wheel;
[0023] 21. at least one adsorption zone;
[0024] 22. at least one desorption zone;
[0025] 23. At least one exhaust pipe; 231. Fan;
[0026] 24. At least one hot gas pipeline;
[0027] 25. at least one desorption gas pipeline;
[0028] 26. Chimney;
[0029] 27. Compression liquefaction device;
[0030] 28. Storage equipment;
[0031] 29. Heater;
[0032] 30. Location;
[0033] 31. Purification equipment; 3101. Raw material tank; 3102. Purification tower; 31021. Packing bed; 3103. Heater; 3104. Cooling facility; 311. Purification pipeline; 3121. Liquid-to-gas device; 3122. Raw material tank; 3123. Thin film contactor; 31231. Thin film; 3124. Heater; 3131. Liquid-to-gas device; 3132. Raw material tank; 3133. Adsorption-desorption bed module; 3134. Vacuum pump;
[0034] 32. Purification and storage equipment;
[0035] 33. Factory area;
[0036] 40. first adsorption rotor; 401. adsorption zone; 402. cooling zone; 403. desorption zone;
[0037] 41. Exhaust gas intake pipeline; 411. Exhaust gas connecting pipeline; 4111. Exhaust gas connecting control valve;
[0038] 42. First clean gas discharge pipeline; 421. First clean gas communication pipeline; 4211. First clean gas communication control valve;
[0039] 43. A first cooling air intake pipeline;
[0040] 44. A first cooling gas delivery pipeline;
[0041] 45. A first hot gas delivery pipeline;
[0042] 46. First desorption concentrated gas pipeline; 461. Fan
[0043] 50, second adsorption rotor; 501, adsorption zone; 502, cooling zone; 503, desorption zone;
[0044] 52. Second clean air discharge pipeline; 521. Fan;
[0045] 53. Second cooling air intake pipeline;
[0046] 54. Second cooling gas delivery pipeline;
[0047] 55. Second hot gas delivery pipeline;
[0048] 56. Second desorption concentrated gas pipeline; 561. Fan;
[0049] 61. first heat exchanger; 611. first cold side pipeline; 612. first hot side pipeline;
[0050] 62. Second heat exchanger; 621. Second cold side pipeline; 622. Second hot side pipeline;
[0051] 63. a third heat exchanger; 631. a third cold side pipeline; 632. a third hot side pipeline;
[0052] 64, fourth heat exchanger; 641, fourth cold side pipeline; 642, fourth hot side pipeline;
[0053] 65. First cold side delivery pipeline;
[0054] 66. Fourth cold side delivery pipeline. DETAILED DESCRIPTION
[0055] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0056] See also Figure 1-Figure 7 , which is a schematic diagram of an embodiment of the utility model. The best implementation of the combustion exhaust carbon dioxide treatment system of the utility model is to be used in petrochemical plants, oil storage plants, technology manufacturing plants or similar areas, mainly with the efficiency of concentrating and recovering carbon dioxide gas in the combustion exhaust gas.
[0057] The carbon dioxide treatment system of combustion tail gas of the utility model mainly comprises a combination design of an incineration device 10, a cooling device 111, an adsorption and desorption device 20, a chimney 26, a compression and liquefaction device 27 and at least one storage device 28 (such as Figure 1 and Figure 2As shown in the figure, the incineration equipment 10 discharges a combustion tail gas, and the combustion tail gas contains carbon dioxide gas. The incineration equipment 10 is provided with a tail gas delivery pipeline 11 to deliver the combustion tail gas. In addition, the incineration equipment 10 is any one of a direct-fired incinerator (TO) 101, a catalytic incinerator (not shown), and a regenerative thermal incinerator (RTO) (not shown). When the incineration equipment 10 is a direct-fired incinerator (TO) 101, the direct-fired incinerator (TO) 101 is provided with any one of two heat exchangers, three heat exchangers, and four heat exchangers. The incineration equipment 10 is designed in combination with any one of a double-rotor volatile organic gas (VOC) treatment system 1 or a single-rotor volatile organic gas (VOC) treatment system (not shown). Since volatile organic gas (VOC) is a hydrocarbon, it will produce carbon dioxide after combustion. In order to heat up the direct-fired incinerator (TO) 101, fuel is needed. If the fuel is a fossil fuel, such as natural gas, it contains hydrocarbons, which will produce carbon dioxide gas after combustion. Therefore, the incineration equipment 10 can oxidize the volatile organic gas (VOC) desorbed by the zeolite wheel at a high temperature of about 732°C, so as to oxidize the volatile organic compounds into main components including carbon dioxide and water, and then capture, separate, purify and utilize the carbon dioxide discharged from the combustion exhaust gas, so as to achieve the purpose of environmental protection, energy saving and carbon reduction.
[0058] The combustion exhaust gas is transported to the adsorption and desorption device 20 via the exhaust gas transport pipeline 11 to adsorb and desorb carbon dioxide gas. When transported to the adsorption and desorption device 20, the exhaust gas transport pipeline 11 is provided with a cooling device 111 (such as Figure 1 and Figure 2 As shown), the cooling device 111 is any one of a cooler, a condenser, a dehumidifier, a cooler, a cooling water tower, and a refrigerant compressor. When the cooling device 111 is a cooler, the cooler is any one of a shell and tube cooler, a fin tube cooler, and a plate heat exchanger cooler. The cooling device 111 cools the combustion exhaust gas. Since the combustion exhaust gas has a high temperature of about 200°C, it needs to be cooled first and then sent to the adsorption and desorption device 20 for subsequent carbon dioxide gas adsorption and desorption. The exhaust gas delivery pipeline 11 is provided with a fan 112 (such as Figure 2 As shown), so that the combustion exhaust gas can be pushed and pulled into the adsorption and desorption device 20.
[0059] Furthermore, for example, in a wafer manufacturing plant, organic compounds sometimes contain silicon as a component element, which generates silicon dioxide particles after combustion and oxidation. In addition to the cooling device 111, the exhaust gas delivery pipeline 11 may also be equipped with a dust removal device 113 (such as Figure 2As shown), and the dust or oxides such as silicon dioxide (SiO2) contained in the combustion exhaust gas are removed and filtered through the dust removal device 113, wherein the dust removal device 113 is any one of a bag dust collector, a pulse bag dust collector, an electric bag composite dust collector, a negative pressure back-blowing filter bag dust collector, a low-pressure long bag pulse dust collector, a cartridge pulse dust collector, a pulse filter element dust collector, a pulse jet bag dust collector, an inertial dust collector, an electrostatic dust collector, a horizontal electrostatic dust collector, a centrifugal dust collector, a cyclone separator, a multi-cyclone dust collector, a wet dust collector, a wet electrostatic dust collector, a charged water mist dust collector, a water film dust collector, a venturi tube dust collector, and a multi-layer dust collector. In addition, in addition to being equipped with a dust removal device 113, the exhaust gas conveying pipeline 111 can also be provided with a filter device (not shown), and the dust or oxides such as silicon dioxide (SiO2) contained in the combustion exhaust gas can be removed and filtered through the filter device for dust removal, wherein the filter device is any one of a non-woven filter and a fine mesh.
