Wafer probe station display flipping mechanism and wafer detection equipment

Abstract

The utility model relates to a wafer probe station display flipping mechanism and a wafer detection device, wherein the wafer probe station display flipping mechanism includes a probe station and a display, the display is provided with a connecting portion, and the display is rotatably connected to the probe station through the connecting portion to open or close relative to the probe station. The display is used to make way for the docking channel between the tester and the probe station when it is rotated to a closed position, so as to avoid the docking of the tester and the probe station. According to the technical solution of the utility model, when the tester and the probe station are docking, the display can be rotated to a closed position to make way for the docking channel between the tester and the probe station, so as to achieve stable passage of the tester without affecting the operation process. Compared with the method of disassembling the display in the prior art, the solution of the utility model is easy to operate, and the display does not need to be disassembled, thereby improving the replacement efficiency of the probe card.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer probe stations, in particular to a wafer probe station display flipping mechanism and wafer detection equipment. Background Art

[0002] In the wafer probe test stage, hard docking is a commonly used mechanical docking method between the probe station and the tester. The tester is generally installed on a manipulator. During docking, the tester needs to be raised and moved to directly above the probe station cardholder. During docking, the tester exceeds the height of the monitor. The tester is limited by the travel of the manipulator and may hit the monitor, which is dangerous. Therefore, each time the probe card is replaced, the monitor needs to be removed to facilitate the tester to cross over for docking, which will affect the efficiency of replacing the probe card. Utility Model Content

[0003] In view of this, the utility model provides a wafer probe station display flipping mechanism and a wafer detection device, which mainly solves the technical problem that the display needs to be removed each time the probe card is replaced to facilitate the test machine to cross over and perform docking, which affects the efficiency of probe card replacement.

[0004] In order to achieve the above purpose, the utility model mainly provides the following technical solutions:

[0005] An embodiment of the utility model provides a wafer probe station display flipping mechanism, which includes a probe station and a display, wherein the display is provided with a connecting portion, and the display is rotatably connected to the probe station through the connecting portion to open or close relative to the probe station;

[0006] Wherein, the display is used to make way for the docking channel between the test machine and the probe station when it is rotated to the closed position, so as to avoid the docking between the test machine and the probe station.

[0007] In some embodiments, the wafer probe station display flipping mechanism further includes a locking mechanism, and the locking mechanism is used to lock the display when the display is rotated to the closed position.

[0008] In some embodiments, the locking mechanism includes a screw, which is threadedly connected to the probe station;

[0009] Wherein, a friction block is provided on the screw rod, and the screw rod is used to be driven to rotate when the display rotates to the closed position, driving the friction block to approach the display, so that the friction block fixes the display in the closed position to lock the display.

[0010] In some embodiments, when the display is rotated to the closed position and the screw drives the friction block to move to the locked position, the display abuts against the friction block through the connecting portion.

[0011] In some embodiments, the locking mechanism is further configured to lock the display when the display is rotated to an open position.

[0012] In some embodiments, when the locking mechanism includes a screw and the screw is threadedly connected to the probe station, a slot is provided on the connecting portion; the screw is used to be driven to rotate when the display is rotated to the open position, driving the friction block to be inserted into the slot, so that the friction block is stuck in the slot to fix the display in the open position.

[0013] In some embodiments, an arc-shaped guide groove is provided on the connecting portion, and the center of the arc-shaped guide groove is located on the rotation axis of the connecting portion; and the screw rod passes through the arc-shaped guide groove.

[0014] In some embodiments, when the display is used to move to the open position, one end of the arc-shaped guide groove moves to the screw rod, and when the display is used to move to the closed position, the other end of the arc-shaped guide groove moves to the screw rod;

[0015] The probe platform is provided with a first limit block and a second limit block. When the display is rotated to an open position, it abuts against the first limit block, so that there is a gap between the screw and one end of the arc guide groove; when the display is rotated to a closed position, it abuts against the second limit block, so that there is a gap between the screw and the other end of the arc guide groove.

