A top cover assembly of a glue leveling machine
By introducing magnetic sealing components and clean gas components into the top cover assembly of the uniform glue unit, the formaldehyde gas discharge problem caused by insufficient sealing of the top cover is solved, better sealing and purification of harmful gases are achieved, and the working environment and personnel health are protected.
Patent Information
- Application Number
- CN202421316984.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-11
- Publication Date
- 2025-04-04
- Estimated Expiration
- 2034-06-11
AI Technical Summary
The top cover of the existing glue uniform machine has poor sealing properties, which causes the formaldehyde harmful gas produced by the colloid to be discharged from the gap between the top cover and the glue tray, contaminating the working environment and endangering the health of the staff.
A rubber uniforming machine top cover assembly is designed, including a sealing assembly and a clean air assembly. The sealing assembly uses a magnetic field to enhance the sealing performance by installing multiple iron core rods and energized solenoids on the inside of the top cover; the clean gas assembly uses air nozzles, exhaust hoses and clean gas equipment to purify harmful gases by installing air nozzles, exhaust hoses and clean gas equipment on the top cover.
It effectively increases the sealing properties of the top cover and the glue-covering plate to prevent formaldehyde gas from being discharged and protects the working environment. At the same time, by purifying harmful gases, staff should avoid inhaling harmful gases and ensure health.
Smart Images
Figure CN222719798U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of glue leveling machines, in particular to a top cover assembly of a glue leveling machine. Background Art
[0002] Spreading machine is usually used in photolithography process and occupies an important position in the field of semiconductor manufacturing. Its main function is to evenly coat a layer of colloid on the surface of silicon wafer. This layer of colloid will be used to protect the photolithography area that does not need to be exposed. In the photolithography step, the uniformity of this layer of colloid directly affects the quality of pattern transfer, and then affects the performance and reliability of the entire semiconductor chip. The working principle of the spreader is usually to evenly distribute the colloid on the surface of the semiconductor chip by rotation or vibration. During operation, the rotation speed, vibration frequency and the properties of the colloid itself need to be precisely controlled to ensure the uniformity of coating.
[0003] The existing glue spreader is composed of a masking disk, a top cover, an optical code disk and a tray. After the semiconductor chip is placed in the masking disk, it is supported and placed by the optical code disk and the tray, and the masking disk is covered and sealed by flipping the top cover. However, after the top cover is covered with the masking disk, there is no reinforced seal, which makes the airtightness of the top cover poor. Since the semiconductor chip needs to be heated and dried after being coated with glue, formaldehyde harmful gas will be generated after the colloid is heated, causing the harmful gas to be discharged from the gap between the top cover and the masking disk, causing the working environment to be polluted and endangering the health of the staff after inhalation. Utility Model Content
[0004] The technical problem to be solved by the utility model is to provide a top cover assembly of a glue leveling machine, which solves the problem that the existing top cover has no reinforced seal, resulting in poor airtightness of the top cover, causing the generation of formaldehyde harmful gas to be discharged from the gap between the top cover and the glue masking disk, causing the working environment to be polluted and endangering the health of the workers after inhalation.
[0005] The technical problem to be solved by the utility model is achieved by adopting the following technical solutions:
[0006] A top cover assembly of a glue spreading machine comprises: a glue spreading machine, a glue shielding disk installed in the middle of the top of the glue spreading machine, a top cover arranged on the top of the glue shielding disk and rotatably connected by a hinge, a sealing assembly arranged between the top cover and the glue shielding disk, used to reinforce the seal of the top cover, and an air purification assembly arranged on one side of the top of the top cover, used to purify harmful gases generated inside the glue shielding disk.
[0007] Furthermore, the sealing assembly includes: a plurality of iron core rods arranged on the inner circumference of the top cover, a plurality of limiting holes opened on the outer ring of the top of the rubber masking disk, a plurality of limiting holes are installed with energized solenoids used in conjunction with the iron core rods, a control panel installed on the outside of the glue spreader, a control button is provided on the control panel, and the energized solenoid is electrically connected to the control panel through wires. The sealing assembly can increase the sealing of the top cover and the rubber masking disk, avoid the formation of a gap between the top cover and the rubber masking disk, and prevent the generation of formaldehyde harmful gas after the colloid is heated from being discharged from the gap, thereby avoiding pollution of the working environment.
