A correction device for installing integrated electrode feet of a single crystal furnace

Abstract

A correction device for installing an integrated electrode foot of a single crystal furnace comprises two end plates arranged opposite to each other, each end plate having an arcuate surface which can fit with the arcuate side surface of the electrode foot, and a plurality of side plates which can support the end plates and make their arcuate surfaces fit with the arcuate side surfaces of the corresponding electrode feet are arranged between the two end plates. The utility model can correct the installation of the electrode feet, ensure that the arcuate side surface of the electrode feet can fit with the outer side wall of the graphite heater, and ensure that the graphite heater is installed smoothly; at the same time, the installation efficiency of the single crystal furnace is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace electrode foot installation, in particular to a correction device for installing an integrated electrode foot of a single crystal furnace. Background Art

[0002] In the semiconductor and photovoltaic industries, the single crystal furnace is the main equipment for pulling single crystal silicon rods. At present, the single crystal silicon rod is mainly pulled by the direct pulling single crystal manufacturing method. The single crystal furnace is equipped with a graphite heater and a crucible. The polycrystalline silicon material is loaded into the crucible, and the polycrystalline material is melted by the graphite heater. Then, the single crystal rod is pulled through the processes of seeding, shoulder rotation, and equal diameter. The graphite heater is installed in the single crystal furnace through four electrode feet. The four electrode feet are evenly spaced along the circumference of the graphite heater, such as Figure 2 As shown, the electrode feet include a mounting boss, a connecting plate and an electrode column which are arranged in sequence from top to bottom along the height of the single crystal furnace. A connecting hole for connecting to the steel electrode on the bottom plate of the single crystal furnace is provided at the bottom end of the electrode column. The mounting boss has an arc-shaped side surface. When the graphite heater is installed, the arc-shaped side surfaces of all the electrode feet are in contact with the outer side wall of the graphite heater.

[0003] At present, in order to ensure the current stability of the electrode foot and the steel electrode, the two are matched with full threads. After the threads are installed in place, Figure 4 As shown, there is a directional deviation between the electrode foot and the outer wall of the graphite heater, which needs to be corrected. Utility Model Content

[0004] In order to solve the problem of directional deviation between the electrode pin and the outer wall of the graphite heater in the prior art, the utility model provides a correction device for the installation of the integrated electrode pin of the single crystal furnace, which can correct the electrode pin to ensure that the curved side of the electrode pin can fit with the outer wall of the graphite heater, thereby ensuring smooth installation of the graphite heater; at the same time, the installation efficiency of the single crystal furnace is improved.

[0005] In order to achieve the above-mentioned purpose, the specific scheme adopted by the utility model is: a correction device for the installation of integrated electrode feet of a single crystal furnace, comprising two oppositely arranged end plates, each end plate having an arc-shaped surface that can fit with the arc-shaped side surface of the electrode foot, and a plurality of side plates that can support the end plates and make their arc-shaped surfaces fit with the corresponding arc-shaped side surfaces of the electrode feet are arranged between the two end plates.

[0006] As an optimized solution of the above-mentioned correction device for installing the integrated electrode feet of a single crystal furnace: the arc-shaped side is provided with a threaded hole for installing the single crystal furnace heater, and the end plate is provided with a fixing hole corresponding to the threaded hole, and the tail of the fixing bolt can pass through the fixing hole and extend into the threaded hole.

[0007] As another optimization scheme of the above-mentioned correction device for installing integrated electrode feet of a single crystal furnace: the number of the side panels is two, the two side panels are arranged in parallel, and the two ends of the side panels are respectively connected to the end plates to enclose a rectangular frame.

[0008] As another optimization scheme of the above-mentioned correction device for installing the integrated electrode foot of a single crystal furnace: the arc-shaped surface is convex to the outside of the frame.

[0009] As another optimization scheme of the above-mentioned correction device for installing integrated electrode feet of a single crystal furnace: the end plate is provided with a groove opening toward the outside of the frame, and the end of the side plate extends into the groove and is fixedly connected to the end plate.

