A chemical adsorption reactor for phosphine gas purification
By designing a chemical adsorption reactor for purification of phosphane gas including an adsorption tower and a reservoir, a multi-group immersion assembly and a multi-layer adsorption plate structure are adopted, and the efficient purification of phosphane gas is achieved in combination with the use of alkaline solutions, and the problem of poor purification effect in the prior art is solved.
Patent Information
- Application Number
- CN202420679938.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-03
- Publication Date
- 2025-04-04
- Estimated Expiration
- 2034-04-03
AI Technical Summary
The prior art is difficult to efficiently purify phosphane gas, resulting in limited applications in electronics, aviation, military and other fields.
A chemoadsorption reactor for purification of phosphane gas including an adsorption tower and a reservoir was designed. Multiple sets of immersion components and multi-layer adsorption plate structures were adopted, and multiple chemical adsorption of gases were achieved in combination with the use of alkaline solutions.
The purity of the phosphane gas can be significantly improved through this device, and the problem of poor adsorption effect in the prior art is solved, and the purification of high-purity phosphane is achieved.
Smart Images
Figure CN222709355U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chemical adsorption equipment, in particular to a chemical adsorption reactor for purifying phosphine gas. Background Art
[0002] Phosphine (PH3) is a very important electronic gas. As an n-type dopant, it plays a very key role in epitaxial GaP materials and ion implantation processes. It is also an important raw material for synthesizing compound semiconductor gallium arsenide phosphide (GaAsP). It is also widely used in the fields of solar cells and grain fumigation. At present, the synthesis methods of phosphine mainly include chemical method, electrolysis method and microwave method, but no matter which synthesis process, unnecessary impurities will be produced. The purity of phosphine synthesized in China is 98-99% after pretreatment. The impurities contained therein are N2, O2, CO, CH4, CO2, SiH4, H2S, H2O, AsH3, SnH4 and GeH4, which cannot be directly used in the fields of electronics, aviation, military industry, etc. Most of the chemical adsorption instruments on the existing market are not practical, and the adsorption effect is not good and high-purity phosphine cannot be obtained. Utility Model Content
[0003] The utility model aims to provide a chemical adsorption reactor for purifying phosphine gas to solve the problems raised in the above background technology.
[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a chemical adsorption reactor for phosphine gas purification, comprising an adsorption tower and a liquid storage tank, wherein the top of the adsorption tower is provided with an air outlet, and one side of the bottom of the adsorption tower is provided with an air inlet pipe, and the interior of the adsorption tower and located above the air inlet pipe are provided with a first adsorption plate and a second adsorption plate in sequence from bottom to top, and the outer circumference of the air inlet pipe is provided with a plurality of groups of immersion components downward, and the immersion components are arranged inside the adsorption tower, and the immersion components include a connecting outer tube and a connecting inner tube, and the connecting outer tube is connected to the air inlet pipe through the inner wall of the bottom of the connecting outer tube A group of limit blocks are fixedly arranged relatively on the upper part, the connecting inner tube is movably arranged in the connecting outer tube, and slide grooves are arranged on both sides of the outer circumference of the connecting inner tube, and the slide grooves are arranged corresponding to the limit blocks. A conical block is arranged at the bottom end of the connecting inner tube, and the conical block is a high-density metal component. The interior of the conical block is hollow, and a plurality of air holes are opened on the conical surface of the conical block. The interior of the conical block is connected with the interior of the connecting inner tube, and the bottom of the outer circumference of the connecting inner tube is located above the conical block and a floating block is sleeved thereon. The floating block is a lightweight sponge foam, and the floating block is fixedly connected to the outer circumference of the connecting inner tube.
[0005] Preferably, a support frame is fixedly mounted on the lower end of the outer periphery of the adsorption tower.
[0006] Preferably, the liquid storage tank is arranged on one side of the adsorption tower, and the interior of the liquid storage tank is connected to the lower end of the adsorption tower through a water pump and a pipeline, and the liquid connected to the interior of the liquid storage tank is an alkaline solution, which is a 30wt% sodium hydroxide solution.
[0007] Preferably, a drainage pipe is provided at the bottom of the adsorption tower, and a drainage valve is installed on the drainage pipe.
[0008] Preferably, the first adsorption plate is filled with a solid adsorbent, and the solid adsorbent is alkaline alumina with a pH value of 9-10.
[0009] Preferably, the second adsorption plate is filled with an adsorbent, and the adsorbent is 4A molecular sieve.