[0008] Furthermore, the air purification component includes: an air nozzle installed on one side of the top cover, an exhaust hose connected to the top of the air nozzle, an air purification device is provided at one end of the exhaust hose, an activated carbon plate is arranged inside the air purification device, a small air purifier is provided at the bottom of the activated carbon plate, an air outlet pipe is provided on one side of the outer end of the air purification device, an air pump is installed at the top of the air purification device and connected to the exhaust hose, and a delivery pipe is provided at the bottom of the air pump facing the activated carbon plate. The formaldehyde harmful gas in the masking plate can be extracted from the top cover through the air purification component, thereby effectively purifying the formaldehyde harmful gas generated by the drying of the glue coating, thereby preventing the staff from inhaling harmful gases and causing harm to their health.
[0009] Furthermore, a handle is installed on one side of the top of the top cover, an optical code disk is provided at the bottom end of the masking disk, and a tray is installed on the top of the optical code disk. After the semiconductor chip is placed in the masking disk, it is supported and placed by the optical code disk and the tray, and then the top cover is flipped over to cover the masking disk for sealing.
[0010] Furthermore, two limit blocks are installed on both sides of the air purification equipment, the activated carbon plate is located between the two limit blocks, a slot is opened on the outside of the air purification equipment at a relative position to the limit blocks, and a handle is installed on the outside of the activated carbon board. After the activated carbon board fails to work, the handle is grasped to pull the activated carbon board outward from the slot, so that the activated carbon board is detached from between the two limit blocks, and a new activated carbon board is replaced.
[0011] Furthermore, a power cord is installed on one side of the outer end of the air purification device, and a plug is installed on one end of the power cord. A movable door is rotatably connected to the outer side of the air purification device through a hinge, and a control panel is installed on the movable door. The power cord is respectively connected to the control panel, the small air purifier and the air pump. Insert the plug into the external power supply and turn on the power. Since the power cord is respectively connected to the control panel, the small air purifier and the air pump, the control panel, the small air purifier and the air pump are powered on and used normally, and the start and stop of the small air purifier and the air pump can be controlled through the control panel.
[0012] Furthermore, a connector is installed at one end of the exhaust hose, and a sealing ring is provided inside the connector to increase the sealing between the connector and the gas nozzle to prevent leakage of harmful gases during exhaust purification.
[0013] The beneficial effects of the utility model are:
[0014] (1) The sealing assembly of the utility model can increase the sealing performance between the top cover and the rubber cover disc, avoid the formation of a gap between the top cover and the rubber cover disc, and prevent the harmful formaldehyde gas generated after the colloid is heated from being discharged from the gap, thereby avoiding pollution of the working environment.
[0015] (2) The air purification component of the utility model can extract the formaldehyde harmful gas in the glue masking disk from the top cover, thereby effectively purifying the formaldehyde harmful gas generated by the glue drying, thereby preventing the workers from inhaling the harmful gas and causing harm to their health. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model.
[0017] Figure 2 It is a top view cross-sectional schematic diagram of the rubber masking disc of the present utility model.
[0018] Figure 3 This is a schematic diagram of the structure of the gas purification equipment of the utility model.
[0019] Figure 4 For the utility model Figure 3 Enlarged structural diagram at A in the middle.
[0020] Figure 5 It is a cross-sectional schematic diagram of the gas purification equipment of the present utility model.
[0021] Figure 6 It is a schematic diagram of the internal structure of the connector of the utility model.
[0022] Figure 1-Figure 6 In: 1. Glue spreader; 101. Glue masking plate; 102. Top cover; 103. Handle; 104. Optical code disk; 105. Tray; 106. Core rod; 107. Limit hole; 108. Energized solenoid; 109. Control panel; 2. Air nozzle; 201. Exhaust hose; 202. Air purification equipment; 203. Activated carbon plate; 204. Small air purifier; 205. Exhaust pipe; 206. Vacuum pump; 207. Delivery pipe; 208. Limit block; 209. Notch; 210. Handle; 211. Power cord; 212. Plug; 213. Movable door; 214. Control panel; 3. Connector; 301. Sealing ring. DETAILED DESCRIPTION
[0023] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making any creative work shall fall within the scope of protection of the present application.
