Silicon rod cutting and clamping mechanism

Abstract

The utility model belongs to the technical field of diamond wire slicers, and relates to a silicon rod cutting clamping mechanism, including a fixed seat, the lower end of which is fastened to a material clamping plate, and the upper end is fastened to a cylinder assembly; the lower end of the piston rod of the cylinder assembly is fastened to a clamping head, and the clamping head can cooperate with the bottom surface of the material clamping plate under the drive of the piston rod to clamp the workpiece; the lower end outer ring of the material clamping plate is fastened to a guide plate, and the guide plate guides the workpiece entering the material clamping plate from the side; the cylinder assembly includes a cylinder body, and the piston rod divides the cylinder body into two upper and lower cavities, the oil port provided at the upper end of the cylinder body is connected to the upper cavity, and the air port provided at the side of the cylinder body is connected to the lower cavity. The clamping mechanism can meet the needs of vertical clamping and lateral clamping of silicon rods, and has the characteristics of high positioning accuracy, high dynamic response, high stability, faster response, and more sensitivity.

Description

Technical Field

[0001] The utility model belongs to the technical field of diamond wire slicers and relates to a silicon rod cutting and clamping mechanism. Background Art

[0002] Diamond wire slicer is a special precision equipment for silicon wafer cutting in solar photovoltaic equipment. It is the equipment with the highest production cost and the highest technical difficulty in the front-end process (crystal pulling, squaring, and slicing) of solar cells. During the operation of the diamond wire slicer, the stability of the silicon rod fixation is one of the important conditions for the quality of silicon wafers. The silicon rod needs to withstand vertical clamping force and lateral clamping force. Having a reliable silicon rod clamping method is a strong guarantee for improving the efficiency of silicon wafer cutting. In the industry, the lateral clamping force is usually ensured by the guide track of the equipment, which can be guaranteed by the machining accuracy; the vertical clamping force is completed by the pneumatic system. In the production of small-sized silicon wafers, the silicon rod size is small and the loading capacity is small. The pneumatic system can meet the use requirements, but with the iteration of technology, one of the technical development trends of silicon wafer cutting is "large size and large loading capacity". The product has multiple specifications and thin slices, and the equipment requires thin lines, large production capacity, and high speed. When the cutting equipment is working, it needs to clamp the processed material and the cutting tool in continuous, stable, and close contact. The clamping stability of the processed material directly affects the quality and efficiency of cutting. Therefore, in view of the shortcomings of the prior art, the purpose of the utility model is to provide a mechanism with high positioning accuracy, high dynamic response, and high stability of vertical clamping force to meet the production needs of silicon rods of various specifications, so that the output response of the mechanism is faster and more sensitive. Summary of the invention

[0003] In view of the above problems, the utility model provides a silicon rod cutting clamping mechanism, which can meet the needs of vertical clamping and lateral clamping of silicon rods, and has the characteristics of high positioning accuracy, high dynamic response, high stability, faster response and greater sensitivity.

[0004] According to the technical solution of the utility model: a silicon rod cutting and clamping mechanism is characterized by comprising a fixing seat, the lower end of which is fastened to a material clamping plate, and the upper end of which is fastened to a cylinder assembly;

[0005] The lower end of the piston rod of the cylinder assembly is tightly connected to the clamping head, and the clamping head can cooperate with the bottom surface of the material clamping plate under the drive of the piston rod to clamp the workpiece;

[0006] The outer ring of the lower end of the material clamping plate is tightly connected to the guide plate, and the guide plate guides the workpiece entering the material clamping plate from the side;

[0007] The cylinder assembly comprises a cylinder body, and a piston rod divides the cylinder body into two upper and lower cavities. An oil port arranged at the upper end of the cylinder body is connected to the upper cavity, and an air port arranged at the side of the cylinder body is connected to the lower cavity.

[0008] As a further improvement of the utility model, the cylinder body is fastened to the upper end of the fixing seat through a flange portion integrally connected to the lower part thereof, the lower end of the cylinder body extends into the inner cavity of the fixing seat, and a flange cover is fastened to the lower end of the cylinder body;

[0009] A group of disc springs are arranged in the lower cavity of the cylinder body, the lower rod body of the piston rod penetrates the disc springs, the upper end of the disc spring is pressed against the piston bottom surface of the piston rod, and the lower end of the disc spring is pressed against the upper surface of the flange cover.

[0010] As a further improvement of the utility model, the upper rod body of the piston rod extends out of the cylinder body, and a first sealing ring is arranged between the upper rod body of the piston rod and the inner hole of the cylinder body.

[0011] As a further improvement of the utility model, a second sealing ring is provided on the outer ring of the piston of the piston rod to achieve dynamic sealing with the inner wall of the cylinder body.

[0012] As a further improvement of the utility model, the bottom surface of the flange cover is constructed with an integrally connected axial cylindrical body, and a third sealing ring is arranged in the inner hole of the axial cylindrical body.

