A magnetic suspension conveying structure and conveying device

Abstract

The utility model relates to the technical field of semiconductor processing equipment, and specifically to a magnetic levitation conveying structure, including a support seat, a stator assembly, a mover assembly, and a guide assembly; it can realize contactless reciprocating conveying of workpieces, is easy to operate, has high conveying efficiency, avoids the waste or particles generated by friction in the traditional conveying structure, reduces the impact on the subsequent process space and equipment, and can also ensure the cleanliness of the workpiece processing workshop and reduce unnecessary maintenance costs. A conveying device composed of a conveying track using the above-mentioned magnetic levitation conveying structure is also provided, which can drive the workpiece to reciprocate in the x-axis direction and the y-axis direction, and reciprocate between processing stations of different processing technologies, which is more convenient to operate and has high conveying efficiency; at the same time, multiple conveying tracks are arranged in different directions, which can meet the processing and conveying needs of multiple workpieces and has strong adaptability.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a magnetic suspension conveying structure and a conveying device. Background Art

[0002] In semiconductor processing equipment, conveying devices are one of the common devices that transport the workpieces to be processed between different processing equipment, playing a key role. The traditional conveying process is to use common conveying devices and transmission components such as rollers and chains to transport the workpieces to be processed. However, rollers or chains will produce friction, and debris or particles will inevitably appear during the friction process. These particles will infiltrate into the subsequent processing links and cause greater pollution, reducing the life of the process chamber and processing equipment and the processing yield of semiconductor workpieces; it will also cause pollution to the semiconductor production environment with high cleanliness requirements, increasing the maintenance cost of the dust-free workshop. Utility Model Content

[0003] The purpose of the utility model is to provide a magnetic suspension conveying structure to solve the prior art problems existing in the above background technology.

[0004] In order to solve the above technical problems, the technical solution provided by the utility model is:

[0005] On the one hand, the present application provides a magnetic levitation conveying structure, including a support seat, a stator assembly, a mover assembly and a guide assembly, wherein the stator assembly is fixedly arranged on the support seat, the mover assembly is suspended above the stator assembly and realizes reciprocating motion under the action of the magnetic field force, a guide assembly is arranged between the mover assembly and the support seat for guiding the mover assembly, and a suspension frame is arranged on the mover assembly for loading workpieces.

[0006] Based on the above technical solution, the guide assembly is symmetrically arranged on both sides of the mover assembly.

[0007] Based on the above technical solution, the guide assembly includes a guide rail and a sliding sleeve. The guide rail is fixedly arranged on the top of the support seat, and the sliding sleeve is fixedly arranged on one side of the movable subassembly. The sliding sleeve is adapted to the guide rail structure and is slidably connected.

[0008] On the basis of the above technical solution, a cover plate is provided above the mover assembly, and one side of the bottom end of the cover plate is fixedly arranged on a support seat.

[0009] Based on the above technical solution, the stator assembly is a permanent magnet array, and the mover assembly is a coil assembly with an iron core.

[0010] Based on the above technical solution, the stator assembly is a coil assembly with an iron core, and the mover assembly is a permanent magnet array.

[0011] On the basis of the above technical solution, the stator assembly is a coil assembly without an iron core and is symmetrically arranged in two groups, and the mover assembly is a permanent magnet array and is arranged between the stator assemblies.

[0012] On the other hand, the present application also provides a conveying device, including a plurality of conveying tracks, wherein the conveying tracks adopt the above-mentioned magnetic levitation conveying structure.

[0013] Based on the above technical solution, a plurality of conveying tracks are arranged along the x-axis and / or y-axis directions.