[0060] The adsorption and desorption device 20 has two embodiments. The first embodiment is provided with at least one adsorption material 201 (such as Figure 6 and Figure 7As shown, the at least one adsorbent 201 is filled with multiple tubular hollow fiber tubular membrane adsorbents, and the filling rate is 65% to 95%, mainly to increase its adsorption area. The tubular hollow fiber tubular membrane is made of micron-grade powdered adsorbents and polymer materials, and the adsorbent contained therein is any one or a combination of zeolite (such as X-type zeolite (such as 13X)), anion exchange resin, and metal organic framework (Metal Organic Frameworks: MOF) materials. The above-mentioned tubular hollow fiber tubular membrane adsorbent material includes at least one channel and at least one adsorption layer (not shown), and the at least one adsorption layer surrounds the at least one channel, wherein the adsorption layer is adjacent to the channel, and multiple channels can also be arranged between the adsorption layers. The number of channels and the number of adsorption layers are not limited to the present invention. The at least one channel is used to allow gas to pass through the channel along the inside of the channel, but does not penetrate the channel, wherein the inner diameter of the at least one channel is any one between 0.3 mm and 1.5 mm, so as to be designed to suit different applications. In addition, the diameter of the tubular hollow fiber tubular membrane adsorbent material is D1, and the opening diameter of the at least one channel is d1, which satisfies the condition of 1<D1 / d1<99, and the tubular hollow fiber tubular membrane adsorbent material can be arranged into any of a rectangular body (not shown), a fan-shaped body (not shown), and a cylinder, and combined through the above-mentioned shapes to minimize the gaps between the tubular hollow fiber tubular membrane adsorbent material combinations, wherein the porosity of the tubular hollow fiber tubular membrane adsorbent material is 20%-80%. The so-called porosity is the ratio of the volume of the pores in the hollow part to the total volume of the material, and gas or liquid can enter only through the pores. In addition, the specific surface area of the tubular hollow fiber tubular membrane adsorbent material is greater than 500 square meters / cubic meter (m 2 / m 3 ), wherein the specific surface area refers to the surface area per unit volume of a porous solid substance, and the so-called surface area refers to the internal surface area, so as to have a better adsorption effect.
[0061] Furthermore, the material of the tubular hollow fiber tubular membrane adsorbent at least includes an amine-modified anion exchange resin material and a polymer material (not shown), and is mainly made of the amine-modified anion exchange resin material and the polymer material, wherein the polymer material is at least one of the group consisting of polysulfone, polyethersulfone, polyvinylidene fluoride, polyphenylsulfone, polyacrylonitrile, cellulose acetate, cellulose diacetate, polyimide, polyetherimide, polyamide, polyvinyl alcohol, polylactic acid, polyglycolic acid, polylactic acid-glycolic acid, polycaprolactone, polyvinyl hydropyrrolidone, ethylene-vinyl alcohol, polydimethylsiloxane, polytetrafluoroethylene and cellulose acetate. The amine-modified anion exchange resin is for mutual exchange with negatively charged ions. According to the reversible equilibrium principle of ion exchange reaction, the combined exchange ion is hydroxyl (OH - ) or carbonate (CO3 2- ) can be used to restore the resin to its original state by using the replacement reaction of the ion exchange resin. The amine-modified anion exchange resin material is an anion exchange resin modified by any one of primary amine (-NH2), secondary amine (-NHR), tertiary amine (-NR2), quaternary ammonium salt (-NR3OH) or a combination thereof. The so-called modification is to change the properties of the material, and improve the performance through physical processes such as heating, cooling, ion bombardment and injection, as well as chemical treatment. The so-called amine group (-NH2) is the functional group of amine, and amine can also be divided into primary amine (-NH2), secondary amine (-NHR), tertiary amine (-NR2), quaternary ammonium salt (-NR3OH), etc. according to the number of hydrogen atoms replaced on the nitrogen molecule. Among them, the primary amine (-NH2), secondary amine (-NHR) and tertiary amine (-NR2) are weakly alkaline functional groups, which can dissociate OH in water - The positively charged groups of this resin can adsorb and combine with anions in the solution, thereby producing anion exchange. The quaternary ammonium salt (-NR3OH) is a strong alkaline functional group, which can dissociate into OH in water. - The positively charged groups of this resin can adsorb and combine with the anions in the solution, thus producing anion exchange.
[0062] The tubular hollow fiber tubular membrane adsorbent used in the present invention is not only composed of the above-mentioned polymer materials, but also includes at least one adsorbent (not shown), such as zeolite powder, resin, activated carbon, etc. The adsorbent is in powder form and is micron-sized, with an average particle size of 1 to 99 microns, where 1 micron is equal to 1*10 -6Meters. The membrane body of the tubular hollow fiber tubular membrane adsorbent is made by a dry-wet spinning phase transfer process. The membrane body structure of the tubular hollow fiber tubular membrane adsorbent is similar to a sponge or foam structure, and has interconnected micron-sized small and medium-sized pores. Gas molecules can move and diffuse between the micron-sized small and medium-sized pores, wherein the gas molecules are sub-nanometer or angstrom (Ångström, abbreviated as angstrom, symbol Å) molecular size. In addition, the polymer material content is less than that of the adsorbent, and the polymer material accounts for 5wt%~55wt%, and the adsorbent (such as zeolite) accounts for 95wt%~45wt%. Generally speaking, the polymer material accounts for 10wt%~30wt% in a better ratio. The tubular hollow fiber tubular membrane adsorbent used in the utility model is mainly used to separate or purify a mixed gas containing two or more gases through the principle of adsorption. The principle is that the source feed gas flows through the surface of the membrane body of the tubular hollow fiber tubular membrane adsorbent and is output as concentrated gas. Through the diffusion of the source feed gas flowing through the surface of the membrane body of the tubular hollow fiber tubular membrane adsorbent, one or more gases are easily adsorbed by the adsorbent contained in the membrane body of the tubular hollow fiber tubular membrane adsorbent, while other gas components are less likely to be adsorbed. Therefore, part of the gas that is more easily adsorbed will be adsorbed on the adsorbent in the membrane body of the tubular hollow fiber tubular membrane adsorbent to achieve the effect of separation or purification. The factors of adsorption of the source feed gas include the micropore size of the adsorbent, the size of the gas molecule, the van der Waals force, the polarity, the hydrophilicity or hydrophobicity of the adsorbent, etc. The flow rate of the source feed gas passing through the membrane surface of the tubular hollow fiber tubular membrane adsorbent material is usually controlled at 0.01m / s~1m / s. Sometimes, when the processing efficiency requirement is lower or the purification separation requirement is lower, it can be adjusted to a maximum of 2.5m / s.