[0010] Compared with the prior art, the beneficial effects of the utility model are as follows: the utility model generates buoyancy when the floating block contacts the liquid by setting a water immersion component, so that the connecting inner tube slides in the connecting outer tube as the liquid level rises and falls, ensuring that the conical block at the lower end of the connecting inner tube is immersed in the liquid. At this time, the gas in the air intake pipe can be discharged into the solution, and some impurities in the gas can be removed; the utility model sets a first adsorption plate and a second adsorption plate, plus a solution, and the multiple structures chemically adsorb the gas to improve the adsorption effect. The utility model has a simple structure and a good adsorption effect. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0012] Figure 2 A cross-sectional view of the utility model as a whole;
[0013] Figure 3 This is a schematic diagram of the structure of the water-immersed component of the utility model;
[0014] Figure 4 It is a cross-sectional view of the water-immersed component of the utility model.
[0015] In the figure: 1. adsorption tower; 2. support frame; 3. air inlet pipe; 4. air outlet; 5. drainage pipe; 6. drainage valve; 7. first adsorption plate; 8. second adsorption plate; 9. immersion component; 91. connecting outer pipe; 92. connecting inner pipe; 93. conical block; 94. air vent; 95. floating block; 96. slide groove; 97. limit block; 10. liquid storage tank. DETAILED DESCRIPTION
[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0017] In the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0018] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0019] See also Figure 1-4The utility model provides a technical solution: a chemical adsorption reactor for purifying phosphine gas, comprising an adsorption tower 1 and a liquid storage tank 10, wherein the top of the adsorption tower 1 is provided with an air outlet 4, and the bottom side of the adsorption tower 1 is provided with an air inlet pipe 3, and the interior of the adsorption tower 1 and located above the air inlet pipe 3 are provided with a first adsorption plate 7 and a second adsorption plate 8 in sequence from bottom to top, and the outer circumference of the air inlet pipe 3 is provided with a plurality of groups of immersion components 9 downwardly, and the immersion components 9 are arranged inside the adsorption tower 1, and the immersion components 9 include a connecting outer tube 91 and a connecting inner tube 92, and the connecting outer tube 91 is connected to the air inlet pipe 3 through, and a relative group of limit stops are fixedly provided on the bottom inner wall of the connecting outer tube 91 Block 97, the connecting inner tube 92 is movably arranged in the connecting outer tube 91, and slide grooves 96 are arranged on both sides of the outer circumference of the connecting inner tube 92, and the slide grooves 96 are arranged corresponding to the limit blocks 97. A conical block 93 is arranged at the bottom end of the connecting inner tube 92, and the conical block 93 is a high-density metal component. The interior of the conical block 93 is hollow, and a plurality of air holes 94 are opened on the conical surface of the conical block 93. The interior of the conical block 93 is connected with the interior of the connecting inner tube 92, and the bottom of the outer circumference of the connecting inner tube 92 is located above the conical block 93 and is sleeved with a floating block 95. The floating block 95 is a lightweight sponge foam, and the floating block 95 is fixedly connected to the outer circumference of the connecting inner tube 92.
[0020] Furthermore, a support frame 2 is fixedly installed at the lower end of the outer periphery of the adsorption tower 1 .
[0021] Furthermore, the liquid storage tank 10 is arranged on one side of the adsorption tower 1, and the interior of the liquid storage tank 10 is connected to the lower end of the adsorption tower 1 by arranging a water pump and a pipeline. The liquid connected to the interior of the liquid storage tank 10 is an alkaline solution, which is a 30wt% sodium hydroxide solution. The sodium hydroxide solution directly absorbs hydrogen sulfide and carbon dioxide in the mixed gas.
[0022] Furthermore, a drainage pipe 5 is provided at the bottom of the adsorption tower 1 , and a drainage valve 6 is installed on the drainage pipe 5 .
[0023] Furthermore, the first adsorption plate 7 is filled with a solid adsorbent, which is alkaline alumina with a pH value of 9-10, and can effectively remove residual sulfides in the gas.
[0024] Furthermore, the second adsorption plate 8 is filled with an adsorbent, and the adsorbent is a 4A molecular sieve, which is used to adsorb dehydrated molecules, carbon dioxide and hydrogen sulfide.
