A magnetron sputtering device for coating automobile parts

Abstract

The utility model relates to the technical field of magnetron coating, and specifically to a magnetron sputtering device for coating automotive parts, comprising a shell, a mounting mechanism is arranged in the shell, the mounting mechanism comprises a fixing assembly for fixing a back plate, a rotating rod is fixedly connected to the fixing assembly, the rotating rod is rotatably connected to a mounting block, the mounting block is connected to a sliding assembly, a reversing assembly is arranged in the shell; the reversing assembly comprises a driving source fixed in the shell, a rack is fixedly connected to the output end of the driving source, a gear is fixedly arranged on the rotating rod, and the driving source cooperates with the rack and the gear to drive the rotating rod 180 degrees. The back plate is mounted on the fixing assembly, the sliding assembly drives the mounting block to move in a direction away from the magnetic field generating device, the mounting block drives the rotating rod and the fixing assembly to move synchronously, and when the rotating rod moves to the reversing assembly, the reversing assembly causes the rotating rod to rotate 180 degrees, thereby completing the flipping of the back plate.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron coating, in particular to a magnetron sputtering device for coating automobile parts. Background Art

[0002] The working principle of magnetron sputtering is that electrons, under the action of the electric field E, collide with argon atoms in the process of flying toward the substrate, causing them to ionize and produce Ar positive ions and new electrons; the new electrons fly toward the substrate, and the Ar ions are accelerated toward the cathode target under the action of the electric field, and bombard the target surface with high energy, causing the target material to be sputtered. Among the sputtered particles, neutral target atoms or molecules are deposited on the substrate to form a thin film, which is the process of sputtering coating.

[0003] The Chinese patent with the publication number "CN218710811U" and the name "A magnetron sputtering coating target" discloses a magnetron sputtering coating target, including two brackets, a back plate, two targets, a connecting shaft and two L-shaped plates. The back plate is rotatably connected between the two brackets, and the two L-shaped plates are respectively fixedly connected to the top and bottom ends of the back plate. A fixing assembly is arranged on the inner side of the L-shaped plate. The two targets are respectively arranged on both sides of the back plate through the fixing assembly. The connecting shaft is rotatably connected to one side of one of the brackets. One end of the back plate rotating shaft is fixedly connected to one end of the connecting shaft close to the back plate. A displacement assembly is arranged on the outer side of the connecting shaft. The displacement assembly is used to fix the back plate. The patent rotates the back plate to rotate the target on the other side to become the working surface target, which reduces the time for replacing the target and improves work efficiency.

[0004] However, since the target material is usually set near the magnetic field, the rotation of the back plate is hindered by the magnetic field generating device. If the target material is set far away from the magnetic field, the probability of electrons colliding with argon gas to produce ions will be reduced, and the number of target atoms or molecules sputtered by the target material will be small, thereby reducing the production efficiency of the coating. Utility Model Content

[0005] The utility model aims to provide a magnetron sputtering device for coating automobile parts, so as to solve the above-mentioned shortcomings in the prior art.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A magnetron sputtering device for coating automobile parts comprises a shell, a mounting mechanism is arranged in the shell, the mounting mechanism comprises a fixing assembly for fixing a back plate, the fixing assemblies are respectively fixedly connected with rotating rods, the rotating rods are rotatably connected to the mounting blocks, the mounting blocks are connected to the sliding assembly, and a reversing assembly is arranged in the shell; the reversing assembly comprises a driving source fixedly arranged in the shell, a rack is fixedly connected to the output end of the driving source, a gear is fixedly arranged on the rotating rod, and the driving source cooperates with the rack and the gear so that the rotating rod drives 180 degrees.

[0008] Furthermore, the fixing assembly includes a support frame fixedly connected to the rotating rod, the support frame is arranged in a U shape, and an adjusting rod is threadedly connected to the support frame.

[0009] Furthermore, the sliding assembly includes a screw rotatably arranged in a slot on the side wall of the shell, the screw is threadedly connected to the mounting block, the mounting block is slidably connected to the slot, the end of the screw is connected to the motor, and the motor is fixed in the shell.

[0010] Furthermore, a damper is provided between the mounting block and the rotating rod.

[0011] Furthermore, the support frame and the end of the adjustment rod close to the back plate are both provided with a protective pad.

[0012] In the above technical solution, the utility model provides a magnetron sputtering device for coating automotive parts, which has the following beneficial effects:

[0013] Through the provided installation mechanism, the back plate with target materials on both sides is installed on the fixed component, the sliding component drives the installation block to move in the direction away from the magnetic field generating device, and the installation block drives the rotating rod and the fixed component to move synchronously. When the rotating rod moves to the reversing component, the driving source drives the rack to move, and the rack movement drives the rotating rod to rotate through the meshing gear, so that the rotating rod rotates 180 degrees, thereby flipping the back plate and switching the unused target material surface. After the switching is completed, the back plate is moved to the original position by the sliding component for normal operation.

[0014] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.

[0015] This application document provides an overview of various implementations or examples of the technology described in the present disclosure, and is not a comprehensive disclosure of the entire scope or all features of the disclosed technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0017] Figure 1 The overall structural diagram provided for the embodiment of the utility model;

[0018] Figure 2 A schematic diagram of the structure of a fixing assembly provided in an embodiment of the utility model;

[0019] Figure 3 This is a schematic structural diagram of a reversing assembly and a sliding assembly provided in an embodiment of the utility model.

