Anti-skid boat rack

Abstract

The utility model discloses an anti-skid boat rack, which comprises a top plate, a bottom plate and a plurality of supporting rods, the tops and the bottoms of the plurality of supporting rods are respectively and detachably mounted with the top plate and the bottom plate, a plurality of clamping grooves are uniformly distributed in the inner sides of the supporting rods along the vertical direction, supporting steps are arranged at the bottoms of the clamping grooves, and the supporting steps are used for bearing wafers. And the wafer is limited in the clamping groove. The utility model has the advantages of compact structure, good anti-skid performance, high stability and the like, and the wafer is limited among the plurality of supporting rods through the supporting steps, so that the wafer is prevented from sliding due to environmental vibration, equipment mechanical movement, airflow in the technical process, stress release in the wafer and the like in the production process, and the service life of the wafer is prolonged. And the safety of the wafer is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to an anti-skid boat frame. Background Art

[0002] In the semiconductor manufacturing process, the wafer boat is an important tool for carrying and transporting wafers. Due to the need for frequent handling and placement during the operation, the boat is mainly classified according to the type of boat material, including quartz boats, silicon carbide boats, graphite boats, metal boats, etc. Different boats are used in different environments. Quartz boats are mainly used in environments with temperatures below 1100°C, SiC boats are mainly used in SiC high-temperature oxidation environments, metal boats are mainly used as temporary buffer boats, and graphite boats can be used in SiC high-temperature annealing equipment because they can withstand high temperatures. At present, the graphite boats in existing high-temperature annealing equipment have insufficient anti-slip performance. They are prone to slipping during the production process due to environmental vibration, mechanical movement of the equipment, or process airflow and internal stress release of the wafer, resulting in damage to the wafer during the robot taking the wafer, and in severe cases, wafer drop and fragmentation. Utility Model Content

[0003] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide an anti-skid boat rack with compact structure, good anti-skid performance and high stability.

[0004] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0005] A non-slip boat frame comprises: a top plate, a bottom plate and a plurality of support rods, wherein the tops and bottoms of the plurality of support rods are detachably mounted to the top plate and the bottom plate respectively, a plurality of slots are evenly distributed along the vertical direction on the inner sides of the support rods, support steps are provided at the bottoms of the slots, and the support steps are used to carry wafers and limit the wafers in the slots.

[0006] As a further improvement of the utility model, the top plate and the bottom plate are both in annular shape, the support rod includes a first support rod, a second support rod and a third support rod, the second support rod is facing the direction of the wafer entering and exiting the slot, and the first support rod and the third support rod are symmetrically arranged on both sides of the second support rod.

[0007] As a further improvement of the present invention, the angle β between the first support rod and the third support rod is 120° to 140°.

[0008] As a further improvement of the present invention, positioning holes are provided on the top plate, the bottom plate and the support rod, and screws are installed in the positioning holes to achieve detachable installation of the top and bottom of the support rod with the top plate and the bottom plate respectively.

[0009] As a further improvement of the utility model, the screws, top plate, bottom plate and support rods are all made of graphite material.

[0010] As a further improvement of the present invention, the surface roughness Ra of the graphite material is greater than 6.3.

[0011] As a further improvement of the utility model, the surface of the graphite material is sandblasted.

[0012] As a further improvement of the present invention, after the screws, top plate, bottom plate and support rods are purified in a high-temperature furnace into which a mixture of hydrogen chloride and argon is introduced, the graphite gray value of the graphite material is less than 5 ppm.

[0013] As a further improvement of the present invention, a pyrolytic carbon coating is deposited on the surfaces of the screws, the top plate, the bottom plate and the support rods.

[0014] As a further improvement of the present invention, the thickness of the pyrolytic carbon coating is 30 to 80 um.

[0015] Compared with the prior art, the advantages of the utility model are:

[0016] 1. The anti-skid boat frame of the utility model comprises a top plate, a bottom plate and a plurality of support rods to form the main structure of the anti-skid boat frame. Specifically, the top and bottom of the plurality of support rods are detachably mounted to the top plate and the bottom plate respectively, thereby improving the flexibility of the boat frame. At the same time, a plurality of card slots are evenly distributed along the vertical direction on the inner side of the support rods, and a supporting step is provided at the bottom of the card slot. The supporting step is utilized to support the wafer and limit the wafer in the card slot, thereby effectively preventing the wafer from sliding during the production process due to environmental vibration, mechanical movement of the equipment, airflow during the process, and internal stress release of the wafer, thereby reducing the risk of wafer falling and fragmentation and improving the safety of the wafer.