[0063] The second embodiment of the adsorption and desorption device 20 is provided with at least one rotating wheel 202 (such as Figure 1 and Figure 2 As shown in FIG. 1 ), the rotor 202 is any one of a turret type, a horizontal type, and a cylindrical type, and the rotor 202 is filled with any one of activated carbon, zeolite, silica gel, activated alumina, molecular sieve, manganese oxide, calcium hydroxide, graphene, and hollow fiber. In addition, the adsorption and desorption device 20 of the utility model has at least one adsorption area 21 and at least one desorption area 22. When the adsorption and desorption device 20 is at least one adsorption material 201 of the first embodiment (such as Figure 6 and Figure 7As shown in FIG. 2 , the at least one adsorption material 201 is filled with a plurality of tubular hollow fiber tubular membrane adsorption materials. The at least one adsorption material 201 can be set as two adsorption materials 201. Taking two adsorption materials 201 as an example, one adsorption material 201 is an adsorption area 21, and the other adsorption material 201 is a desorption area 22. After a period of time, one adsorption material 201 is converted into a desorption area 22, and the other adsorption material 201 is converted into an adsorption area 21 to facilitate adsorption and desorption. When the adsorption and desorption device 20 is at least one rotating wheel 202 of the second embodiment (as shown in FIG. 2 ), the at least one rotating wheel 202 of the second embodiment (as shown in FIG. 2 ) can be set as two adsorption materials 201. Figure 1 and Figure 2 As shown in FIG. 2 , the rotating wheel 202 is divided into at least one adsorption zone 21 and at least one desorption zone 22. After a period of time, the rotating wheel 202 rotates, so that the adsorption zone 21 rotates into the desorption zone 22, and the desorption zone 22 rotates into the adsorption zone 21, so as to facilitate adsorption and desorption.
[0064] The adsorption and desorption device 20 of the present invention is provided with at least one exhaust pipe 23, at least one hot gas pipe 24, and at least one desorption gas pipe 25, wherein the at least one adsorption zone 21 is connected to the tail gas delivery pipe 11 of the incineration equipment 10 (such as Figure 1 , Figure 2 , Figure 6 and Figure 7 As shown), the combustion exhaust gas of the exhaust gas delivery pipeline 11 is sent to the at least one adsorption zone 21 for carbon dioxide gas adsorption, and the at least one adsorption zone 21 is connected to the at least one exhaust pipeline 23, so that the adsorbed gas generated by the at least one adsorption zone 21 is discharged through the at least one exhaust pipeline 23, and the at least one exhaust pipeline 23 is connected to the chimney 26, and the exhaust pipeline 23 is provided with a fan 231 (as shown Figure 2 and Figure 7 As shown), the adsorbed gas can be pushed and pulled into the chimney 26 through the at least one exhaust pipe 23 for discharge. In addition, the at least one desorption zone 22 is connected to the at least one hot gas pipeline 24 to transport at least one heat source to the at least one desorption zone 22 through the at least one hot gas pipeline 24, wherein the at least one hot gas pipeline 24 has two implementations, the first implementation is that the at least one hot gas pipeline 24 is connected to a heat exchanger (not shown), the heat exchanger is any one of a fin-tube heat exchanger, a shell-and-tube heat exchanger, a plate heat exchanger, a gas-to-gas heat exchanger, and a liquid-to-gas heat exchanger, and the second implementation is that the at least one hot gas pipeline 24 is connected to a heater 29 (as shown in FIG. Figure 1 , Figure 2 , Figure 6 and Figure 7As shown), the heater 29 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater, so that the at least one hot gas pipeline 24 can transport at least one heat source to the at least one desorption zone 22 for desorption through a heat exchanger (not shown) or the heater 29, and the at least one desorption zone 22 is connected to the at least one desorption gas pipeline 25 so that the carbon dioxide gas after desorption in the at least one desorption zone 22 is output through the at least one desorption gas pipeline 25.
[0065] The at least one desorbed gas pipeline 25 is connected to the compression liquefaction device 27 to compress and liquefy the desorbed carbon dioxide gas into liquid carbon dioxide. Carbon dioxide is one of the gases that is easier to liquefy. The liquefaction temperature is 15°C and the pressure is about 14.7Pa. When the carbon dioxide pressure is higher than 7.4MPa and the temperature is higher than 31°C, carbon dioxide will turn into a supercritical fluid. Its physical properties are between the gas and liquid phases. It has the characteristics of both gas and liquid, low viscosity, and almost no surface tension. In addition, the compression liquefaction device 27 is provided with a compressor (not shown), wherein the compressor can be divided into two types: one that changes the gas volume and one that changes the gas speed. The compressor that changes the gas volume first introduces the gas into a closed space, and then increases the gas pressure by compressing the gas volume. The compressor that changes the gas speed allows the gas to flow at a high speed through the rotation of the impeller, and then passes through the outer boost ring. Later, due to the increase in the cross-sectional area of the boost ring, the gas flow rate gradually decreases, so that the gas energy is converted from kinetic energy to pressure energy, and the pressure increases. In addition, the compressor has a cooling pipeline (not shown), which is used for the entry of a liquid or a gas, wherein the liquid is any one of water, ice water, and a refrigerant, and the gas is any one of air and cold air. After the desorbed carbon dioxide gas is compressed and liquefied into liquid carbon dioxide, the carbon dioxide compressed and liquefied by the compression and liquefaction device 27 is stored by the at least one storage device 28 (e.g. Figure 1 , Figure 2 , Figure 6 and Figure 7 As shown), wherein the at least one storage device 28 is any one of a tank truck, a cylinder, a barrel, a storage tank, and a container, which can facilitate the handling or transportation of the liquid carbon dioxide to any place or any location 30, wherein the location 30 is a place where liquid carbon dioxide is processed, such as a chemical plant, a gas processing plant, and the like.
