A sputtering vacuum coating machine with uniform coating

Abstract

The utility model discloses a sputtering vacuum coating machine with uniform coating, which belongs to the technical field of vacuum coating machines, including a base, a shell fixedly connected to the top of the base, a gear ring fixedly connected to the top surface of the base, a coating component provided on the top surface of the base, a placement component provided on the top surface of the base, and a belt slidably connected to the outer wall of the first pulley; in the utility model, a reciprocating screw is arranged inside, and the output shaft of the motor drives the first pulley to rotate, and the reciprocating screw is driven to rotate through the transmission, and the threaded block is driven to reciprocate through the rotation of the reciprocating screw, thereby driving the splash frame to swing up and down. Through this design, the swing of the spray head is realized, so that it can coat the parts at different angles during coating, avoiding the occurrence of uneven coating due to the limited splashing range caused by the fixation of the spray head, thereby ensuring the uniformity of the coating and improving the efficiency of the coating.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating machines, and in particular relates to a sputtering vacuum coating machine with uniform coating. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. There are many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and many other types. Vacuum coating can improve the surface hardness and make the surface smooth.

[0003] During the use of the vacuum coating machine, since its sputtering head is generally fixed on the inner wall of the device and cannot move, it is affected by other factors during coating, resulting in uneven coating. In addition, when coating, since it generally only rotates with the rotation of the turntable, some parts of the parts to be coated are blocked, resulting in uneven coating. In order to solve the above problems, a sputtering vacuum coating machine with uniform coating is urgently needed to solve the above problems. Utility Model Content

[0004] The purpose of the utility model is to propose a sputtering vacuum coating machine with uniform coating in order to solve the problem that during the use of the vacuum coating machine, the spray head is generally fixed on the inner wall of the device and cannot be moved, so that it is affected by other factors during coating, resulting in uneven coating, and that when coating, it generally only rotates with the rotation of the turntable, so that some parts of the parts to be coated are blocked, resulting in uneven coating.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a sputtering vacuum coating machine with uniform coating, comprising a base, a shell fixedly connected to the top of the base, a gear ring fixedly connected to the top surface of the base, a coating component provided on the top surface of the base, a placement component provided on the top surface of the base, a motor provided on the bottom end of the base, a first pulley fixedly connected to the outer wall of the output shaft of the motor, and a belt slidably connected to the outer wall of the first pulley.

[0006] As a further description of the above technical solution:

[0007] The coating assembly comprises a splash frame, one end of which is fixedly connected to a splash head, and one side of which is fixedly connected to a connecting column, and the connecting column has two groups.

[0008] As a further description of the above technical solution:

[0009] The base is rotatably connected to a reciprocating screw rod through a through hole provided on the top surface thereof, a threaded block is threadedly connected to the outer wall of the reciprocating screw rod, and the threaded block is rotatably connected to a group of connecting columns through grooves provided on both sides thereof.

[0010] As a further description of the above technical solution:

[0011] The top surface of the base is fixedly connected to a support column, and the support column is rotatably connected to another group of connecting columns through grooves opened on both sides thereof. One end of the reciprocating screw is fixedly connected to a second pulley, and the outer wall of the second pulley is slidably connected to the belt.

[0012] As a further description of the above technical solution:

[0013] The placement assembly comprises a turntable, a top surface of the turntable is fixedly connected to a rotating shaft, an outer wall of the rotating shaft is rotatably connected to a gear, and the gear is meshed with a gear ring.

[0014] As a further description of the above technical solution:

[0015] The top surface of the gear is fixedly connected with a mounting rod, the outer wall of the mounting rod is hinged with a supporting rod, and the output shaft of the motor is fixedly connected with the turntable.