[0017] 2. The anti-skid boat frame of the utility model is prepared by using purified graphite materials for screws, top plates, bottom plates and support rods, and sandblasting and depositing pyrolytic carbon coating on the surface of the anti-skid boat frame. This can prevent the surface contamination of the wafer due to the release of impurities inside the boat frame during the high-temperature annealing process using the boat frame, and can significantly improve the anti-skid performance of the boat frame. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the explosion structure principle of the anti-skid boat frame in a specific embodiment of the utility model.

[0019] Figure 2 It is a schematic diagram of the three-dimensional structural principle of the anti-skid boat carrying wafers in a specific embodiment of the utility model.

[0020] Figure 3 It is a schematic diagram of the main structural principle of the anti-skid boat frame carrying wafers in a specific embodiment of the utility model.

[0021] Figure 4 for Figure 3 Schematic diagram of the structural principle in the AA direction.

[0022] Figure 5 for Figure 4 Schematic diagram of the structural principle of the middle BB direction.

[0023] Figure 6 for Figure 4 Schematic diagram of the structural principle at II in the middle.

[0024] Legend: 1. Screw; 2. First support rod; 3. Positioning hole; 4. Top plate; 5. Second support rod; 6. Third support rod; 7. Bottom plate; 8. Wafer; 9. Support step; 10. Slot. DETAILED DESCRIPTION

[0025] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0026] Example

[0027] like Figures 1 to 6 As shown, the anti-skid boat frame of the utility model includes: a top plate 4, a bottom plate 7 and a plurality of support rods. The top and bottom of the plurality of support rods are detachably mounted with the top plate 4 and the bottom plate 7, respectively. It has the advantages of simple structure and low processing cost. When the boat frame is damaged, only the damaged parts need to be replaced. A plurality of concave card slots 10 are evenly distributed along the vertical direction on the inner side of the support rods. A support step 9 is provided at the bottom of the card slot 10. The support step 9 is used to carry the wafer 8 and limit the wafer 8 in the card slot 10. When placing the wafer on the boat frame, the wafer is placed on the support step 9. If the wafer needs to be removed, the wafer needs to be first lifted vertically to leave the support step 9 and then moved out of the card slot 10.

[0028] like Figure 1 As shown, in this embodiment, the top plate 4 and the bottom plate 7 are both in annular shape, and the support rods include a first support rod 2, a second support rod 5 and a third support rod 6. The second support rod 5 is directly facing the direction in which the wafer 8 enters and exits the card slot 10, and the first support rod 2 and the third support rod 6 are symmetrically arranged on both sides of the second support rod 5. The first support rod 2, the second support rod 5 and the third support rod 6 are provided with card slot concave steps of the same height to form a wafer anti-slip structure, which restricts the wafer to move only on the concave steps, and prevents the wafer from being subjected to external environmental vibration or excessive movement due to the high temperature of the wafer itself. Stress accidents such as slipping and fragments.

[0029] like Figure 5As shown, in this embodiment, the angle β between the first support rod 2 and the third support rod 6 is 120° to 140°, so that the center of gravity of the wafer is closer to the center of gravity of the support point, reducing the risk of slip. When the wafer is placed on the boat, the wafer and the boat are in contact with a three-segment line, which reduces the contact area between the boat and the wafer and reduces the risk of damage and contamination of the wafer.

[0030] like Figure 1 As shown, in this embodiment, positioning holes 3 are provided on the top plate 4, the bottom plate 7 and the support rod, and screws 1 are installed in the positioning holes 3 to achieve detachable installation of the top and bottom of the support rod with the top plate 4 and the bottom plate 7 respectively.

[0031] In this embodiment, the screw 1, the top plate 4, the bottom plate 7 and the support rod are all made of graphite material.

[0032] Furthermore, the surface roughness Ra of the graphite material is greater than 6.3, and the surface of the graphite material is sandblasted. In order to improve the anti-slip effect of the graphite step and the adhesion effect of the pyrolytic carbon, the outer surface of the graphite is sandblasted.

[0033] After the screw 1, the top plate 4, the bottom plate 7 and the support rod are purified in a high-temperature furnace body into which a mixture of hydrogen chloride and argon is introduced, the graphite gray value of the graphite material is less than 5ppm.

[0034] Furthermore, the surfaces of the screw 1, the top plate 4, the bottom plate 7 and the support rod are deposited with a pyrolytic carbon coating, and the thickness of the pyrolytic carbon coating is 30-80 um.

[0035] The graphite boat is processed by purification, pyrolysis of graphite and other processes to reduce metal pollution at high temperatures. It can be used in high-temperature furnaces in the semiconductor industry and can be used in high-temperature annealing processes up to 2000°C.