[0066] When the at least one storage device 28 is sent to a place 30 for purification treatment, the place 30 is provided with at least one purification device 31, so that the stored liquid carbon dioxide is purified into either high-concentration liquid carbon dioxide or high-concentration gaseous carbon dioxide through the purification device 31. When the purification device 31 purifies the liquid carbon dioxide into high-concentration liquid carbon dioxide, the purified high-concentration liquid carbon dioxide is stored through at least one purification storage device 32 (such as Figure 1 and Figure 6 As shown in FIG. 1 ), the at least one purification storage device 32 is any one of a tank truck, a steel cylinder, a barrel tank, a storage tank, and a container, which can facilitate the handling or transportation of the high-concentration liquid carbon dioxide. The at least one purification storage device 32 is sent to a factory area 33 (such as Figure 1 and Figure 6 As shown), the purified high-concentration liquid carbon dioxide is sent to the plant 33 for use, wherein the plant 33 is any one of a semiconductor process plant, an electronic process plant, an optoelectronic process plant, a chemical process plant, a petrochemical process plant, an electroplating process plant, a food process plant, a dry cleaning process plant, and a pharmaceutical process plant. For example, the carbon dioxide is sent back to the semiconductor process plant for use as a laser light source in deep extreme ultraviolet lithography, or for use in cleaning processes, removing static electricity, and the like.
[0067] The purification equipment 31 for purifying liquid carbon dioxide into high-concentration liquid carbon dioxide comprises a raw material tank 3101, a purification tower 3102, a heater 3103 and a cooling facility 3104 (such as Figure 3As shown in the figure, the raw material tank 3101 is connected to the purification tower 3102, the heater 3103 is connected to the purification tower 3102, and the cooling facility 3104 is connected to the purification tower 3102. The liquid carbon dioxide stored in the at least one storage device 28 is sent to the raw material tank 3101 for storage. The raw material tank 3101 then transports the liquid carbon dioxide to the purification tower 3102 for convection heat exchange with the hot air transported by the heater 3103, wherein the heater 3103 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater, so that the lower boiling point substances dissolved in the liquid carbon dioxide are evaporated and rise, and the higher boiling point substances dissolved in the liquid carbon dioxide sink in liquid form. The evaporated and rising lower boiling point substances are cooled by the cooling facility 3104 into high-concentration liquid carbon dioxide, wherein the cooling facility 3104 is any one of a cooler, a condenser, a dehumidifier, a cooler, a cooling water tower, and a refrigerant compressor for filtering and purification. In addition, the purification tower 3102 is provided with at least one packed bed 31021, and the packed bed 31021 is made of any one of a Dixon packing, a McMahon packing, and a double-layer wire mesh corrugated (Sulyer) packing, so that the liquid carbon dioxide flows into the top of the purification tower 3102 by its own gravity and passes through the packed bed 31021 to perform convection heat exchange with a hot gas previously generated by the heater 3103.
[0068] When the purification device 31 purifies the liquid carbon dioxide into a high-concentration gaseous carbon dioxide, the purification device 31 is provided with a purification pipeline 311, which is connected to a plant area 33 (such as Figure 2 and Figure 7 As shown), the gaseous carbon dioxide purified into a high concentration is transported to the plant area 33 through the purification pipeline 311, wherein the plant area 33 is any one of a semiconductor process plant area, an electronic process plant area, an optoelectronic process plant area, a chemical process plant area, a petrochemical process plant area, an electroplating process plant area, a food process plant area, a drying and cleaning process plant area, and a pharmaceutical process plant area. For example, the gaseous carbon dioxide is sent back to the semiconductor process plant area for use as a laser light source in deep extreme ultraviolet lithography, or is sent back to the semiconductor process plant area for cleaning processes, static electricity removal, and the like.
[0069] The purification device 31 for purifying liquid carbon dioxide into high-concentration gaseous carbon dioxide has two embodiments. In the first embodiment, the purification device 31 is provided with a liquid-to-gas device 3121, a raw material tank 3122, a membrane contactor 3123 and a heater 3124 (such as Figure 4As shown in the figure, the liquid-to-gas device 3121 is connected to the raw material tank 3122, wherein the liquid-to-gas device 3121 is any one of an evaporator and a vaporizer, the raw material tank 3122 is connected to the film contactor 3123, wherein the film contactor 3123 is provided with at least one film 31231, and the at least one film 31231 is any one of a hollow fiber tubular membrane, a nanoporous carbon film, a polyether ether ketone film, a polyimide film, a monoethanolamine film, a rubber-like polymer film, and a polyimide hollow fiber film, and the heater 3124 is connected to the film contactor The contactor 3123, wherein the heater 3124 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater. The liquid carbon dioxide stored in the at least one storage device 28 is first converted into gaseous carbon dioxide by the liquid-to-gas device 3121 and then sent to the raw material tank 3122 for storage, and then transported to the membrane contactor 3123 for convection heat exchange with the hot air transported by the heater 3124, so as to filter and remove impurities in the gaseous carbon dioxide, so that the converted gaseous carbon dioxide can form a high concentration of gaseous carbon dioxide for filtration and purification.
[0070] The second embodiment of the purification device 31 for purifying liquid carbon dioxide into high-concentration gaseous carbon dioxide is that the purification device 31 is provided with a liquid-to-gas device 3131, a raw material tank 3132, at least one adsorption-desorption bed module 3133 and a vacuum pump 3134 (such as Figure 5As shown), the liquid-to-gas device 3131 is connected to the raw material tank 3132, wherein the liquid-to-gas device 3131 is any one of an evaporator and a vaporizer, the raw material tank 3132 is connected to the at least one adsorption-desorption bed module 3133, the vacuum pump 3134 is connected to the at least one adsorption-desorption bed module 3133, wherein the adsorption-desorption bed module 3133 is filled with a plurality of tubular hollow fiber tubular membrane adsorption materials, the tubular hollow fiber tubular membrane adsorption material is any one of zeolite, anion exchange resin, metal organic framework material or a combination thereof, the tubular hollow fiber tubular membrane adsorption material comprises at least one pore and at least one adsorption layer (not shown), and the adsorption layer further comprises an amino group Modified anion exchange resin material and a polymer material (please refer to the previous paragraph regarding the tubular hollow fiber tubular membrane adsorbent material). The liquid carbon dioxide stored in the at least one storage device 28 is first converted into gaseous carbon dioxide by the liquid-to-gas device 3131 and then sent to the raw material tank 3132, and then transported to the at least one adsorption and desorption bed module 3133 for pressurized adsorption or reduced pressure desorption, wherein the at least one adsorption and desorption bed module 3133 adopts a combined structure of an absorption tower and a desorption tower. The gaseous carbon dioxide enters the absorption tower of the at least one adsorption and desorption bed module 3133 and forms a convection contact with the ethanolamine (MEA) solution entering from the top to carry out the gaseous carbon dioxide adsorption process. The saturated solution after adsorption is input into the desorption tower of the at least one adsorption-desorption bed module 3133 for heating to evaporate the gaseous carbon dioxide, thereby separating the gaseous carbon dioxide from the ethanolamine (MEA) solution for desorption, and desorbing the high-concentration gaseous carbon dioxide through the vacuum pump 3134 in a vacuum manner (performing a heated vacuum desorption (TVSA) procedure) during reduced pressure desorption for filtration and purification.