[0016] In summary, due to the adoption of the above technical solution, the beneficial effects of the utility model are:

[0017] 1. In the utility model, a reciprocating screw is arranged inside, and the parts are placed on the placement assembly. The motor is started, and the output shaft of the motor rotates to drive the first pulley to rotate, and the reciprocating screw is driven to rotate through the transmission, and the rotation of the reciprocating screw drives the threaded block to move back and forth, thereby driving the splash frame to swing up and down. Through this design, the swing of the spray head is realized, so that it can coat the parts at different angles during coating, avoiding the occurrence of uneven coating due to the limited splashing range caused by the fixation of the splash head, thereby ensuring the uniformity of the coating and improving the efficiency of the coating.

[0018] 2. In the utility model, by arranging gears inside, when coating is performed, the parts are hung on the support rod through hooks, and when coating is performed, the motor is started, and the output shaft of the motor rotates to drive the turntable to rotate, and drives the gear to move, thereby driving the gear to rotate through the gear ring, thereby driving the mounting rod to rotate. Through this design, when coating is performed, the mounting rod drives the gear to rotate through the gear ring as the turntable rotates, thereby driving the mounting rod to rotate on its own, thereby reducing the generation of dead angles when coating the parts, so that they can be evenly coated. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1It is a three-dimensional structural schematic diagram of a sputtering vacuum coating machine with uniform coating.

[0020] Figure 2 It is a schematic diagram of the exploded three-dimensional structure of a sputtering vacuum coating machine with uniform coating.

[0021] Figure 3 Schematic diagram of an exploded three-dimensional structure of components placed in a sputtering vacuum coating machine with uniform coating.

[0022] Figure 4 It is a schematic diagram of the exploded three-dimensional structure of a coating component in a sputtering vacuum coating machine with uniform coating.

[0023] Legend:

[0024] 1. Motor; 2. First pulley; 3. Belt; 4. Gear ring; 5. Base; 6. Placement assembly; 61. Support rod; 62. Mounting rod; 63. Gear; 64. Turntable; 65. Rotating shaft; 7. Coating assembly; 71. Support column; 72. Reciprocating screw rod; 73. Thread block; 74. Connecting column; 75. Splashing rack; 76. Splashing head; 77. Second pulley; 8. Casing. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] See also Figure 1-4 The utility model provides a technical solution: a sputtering vacuum coating machine with uniform coating, comprising a base 5, a housing 8 is fixedly connected to the top of the base 5, a gear ring 4 is fixedly connected to the top surface of the base 5, a coating component 7 is provided on the top surface of the base 5, a placement component 6 is provided on the top surface of the base 5, a motor 1 is provided at the bottom end of the base 5, a first pulley 2 is fixedly connected to the outer wall of the output shaft of the motor 1, and a belt 3 is slidably connected to the outer wall of the first pulley 2;

[0027] The coating assembly 7 includes a splash frame 75, one end of which is fixedly connected to a splash head 76, one side of which is fixedly connected to a connecting column 74, and there are two groups of them, the base 5 is rotatably connected to a reciprocating screw rod 72 through a through hole opened on its top surface, the outer wall of the reciprocating screw rod 72 is threadedly connected to a thread block 73, and the thread block 73 is rotatably connected to a group of connecting columns 74 through grooves opened on both sides thereof, the top surface of the base 5 is fixedly connected to a support column 71, and the support column 71 is rotatably connected to another group of connecting columns 74 through grooves opened on both sides thereof, one end of the reciprocating screw rod 72 is fixedly connected to a second pulley 77, and the outer wall of the second pulley 77 is slidably connected to the belt 3;

[0028] The specific implementation method is as follows: the parts are placed on the placement assembly 6, the motor 1 is started, the output shaft of the motor 1 rotates to drive the first pulley 2 to rotate, the first pulley 2 drives the second pulley 77 to rotate through the belt 3, the reciprocating screw rod 72 is driven to rotate through the second pulley 77, the rotation of the reciprocating screw rod 72 drives the threaded block 73 to reciprocate, and thus drives the splash frame 75 to swing up and down through the connecting column 74;

[0029] The placement component 6 includes a turntable 64, the top surface of the turntable 64 is fixedly connected to a rotating shaft 65, the outer wall of the rotating shaft 65 is rotatably connected to a gear 63, the gear 63 is meshed with the gear ring 4, the top surface of the gear 63 is fixedly connected to a mounting rod 62, the outer wall of the mounting rod 62 is hinged to a support rod 61, and the output shaft of the motor 1 is fixedly connected to the turntable 64.

