A separation device capable of improving the separation efficiency of electrostatic chuck substrate and ceramic plate

Abstract

The utility model discloses a separation device capable of improving the separation efficiency between an electrostatic chuck substrate and a ceramic plate, belonging to the field of separation devices, including a workbench, a separation device provided on the workbench, a separation wire and a positioning card provided on the workbench, both ends of the separation wire pass through the positioning card, one end of the separation wire passes through the positioning card and is connected to a positioning column, and the other end of the separation wire passes through the positioning card and is connected to the tightening assembly. By providing the positioning card, the separation wire can be allowed to contact the glue layer of the electrostatic chuck during the length passing through the positioning card, and the separation wire can be tightened by the tightening assembly so that the separation wire can cut and separate the glue layer of the electrostatic chuck from multiple directions, thereby improving the separation efficiency. When the separation wire contracts to separate the electrostatic chuck substrate and the electrostatic chuck ceramic plate, it will not damage the electrostatic chuck substrate or the ceramic plate.

Description

Technical Field

[0001] The utility model relates to the technical field of separation devices, in particular to a separation device capable of improving the separation efficiency between an electrostatic chuck substrate and a ceramic plate. Background Art

[0002] When repairing the electrostatic chuck, it is necessary to separate the substrate and ceramic plate of the electrostatic chuck. The electrostatic chuck substrate and the ceramic plate are bonded together by a glue layer. In the prior art, a thin blade is used to cut and separate the glue layer between the electrostatic chuck substrate and the electrostatic chuck ceramic plate. The electrostatic chuck needs to be heated to soften the glue layer and improve the separation efficiency.

[0003] However, there is usually only one thin blade for separation, which can only be fed in one direction for separation, resulting in low separation efficiency, and care must be taken during separation to prevent the thin blade from damaging the electrostatic chuck. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a separation device which can improve the separation efficiency of an electrostatic chuck substrate and a ceramic plate, and can improve the separation efficiency of an electrostatic chuck substrate and a ceramic plate.

[0005] In order to solve the above technical problems, the technical solution of the utility model is:

[0006] A separation device capable of improving the separation efficiency of an electrostatic chuck substrate and a ceramic plate comprises a workbench, on which a separation device is arranged, the separation device comprising a separation steel wire and a positioning card, the positioning card being arranged on the workbench, both ends of the separation steel wire passing through the positioning card, one end of the separation steel wire passing through the positioning card to be connected to a positioning column, and the other end of the separation steel wire passing through the positioning card to be connected to a tightening assembly.

[0007] Preferably, the positioning card is provided with a first through hole and a second through hole for the two ends of the separation wire to pass through.

[0008] Preferably, the first through hole and the second through hole are arranged in parallel.

[0009] Preferably, the distance between the first through hole and the second through hole is 2-10 mm.

[0010] Preferably, the tightening assembly comprises a support seat arranged on the workbench, a tightening wheel for receiving the separation wire is rotatably provided on the support seat, and a rotating handle is provided on the tightening wheel.

[0011] Preferably, the device further comprises an electric heating wire for heating the separation steel wire, and the separation steel wire is in contact with the electric heating wire.

[0012] Preferably, the area where the electric heating wire contacts the separation steel wire is located between the positioning card and the positioning column.

[0013] Preferably, the workbench is provided with a plurality of positioning holes for fixing the electrostatic chuck.

[0014] The above technical solution has the following beneficial effects:

[0015] By setting the positioning card, the separation steel wire can be allowed to contact the glue layer of the electrostatic chuck by the length passing through the positioning card, and the separation steel wire is tightened by the tightening assembly, so that the separation steel wire can cut and separate the glue layer of the electrostatic chuck from multiple directions, which can improve the separation efficiency. When the separation steel wire contracts to separate the electrostatic chuck substrate and the electrostatic chuck ceramic plate, it will not damage the electrostatic chuck substrate or the ceramic plate;

[0016] By setting an electric heating wire, the separation steel wire can be heated to better melt the glue layer of the electrostatic chuck and improve the separation efficiency of the electrostatic chuck substrate and the ceramic plate;

[0017] By setting the positioning holes, the electrostatic chuck can be fixed on the workbench, so as to better separate the electrostatic chuck substrate and the ceramic plate using the separation wire. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic structural diagram of a separation device capable of improving the separation efficiency between an electrostatic chuck substrate and a ceramic plate according to the utility model;

[0019] Figure 2 This is another structural schematic diagram of a separation device of the utility model which can improve the separation efficiency between an electrostatic chuck substrate and a ceramic plate. DETAILED DESCRIPTION

[0020] The specific implementation methods of the present invention are further described below in conjunction with the accompanying drawings. It should be noted that the description of these implementation methods is used to help understand the present invention, but does not constitute a limitation of the present invention. In addition, the technical features involved in each implementation method of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0021] refer to Figure 1 The separation device capable of improving the separation efficiency of the electrostatic chuck substrate and the ceramic plate comprises a workbench 1, on which a separation device is arranged, the separation device comprises a separation steel wire 2 and a positioning card 3, the positioning card 3 is arranged on the workbench 1, both ends of the separation steel wire 2 pass through the positioning card 3, one end of the separation steel wire 2 passes through the positioning card 3 and is connected with the positioning column 4, and the other end of the separation steel wire 2 passes through the positioning card 3 and is connected with the tightening component;

[0022] The positioning card 3 is provided with a first through hole 9 and a second through hole 10 for the two ends of the separation wire 2 to pass through;