[0071] Furthermore, the utility model describes in the preceding paragraph any combination design of the incineration equipment 10 and a double-rotor volatile organic gas (VOC) treatment system 1 or a single-rotor volatile organic gas (VOC) treatment system (not shown). When the incineration equipment 10 is combined with a double-rotor volatile organic gas (VOC) treatment system 1, the incineration equipment 10 is a direct-fired incinerator (TO) 101, and the double-rotor volatile organic gas (VOC) treatment system 1 is provided with a first heat exchanger 61, a second heat exchanger 62, a third heat exchanger 63, a fourth heat exchanger 64, a first cold side delivery pipeline 65, a fourth cold side delivery pipeline 66, a first adsorption rotor 40, a second adsorption rotor 50 and a chimney 26 (such as Figure 1 and Figure 2As shown in the figure), the first heat exchanger 61 is provided with a first cold side pipeline 611 and a first hot side pipeline 612, the second heat exchanger 62 is provided with a second cold side pipeline 621 and a second hot side pipeline 622, the third heat exchanger 63 is provided with a third cold side pipeline 631 and a third hot side pipeline 632, and the fourth heat exchanger 63 is provided with a fourth cold side pipeline 641 and a fourth hot side pipeline 642. The direct-fired incinerator (TO) 101 is provided with a burner head and a furnace (not shown in the figure), the burner head is communicated with the furnace, the first heat exchanger 61, the second heat exchanger 62, the third heat exchanger 63 and the fourth heat exchanger 64 are respectively arranged in the furnace of the direct-fired incinerator (TO) 101, and the direct-fired incinerator (TO) 101 is provided with an inlet and an outlet, the inlet is provided at the burner head, and the inlet is connected to the other end of the fourth cold side pipeline 641 of the fourth heat exchanger 64.
[0072] The burner head of the above-mentioned direct-fired incinerator (TO) 101 can first transport the incinerated high-temperature gas to one side of the first hot side pipeline 612 of the first heat exchanger 61 for heat exchange, and then transport the incinerated high-temperature gas to one side of the second hot side pipeline 622 of the second heat exchanger 62 for heat exchange from the other side of the first hot side pipeline 612 of the first heat exchanger 61, and then transport the incinerated high-temperature gas to one side of the third hot side pipeline 632 of the third heat exchanger 63 for heat exchange from the other side of the second hot side pipeline 622 of the second heat exchanger 62, and then transport the incinerated high-temperature gas to one side of the fourth hot side pipeline 642 of the fourth heat exchanger 64 from the other side of the third hot side pipeline 632 of the third heat exchanger 63 for heat exchange, and finally transport it to the outlet of the furnace from the other side of the fourth hot side pipeline 642 of the fourth heat exchanger 64.
[0073] The first adsorption rotor 40 of the present invention is provided with an adsorption zone 401, a cooling zone 402 and a desorption zone 403. The first adsorption rotor 40 is connected with an exhaust gas intake pipeline 41, a first clean gas exhaust pipeline 42, a first cooling gas intake pipeline 43, a first cooling gas delivery pipeline 44, a first hot gas delivery pipeline 45 and a first desorption concentrated gas pipeline 46 (such as Figure 1 and Figure 2 As shown in FIG. 1 , the second adsorption rotor 50 is provided with an adsorption zone 501, a cooling zone 502 and a desorption zone 503. The second adsorption rotor 50 is connected with a second clean gas discharge pipeline 52, a second cooling gas intake pipeline 53, a second cooling gas delivery pipeline 54, a second hot gas delivery pipeline 55 and a second desorption concentrated gas pipeline 56. The first adsorption rotor 40 and the second adsorption rotor 50 are respectively zeolite concentration rotors or concentration rotors of other materials.
[0074] One end of the exhaust gas intake pipeline 41 is connected to one side of the adsorption zone 401 of the first adsorption rotor 40, so that the exhaust gas intake pipeline 41 can transport the organic waste gas to one side of the adsorption zone 401 of the first adsorption rotor 40, one end of the first clean gas discharge pipeline 42 is connected to the other side of the adsorption zone 401 of the first adsorption rotor 40, and one end of the first clean gas discharge pipeline 42 is connected to one side of the adsorption zone 501 of the second adsorption rotor 50 (such as Figure 1 and Figure 2 ), so that the organic waste gas can be transported to the adsorption zone 501 of the second adsorption wheel 50 through the first clean gas discharge pipeline 42 after the organic matter is adsorbed by the adsorption zone 401 of the first adsorption wheel 40. The other side of the adsorption zone 501 of the second adsorption wheel 50 is connected to the second clean gas discharge pipeline 52 (as shown in FIG. Figure 1 and Figure 2 As shown), the second clean gas discharge pipeline 52 is connected to the chimney 26 through the other end of the second clean gas discharge pipeline 52, and the second clean gas discharge pipeline 52 is provided with a fan 521, so that the adsorbed gas in the second clean gas discharge pipeline 52 can be pushed and pulled into the chimney 26 for discharge through the fan 521.
[0075] One side of the cooling zone 402 of the first adsorption wheel 40 is connected to the first cooling air inlet pipeline 43 so that the gas can enter the cooling zone 402 of the first adsorption wheel 40 for cooling. The other side of the cooling zone 402 of the first adsorption wheel 40 is connected to one end of the first cooling air delivery pipeline 44. The other end of the first cooling air delivery pipeline 44 is connected to one end of the second cold side pipeline 621 of the second heat exchanger 62 (such as Figure 1 and Figure 2 As shown), the gas after entering the cooling zone 402 of the first adsorption rotor 40 is transported to the second heat exchanger 62 for heat exchange. In addition, one end of the first hot gas transport pipeline 45 is connected to the other side of the desorption zone 403 of the first adsorption rotor 40, and the other end of the first hot gas transport pipeline 45 is connected to the other end of the second cold side pipeline 621 of the second heat exchanger 62, so that the high-temperature hot gas that undergoes heat exchange through the second heat exchanger 62 can be transported to the desorption zone 403 of the first adsorption rotor 40 through the first hot gas transport pipeline 45 for desorption.
[0076] The cooling zone 402 of the first adsorption rotor 40 is provided with two embodiments, wherein the first embodiment is that the first cooling air intake pipe 43 connected to one side of the cooling zone 402 of the first adsorption rotor 40 is provided with fresh air or external air (not shown), and the cooling zone 402 of the first adsorption rotor 40 is cooled by the fresh air or external air. The second embodiment is that the exhaust gas intake pipe 41 is provided with an exhaust gas connecting pipe 411 (such as Figure 1As shown in the figure), the other end of the exhaust gas connecting pipe 411 is connected to the first cooling air intake pipe 43, so that the exhaust gas in the exhaust gas intake pipe 41 can be transported to the cooling zone 402 of the first adsorption wheel 40 through the exhaust gas connecting pipe 411 for cooling. The exhaust gas connecting pipe 411 is provided with an exhaust gas connecting control valve 4111 to control the air volume of the exhaust gas connecting pipe 411.