[0016] In some embodiments, the wafer probe station display flipping mechanism further includes a housing, and the connecting portion of the display is disposed in the housing;

[0017] Wherein, the housing is provided with a position-avoiding opening for avoiding the rotation of the display, and the housing is provided with a movable cover plate, and the movable cover plate is used to open or close the position-avoiding opening;

[0018] The wafer probe station display flipping mechanism may include an adsorption structure and an elastic structure, wherein the adsorption structure is used to adsorb and fix the movable cover when the movable cover opens the avoidance opening; and the elastic structure is used to drive the movable cover to close the avoidance opening when the adsorption structure releases the movable cover.

[0019] An embodiment of the utility model further provides a wafer inspection device, which may include any one of the wafer probe station display flipping mechanisms described above.

[0020] By means of the above technical solution, the wafer probe station display flipping mechanism and wafer detection equipment of the utility model have at least the following beneficial effects:

[0021] 1. When the tester and the probe station are docking, the display can be rotated to a closed position to open the docking channel between the tester and the probe station, so that the tester can pass stably without affecting the operation process. Compared with the method of disassembling the display in the prior art, the solution of the utility model is easy to operate and does not require disassembly of the display, thereby improving the efficiency of replacing the probe card.

[0022] 2. The one-way damper can provide damping for the display when it is closed, thus preventing the display from suddenly flipping over and falling when closed, causing impact damage.

[0023] 3. The locking mechanism can lock the display when the display is rotated to the closed position, thereby preventing the display from popping up during the docking process of the test machine and improving safety.

[0024] 4. The locking mechanism also locks the display when the display is rotated to the open position, which can prevent the display from turning over and falling, and improve the stability of the display in the open position.

[0025] 5. The first limit block and the second limit block can prevent the end wall of the arc-shaped guide groove from colliding with the screw during the opening and closing process of the display, thereby improving the safety of the screw.

[0026] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0028] Figure 1 It is a schematic diagram of docking of a test machine and a probe station provided by an embodiment of the utility model;

[0029] Figure 2 It is a partial structural schematic diagram of a wafer probe station display flipping mechanism provided by one embodiment of the utility model;

[0030] Figure 3 It is a structural schematic diagram reflecting the rotating part;

[0031] Figure 4 It is a partial structural schematic diagram of another viewing angle of a wafer probe station display flipping mechanism provided by one embodiment of the utility model;

[0032] Figure 5 yes Figure 4 The enlarged schematic diagram of point A in the middle;

[0033] Figure 6 It is a schematic diagram reflecting the avoidance opening on the movable cover closing shell;

[0034] Figure 7 It is a schematic diagram reflecting the coordination between the movable cover plate, the adsorption structure and the elastic structure.

[0035] Figure numerals: 1. test machine; 2. probe station; 3. display; 4. housing; 5. rotating shaft; 6. screw; 7. second limit block; 8. first limit block; 9. movable cover; 10. adsorption structure; 11. elastic structure; 31. connecting part; 32. arc-shaped guide groove; 41. avoidance mouth; 61. friction block; 62. handle; 81. bolt; 301. slot; 321. one end of the arc-shaped guide groove; 322. the other end of the arc-shaped guide groove. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0037] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0038] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0039] like Figure 1 and Figure 2 As shown, an embodiment of the utility model proposes a wafer probe station display flipping mechanism, which includes a probe station 2 and a display 3. A connecting portion 31 is provided on the display 3, and the display 3 is rotatably connected to the probe station 2 through the connecting portion 31 to open or close relative to the probe station 2. Among them, the connecting portion 31 can be a connecting seat, etc., and the connecting portion 31 and the display 3 remain relatively fixed. The connecting portion 31 can be rotatably connected to the probe station 2 through a rotating shaft 5.

[0040] The display 3 is used to make way for the docking passage between the test machine 1 and the probe station 2 when it is rotated to the closed position, so as to avoid the docking between the test machine 1 and the probe station 2.

[0041] In the above example, when the test machine 1 and the probe station 2 are docking, the display 3 can be rotated to a closed position to open the docking channel between the test machine 1 and the probe station 2, so as to achieve stable passage of the test machine 1 without affecting the operation process. Compared with the method of disassembling the display 3 in the prior art, the solution of the utility model is easy to operate and does not require disassembly of the display 3, thereby improving the efficiency of replacing the probe card.