[0010] As another optimization scheme of the above-mentioned correction device for installing the integrated electrode foot of a single crystal furnace: the depth of the groove is equal to or less than the thickness of the side plate.

[0011] As another optimization scheme of the above-mentioned correction device for installing integrated electrode feet of a single crystal furnace: the end plate and the side plate are fixedly connected by a plurality of mounting bolts, a plurality of mounting holes are opened on the end plate, and through holes corresponding to the mounting holes are opened on the side plate, and the tail of the mounting bolt passes through the through holes and extends into the mounting holes.

[0012] As another optimization solution of the above-mentioned correction device for installing the integrated electrode feet of a single crystal furnace: a gasket is arranged between the installation bolt and the side plate.

[0013] Compared with the prior art, the utility model has the following beneficial effects:

[0014] The utility model provides a correction device for installing an integrated electrode foot of a single crystal furnace. The electrode foot is first installed on a steel electrode and tightened, and the connection between the steel electrode and the chassis is loosened. The arc surfaces of the two end plates of the utility model are respectively fitted with two oppositely arranged arc side surfaces. At this time, the steel electrode and the electrode foot are rotated relative to the chassis at the same time, so that the arc side surface of the electrode foot is rotated to a desired position, and then the steel electrode and the chassis are locked to achieve correction of the electrode foot. At the same time, the installation efficiency of the electrode foot is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the utility model;

[0016] Figure 2 It is a schematic diagram of the structure of the electrode foot;

[0017] Figure 3 It is a schematic diagram of the structure of the utility model when the electrode pin is installed;

[0018] Figure 4 The electrode pins are misaligned during the actual installation process;

[0019] Figure 5 This is a picture of the correction device installed on the electrode foot

[0020] Figure numerals: 1. electrode column, 2. mounting boss, 201. threaded hole, 202. arc-shaped side surface, 3. end plate, 301. arc-shaped surface, 302. groove, 303. fixing hole, 4. side plate, 5. mounting bolt, 501. gasket. DETAILED DESCRIPTION

[0021] The technical solution of the present invention is further elaborated in detail below in conjunction with specific embodiments. The parts of the present invention that are not described and disclosed in detail in the following embodiments should be understood as the prior art known or should be known to those skilled in the art.

[0022] A correction device for installing an integrated electrode foot of a single crystal furnace, that is, the correction device in the utility model is used for installing the electrode foot in the single crystal furnace. At present, the connection between the graphite heater and the steel electrode in the single crystal furnace is usually connected by a heater connector and an electrode column. The top of the heater connector is connected to the graphite heater, and the bottom of the heater connector is provided with a slot that can be sleeved on the top of the electrode column. The more connecting parts there are, the more contact areas between the parts, and the more gaps between the parts; molten polysilicon will produce silicon volatiles under high temperature conditions, most of these volatiles will be discharged to the outside of the single crystal furnace with the airflow in the hot field, but a small part of the volatiles will enter the gap between the connector and the electrode column. These volatiles will increase the frequency of sparking on the contact surface of the connector and the electrode column. When the electrode column and the connector spark, the single crystal furnace will take emergency shutdown operations, which will lead to the scrapping of silicon materials. Therefore, the applicant proposed an integrated structure of a connector and an electrode column in a single crystal furnace, namely, the electrode pin recorded in the utility model. However, when the electrode pin is installed, there is a directional deviation between the electrode pin and the outer wall of the graphite heater, which needs to be corrected.

[0023] like Figure 2 As shown, the electrode foot includes a mounting boss 2, a connecting plate and an electrode column 1 which are arranged in sequence from top to bottom along the height of the single crystal furnace. The connecting plate is integrally connected to the mounting boss 2 and the electrode column 1. A connecting hole for connecting to a steel electrode is provided at the bottom center of the electrode column 1, and an internal thread is provided in the connecting hole. The mounting boss 2 and the connecting plate have an "L"-shaped step surface, wherein the mounting boss 2 has two symmetrically arranged arc surfaces and a first side surface and an arc-shaped side surface 202 connecting the two arc surfaces. The arc-shaped side surface 202 is concave toward the mounting boss 2, and the curvature radius of the arc-shaped side surface 202 is equal to the curvature radius of the outer wall of the graphite heater.

