A vacuum environment cooling system

Abstract

The utility model specifically discloses a vacuum environment cooling system, in which an air-cooled motor is installed on the top of a vacuum cavity, a fan blade is installed on the output shaft at the lower end of the air-cooled motor, a magnetic fluid seal is arranged inside the air-cooled motor, a water-cooled fin tube is installed in the vacuum cavity, the water inlet and outlet of the water-cooled fin tube are located below the vacuum cavity, and a water-cooled sealing flange is installed at the water inlet and outlet of the water-cooled fin tube. The utility model provides a cooling system composed of a copper fin cooling tube and an air-cooled cycle, which can safely and stably quickly and effectively reduce the temperature in the vacuum cavity under a vacuum environment, greatly reducing the time consumption of the process flow. The cooling system is used in an electric heating vacuum furnace, which is suitable for product anti-oxidation cooling and improving production efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of electric heating equipment, in particular to a vacuum environment cooling system. Background Art

[0002] At present, with the technological progress in photovoltaics, semiconductors, electronic circuits and other fields in my country, various materials used by enterprises, such as sheet capacitors, sheet inductors, electronic ceramics, magnetic materials, powder metallurgy materials, microwave ferrites, and rare earth materials, require precise time and temperature standards for heating and processing. Therefore, a set of intelligent and automated high-temperature processing equipment has become a hot spot in domestic demand. Among them, the electric heating vacuum box furnace has a unique high-efficiency heating and cooling system, ultra-light fiber material insulation, energy saving and environmental protection, modular design, and can be customized to meet specific processing requirements. It is widely used in high-temperature processing of electronic ceramics, sheet capacitors, dry, magnetic materials, powder metallurgy materials, microwave ferrites, rare earth materials and other materials.

[0003] At present, the existing electric heating vacuum furnaces in China use products that need to be operated under vacuum throughout the process, but there is no matching cooling system that can operate reliably under vacuum, resulting in slow cooling of products and low production efficiency. In order to solve this problem, a cooling system consisting of copper fin cooling tubes and air cooling circulation is designed to improve the production efficiency of the equipment. Utility Model Content

[0004] The purpose of the utility model is to provide a vacuum environment cooling system to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A vacuum environment cooling system comprises a vacuum cavity: an air-cooled motor is installed on the top of the vacuum cavity, a fan blade is installed on the output shaft at the lower end of the air-cooled motor, a magnetic fluid seal is arranged inside the air-cooled motor, a water-cooled fin tube is installed in the vacuum cavity, the water inlet and water inlet of the water-cooled fin tube are located below the vacuum cavity, and water-cooled sealing flanges are installed at the water inlet and water inlet of the water-cooled fin tube.

[0007] Preferably, the water-cooled finned tube is made of pure copper, and a plurality of annular heat dissipating fins are arranged on the tube.

[0008] Preferably, the coolant of the water-cooled fin tube is pure water, and power is provided by a water pump outside the equipment.

[0009] Preferably, the magnetic fluid seal is located inside the motor, and is composed of a non-magnetic seat, bearings, magnetic poles, permanent magnets, a magnetic shaft, and a magnetic fluid. Under the action of a uniform and stable magnetic field, the magnetic fluid fills the set space and establishes a multi-stage "O-ring", thereby achieving the effect of sealing the vacuum cavity.

[0010] Compared with the prior art, the beneficial effects of the utility model are:

[0011] The utility model provides a cooling system composed of copper fin cooling tubes and air cooling circulation, which can safely and stably reduce the temperature in the vacuum chamber quickly and effectively under vacuum environment, greatly reducing the time consumption of the process. This cooling system is used in electric heating vacuum furnaces, suitable for product oxidation prevention and cooling, and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0013] Figure 2 It is a schematic diagram of the AA-section structure of the utility model.

[0014] In the figure: 1. Vacuum chamber; 2. Air-cooled motor; 3. Magnetic fluid seal; 4. Water-cooled fin tube; 5. Water-cooled sealing flange. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0016] In the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0017] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0018] See also Figure 1-2 The utility model provides a technical solution: a vacuum environment cooling system, including a vacuum cavity: an air-cooled motor 2 is installed on the top of the vacuum cavity 1, a fan blade is installed on the output shaft at the lower end of the air-cooled motor 2, a magnetic fluid seal 3 is arranged in the air-cooled motor 2, a water-cooled fin tube 4 is installed in the vacuum cavity 1, the water inlet and water inlet of the water-cooled fin tube 4 are located below the vacuum cavity, and a water-cooled sealing flange 5 is installed at the water inlet and water inlet of the water-cooled fin tube.

[0019] Furthermore, the water-cooled finned tube is made of pure copper, and a plurality of annular heat dissipating fins are arranged on the tube.

[0020] Furthermore, the coolant of the water-cooled fin tube is pure water, and power is provided by a water pump outside the equipment.

[0021] Furthermore, the magnetic fluid seal is located inside the motor, and is composed of a non-magnetic seat, bearings, magnetic poles, permanent magnets, a magnetic shaft, and a magnetic fluid. Under the action of a uniform and stable magnetic field, the magnetic fluid fills the set space and establishes a multi-stage "O-ring", thereby achieving the effect of sealing the vacuum cavity.

[0022] Working principle: After a series of processes, the temperature of the product in the vacuum chamber of the electric heating vacuum furnace reaches the target and needs to be cooled. At this time, the air-cooled motor is started, and the fan blades drive the airflow to transfer the heat to the water-cooled fin tubes (due to process and equipment reasons, there is a very small amount of air in the vacuum chamber). The water-cooled fin tubes take away the heat through the large heat dissipation area and the fast-flowing cooling water, which has the effect of accelerating cooling.

[0023] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum environment cooling system, comprising a vacuum chamber, characterized in that: An air-cooled motor is installed on the top of the vacuum chamber, a fan blade is installed on the output shaft at the lower end of the air-cooled motor, a magnetic fluid seal is arranged inside the air-cooled motor, a water-cooled fin tube is installed in the vacuum chamber, the water inlet and water inlet of the water-cooled fin tube are located below the vacuum chamber, and water-cooled sealing flanges are installed at the water inlet and water inlet of the water-cooled fin tube.

2. The vacuum environment cooling system according to claim 1, characterized in that: The water-cooled finned tube is made of pure copper, and a plurality of annular heat dissipating fins are arranged on the tube.

3. The vacuum environment cooling system according to claim 1, characterized in that: The coolant of the water-cooled fin tube is pure water, and the power is provided by a water pump outside the equipment.

4. The vacuum environment cooling system according to claim 1, characterized in that: The magnetic fluid seal is located inside the motor. The magnetic fluid seal is composed of a non-magnetic seat, a bearing, a magnetic pole, a permanent magnet, a magnetic shaft, and a magnetic fluid. Under the action of a uniform and stable magnetic field, the magnetic fluid fills the set space and establishes a multi-level "O-ring", thereby achieving the effect of sealing the vacuum cavity.

Images