[0024] The present application is described in detail below with reference to the accompanying drawings and specific implementation methods.
[0025] Example 1
[0026] like Figure 1-Figure 6 As shown, a top cover assembly of a glue spreading machine includes: a glue spreading machine 1, a glue shielding disk 101 installed in the middle of the top of the glue spreading machine 1, a top cover 102 arranged on the top of the glue shielding disk 101 and rotatably connected to it by a hinge, a sealing assembly arranged between the top cover 102 and the glue shielding disk 101, which is used to reinforce the seal of the top cover 102, and an air purification assembly arranged on one side of the top of the top cover 102, which is used to purify harmful gases generated inside the glue shielding disk 101.
[0027] Glue spreading machine 1, glue covering disk 101, top cover 102, sealing assembly and air purification assembly. The glue covering disk 101 is installed in the middle of the top of the glue spreading machine 1. The top of the glue covering disk 101 is rotatably connected with the top cover 102 through a hinge. The sealing assembly between the top cover 102 and the glue covering disk 101 is used to reinforce the seal of the top cover 102. A purification assembly is provided on one side of the top of the top cover 102 to purify harmful gases generated inside the glue covering disk 101.
[0028] Among them, reference Figure 1-Figure 2 A handle 103 is installed on one side of the top of the top cover 102, an optical code disk 104 is provided at the bottom of the masking disk 101, and a tray 105 is installed on the top of the optical code disk 104. When applying glue to the semiconductor chip, the handle 103 is grasped to lift the top cover 102 from the top of the masking disk 101, and after the semiconductor chip is placed in the masking disk 101, it is supported and placed by the optical code disk 104 and the tray 105, and then the top cover 102 is turned over to cover the masking disk 101 for sealing. Wires and power plugs are provided on the outside of the glue spreader 1, and the wires are connected to the control console 109. After the power plug is inserted into the external plug board, the power is turned on, and the vibration motor inside the glue spreader 1 is started through the control console 109. The vibration motor transmits vibration to the optical code disk 104 and the tray 105, so that the colloid on the semiconductor chip is vibrated and evenly coated.
[0029] Among them, reference Figure 1-Figure 2, multiple iron core rods 106 are arranged on the inner circumference of the top cover 102, multiple limiting holes 107 are opened on the outer ring of the top of the glue shielding disk 101, and the multiple limiting holes 107 are installed inside. The energized solenoids 108 used in conjunction with the iron core rods 106 are installed, and a control console 109 installed on the outside of the glue-splitting machine 1 is installed. The control console 109 is provided with a control button, and the energized solenoid 108 is electrically connected to the control console 109 through an electric wire. When the top cover 102 covers the glue shielding disk 101 for sealing, the top cover 102 is flipped downward, and the multiple iron core rods 106 on the inner circumference are opposite to the multiple limiting holes 107 on the top of the glue shielding disk 101, that is, the iron core rods 106 will be inserted into the energized solenoids 108 in the limiting holes 107. , insert the power plug into the external plug board, after the control panel 109 is powered on, start the energized solenoid 108 through the control button on the control panel 109, that is, after the energized solenoid 108 is powered on, the core rod 106 is magnetized by the magnetic field of the energized solenoid 108, and the magnetized core rod 106 also becomes a magnet, so that the two magnetic fields of the core rod 106 and the energized solenoid 108 are superimposed on each other, so that the magnetism of the energized solenoid 108 is greatly enhanced, and the core rod 106 is magnetically fixed, thereby increasing the sealing of the top cover 102 and the rubber cover disk 101, avoiding the formation of a gap between the top cover 102 and the rubber cover disk 101, and preventing the harmful formaldehyde gas generated after the colloid is heated from being discharged from the gap, thereby avoiding pollution of the working environment.