[0024] The correction device includes two end plates 3 arranged opposite to each other, each end plate 3 having an arcuate surface 301 that can fit with the arcuate side surface 202 of the electrode foot. Figure 1 As shown, the end plate 3 includes an upper surface, a lower surface, a left side surface, a right side surface, a front side surface and a rear side surface, wherein the left side surface is an arc-shaped surface 301, and the remaining surfaces are all planes. A plurality of side plates 4 are arranged between the two end plates 3, which can support the end plates 3 and make their arc-shaped surfaces 301 fit with the arc-shaped side surfaces 202 of the corresponding electrode pins. The number of side plates 4 is 1-2. When the number of side plates 4 is 1, the two ends of the side plates 4 are respectively connected to the center position of the end plates 3, and the two end plates 3 and one side plate 4 are in an "I" shape; in this embodiment, the number of side plates 4 is two, and the two side plates 4 are arranged in parallel, and the two ends of the side plates 4 are respectively connected to the end plates 3 to enclose a rectangular frame, and the arc-shaped surface 301 protrudes to the outside of the frame, as shown in FIG. Figure 1 As shown, the electrode pin can be corrected to ensure that the arc-shaped side surface 202 of the electrode pin can fit with the outer side wall of the graphite heater, thereby ensuring smooth installation of the graphite heater; at the same time, the installation efficiency of the single crystal furnace is improved.

[0025] The height of the arc surface 301 is equal to the height of the arc side surface 202, that is, during the correction process, the lower surface of the end plate 3 is fitted with the upper surface of the connecting plate, and the upper surface of the end plate 3 is flush with the upper surface of the mounting boss 2. The length of the arc surface 301 is greater than the length of the arc side surface 202, that is, when the arc surface 301 is fitted with the arc side surface 202, the front edge and the rear edge of the arc surface 301 extend out of the arc side surface 202, ensuring that the arc side surface 202 can be fitted on the arc surface 301, thereby improving the accuracy of the correction.

[0026] The arc-shaped side surface 202 is provided with threaded holes 201 for installing the single crystal furnace heater. The number of threaded holes 201 is 1-2. In this embodiment, the number of threaded holes 201 is 2 and symmetrically arranged. The end plate 3 is provided with fixing holes 303 corresponding to the threaded holes 201. The number of fixing holes 303 is the same as the number of threaded holes 201. The diameter of the fixing holes 303 is greater than or equal to the diameter of the threaded holes 201. In this embodiment, the number of fixing holes 303 is 2. The diameter of the fixing holes 303 is greater than the diameter of the threaded holes 201, which is convenient for the fixing bolts to pass through the fixing holes 303. The tail of the fixing bolt can pass through the fixing holes 303 and extend into the threaded holes 201, thereby fixing the correction device and the electrode pin.

[0027] The end of the side plate 4 is connected to the end plate 3, specifically, as Figure 1As shown, the end plate 3 is provided with a groove 302 with its opening facing the outside of the frame, the front side and the rear side of the end plate 3 are both provided with grooves 302, the opening of the groove 302 faces the outside of the frame, the depth of the groove 302 is equal to or greater than the thickness of the side plate 4, the width of the groove 302 is equal to or greater than the width of the side plate 4, in this embodiment, the depth of the groove 302 is equal to the thickness of the side plate 4, and the width of the groove 302 is equal to the width of the side plate 4. The end of the side plate 4 extends into the groove 302 and is fixedly connected with the end plate 3. Specifically, the end plate 3 and the side plate 4 are fixedly connected by a plurality of mounting bolts 5, and a plurality of mounting holes are provided on the end plate 3. In this embodiment, the mounting holes are provided at the bottom of the groove 302, the number of mounting holes is two, and the mounting holes are provided with internal threads matching the mounting threads, and the side plate 4 is provided with through holes corresponding to the mounting holes, the diameter of the through holes is larger than the mounting holes, so as to facilitate the passing of the mounting bolts 5, and the tail of the mounting bolts 5 passes through the through holes and extends into the mounting holes, so as to realize the fixed connection between the side plate 4 and the end plate 3.