[0036] In this embodiment, the anti-slip graphite boat frame can be prepared by the following method steps:

[0037] Step S1, selecting semiconductor grade high purity graphite base material.

[0038] Step S2: According to the shape of the graphite boat frame component, a suitable graphite base material is selected for precise processing to form the required shape and size, especially the anti-slip step on the graphite strut. This can be achieved by using CNC machine tools and other methods, and the processing accuracy can be adjusted according to actual needs.

[0039] Step S3: Process the surface of the graphite boat frame parts, requiring the surface roughness Ra of the graphite parts to be greater than 6.3. Sandblasting is mainly used, and the sandblasting material is required to be clean, and 30-mesh corundum produced by pickling process can be used.

[0040] Step S4: purify the parts of the graphite wafer, requiring the gray value of the graphite after purification to be below 5ppm. The graphite parts can be placed in a high-temperature furnace at a temperature of 1800°C to 2000°C, and a mixed gas of hydrogen chloride and argon is introduced to react or volatilize the impurities in the graphite, so that the purity of the graphite device reaches the semiconductor level.

[0041] Step S5: Assemble the graphite components into a graphite boat frame as a whole. The assembly needs to be performed in a clean environment.

[0042] Step S6, repeating step S4 to purify the entire graphite boat frame.

[0043] Step S7, the graphite boat is subjected to a pyrolytic graphite process, and the coating thickness is 30-80 um. The graphite boat is placed under a furnace pressure into which high-purity hydrocarbon gas is introduced, and a highly crystalline pyrolytic carbon coating is deposited on the graphite boat substrate at 1800°C to 2000°C by chemical vapor deposition, which can prevent the release of impurities inside the boat from causing contamination of the wafer surface during the high-temperature annealing process using the graphite boat, and can further improve its anti-slip performance.

[0044] Through the above steps, the anti-skid graphite boat of the present embodiment can be obtained. The graphite boat has excellent anti-skid performance and beautiful appearance, and is suitable for occasions requiring anti-skid treatment in semiconductor production.

[0045] Although the utility model is disclosed as above with preferred embodiments, it is not intended to limit the utility model. Any technician familiar with the art can use the above disclosed methods and technical contents to make many possible changes and modifications to the technical solution of the utility model without departing from the spirit and technical solution of the utility model, or modify it into an equivalent embodiment with equivalent changes. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments according to the technical essence of the utility model without departing from the content of the technical solution of the utility model still falls within the scope of protection of the technical solution of the utility model.

Claims

1. A non-slip boat rack, characterized in that: include: A top plate (4), a bottom plate (7) and a plurality of support rods, the tops and bottoms of the plurality of support rods being detachably mounted on the top plate (4) and the bottom plate (7) respectively, a plurality of slots (10) being evenly distributed along the vertical direction on the inner sides of the support rods, a support step (9) being provided at the bottom of the slot (10), the support step (9) being used to carry a wafer (8) and to limit the wafer (8) in the slot (10).

2. The anti-skid boat rack according to claim 1, characterized in that: The top plate (4) and the bottom plate (7) are both in the shape of an annulus, and the support rods include a first support rod (2), a second support rod (5) and a third support rod (6), the second support rod (5) is directly facing the direction in which the wafer (8) enters and exits the card slot (10), and the first support rod (2) and the third support rod (6) are symmetrically arranged on both sides of the second support rod (5).

3. The anti-skid boat rack according to claim 2, characterized in that: The included angle β between the first support rod (2) and the third support rod (6) is 120° to 140°.

4. The anti-skid boat rack according to claim 1, characterized in that: Positioning holes (3) are provided on the top plate (4), the bottom plate (7) and the support rod, and screws (1) are installed in the positioning holes (3) to achieve detachable installation of the top and bottom of the support rod with the top plate (4) and the bottom plate (7) respectively.

5. The anti-skid boat rack according to claim 4, characterized in that: The screw (1), top plate (4), bottom plate (7) and support rod are all made of graphite material.

6. The anti-skid boat rack according to claim 5, characterized in that: The surface roughness Ra of the graphite material is greater than 6.

3.

7. The anti-skid boat rack according to claim 6, characterized in that: The surface of the graphite material is sandblasted.

8. The anti-skid boat stand according to any one of claims 5 to 7, characterized in that: A pyrolytic carbon coating is deposited on the surfaces of the screw (1), the top plate (4), the bottom plate (7) and the support rod.

9. The anti-skid boat rack according to claim 8, characterized in that: The thickness of the pyrolytic carbon coating is 30-80 um.

Images