[0030] Example 2
[0031] Based on Example 1, Figure 3-Figure 5 An air nozzle 2 is installed on one side of the top of the top cover 102, an exhaust hose 201 is connected to the top of the air nozzle 2, an air purification device 202 is provided at one end of the exhaust hose 201, an activated carbon plate 203 is arranged inside the air purification device 202, a small air purifier 204 is provided at the bottom of the activated carbon plate 203, an air outlet pipe 205 is provided on one side of the outer end of the air purification device 202, an air pump 206 is installed at the top of the air purification device 202 and connected to the exhaust hose 201, and a delivery pipe 207 is provided at the bottom of the air pump 206 in the direction of the activated carbon plate 203.
[0032] After the semiconductor chip is coated with glue and dried in the masking disk 101, the vacuum pump 206 and the small air purifier 204 are started, and the vacuum pump 206 generates suction on the exhaust hose 201 and the air nozzle 2, and the formaldehyde harmful gas in the masking disk 101 is sucked out through the air nozzle 2, and discharged into the air purification equipment 202 from the delivery pipe 207, and the formaldehyde harmful gas is discharged to the activated carbon plate 203, and the activated carbon plate 203 adsorbs formaldehyde in the gas, thereby reducing the concentration of formaldehyde. After the concentration of formaldehyde is reduced, the gas is discharged downward to the small air purifier 204. The small air purifier 204 generates positive and negative ions through ionization technology. These positive and negative ions can combine with and decompose formaldehyde pollutants in the gas, making it heavier and precipitated, thereby achieving the purpose of purifying formaldehyde harmful gas. After the formaldehyde harmful gas is purified, the purified gas is discharged from the air outlet pipe 205 to the outside of the air purification equipment 202, and the formaldehyde harmful gas generated by the coating and drying is effectively purified to prevent the staff from inhaling harmful gas and causing harm to their health.
[0033] After the harmful gas in the masking disk 101 is extracted and purified, the energized solenoid 108 is de-energized by controlling the control button, so that the magnetic field between the core rod 106 and the energized solenoid 108 disappears, that is, the fixation of the core rod 106 is released, and the top cover 102 can be opened by grasping the handle 103 and lifting it upwards, so that the semiconductor chip in the masking disk 101 can be taken out.
[0034] Among them, the model of the small air purifier 204 can be LA510, and its working principle is: when the fan rotates, negative pressure is formed to inhale various pollutants in the air (generally including PM2.5, dust, pollen, odor, decoration pollution such as formaldehyde, bacteria, etc.), and the purified air is discharged after filtering through the filter and adsorbing with activated carbon. In this way, the indoor air is purified by the cycle. The small air purifier 204 is a mature conventional technology in this technical field, and this scheme does not make improvements to the circuit or program of the small air purifier 204. The circuit and signal connection method between the small air purifier 204 and the control panel 214 also belongs to the public conventional technology, so the circuit and signal connection relationship will not be repeated.
[0035] Among them, reference Figure 6 A connector 3 is installed at one end of the exhaust hose 201, and a sealing ring 301 is arranged inside the connector 3. When the exhaust hose 201 is in use, it is connected to the gas nozzle 2 through the connector 3. When the connector 3 is inserted into the gas nozzle 2, the sealing ring 301 inside the connector 3 will be sleeved on the gas nozzle 2. The sealing ring 301 increases the sealing between the connector 3 and the gas nozzle 2 to prevent leakage of harmful gases during exhaust purification.
[0036] Among them, reference Figure 3 and Figure 5Two limit blocks 208 are installed on both sides of the inside of the air purification equipment 202, and the activated carbon board 203 is located between the two limit blocks 208. A notch 209 is opened at the relative position between the outside of the air purification equipment 202 and the limit blocks 208, and a handle 210 is installed on the outside of the activated carbon board 203. When the activated carbon board 203 is in use, the handle 210 is grasped to put the activated carbon board 203 into the air purification equipment 202 through the notch 209, and the activated carbon board 203 is inserted between the two limit blocks 208 and fixed, so that the activated carbon board 203 is placed firmly. After the activated carbon board 203 is inserted into the notch 209, it fits tightly with it completely.
[0037] When the activated carbon plate 203 becomes ineffective, the handle 210 is grasped to pull the activated carbon plate 203 outward from the notch 209 so that the activated carbon plate 203 is separated from between the two limiting blocks 208, that is, a new activated carbon plate 203 is replaced.