[0014] The beneficial effects of the technical solution provided by the utility model are:

[0015] 1. The utility model provides a magnetic suspension conveying structure, which can realize contactless reciprocating conveying of workpieces, is easy to operate, has high conveying efficiency, avoids the waste or particles generated by friction in traditional conveying structures, reduces the impact on subsequent process space and equipment, and can also ensure the cleanliness of the workpiece processing workshop and reduce unnecessary maintenance costs. Specifically, the mover assembly is suspended above the stator assembly under the action of the magnetic field generated by the stator assembly, and realizes reciprocating motion under the driving action of the stator assembly, thereby driving the conveying of the workpiece; at the same time, a guide assembly is arranged between the stator assembly and the mover assembly, which can realize the guidance of the mover assembly during the conveying process, and the conveying process is smoother.

[0016] 2. This embodiment also provides a conveying device composed of a conveying track using the above-mentioned magnetic levitation conveying structure, which can drive the workpiece to reciprocate in the x-axis direction and the y-axis direction, and perform reciprocating conveyance between processing stations of different processing technologies. The operation is more convenient and the conveying efficiency is high. At the same time, multiple conveying tracks are arranged in different directions, which can meet the processing and conveying needs of multiple workpieces and has strong adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the utility model;

[0018] Figure 2 It is a structural schematic diagram of the stator assembly and the mover assembly in Embodiment 1 of the present utility model;

[0019] Figure 3 It is a structural schematic diagram of the stator assembly in Embodiment 1 of the present utility model;

[0020] Figure 4 It is a structural schematic diagram of the stator assembly and the mover assembly in Embodiment 2 of the present utility model;

[0021] Figure 5 It is a structural schematic diagram of the stator assembly and the mover assembly in Embodiment 3 of the present utility model;

[0022] Figure 6 It is a partial cross-sectional view of the stator assembly and the mover assembly in Embodiment 3 of the present utility model;

[0023] Figure 7 It is a structural schematic diagram of the conveying device in the utility model; DETAILED DESCRIPTION

[0024] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0025] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] In the description of the present invention, it should be understood that the terms "left", "right", "front", "back", "top", "bottom", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0027] Example 1

[0028] like Figures 1 to 7 As shown, a magnetic levitation conveying structure includes a support seat 1, a stator assembly 2, a mover assembly 3 and a guide assembly 4, wherein the stator assembly 2 is fixedly arranged on the support seat 1, the mover assembly 3 is suspended above the stator assembly 2 and realizes reciprocating motion under the action of the magnetic field force, a guide assembly 4 is arranged between the mover assembly 3 and the support seat 1 for guiding the mover assembly 3, and a suspension frame 5 is arranged on the mover assembly 3 for loading workpieces.

[0029] The utility model provides a magnetic suspension conveying structure, which can realize contactless reciprocating conveying of workpieces, is easy to operate, has high conveying efficiency, avoids the waste chips or particles generated by friction in the traditional conveying structure, reduces the impact on the subsequent process space and equipment, and can also ensure the cleanliness of the workpiece processing workshop and reduce unnecessary maintenance costs. Specifically, the movable component 3 is suspended above the stator component 2 under the action of the magnetic field generated by the stator component 2, and realizes reciprocating motion under the driving action of the stator component, thereby driving the conveying of the workpiece; at the same time, a guide component 4 is arranged between the stator component 2 and the movable component 3, which can realize the guidance of the movable component 3 during the conveying process, and the conveying process is more stable.

[0030] Based on the above technical solution, the guide assembly 4 is symmetrically arranged on both sides of the mover assembly 3 .

[0031] Based on the above technical solution, the guide assembly 4 includes a guide rail 41 and a sliding sleeve 42. The guide rail 41 is fixedly arranged on the top of the support seat 1, and the sliding sleeve 42 is fixedly arranged on one side of the movable assembly 3. The sliding sleeve 42 is adapted to the guide rail 41 structure and is slidably connected.