[0077] One side of the cooling zone 502 of the second adsorption wheel 50 is connected to the second cooling air inlet pipeline 53, so that the gas enters the cooling zone 502 of the second adsorption wheel 50 for cooling. The other side of the cooling zone 502 of the second adsorption wheel 50 is connected to one end of the second cooling air delivery pipeline 54, and the other end of the second cooling air delivery pipeline 54 is connected to one end of the third cold side pipeline 631 of the third heat exchanger 63 (such as Figure 1 and Figure 2 As shown), the gas after entering the cooling zone 502 of the second adsorption rotor 50 is transported to the third heat exchanger 63 for heat exchange. In addition, one end of the second hot gas transport pipeline 55 is connected to the other side of the desorption zone 503 of the second adsorption rotor 50, and the other end of the second hot gas transport pipeline 55 is connected to the other end of the third cold side pipeline 631 of the third heat exchanger 63, so that the high-temperature hot gas that undergoes heat exchange through the third heat exchanger 63 can be transported to the desorption zone 503 of the second adsorption rotor 50 through the second hot gas transport pipeline 55 for desorption.
[0078] The cooling zone 502 of the second adsorption rotor 50 is provided with two implementation modes. In the first implementation mode, a second cooling air inlet pipe 53 connected to one side of the cooling zone 502 of the second adsorption rotor 50 is used to supply fresh air or external air (such as Figure 2 As shown in FIG. 1 ), the fresh air or external air is used to cool the cooling area 502 of the second adsorption wheel 50. In a second embodiment, the first clean air discharge pipeline 42 is provided with a first clean air communication pipeline 421 (as shown in FIG. Figure 1 As shown in the figure), the other end of the first clean air connecting pipeline 421 is connected to the second cooling air inlet pipeline 53, so that the gas in the first clean air discharge pipeline 42 can be transported to the cooling zone 502 of the second adsorption wheel 50 through the first clean air connecting pipeline 421 for cooling. The first clean air connecting pipeline 421 is provided with a first clean air connecting control valve 4211 to control the air volume of the first clean air connecting pipeline 421.
[0079] One end of the first desorption concentrated gas pipeline 46 is connected to one side of the desorption zone 403 of the first adsorption rotor 40, and the other end of the first desorption concentrated gas pipeline 46 is connected to one end of the fourth cold side pipeline 641 of the fourth heat exchanger 64 (such as Figure 1and Figure 2 As shown), the other end of the fourth cold side pipeline 641 of the fourth heat exchanger 64 is connected to one end of the fourth cold side delivery pipeline 66, and the other end of the fourth cold side delivery pipeline 66 is connected to one end of the first cold side pipeline 611 of the first heat exchanger 61. In addition, the other end of the first cold side pipeline 611 of the first heat exchanger 61 is connected to one end of the first cold side delivery pipeline 65, and the other end of the first cold side delivery pipeline 65 is connected to the inlet of the direct-fired incinerator (TO) 101, so that the desorbed concentrated gas desorbed by high temperature can be transported to one end of the fourth cold side pipeline 641 of the fourth heat exchanger 64 through the first desorbed concentrated gas pipeline 46, and the fourth cold side pipeline 64 of the fourth heat exchanger 64 is connected to the first cold side pipeline 611 of the first heat exchanger 61. The other end of the pipeline 641 is transported to one end of the fourth cold side transport pipeline 66, and the other end of the fourth cold side transport pipeline 66 is transported to one end of the first cold side pipeline 611 of the first heat exchanger 61, and then the other end of the first cold side pipeline 611 of the first heat exchanger 61 is transported to one end of the first cold side transport pipeline 65, and finally the other end of the first cold side transport pipeline 65 is transported to the inlet of the direct-fired incinerator (TO) 101 (such as Figure 1 and Figure 2 As shown), so that the burner head of the direct-fired incinerator (TO) 101 can be subjected to high-temperature cracking to reduce volatile organic compounds. The first desorbed concentrated gas pipeline 46 is provided with a fan 461 to push and pull the desorbed concentrated gas into one end of the first cold side pipeline 611 of the first heat exchanger 61.
[0080] One end of the second desorption concentrated gas pipeline 56 is connected to one side of the desorption zone 503 of the second adsorption rotor 50, wherein the other end of the second desorption concentrated gas pipeline 56 has two implementation modes. The first implementation mode is that the other end of the second desorption concentrated gas pipeline 56 is connected to the exhaust gas intake pipeline 41 (such as Figure 1 As shown in FIG. 4 ), the concentrated gas can enter the adsorption zone 401 of the first adsorption wheel 40 through the exhaust gas intake pipe 41 to be adsorbed again. The second embodiment is that the other end of the second desorption concentrated gas pipeline 56 is connected to the first cooling gas intake pipe 43 (as shown in FIG. Figure 2 As shown in FIG. 4 ), the concentrated gas can then enter the cooling zone 402 of the first adsorption rotor 40 through the first cooling gas inlet pipeline 43 for cooling. In addition, the second desorption concentrated gas pipeline 56 is provided with a fan 561 (as shown in FIG. Figure 2As shown in the figure, the desorbed concentrated gas can be pushed and pulled into the exhaust gas intake pipe 41 or the first cooling gas intake pipe 43. The desorbed gas generated by the desorption zone 503 of the second adsorption rotor 50 can enter the adsorption zone 401 of the first adsorption rotor 40 or the cooling zone 402 of the first adsorption rotor 40 for recycling.
[0081] Finally, the dual-rotor volatile organic gas (VOC) treatment system 1 may be provided with only the first heat exchanger 61, the second heat exchanger 62, the third heat exchanger 63, and the fourth heat exchanger 64 in the direct-fired incinerator (TO) 101 (e.g., Figure 6 and Figure 7 As shown), the difference is that the fourth heat exchanger 64 is subtracted, and the other end of the first desorption concentrated gas pipeline 46 is connected to one end of the first cold side pipeline 611 of the first heat exchanger 61, wherein the other end of the first cold side pipeline 611 of the first heat exchanger 61 is connected to one end of the first cold side transport pipeline 65, and the other end of the first cold side transport pipeline 65 is connected to the inlet of the direct-fired incinerator (TO) 101, so that the desorbed concentrated gas desorbed by high temperature can be transported to one end of the first cold side pipeline 611 of the first heat exchanger 61 through the first desorption concentrated gas pipeline 46, and transported from the other end of the first cold side pipeline 611 of the first heat exchanger 61 to one end of the first cold side transport pipeline 65, and transported from the other end of the first cold side transport pipeline 65 to the inlet of the direct-fired incinerator (TO) 101. The rest of the first adsorption rotor 40 and the second adsorption rotor 50 adopt the same design. Therefore, the above-mentioned direct-fired incinerator (TO) 101, the first heat exchanger 61, the second heat exchanger 62, the third heat exchanger 63, the first cold side transport pipeline 65, the first adsorption rotor 40, the second adsorption rotor 50 and the chimney 26 are not repeated. Please refer to the above-mentioned description.