[0042] The aforementioned wafer probe station display flip mechanism may also include a one-way damper, which provides damping to the display 3 only when the display 3 is closed, so as to prevent the display 3 from suddenly flipping and falling when closed and causing impact damage. Among them, the specific setting method of the one-way damper is the prior art and will not be repeated here.

[0043] In some embodiments, the aforementioned wafer probe station display flipping mechanism may further include a locking mechanism, and the locking mechanism is used to lock the display 3 when the display 3 is rotated to the closed position.

[0044] In the above example, the locking mechanism can lock the display 3 when the display 3 is rotated to the closed position, thereby preventing the display 3 from bouncing up during the docking process of the testing machine 1, thereby improving safety.

[0045] In order to realize the function of the aforementioned locking mechanism, Figure 2 As shown, the aforementioned locking mechanism may include a screw rod 6, which is threadedly connected to the probe station 2. A friction block 61 may be provided on the screw rod 6, and the friction block 61 may be integrally formed on the screw rod 6. The screw rod 6 is used to be driven to rotate when the display 3 is rotated to the closed position, driving the friction block 61 to approach the display 3, so that the friction block 61 fixes the display 3 in the closed position, so as to lock the display 3.

[0046] In the above example, when the screw rod 6 is screwed, the friction block 61 can be driven to move together. When the display 3 is rotated to the closed position, the screw rod 6 can drive the friction block 61 to resist the display 3. At this time, the friction resistance between the friction block 61 and the display 3 can fix the display 3, thereby achieving locking of the display 3.

[0047] It should be noted here that a handle 62 may be provided at one end of the screw rod 6 to facilitate the user to rotate the screw rod 6 .

[0048] In a specific application example, when the display 3 rotates to the closed position and the screw 6 drives the friction block 61 to move to the locked position, the display 3 can abut against the friction block 61 through the aforementioned connecting part 31, thereby preventing the friction block 61 from directly abutting against the display 3 and scratching the display 3.

[0049] In some embodiments, the aforementioned locking mechanism is also used to lock the display 3 when the display 3 is rotated to the open position, thereby preventing the display 3 from flipping over and falling, and improving the stability of the display 3 in the open position.

[0050] In order to realize the function of the locking mechanism to lock the display 3 when it is rotated to the open position, as shown in FIG. Figure 2 and Figure 3 As shown, when the locking mechanism includes a screw rod 6, and the screw rod 6 is threadedly connected to the probe station 2, a slot 301 may be provided on the aforementioned connecting portion 31. The screw rod 6 is used to be driven to rotate when the display 3 is rotated to the open position, driving the friction block 61 to be inserted into the slot 301, so that the friction block 61 is locked into the slot 301, so as to fix the display 3 in the open position.

[0051] In the above example, when the display 3 is in the open position, the friction block 61 is opposite to the slot 301. At this time, screwing the screw 6 can drive the friction block 61 to insert into the slot 301, so that the display 3 can be fixed in the open position, thereby locking the display 3 in the open state.

[0052] In some embodiments, Figure 2 and Figure 3As shown, the aforementioned connecting portion 31 may be provided with an arc-shaped guide groove 32, the center of which is located on the rotation axis of the aforementioned connecting portion 31. The aforementioned screw rod 6 passes through the arc-shaped guide groove 32.

[0053] In the above example, the screw rod 6 cooperates with the arc-shaped guide groove 32 to provide guidance for the opening and closing process of the display 3, so as to improve the opening and closing accuracy of the display 3.

[0054] In some embodiments, Figure 3 As shown, the aforementioned clamping groove 301 can be arranged at one end of the arc-shaped guiding groove.

[0055] The aforementioned display 3 can drive the arc guide groove 32 to move together when opening and closing. Specifically, when the display 3 is used to move to the open position, it drives one end 321 of the arc guide groove to move to the screw 6, and when the display 3 is used to move to the closed position, it drives the other end 322 of the arc guide groove to move to the screw 6.