[0028] A gasket 501 is provided between the mounting bolt 5 and the side plate 4 to prevent the mounting bolt 5 from loosening.

[0029] The correction process of the utility model is as follows: the steel electrode is locked with the single crystal furnace chassis, the electrode foot is threadedly connected with the steel electrode, and the electrode foot and the steel electrode are threadedly locked; then, the connection between the steel electrode and the single crystal furnace chassis is loosened so that the steel electrode can rotate relative to the chassis, the end plate 3 is placed on the corresponding electrode foot and the arc surface 301 is fitted with the arc side surface 202. At this time, the electrode foot and the steel electrode are rotated to the desired position, and the fixing bolt passes through the fixing hole 303 and extends into the threaded hole 201, so that the correction device is fixedly connected with the electrode foot; the steel electrode and the chassis are locked so that the two are fixedly connected, and the fixing bolt and the correction device are removed to complete the entire correction process. The setting of the fixing bolt avoids the misalignment between the end plate 3 and the electrode foot when the steel electrode is locked with the chassis, thereby ensuring the installation accuracy of the electrode foot.

[0030] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A correction device for installing integrated electrode feet of a single crystal furnace, characterized in that: The invention comprises two end plates (3) arranged opposite to each other, wherein the end plates (3) have an arcuate surface (301) capable of being fitted with the arcuate side surface (202) of the electrode foot, and a plurality of side plates (4) capable of supporting the end plates (3) and making the arcuate surface (301) fit with the arcuate side surface (202) of the corresponding electrode foot are arranged between the two end plates (3).

2. A correction device for installing an integrated electrode foot of a single crystal furnace according to claim 1, characterized in that: The arc-shaped side surface (202) is provided with a threaded hole (201) for installing a single crystal furnace heater, and the end plate (3) is provided with a fixing hole (303) corresponding to the threaded hole (201), and the tail of the fixing bolt can pass through the fixing hole (303) and extend into the threaded hole (201).

3. A correction device for installing an integrated electrode foot of a single crystal furnace according to claim 1, characterized in that: The number of the side panels (4) is two, the two side panels (4) are arranged in parallel, and the two ends of the side panels (4) are respectively connected to the end panels (3) to enclose a rectangular frame.

4. A correction device for installing an integrated electrode foot of a single crystal furnace as claimed in claim 3, characterized in that: The arc-shaped surface (301) is convex toward the outside of the frame.

5. A correction device for installing an integrated electrode foot of a single crystal furnace as claimed in claim 3, characterized in that: The end plate (3) is provided with a groove (302) with its opening facing the outside of the frame, and the end of the side plate (4) extends into the groove (302) and is fixedly connected to the end plate (3).

6. A correction device for installing an integrated electrode foot of a single crystal furnace as claimed in claim 5, characterized in that: The depth of the groove (302) is equal to or less than the thickness of the side plate (4).

7. A correction device for installing an integrated electrode foot of a single crystal furnace as claimed in claim 3, characterized in that: The end plate (3) and the side plate (4) are fixedly connected by a plurality of mounting bolts (5); a plurality of mounting holes are provided on the end plate (3); through holes corresponding to the mounting holes are provided on the side plate (4); and the tails of the mounting bolts (5) pass through the through holes and extend into the mounting holes.

8. A correction device for installing an integrated electrode foot of a single crystal furnace according to claim 7, characterized in that: A gasket (501) is provided between the mounting bolt (5) and the side plate (4).

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