[0082] In addition to being designed in combination with the double-rotor volatile organic gas (VOC) treatment system 1 as described above, the incineration equipment of the present invention can also be designed in combination with a single-rotor volatile organic gas (VOC) treatment system (not shown). The difference between the single-rotor volatile organic gas (VOC) treatment system (not shown) and the double-rotor volatile organic gas (VOC) treatment system 1 described above is that the second adsorption rotor 50 is missing. The direct-fired incinerator (TO) 101 can be replaced with two heat exchangers or three heat exchangers. The combination state can refer to the design of the first adsorption rotor 40 in the double-rotor volatile organic gas (VOC) treatment system 1, and its content will not be repeated. Please refer to the above description.
[0083] Through the above detailed description, it can be made clear to those skilled in the art that the utility model can indeed achieve the aforementioned purpose and actually complies with the provisions of the Patent Law, and thus a patent application is filed.
[0084] However, the above is only a preferred embodiment of the present utility model, and should not be used to limit the scope of implementation of the present utility model; therefore, all simple equivalent changes and modifications made according to the protection scope of the claims of the present utility model and the contents of the utility model specification should still fall within the scope of protection of the present utility model.
[0085] The specific embodiments described above further illustrate the purpose, technical solutions and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A carbon dioxide treatment system for combustion tail gas, characterized in that: include: An incineration device, which emits a combustion tail gas, the combustion tail gas contains carbon dioxide gas, and the incineration device is provided with a tail gas delivery pipeline to deliver the combustion tail gas; a cooling device, which is arranged on the exhaust gas delivery pipeline to cool the combustion exhaust gas; An adsorption and desorption device, the adsorption and desorption device has at least one adsorption zone and at least one desorption zone, the adsorption and desorption device is provided with at least one exhaust pipeline, at least one hot gas pipeline, and at least one desorption gas pipeline, the at least one adsorption zone is connected to the exhaust gas conveying pipeline of the incineration equipment to deliver the combustion exhaust gas of the exhaust gas conveying pipeline to the at least one adsorption zone for carbon dioxide gas adsorption, the at least one adsorption zone is connected to the at least one exhaust pipeline to discharge the adsorbed gas generated by the at least one adsorption zone through the at least one exhaust pipeline, the at least one desorption zone is connected to the at least one desorption gas pipeline to output the carbon dioxide gas after desorption in the at least one desorption zone through the at least one desorption gas pipeline, and the at least one desorption zone is connected to the at least one hot gas pipeline to transport at least one heat source to the at least one desorption zone through the at least one hot gas pipeline; a chimney connected to the at least one exhaust pipe; a compression and liquefaction device connected to the at least one desorbed gas pipeline to compress and liquefy the desorbed carbon dioxide gas into liquid carbon dioxide; and At least one storage device, which will compress and liquefy the carbon dioxide into liquid form for storage after being compressed and liquefied by the compression and liquefaction device.
2. The carbon dioxide treatment system for combustion tail gas according to claim 1, characterized in that: The tail gas delivery pipeline is also provided with a fan.
3. The carbon dioxide treatment system for combustion tail gas according to claim 1, characterized in that: The at least one exhaust pipeline is also provided with a fan.
4. The carbon dioxide treatment system for combustion tail gas according to claim 1, characterized in that: The at least one hot gas pipeline is also connected to a heat exchanger, and the heat exchanger is any one of a fin-tube heat exchanger, a shell-and-tube heat exchanger, a plate heat exchanger, an air-to-air heat exchanger, and a liquid-to-air heat exchanger.
5. The carbon dioxide treatment system for combustion tail gas according to claim 1, characterized in that: The at least one hot gas pipeline is also connected to a heater, and the heater is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.
6. The carbon dioxide treatment system for combustion tail gas according to claim 1, characterized in that: The compression liquefaction device is also provided with a compressor having a cooling pipeline for either a liquid or a gas to enter the cooling pipeline so as to compress and liquefy the desorbed carbon dioxide gas into liquid carbon dioxide.
7. The carbon dioxide treatment system for combustion tail gas according to claim 1, characterized in that: The cooling device is any one of a cooler, a condenser, a dehumidifier, a cooler, a cooling water tower, and a refrigerant compressor.
8. The carbon dioxide treatment system for combustion tail gas according to claim 7, characterized in that: The cooler is any one of a shell and tube cooler, a fin-tube cooler, and a plate heat exchanger cooler.
9. The carbon dioxide treatment system for combustion tail gas according to claim 1, characterized in that: The exhaust gas conveying pipeline is also provided with a dust removal device, which is any one of a bag dust collector, a pulse bag dust collector, an electric bag composite dust collector, a negative pressure back-blowing filter bag dust collector, a low-pressure long bag pulse dust collector, a cartridge pulse dust collector, a pulse filter element dust collector, a pulse spray bag dust collector, an inertial dust collector, an electrostatic dust collector, a horizontal electrostatic dust collector, a centrifugal dust collector, a cyclone separator, a multi-cyclone dust collector, a wet dust collector, a wet electrostatic dust collector, a charged water mist dust collector, a water film dust collector, a Venturi tube dust collector, and a multi-layer dust collector.
10. The carbon dioxide treatment system for combustion tail gas according to claim 1, characterized in that: The tail gas delivery pipeline is also provided with a filter device, which is used for dust removal.
11. The carbon dioxide treatment system for combustion tail gas according to claim 1, characterized in that: The at least one storage device is any one of a tank truck, a steel cylinder, a barrel, a storage tank, and a container.
12. The carbon dioxide treatment system for combustion tail gas according to claim 1, characterized in that: The at least one storage device is also sent to a place for purification treatment. The place is also equipped with at least one purification device to purify the stored liquid carbon dioxide into either high-concentration liquid carbon dioxide or high-concentration gaseous carbon dioxide through the purification device.
13. The carbon dioxide treatment system for combustion tail gas according to claim 12, characterized in that: The purification equipment is also provided with a purification pipeline, which is connected to a factory area so as to transport the gaseous carbon dioxide purified into a high concentration to the factory area through the purification pipeline.