[0013] As a further improvement of the utility model, the clamping head is fastened to the lower rod body of the piston rod by bolts, and the lower end of the clamping head is configured with a radially extending clamping portion.

[0014] As a further improvement of the utility model, the upper end of the piston rod is fixedly connected to the detection shaft, and the upper end of the cylinder body is installed with a sensor, and the sensor cooperates with the detection shaft.

[0015] As a further improvement of the utility model, the top surface of the material clamping plate is structured with a positioning countersunk hole, and the fixing seat is cooperatively arranged in the positioning countersunk hole and is fastened and connected by bolts.

[0016] The technical effect of the utility model is that the product structure of the utility model is reasonable and ingenious. In view of the shortcomings of the prior art, the purpose of the utility model is to provide a mechanism with high positioning accuracy, high dynamic response, and high stability of vertical clamping force to meet the production needs of silicon rods of various specifications, so that the output response of the mechanism is faster and more sensitive. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the utility model in a clamping state.

[0018] Figure 2 It is a structural schematic diagram of the utility model in a released state. DETAILED DESCRIPTION

[0019] The specific implementation of the utility model is further described below in conjunction with the accompanying drawings.

[0020] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. The described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0021] Figure 1 , 2 It includes 1-guide plate, 2-material clamping plate, 3-fixed seat, 4-cylinder body, 5-disc spring, 6-piston rod, 7-sensor, 8-detection shaft, 9-first sealing ring, 10-second sealing ring, 11-flange cover, 12-third sealing ring, 13-clamping head, 14-workpiece, etc.

[0022] like Figure 1 , 2 As shown, the utility model is a silicon rod cutting and clamping mechanism, comprising a fixing seat 3, wherein the fixing seat 3 is fastened to a material clamping plate 2 at the lower end and is fastened to a cylinder assembly at the upper end.

[0023] The lower end of the piston rod 6 of the cylinder assembly is tightly connected to the clamping head 13 . The clamping head 13 can cooperate with the bottom surface of the material clamping plate 2 under the drive of the piston rod 6 to clamp the workpiece 14 .

[0024] The outer ring of the lower end of the material clamping plate 2 is tightly connected to the guide plate 1 , and the guide plate 1 guides the workpiece 14 entering the material clamping plate 2 from the side.

[0025] The cylinder assembly includes a cylinder 4, and a piston rod 6 divides the cylinder 4 into two upper and lower cavities. The oil port arranged at the upper end of the cylinder 4 is connected to the upper cavity, and the air port arranged at the side of the cylinder 4 is connected to the lower cavity.

[0026] The cylinder body 4 is fastened to the upper end of the fixing seat 3 via a flange portion integrally connected at the lower portion thereof. The lower end of the cylinder body 4 extends into the inner cavity of the fixing seat 3 , and a flange cover 11 is fastened to the lower end of the cylinder body 4 .

[0027] A group of disc springs 5 ​​are arranged in the lower cavity of the cylinder body 4, the lower rod body of the piston rod 6 passes through the disc springs 5, the upper end of the disc spring 5 is pressed against the bottom surface of the piston of the piston rod 6, and the lower end of the disc spring 5 is pressed against the upper surface of the flange cover 11.

[0028] The upper rod body of the piston rod 6 extends out of the cylinder body 4, and a first sealing ring 9 is arranged between the upper rod body of the piston rod 6 and the inner hole of the cylinder body 4. The first sealing ring 9 is arranged in the groove of the cylinder body 4. In order to achieve reliable dynamic sealing, two grooves are arranged on the cylinder body 4.

[0029] A second sealing ring 10 is disposed on the outer ring of the piston of the piston rod 6 to achieve dynamic sealing with the inner wall of the cylinder body 4 . Furthermore, a second sealing ring 10 is disposed at each of the two axial ends of the piston of the piston rod 6 .

[0030] The bottom surface of the flange cover 11 is constructed with an integrally connected axial cylindrical body, and a third sealing ring 12 is disposed in the inner hole of the axial cylindrical body.

[0031] The clamping head 13 is fastened to the lower rod body of the piston rod 6 by bolts, and the lower end of the clamping head 13 is configured with a radially extending clamping portion.

[0032] The upper end of the piston rod 6 is fixedly connected to the detection shaft 8 , and the upper end of the cylinder body 4 is installed with a sensor 7 , which matches with the detection shaft 8 .

[0033] The top surface of the material clamping plate 2 is structured with a positioning countersunk hole, and the fixing seat 3 is matched and arranged in the positioning countersunk hole and is fastened and connected by bolts.

[0034] The working process of the utility model is as follows: the inner cavity of the cylinder body 4 is divided into two cavities by the piston of the piston rod 6, which are not connected in series. One of the cavities is connected in series with the hydraulic system, and the other cavity is equipped with a group of disc springs 5. The clamping mechanism is connected to the hydraulic system. The hydraulic oil of the hydraulic system can enter and exit one of the cavities of the cylinder body 4 through the inlet and return hydraulic oil ports of the clamping mechanism.