[0032] In a preferred embodiment, a guide rail 41 and a sliding sleeve 42 are used as the guide assembly 4, that is, a guide rail 41 is provided on the support seat 1, and a sliding sleeve 42 is provided on one side of the movable subassembly 3. The sliding sleeve 42 and the guide rail 41 cooperate to realize the stable sliding of the movable subassembly 3, that is, to realize the stable transportation of the hanging frame 5 and the workpiece loaded thereon. More preferably, the guide assembly 4 is provided on both sides of the movable subassembly 3, which can ensure the stability of the movable subassembly 3 during the movement process and reduce the adverse effects of shaking on the processing and transportation.

[0033] On the basis of the above technical solution, a cover plate 6 is provided above the mover assembly 3 , and one side of the bottom end of the cover plate 6 is fixedly disposed on the support seat 1 .

[0034] By providing a cover plate 6 above the mover assembly 3, dust can be effectively prevented from entering the magnetic suspension structure composed of the mover assembly 3 and the stator assembly 2, thereby avoiding adverse effects on the normal operation of the magnetic suspension structure. At the same time, it can be understood that one side of the bottom end of the cover plate is fixedly arranged on the support seat, that is, it does not hinder the mover assembly from driving the normal reciprocating motion of the suspension frame and the workpiece thereon.

[0035] Based on the above technical solution, the stator assembly 2 is a permanent magnet array, and the mover assembly 3 is a coil assembly with an iron core.

[0036] In this embodiment, preferably, as 2 and Figure 3As shown, the stator assembly 2 adopts a permanent magnet array, and the mover assembly 3 adopts a coil with an iron core. The permanent magnet is fixed on the support seat 1 to form a static magnetic field. The mover is installed above the stator. The installation gap between the stator and the mover is 0.2-1.5mm. The smaller the gap, the greater the thrust of the mover, and the larger the gap, the smaller the thrust of the mover. The stator is arranged in N / S poles, and the PLC generates a pulse voltage / current to the mover's driver to drive the coil to generate a magnetic field that repulses the stator, thereby causing the mover to move relative to the stator. The number of pulses generated forms a closed-loop control with the encoder, so that the distance of the mover movement can be accurately controlled.

[0037] This embodiment also provides a conveying device, including a plurality of conveying tracks, wherein the conveying tracks adopt the above-mentioned magnetic levitation conveying structure.

[0038] Based on the above technical solution, a plurality of conveying tracks are arranged along the x-axis and / or y-axis directions.

[0039] The present embodiment also provides a conveying device composed of a conveying track using the above-mentioned magnetic levitation conveying structure, which can drive the workpiece to reciprocate in the x-axis direction and the y-axis direction, and perform reciprocating conveyance between processing stations of different processing technologies. The operation is more convenient and the conveying efficiency is high. At the same time, multiple conveying tracks are arranged in different directions, which can meet the processing and conveying needs of multiple workpieces and improve the processing efficiency. On the basis of adopting a non-contact magnetic levitation conveying structure as the conveying track, it effectively avoids the adverse effects of debris or particles caused by friction of traditional conveying devices on the process space and equipment service life and semiconductor processing yield; at the same time, it can also ensure a dust-free clean space for semiconductor production and reduce maintenance costs.

[0040] Example 2

[0041] Based on the above technical solution, different from the technical solution of Example 1, the stator assembly 2 is a coil assembly with an iron core, and the mover assembly 3 is a permanent magnet array.

[0042] like Figure 4As shown, the stator assembly 2 described in this embodiment adopts a coil assembly, and the mover assembly 3 adopts a permanent magnet array. The coil is laid on the support seat 1. The mover assembly can achieve movement without connecting cables, which is suitable for long-distance travel. Specifically, when alternating current passes through the coil of the stator assembly, an alternating magnetic field will be generated around the coil. This magnetic field cuts the permanent magnet in the mover assembly. According to Faraday's law of electromagnetic induction, an induced current will be generated inside the mover, and the permanent magnetic material will still feel the force in the changing magnetic field; these induced currents interact with the magnetic field generated by the stator, and according to Lenz's law, a repulsive or attractive force is generated, pushing or pulling the mover to move along a straight path. By adjusting the frequency, voltage and phase of the alternating current input to the stator coil, the acceleration, speed and direction of the mover can be controlled.