14. The system for treating carbon dioxide from combustion tail gas according to claim 13, characterized in that: The plant is any one of a semiconductor process plant, an electronic process plant, an optoelectronic process plant, a chemical process plant, a petrochemical process plant, an electroplating process plant, a food process plant, a drying and cleaning process plant, and a pharmaceutical process plant.
15. The carbon dioxide treatment system for combustion tail gas according to claim 12, characterized in that: The purification equipment is also provided with at least one purification storage device, so as to store the liquid carbon dioxide purified into a high concentration through the at least one purification storage device.
16. The carbon dioxide treatment system for combustion tail gas according to claim 15, characterized in that: The at least one purification storage device is any one of a tank truck, a steel cylinder, a barrel, a storage tank, and a container.
17. The system for treating carbon dioxide from combustion tail gas according to claim 15, characterized in that: The at least one purification storage device is sent to a factory area to send the purified high-concentration liquid carbon dioxide to the factory area for use.
18. The carbon dioxide treatment system for combustion tail gas according to claim 17, characterized in that: The plant is any one of a semiconductor process plant, an electronic process plant, an optoelectronic process plant, a chemical process plant, a petrochemical process plant, an electroplating process plant, a food process plant, a drying and cleaning process plant, and a pharmaceutical process plant.
19. The system for treating carbon dioxide from combustion tail gas according to claim 12, characterized in that: The purification equipment is also provided with a raw material tank, a purification tower, a heater and a cooling facility. The raw material tank is connected to the purification tower, the heater is connected to the purification tower, and the cooling facility is connected to the purification tower. The liquid carbon dioxide stored in the at least one storage device is sent to the raw material tank, and then transported to the purification tower for convection heat exchange with the hot air transported by the heater, so that the lower boiling point substances dissolved in the liquid carbon dioxide are evaporated and rise, and the higher boiling point substances dissolved in the liquid carbon dioxide sink in liquid form. The evaporated and rising lower boiling point substances are cooled by the cooling facility into high-concentration liquid carbon dioxide for filtration and purification.
20. The system for treating carbon dioxide from combustion tail gas according to claim 19, characterized in that: The purification tower is also provided with at least one packing bed, and the packing bed is made of any one of mesh ring packing, mesh saddle packing, and double-layer wire mesh corrugated packing.
21. The system for treating carbon dioxide from combustion tail gas according to claim 12, characterized in that: The purification equipment is also provided with a liquid-to-gas device, a raw material tank, at least one adsorption-desorption bed module and a vacuum pump. The liquid-to-gas device is connected to the raw material tank, the raw material tank is connected to the at least one adsorption-desorption bed module, and the vacuum pump is connected to the at least one adsorption-desorption bed module. The liquid carbon dioxide stored in the at least one storage device is first converted into gaseous carbon dioxide by the liquid-to-gas device and then sent to the raw material tank, and then transported to the at least one adsorption-desorption bed module for pressurized adsorption or reduced pressure desorption. During reduced pressure desorption, the vacuum pump is used to desorb high-concentration gaseous carbon dioxide in a vacuum manner for filtration and purification.
22. The system for treating carbon dioxide from combustion tail gas according to claim 21, characterized in that: The adsorption-desorption bed module is filled with a plurality of tubular hollow fiber tubular membrane adsorbents, and the tubular hollow fiber tubular membrane adsorbent is any one or a combination of zeolite, anion exchange resin, and metal organic framework material.
23. The system for treating carbon dioxide from combustion tail gas according to claim 22, characterized in that: The tubular hollow fiber tubular membrane adsorbent also comprises at least one pore and at least one adsorption layer. The adsorption layer comprises an amine-modified anion exchange resin material and a polymer material.
24. The system for treating carbon dioxide from combustion tail gas according to claim 21, characterized in that: The liquid-to-gas device is any one of an evaporator and a vaporizer.
25. The system for treating carbon dioxide from combustion tail gas according to claim 12, characterized in that: The purification equipment is also provided with a liquid-to-gas device, a raw material tank, a membrane contactor and a heater. The liquid-to-gas device is connected to the raw material tank, the raw material tank is connected to the membrane contactor, and the heater is connected to the membrane contactor. The liquid carbon dioxide stored in the at least one storage device is first converted into gaseous carbon dioxide by the liquid-to-gas device and then sent to the raw material tank, and then transported to the membrane contactor for convection heat exchange with the hot air transported by the heater, so that the converted gaseous carbon dioxide can form a high concentration of gaseous carbon dioxide for filtration and purification.
26. The system for treating carbon dioxide from combustion tail gas according to claim 25, characterized in that: The membrane contactor is also provided with at least one membrane, which is any one of a hollow fiber tubular membrane, a nanoporous carbon membrane, a polyether ether ketone membrane, a polyimide membrane, a monoethanolamine membrane, a rubber-like polymer membrane, and a polyimide hollow fiber membrane.
27. The system for treating carbon dioxide from combustion tail gas according to claim 25, characterized in that: The liquid-to-gas device is any one of an evaporator and a vaporizer.
28. The system for treating carbon dioxide from combustion tail gas according to claim 1, characterized in that: The adsorption and desorption device is also provided with a rotating wheel, which can be any one of a rotating tower type, a horizontal type, and a cylindrical type.
29. The system for treating carbon dioxide from combustion tail gas according to claim 28, characterized in that: The runner is filled with any one of activated carbon, zeolite, silica gel, activated alumina, molecular sieve, manganese oxide, calcium hydroxide, graphene and hollow fiber.
30. The system for treating carbon dioxide from combustion tail gas according to claim 1, characterized in that: The adsorption and desorption device is also provided with at least one adsorption material, which is filled with a plurality of tubular hollow fiber tubular membrane adsorption materials. The tubular hollow fiber tubular membrane adsorption material is any one or a combination of zeolite, anion exchange resin, and metal organic framework material.
31. The system for treating carbon dioxide from combustion tail gas according to claim 30, characterized in that: The tubular hollow fiber tubular membrane adsorbent also comprises at least one pore and at least one adsorption layer. The adsorption layer comprises an amine-modified anion exchange resin material and a polymer material.
32. The system for treating carbon dioxide from combustion tail gas according to claim 1, characterized in that: The incineration equipment is any one of a direct-fired incinerator, a catalytic incinerator, and a thermal storage incinerator.
33. The system for treating carbon dioxide from combustion tail gas according to claim 1, characterized in that: The incineration device is also designed to be combined with either a double-rotor volatile organic gas treatment system or a single-rotor volatile organic gas treatment system.
34. The system for treating carbon dioxide from combustion tail gas according to claim 32, characterized in that: The direct-fired incinerator is provided with any one of two heat exchangers, three heat exchangers and four heat exchangers.