[0056] Among them, Figure 4 As shown, the probe station 2 is provided with a first limit block 8 and a second limit block 7, and the first limit block 8 and the second limit block 7 can be fixed on the probe station 2. The display 3 is used to abut against the first limit block 8 when it is rotated to the open position, so that there is a gap between the screw rod 6 and one end 321 of the arc guide groove to prevent the one end 321 of the arc guide groove from colliding with the screw rod 6. The display 3 is used to abut against the second limit block 7 when it is rotated to the closed position, so that there is a gap between the screw rod 6 and the other end 322 of the arc guide groove to prevent the one end 321 of the arc guide groove from colliding with the screw rod 6.

[0057] In the above example, the first limit block 8 and the second limit block 7 are provided to prevent the end wall of the arc guide groove 32 from colliding with the screw 6 during the opening and closing process of the display 3, thereby improving the safety of the screw 6.

[0058] In some embodiments, the aforementioned display 3 is used to abut against the first limit block 8 through the connecting portion 31 when it is rotated to the open position, and to abut against the second limit block 7 through the connecting portion 31 when it is rotated to the closed position. In this way, the first limit block 8 and the second limit block 7 can be prevented from directly abutting against the display 3 and causing damage.

[0059] In some embodiments, Figure 4 and Figure 5As shown, the first limit block 8 may be provided with a bolt 81, which is threadedly connected to the first limit block 8 and passes through the first limit block 8. The first limit block 8 abuts against the display 3 in the open position through the end of the bolt 81. Specifically, the first limit block 8 abuts against the rotating part 31 of the display 3 in the open position through the end of the bolt 81. When the bolt 81 is screwed, the position of the end of the bolt 81 can be adjusted to adjust the limit position.

[0060] In some embodiments, Figure 6 As shown, the aforementioned wafer probe station display flipping mechanism may further include a housing 4, and the connection portion 31 of the aforementioned display 3 is disposed in the housing 4 to improve the appearance.

[0061] The housing 4 is provided with a position-avoiding opening 41 for avoiding the rotation of the display 3 so as not to affect the rotation of the display 3. The housing 4 may be provided with a movable cover plate 9, which is used to open or close the position-avoiding opening 41. Specifically, when the display 3 is opened, the movable cover plate 9 closes the position-avoiding opening 41 to improve the appearance. When the display 3 needs to be closed, the movable cover plate 9 opens the position-avoiding opening 41 so that the display 3 can be closed smoothly.

[0062] like Figure 7 As shown, the aforementioned wafer probe station display flipping mechanism may include an adsorption structure 10 and an elastic structure 11. The adsorption structure 10 is used to adsorb and fix the movable cover plate 9 when the movable cover plate 9 opens the avoidance opening 41, so as to improve the stability of the movable cover plate 9 opening the avoidance opening 41. The elastic structure 11 is used to drive the movable cover plate 9 to close the avoidance opening 41 when the adsorption structure 10 releases the movable cover plate 9, so as to save manpower and improve the stability of the movable cover plate 9 closing the avoidance opening 41.

[0063] The aforementioned adsorption structure 10 may include a magnet disposed on the housing 4, and the aforementioned movable cover plate 9 may be a metal part that can be adsorbed by the magnet, so that when the movable cover plate 9 opens the avoidance opening 41, the adsorption structure 10 can adsorb and fix the movable cover plate 9 through the magnet. The aforementioned elastic structure 11 may be a spring or a flexible plastic, etc.

[0064] The utility model also provides a wafer detection device, which can include any of the above-mentioned wafer probe station display flipping mechanisms. In this example, because the wafer detection device adopts the above-mentioned wafer probe station display flipping mechanism, when the test machine 1 and the probe station 2 are docking, the display 3 can be rotated to a closed position to open the docking channel between the test machine 1 and the probe station 2, so as to achieve stable passage of the test machine 1 without affecting the operation process. Compared with the method of disassembling the display 3 in the prior art, the solution of the utility model is easy to operate and does not need to disassemble the display 3, thereby improving the replacement efficiency of the probe card.

[0065] The above description is only a preferred embodiment of the utility model, and does not limit the patent scope of the utility model. All equivalent structural changes made by using the contents of the utility model specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the utility model.