[0038] Among them, reference Figure 1 , Figure 2 and Figure 5 A power cord 211 is installed on one side of the outer end of the air purification device 202, and a plug 212 is installed on one end of the power cord 211. A movable door 213 is connected to the outer side of the air purification device 202 through a hinge, and a control panel 214 is installed on the movable door 213. The power cord 211 is respectively connected to the control panel 214, the small air purifier 204 and the air pump 206. When the air purification device 202 is in use, the plug 212 is inserted into the external power supply to turn on the power. Since the power cord 211 is respectively connected to the control panel 214, the small air purifier 204 and the air pump 206, the control panel 214, the small air purifier 204 and the air pump 206 are powered on and used normally, and the small air purifier 204 and the air pump 206 can be controlled to start and shut down through the control panel 214. The control program involved in the utility model can be implemented by those skilled in the art according to the same or similar principles in the prior art. This part is not the innovation of the utility model.
[0039] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.
[0040] The above is a detailed introduction to a top cover assembly of a glue leveling machine provided in an embodiment of the present application. Specific examples are used in this article to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the technical solution and core idea of the present application. Ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some of the technical features therein with equivalents, and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A top cover assembly of a glue spreader, characterized in that: include: Glue mixing machine (1); A glue shielding plate (101) installed in the middle of the top end of the glue leveling machine (1); A top cover (102) disposed on the top of the masking disc (101) and rotatably connected via a hinge; A sealing component disposed between the top cover (102) and the rubber masking disc (101), used for reinforcing the seal of the top cover (102); The air purification component arranged on one side of the top of the top cover (102) is used to purify harmful gases generated inside the masking disc (101).
2. The top cover assembly of the glue spinner according to claim 1, characterized in that: The sealing assembly comprises: A plurality of iron core rods (106) arranged in a circumferential direction on the inner side of the top cover (102); A plurality of limiting holes (107) are provided on the outer ring of the top of the masking disk (101), and a power-on solenoid (108) used in conjunction with the iron core rod (106) is installed inside each of the plurality of limiting holes (107); A control panel (109) is installed outside the glue leveling machine (1), the control panel (109) is provided with control buttons, and the energized solenoid (108) is electrically connected to the control panel (109) through an electric wire.
3. The top cover assembly of the glue spinner according to claim 1, characterized in that: The clean air component comprises: An air nozzle (2) is installed on one side of the top of the top cover (102), an exhaust hose (201) is connected to the top of the air nozzle (2), and an air purification device (202) is provided at one end of the exhaust hose (201); An activated carbon plate (203) is arranged inside the air purification device (202), a small air purifier (204) is arranged at the bottom of the activated carbon plate (203), and an air outlet pipe (205) is arranged at one side of the outer end of the air purification device (202); An air pump (206) is installed at the top of the air purification device (202) and connected to the exhaust hose (201), and a delivery pipe (207) is provided at the bottom of the air pump (206) in the direction toward the activated carbon plate (203).
4. The top cover assembly of the glue spinner according to claim 1, characterized in that: A handle (103) is installed on one side of the top of the top cover (102), an optical code disk (104) is provided at the bottom of the inner part of the masking disk (101), and a tray (105) is installed on the top of the optical code disk (104).
5. The top cover assembly of the glue spinner according to claim 3, characterized in that: Two limit blocks (208) are respectively installed on both sides of the interior of the air purification device (202); the activated carbon plate (203) is located between the two limit blocks (208); a notch (209) is provided at a position relative to the limit blocks (208) on the outside of the air purification device (202); and a handle (210) is installed on the outside of the activated carbon plate (203).
6. The top cover assembly of the glue spinner according to claim 3, characterized in that: A power cord (211) is installed on one side of the outer end of the air purification device (202), and a plug (212) is installed on one end of the power cord (211). A movable door (213) is rotatably connected to the outer side of the air purification device (202) via a hinge, and a control panel (214) is installed on the movable door (213). The power cord (211) is respectively connected to the control panel (214), the small air purifier (204), and the air pump (206).
7. The top cover assembly of the glue spinner according to claim 3, characterized in that: A connector (3) is installed at one end of the exhaust hose (201), and a sealing ring (301) is provided inside the connector (3).