[0025] Working principle: The utility model provides a chemical adsorption reactor for purifying phosphine gas, including an adsorption tower 1 and a liquid storage tank 10. The top of the adsorption tower 1 is provided with an air outlet 4, and the bottom side of the adsorption tower 1 is provided with an air inlet pipe 3. The interior of the adsorption tower 1 and above the air inlet pipe 3 are provided with a first adsorption plate 7 and a second adsorption plate 8 in sequence from bottom to top. The outer circumference of the air inlet pipe 3 is provided with multiple groups of immersion components 9 downwardly, and the immersion components 9 are arranged inside the adsorption tower 1. The immersion components 9 include a connecting The outer tube 91 is connected to the inner tube 92, and the outer tube 91 is connected to the intake pipe 3. A set of relative limit blocks 97 are fixedly arranged on the inner wall of the bottom of the outer tube 91. The inner tube 92 is movably arranged in the outer tube 91. Slide grooves 96 are arranged on both sides of the outer circumference of the inner tube 92. The slide grooves 96 are arranged corresponding to the limit blocks 97. The bottom end of the inner tube 92 is provided with a conical block 93, which is a high-density metal component. The interior of the conical block 93 is hollow. A plurality of air holes 94 are provided on the conical surface of the conical block 93, and the interior of the conical block 93 is connected with the interior of the connecting inner tube 92. The outer circumferential bottom of the connecting inner tube 92 is located above the conical block 93 and is sleeved with a floating block 95. The floating block 95 is a lightweight sponge foam and is fixedly connected to the outer circumference of the connecting inner tube 92. When in use, the solution in the liquid storage tank 10 is pumped into the bottom of the adsorption tower 1, and then the gas enters from the air inlet pipe 3, and is discharged into the solution at the bottom of the adsorption tower 1 through the connecting outer tube 91 and the connecting inner tube 92. The sodium hydroxide solution directly absorbs hydrogen sulfide and carbon dioxide in the gas, and then the gas flows upward and passes through the first adsorption plate 7 and the second adsorption plate 8 in turn. The alkaline alumina inside the first adsorption plate 7 effectively removes residual sulfide in the gas, and the 4A molecular sieve inside the second adsorption plate 8 adsorbs dehydrated molecules, carbon dioxide and hydrogen sulfide. The multiple structures chemically adsorb the gas to improve the adsorption effect. The structure is simple and the adsorption effect is good. Finally, the purified gas is discharged from the gas outlet 4.
[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A chemical adsorption reactor for phosphine gas purification, characterized in that: The invention comprises an adsorption tower (1) and a liquid storage tank (10), wherein the top of the adsorption tower (1) is provided with an air outlet (4), the bottom side of the adsorption tower (1) is provided with an air intake pipe (3), the interior of the adsorption tower (1) and located above the air intake pipe (3) are provided with a first adsorption plate (7) and a second adsorption plate (8) in sequence from bottom to top, the outer circumference of the air intake pipe (3) is provided with a plurality of groups of immersion components (9) facing downward, the immersion components (9) are arranged inside the adsorption tower (1), the immersion components (9) comprise a connecting outer pipe (91) and a connecting inner pipe (92), the connecting outer pipe (91) is connected to the air intake pipe (3), a group of relative limit blocks (97) are fixedly provided on the inner wall of the bottom of the connecting outer pipe (91), and the connecting inner pipe (92) is movable. The connecting inner tube (92) is movably arranged in the connecting outer tube (91), and the two sides of the outer circumference of the connecting inner tube (92) are provided with sliding grooves (96), and the sliding grooves (96) are arranged corresponding to the limit blocks (97). The bottom end of the connecting inner tube (92) is provided with a conical block (93), and the conical block (93) is a high-density metal component. The interior of the conical block (93) is hollow, and a plurality of air holes (94) are opened on the conical surface of the conical block (93). The interior of the conical block (93) is connected with the interior of the connecting inner tube (92). The bottom of the outer circumference of the connecting inner tube (92) is located above the conical block (93) and is provided with a floating block (95). The floating block (95) is a lightweight sponge foam, and the floating block (95) is fixedly connected to the outer circumference of the connecting inner tube (92).
2. A chemical adsorption reactor for phosphine gas purification according to claim 1, characterized in that: A support frame (2) is fixedly mounted on the lower end of the outer periphery of the adsorption tower (1).
3. The chemical adsorption reactor for purifying phosphine gas according to claim 1, characterized in that: The liquid storage tank (10) is arranged on one side of the adsorption tower (1), and the interior of the liquid storage tank (10) is connected to the lower end of the interior of the adsorption tower (1) through a water pump and a pipeline.
4. The chemical adsorption reactor for purifying phosphine gas according to claim 1, characterized in that: A liquid discharge pipe (5) is provided at the bottom of the adsorption tower (1), and a liquid discharge valve (6) is installed on the liquid discharge pipe (5).
5. The chemical adsorption reactor for purifying phosphine gas according to claim 1, characterized in that: The first adsorption plate (7) is filled with a solid adsorbent, which is alkaline aluminum oxide with a pH value of 9-10.
6. The chemical adsorption reactor for purifying phosphine gas according to claim 1, characterized in that: The second adsorption plate (8) is filled with an adsorbent, which is a 4A molecular sieve.