[0043] Example 3

[0044] Based on the above technical solution, different from the technical solution of Example 1, the stator assembly 2 is a coil assembly without an iron core and is symmetrically arranged in two groups, and the mover assembly 3 is a permanent magnet array and is arranged between the stator assemblies 2.

[0045] like Figure 5 and Figure 6 As shown, in this embodiment, the stator assembly 2 is a coil assembly without an iron core, and the mover assembly 3 is a permanent magnet array, wherein the stator assembly 2 is provided with two groups and fixedly arranged on the support seat 1, and the mover assembly 3 is fixed by two groups of stator coils. The mover assembly 3 can move without connecting cables, and the running curve is smooth, without cogging effect, and is suitable for long-distance travel. Specifically, when alternating current passes through two groups of stator coils, an alternating magnetic field will be generated around the coils. This magnetic field cuts the permanent magnets in the mover assembly. According to Faraday's law of electromagnetic induction, an induced current will be generated inside the mover assembly, and the permanent magnetic material will still feel the force in the changing magnetic field; these induced currents interact with the magnetic field generated by the stator, and according to Lenz's law, a repulsive or attractive force is generated, pushing or pulling the mover to move along a straight path. By adjusting the frequency, voltage and phase of the alternating current input to the stator coil, the acceleration, speed and direction of the mover assembly can be controlled.

[0046] The basic principle and main features of the utility model are shown and described above. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments. Therefore, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the appended claims rather than the above description. Therefore, it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model.

[0047] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A magnetic levitation conveying structure, characterized in that: The invention comprises a support seat (1), a stator assembly (2), a mover assembly (3) and a guide assembly (4), wherein the stator assembly (2) is fixedly arranged on the support seat (1), the mover assembly (3) is suspended above the stator assembly (2) and realizes reciprocating motion under the action of a magnetic field force, a guide assembly (4) is arranged between the mover assembly (3) and the support seat (1) and is used for guiding the mover assembly (3), and a suspension frame (5) is arranged on the mover assembly (3) and is used for loading a workpiece.

2. A magnetic levitation transport structure according to claim 1, characterized in that: The guide assembly (4) is symmetrically arranged on both sides of the mover assembly (3).

3. A magnetic levitation transport structure according to claim 2, characterized in that: The guide assembly (4) comprises a guide rail (41) and a sliding sleeve (42); the guide rail (41) is fixedly arranged on the top end of the support seat (1); the sliding sleeve (42) is fixedly arranged on one side of the mover assembly (3); the sliding sleeve (42) and the guide rail (41) are structurally compatible and slidably connected.

4. The magnetic levitation transport structure according to claim 1, characterized in that: The upper cover of the mover assembly (3) is provided with a cover plate (6), and one side of the bottom end of the cover plate (6) is fixedly arranged on the support seat (1).

5. The magnetic levitation transport structure according to claim 1, characterized in that: The stator component (2) is a permanent magnet array, and the mover component (3) is a coil component with an iron core.

6. The magnetic levitation transport structure according to claim 1, characterized in that: The stator component (2) is a coil component with an iron core, and the mover component (3) is a permanent magnet array.

7. The magnetic levitation transport structure according to claim 1, characterized in that: The stator assembly (2) is a coil assembly without an iron core and is symmetrically arranged in two groups; the mover assembly (3) is a permanent magnet array and is arranged between the stator assemblies (2).

8. A conveying device, characterized in that: It comprises a plurality of conveying tracks, and the conveying tracks adopt a magnetic levitation conveying structure as described in any one of claims 1 to 7.

9. A conveying device according to claim 8, characterized in that: The conveying tracks are arranged in plurality along the x-axis and / or y-axis directions.

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