Claims

1. A wafer probe station display flipping mechanism, characterized in that: It comprises a probe station (2) and a display (3), wherein the display (3) is provided with a connecting portion (31), and the display (3) is rotatably connected to the probe station (2) via the connecting portion (31) so as to be opened or closed relative to the probe station (2); Wherein, the display (3) is used to make way for the docking channel between the test machine (1) and the probe station (2) when it is rotated to the closed position, so as to avoid the docking between the test machine (1) and the probe station (2).

2. The wafer probe station display flipping mechanism according to claim 1, characterized in that: It also comprises a locking mechanism, which is used to lock the display (3) when the display (3) is rotated to the closed position.

3. The wafer probe station display flipping mechanism according to claim 2, characterized in that: The locking mechanism comprises a screw (6), and the screw (6) is threadedly connected to the probe platform (2); The screw rod (6) is provided with a friction block (61), and the screw rod (6) is used to be driven to rotate when the display (3) is rotated to the closed position, so as to drive the friction block (61) to approach the display (3), so that the friction block (61) fixes the display (3) in the closed position, thereby locking the display (3).

4. The wafer probe station display flipping mechanism according to claim 3, characterized in that: When the display (3) is rotated to the closed position and the screw rod (6) drives the friction block (61) to move to the locked position, the display (3) abuts against the friction block (61) through the connecting portion (31).

5. The wafer probe station display flipping mechanism according to any one of claims 2 to 4, characterized in that: The locking mechanism is also used to lock the display (3) when the display (3) is rotated to an open position.

6. The wafer probe station display flipping mechanism according to claim 5, characterized in that: When the locking mechanism includes a screw rod (6), and the screw rod (6) is threadedly connected to the probe station (2); and a friction block (61) is provided on the screw rod (6), the screw rod (6) is used to be driven to rotate when the display (3) is rotated to the closed position, driving the friction block (61) to approach the display (3), so that the friction block (61) fixes the display (3) in the closed position to lock the display (3), and a slot (301) is provided on the connecting portion (31); the screw rod (6) is used to be driven to rotate when the display (3) is rotated to the open position, driving the friction block (61) to be inserted into the slot (301), so that the friction block (61) is stuck in the slot (301), so as to fix the display (3) in the open position.

7. The wafer probe station display flipping mechanism according to claim 6, characterized in that: The connecting portion (31) is provided with an arc-shaped guide groove (32), the center of which is located on the rotation axis of the connecting portion (31); the screw rod (6) passes through the arc-shaped guide groove (32).

8. The wafer probe station display flipping mechanism according to claim 7, characterized in that: The display (3) is used to drive one end (321) of the arc-shaped guide groove to move to the screw rod (6) when the display (3) is moved to the open position, and the display (3) is used to drive the other end (322) of the arc-shaped guide groove to move to the screw rod (6) when the display (3) is moved to the closed position; The probe station (2) is provided with a first limit block (8) and a second limit block (7); when the display (3) is rotated to an open position, it abuts against the first limit block (8), so that a gap exists between the screw rod (6) and one end (321) of the arc-shaped guide groove; when the display (3) is rotated to a closed position, it abuts against the second limit block (7), so that a gap exists between the screw rod (6) and the other end (322) of the arc-shaped guide groove.

9. The wafer probe station display flipping mechanism according to any one of claims 1 to 4 and 6 to 8, characterized in that: It also comprises a housing (4), wherein the connection portion (31) of the display (3) is arranged in the housing (4); The housing (4) is provided with a position-avoiding opening (41) for avoiding the rotation of the display (3); the housing (4) is provided with a movable cover plate (9), and the movable cover plate (9) is used to open or close the position-avoiding opening (41); The wafer probe station display flipping mechanism also includes an adsorption structure (10) and an elastic structure (11), wherein the adsorption structure (10) is used to adsorb and fix the movable cover plate (9) when the movable cover plate (9) opens the avoidance opening (41); and the elastic structure (11) is used to drive the movable cover plate (9) to close the avoidance opening (41) when the adsorption structure (10) releases the movable cover plate (9).

10. A wafer inspection device, characterized in that: A wafer probe station display flipping mechanism comprising any one of claims 1 to 9.

Images