[0030] The specific implementation method is as follows: when coating is performed, the parts are hung on the support rod 61 through a hook. When encountering larger parts, some support rods 61 can be rotated to store them so as to increase their space. When coating is performed, the motor 1 is started, and the output shaft of the motor 1 rotates to drive the turntable 64 to rotate, and drives the gear 63 to move, thereby driving the gear 63 to rotate through the gear ring 4, thereby driving the mounting rod 62 to rotate.

[0031] Working principle: When coating, the parts are hung on the support rod 61 through a hook. When encountering larger parts, when coating, start the motor 1, the output shaft of the motor 1 rotates to drive the turntable 64 to rotate, and drives the gear 63 to move, thereby driving the gear 63 to rotate through the gear ring 4, thereby driving the mounting rod 62 to rotate, and at the same time, the output shaft of the motor 1 rotates to drive the first pulley 2 to rotate, the first pulley 2 drives the second pulley 77 to rotate through the belt 3, and drives the reciprocating screw rod 72 to rotate through the second pulley 77, and the rotation of the reciprocating screw rod 72 drives the threaded block 73 to reciprocate, thereby driving the splash frame 75 to swing up and down through the connecting column 74.

[0032] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A sputtering vacuum coating machine with uniform coating, comprising a base (5), characterized in that: The top of the base (5) is fixedly connected to a housing (8), the top surface of the base (5) is fixedly connected to a gear ring (4), the top surface of the base (5) is provided with a coating component (7), the top surface of the base (5) is provided with a placement component (6), the bottom end of the base (5) is provided with a motor (1), the outer wall of the output shaft of the motor (1) is fixedly connected to a first pulley (2), and the outer wall of the first pulley (2) is slidably connected to a belt (3).

2. The sputtering vacuum coating machine with uniform coating according to claim 1, characterized in that: The coating assembly (7) comprises a splash frame (75), one end of the splash frame (75) is fixedly connected to a splash head (76), and one side of the splash frame (75) is fixedly connected to a connecting column (74), and the connecting column has two groups.

3. The sputtering vacuum coating machine with uniform coating according to claim 2, characterized in that: The base (5) is rotatably connected to a reciprocating screw rod (72) through a through hole provided on its top surface; a threaded block (73) is threadedly connected to the outer wall of the reciprocating screw rod (72); and the threaded block (73) is rotatably connected to a group of connecting columns (74) through grooves provided on both sides thereof.

4. The sputtering vacuum coating machine with uniform coating according to claim 3, characterized in that: The top surface of the base (5) is fixedly connected to a support column (71), and the support column (71) is rotatably connected to another group of connecting columns (74) through grooves provided on both sides thereof. One end of the reciprocating screw rod (72) is fixedly connected to a second pulley (77), and the outer wall of the second pulley (77) is slidably connected to the belt (3).

5. The sputtering vacuum coating machine with uniform coating according to claim 4, characterized in that: The placement assembly (6) comprises a rotating disk (64), the top surface of which is fixedly connected to a rotating shaft (65), the outer wall of which is rotatably connected to a gear (63), and the gear (63) is meshed with the gear ring (4).

6. The sputtering vacuum coating machine with uniform coating according to claim 5, characterized in that: The top surface of the gear (63) is fixedly connected to a mounting rod (62), the outer wall of the mounting rod (62) is hinged to a support rod (61), and the output shaft of the motor (1) is fixedly connected to a rotating disk (64).

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