[0023] The first through hole 9 and the second through hole 10 are arranged in parallel; the distance between the first through hole 9 and the second through hole 10 is 2 to 10 mm; by making the first through hole 9 and the second through hole 10 closer, the separation wire 2 can contact the electrostatic chuck glue layer at more places, which can improve the separation efficiency;

[0024] When in use, the first through hole 9 is located on the left side of the second through hole 10, the right end of the separation wire 2 passes through the second through hole 10 to be connected with the positioning column 4, and the left end passes through the first through hole 9 to be connected with the tightening assembly, and the separation wire 2 at one end between the first through hole 9 and the second through hole 10 is in contact with the glue layer of the electrostatic chuck. Under the action of the tightening assembly, the separation wire 2 separates the glue layer of the electrostatic chuck from multiple directions at the same time, and the separation efficiency is high;

[0025] refer to Figure 2 In other implementations of the present embodiment, the first through hole 9 is located on the left side of the second through hole 10, the right end of the separation wire 2 passes through the first through hole 9 to be connected to the tightening assembly, and the left end of the separation wire 2 passes through the second through hole 10 to be connected to the positioning column 4, so that more areas of the separation wire 2 can be in contact with the glue layer of the electrostatic chuck, thereby improving the separation efficiency;

[0026] The tightening assembly includes a support base 5 disposed on the workbench 1, a tightening wheel 6 for receiving the separation wire 2 is rotatably disposed on the support base 5, and a rotating handle 7 is disposed on the tightening wheel 6. The tightening wheel 6 can be operated by rotating the handle 7 to tighten the separation wire 2;

[0027] The device also includes an electric heating wire for heating the separation steel wire 2. The separation steel wire 2 is in contact with the electric heating wire. By setting the electric heating wire, heat is transferred to the entire separation steel wire 2 to soften the glue layer and improve the separation efficiency.

[0028] The area where the electric heating wire contacts the separation wire 2 is located between the positioning card 3 and the positioning column 4. This section of the separation wire 2 will not move, so that the electric heating wire can better contact with it.

[0029] The workbench 1 is provided with a plurality of positioning holes 8 for fixing the electrostatic chuck, and the positioning holes 8 are used to fix the electrostatic chuck on the workbench 1 so as to facilitate its separation by the device;

[0030] By setting the positioning card 3, the separation steel wire 2 can make the length passing through the positioning card 3 contact with the glue layer of the electrostatic chuck. By tightening the separation steel wire 2 by the tightening assembly, the separation steel wire 2 can cut and separate the glue layer of the electrostatic chuck from multiple directions, which can improve the separation efficiency. When the separation steel wire 2 contracts to separate the electrostatic chuck substrate and the electrostatic chuck ceramic plate, it will not damage the electrostatic chuck substrate or the ceramic plate.

[0031] By setting an electric heating wire, the separation wire 2 can be heated to facilitate better melting of the glue layer of the electrostatic chuck and improve the separation efficiency of the electrostatic chuck substrate and the ceramic plate;

[0032] By providing the positioning hole 8 , the electrostatic chuck can be fixed on the workbench 1 , so that the electrostatic chuck substrate and the ceramic plate can be better separated by using the separation wire 2 .

[0033] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions and variations of these embodiments are made without departing from the principles and spirit of the present invention, and still fall within the scope of protection of the present invention.

Claims

1. A separation device capable of improving the separation efficiency of an electrostatic chuck substrate and a ceramic plate, characterized in that: It includes a workbench, on which a separation device is provided. The separation device includes a separation steel wire and a positioning card. The positioning card is arranged on the workbench, and both ends of the separation steel wire pass through the positioning card. One end of the separation steel wire passes through the positioning card and is connected to the positioning column, and the other end of the separation steel wire passes through the positioning card and is connected to the tightening assembly.

2. A separation device capable of improving the separation efficiency of an electrostatic chuck substrate and a ceramic plate according to claim 1, characterized in that: The positioning card is provided with a first through hole and a second through hole for the two ends of the separation wire to pass through.

3. A separation device capable of improving the separation efficiency of an electrostatic chuck substrate and a ceramic plate according to claim 2, characterized in that: The first through hole is arranged in parallel with the second through hole.

4. A separation device capable of improving the separation efficiency of an electrostatic chuck substrate and a ceramic plate according to claim 2, characterized in that: The distance between the first through hole and the second through hole is 2-10 mm.

5. A separation device capable of improving the separation efficiency of an electrostatic chuck substrate and a ceramic plate according to claim 1, characterized in that: The tightening assembly comprises a support seat arranged on the workbench, a tightening wheel for receiving the separation wire is rotatably provided on the support seat, and a rotating handle is provided on the tightening wheel.

6. A separation device capable of improving the separation efficiency of an electrostatic chuck substrate and a ceramic plate according to claim 1, characterized in that: The device also includes an electric heating wire for heating the separation steel wire, and the separation steel wire is in contact with the electric heating wire.

7. A separation device capable of improving the separation efficiency of an electrostatic chuck substrate and a ceramic plate according to claim 6, characterized in that: The area where the electric heating wire contacts the separation steel wire is located between the positioning card and the positioning column.

8. A separation device capable of improving the separation efficiency of an electrostatic chuck substrate and a ceramic plate according to claim 1, characterized in that: The workbench is provided with a plurality of positioning holes for fixing the electrostatic chuck.

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