[0035] Under the action of the loading tool, the material sheet 14 is loaded into the material clamping plate 2 through the guide plate 1, and the material clamping plate 2 clamps the material sheet 14 laterally.

[0036] When the clamping device needs to clamp the sheet 14, the sensor 7 receives the enable signal, the hydraulic system is enabled, and the hydraulic oil does not act on the piston rod 6. Under the force of the disc spring 5, the hydraulic oil returns from the cylinder body to the oil cylinder of the hydraulic system through the inlet and return hydraulic oil ports. The piston rod 6 is acted on by the disc spring 5 in an upward direction. The piston rod 6 moves upward under the force of the disc spring 5, causing the clamping head 13 to move upward and clamp the sheet 14 vertically.

[0037] When the clamping device needs to loosen the material plate 14, the sensor 7 receives the enable signal, the hydraulic system is enabled, and the hydraulic oil exerts force on the piston rod 6. Since the force generated by the hydraulic system is much greater than the force generated by the disc spring 5, the hydraulic oil is pressed into the cylinder body 4 from the oil cylinder of the hydraulic system through the inlet and return hydraulic oil ports, the disc spring 5 is compressed, and the piston rod 6 is directed downward by the combined force. The piston rod 6 moves downward under the action of the hydraulic system, causing the clamping head 13 to follow the downward movement and vertically loosen the material plate.

[0038] Finally, it should be noted that the above specific implementation methods are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail with reference to examples, ordinary technicians in the field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the utility model, which should be included in the scope of the claims of the utility model.

Claims

1. A silicon rod cutting and clamping mechanism, characterized in that: It comprises a fixing seat (3), the fixing seat (3) having a lower end fastened to a material clamping plate (2) and an upper end fastened to a cylinder assembly; The lower end of the piston rod (6) of the cylinder assembly is tightly connected to the clamping head (13), and the clamping head (13) can cooperate with the bottom surface of the material clamping plate (2) under the drive of the piston rod (6) to clamp the workpiece (14); The outer ring of the lower end of the material clamping plate (2) is tightly connected to the guide plate (1), and the guide plate (1) guides the workpiece (14) entering the material clamping plate (2) from the side; The cylinder assembly comprises a cylinder (4), wherein a piston rod (6) divides the cylinder (4) into two upper and lower cavities, an oil port provided at the upper end of the cylinder (4) being connected to the upper cavity, and an air port provided at the side of the cylinder (4) being connected to the lower cavity.

2. The silicon rod cutting and clamping mechanism according to claim 1, characterized in that: The cylinder body (4) is fastened to the upper end of the fixing seat (3) via a flange portion integrally connected to the lower portion thereof, the lower end of the cylinder body (4) extends into the inner cavity of the fixing seat (3), and a flange cover (11) is fastened to the lower end of the cylinder body (4); A group of disc springs (5) are arranged in the lower cavity of the cylinder body (4), the lower rod body of the piston rod (6) penetrates the disc springs (5), the upper end of the disc spring (5) is pressed against the bottom surface of the piston of the piston rod (6), and the lower end of the disc spring (5) is pressed against the upper surface of the flange cover (11).

3. The silicon rod cutting and clamping mechanism according to claim 2, characterized in that: The upper rod body of the piston rod (6) extends out of the cylinder body (4), and a first sealing ring (9) is provided between the upper rod body of the piston rod (6) and the inner hole of the cylinder body (4).

4. The silicon rod cutting and clamping mechanism according to claim 2, characterized in that: A second sealing ring (10) is provided on the outer ring of the piston of the piston rod (6) to achieve dynamic sealing with the inner wall of the cylinder body (4).

5. The silicon rod cutting and clamping mechanism according to claim 2, characterized in that: The bottom surface of the flange cover (11) is constructed with an integrally connected axial cylindrical portion, and a third sealing ring (12) is provided in the inner hole of the axial cylindrical portion.

6. The silicon rod cutting and clamping mechanism according to claim 1, characterized in that: The clamping head (13) is fastened to the lower rod body of the piston rod (6) by means of bolts, and the lower end of the clamping head (13) is configured with a radially extending clamping portion.

7. The silicon rod cutting and clamping mechanism according to claim 1, characterized in that: The upper end of the piston rod (6) is fixedly connected to a detection shaft (8), and a sensor (7) is installed at the upper end of the cylinder body (4), and the sensor (7) cooperates with the detection shaft (8).

8. The silicon rod cutting and clamping mechanism according to claim 1, characterized in that: The top surface of the material clamping plate (2) is structured with a positioning countersunk hole, and the fixing seat (3) is arranged in the positioning countersunk hole and is fastened by bolts.

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