[0020] Description of reference numerals:

[0021] 1. Shell; 21. Support frame; 22. Adjustment rod; 3. Rotating rod; 31. Mounting block; 41. Screw rod; 42. Slot; 43. Motor; 5. Reversing assembly; 51. Driving source; 52. Gear; 53. Rack. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0023] See also Figure 1-3 A magnetron sputtering device for coating automotive parts, comprising a housing 1, a mounting mechanism is arranged in the housing 1, the mounting mechanism comprises a fixing assembly for fixing a back plate, a rotating rod 3 is fixedly connected to the fixing assembly, the rotating rod 3 is rotatably connected to the mounting block 31, the mounting block 31 is connected to the sliding assembly, a reversing assembly 5 is arranged in the housing 1; the reversing assembly 5 comprises a driving source 51 fixedly arranged in the housing 1, a rack 53 is fixedly connected to the output end of the driving source 51, a gear 52 is fixedly arranged on the rotating rod 3, the driving source 51 cooperates with the rack 53 and the gear 52 to drive the rotating rod 3 180 degrees. The driving source 51 is a linear driving tool such as a hydraulic cylinder or a cylinder.

[0024] The back plate with target materials on both sides is installed on the fixed component, and the sliding component drives the mounting block 31 to move away from the magnetic field generating device. The mounting block 31 drives the rotating rod 3 and the fixed component to move synchronously. When the rotating rod 3 moves to the reversing component 5, the driving source 51 drives the rack 53 to move, and the rack 53 moves and drives the rotating rod 3 to rotate through the meshing gear 52, so that the rotating rod 3 rotates 180 degrees, thereby flipping the back plate and switching the unused target surface. After the switching is completed, the back plate is moved to the original position by the sliding component for normal operation.

[0025] Furthermore, the fixing assembly includes a support frame 21 fixedly connected to the rotating rod 3, the support frame 21 is U-shaped, and an adjusting rod 22 is threadedly connected to the support frame 21. The back plate is fixed by clamping the side wall of the back plate, thereby fully exposing the target material on the back plate, thereby improving the sputtering efficiency of the target material.

[0026] Furthermore, the sliding assembly includes a screw rod 41 rotatably disposed in a slot 42 on the side wall of the housing 1, the screw rod 41 is threadedly connected to the mounting block 31, the mounting block 31 is slidably connected to the slot 42, and the end of the screw rod 41 is connected to a motor 43, and the motor 43 is fixedly disposed in the housing 1. The motor 43 drives the screw rod 41 to rotate, and the rotation of the screw rod 41 drives the mounting block 31 restricted by the slot 42 to rise and fall, and the movement of the mounting block 31 can drive the rotating rod 3 and the fixed assembly to move.

[0027] Furthermore, a damper is provided between the mounting block 31 and the rotating rod 3. When the rotating rod 3 rotates 180 degrees, the damper can prevent inertial movement, which prevents the back plate from rotating too much and affects the sputtering efficiency.

[0028] Furthermore, the support frame 21 and the adjusting rod 22 are both provided with a protective pad at one end close to the back plate, so as to avoid scratches on the back plate and increase the service life.

[0029] Working principle: The back plate with target materials on both sides is installed on the fixed component, and the motor 43 drives the screw 41 to rotate. The rotation of the screw 41 will drive the mounting block 31 restricted by the slot 42 to move away from the magnetic field generating device. The mounting block 31 drives the rotating rod 3 and the back plate to move synchronously. When the rotating rod 3 moves to the reversing component 5, the driving source 51 drives the rack 53 to move. The rack 53 moves and drives the rotating rod 3 to rotate through the meshing gear 52, so that the rotating rod 3 rotates 180 degrees, thereby flipping the back plate and switching the unused target surface. After the switching is completed, the back plate is moved to the original position by rotating the screw 41 for normal operation.

[0030] The above only describes some exemplary embodiments of the present invention by way of illustration. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A magnetron sputtering device for coating automotive parts, comprising a housing (1), characterized in that: The housing (1) is provided with a mounting mechanism, the mounting mechanism comprising a fixing assembly for fixing a back plate, the fixing assembly is respectively fixedly connected with a rotating rod (3), the rotating rod (3) is rotatably connected to a mounting block (31), the mounting block (31) is connected to a sliding assembly, and the housing (1) is provided with a reversing assembly (5); The reversing assembly (5) comprises a driving source (51) fixedly arranged in the housing (1); a rack (53) is fixedly connected to the output end of the driving source (51); a gear (52) is fixedly arranged on the rotating rod (3); the driving source (51) drives the rotating rod (3) 180 degrees through the cooperation of the rack (53) and the gear (52).

2. A magnetron sputtering device for coating automotive parts according to claim 1, characterized in that: The fixing assembly comprises a support frame (21) fixedly connected to the rotating rod (3); the support frame (21) is arranged in a U shape, and an adjusting rod (22) is threadedly connected to the support frame (21).

3. The magnetron sputtering device for coating automotive parts according to claim 1, characterized in that: The sliding assembly comprises a screw rod (41) rotatably arranged in a slot (42) on a side wall of a housing (1); the screw rod (41) is threadedly connected to a mounting block (31); the mounting block (31) is slidably connected to the slot (42); an end of the screw rod (41) is connected to a motor (43); and the motor (43) is fixedly arranged in the housing (1).

4. The magnetron sputtering device for coating automotive parts according to claim 1, characterized in that: A damper is provided between the mounting block (31) and the rotating rod (3).

5. The magnetron sputtering device for coating automotive parts according to claim 2, characterized in that: The support frame (21) and the adjustment rod (22) are both provided with a protective pad at one end close to the back plate.

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